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US 7,597,002 B2Granted
Diamagnetic levitation system
AssigneeEcole Polytechnique Federale De Lausanne (Epfl)
InventorsRoland Moser, Jan Sandtner, Francois Barrot
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Abstract
The invention concerns an inertial sensor or an actuator based on diamagnetic levitation, said inertial sensor or actuator comprising support means serving as main support body for an inertial sensor or for an actuator, a two dimensional array of permanent magnets and a diamagnetic element facing the said array characterized in that said diamagnetic material constitutes the inertial mass or the moving part of the actuator.
Claims9
An inertial sensor based on diamagnetic levitation,
- said inertial sensor comprising a two dimensional array of permanent magnets and a diamagnetic element facing the said array,
- wherein said diamagnetic element constitutes an inertial mass,
- wherein the inertial sensor senses inertial forces, and
- wherein the inertial sensor further comprises a feed-back loop incorporating:
- at least 1 non contact position sensor to detect the movements of said inertial mass,
- at least 3 electrostatic actuators for keeping in place or moving said inertial mass, and
- computing means to derive the force exerted on a support and for moving or keeping in place said inertial mass accordingly;
- wherein said electrostatic actuators have one common electrode which is physically sealed to said inertial mass, the other electrode of each said electrostatic actuator facing and partly surrounding, or being partly surrounded by, said common electrode.
5 more elements
Dependencies are inferred from the claim text.