Method and system to separate and recycle divergent chemistries

A spin, rinse and dry module, comprising:

• an annular manifold having a body including an inner surface and a bottom surface, the annular manifold defined to rotate a wafer disposed within a region inside the inner surface, the annular manifold having a channel defined through the body from the inner surface to the bottom surface, an opening of the channel at the inner surface configured to receive a fluid to be dispersed from a surface of the rotating wafer;
• a catch basin disposed under the annular manifold, the catch basin being configured to receive the fluid from an opening of the channel at the bottom surface of the annular manifold;
• and
• a drive mechanism for rotating the annular manifold.

A method for collecting a fluid delivered to a surface of a rotating wafer, comprising:

• disposing a wafer within a region defined inside an inner surface of an annular manifold such that the wafer is coupled to the annular manifold, wherein the annular manifold includes a body defined by the inner surface and a bottom surface, the annular manifold including a channel defined through the body from the inner surface to the bottom surface;
• rotating the annular manifold together with the wafer coupled to the annular manifold;
• delivering a fluid to a surface of the rotating wafer;
• collecting the fluid spun from the surface of the rotating wafer through an opening of the channel at the inner surface of the annular manifold such that the collected fluid is directed through an opening of the channel at the bottom surface of the annular manifold to a catch basin;
• and
• dispensing the fluid from the catch basin to a collection tank.

A method for collecting fluids delivered to a surface of a rotating wafer, comprising:

• disposing a wafer within a region defined inside an inner surface of an annular manifold such that the wafer is coupled to the annular manifold, wherein the annular manifold includes a body defined by the inner surface and a bottom surface, the annular manifold including a channel defined through the body from the inner surface to the bottom surface;
• rotating the annular manifold together with the wafer coupled to the annular manifold;
• delivering a first fluid to a surface of the rotating wafer;
• collecting the first fluid spun from the surface of the rotating wafer through an opening of the channel at the inner surface of the annular manifold such that the collected fluid is directed through an opening of the channel at the bottom surface of the annular manifold to a catch basin;
• controllably dispensing the first fluid from the catch basin to a first collection tank;
• delivering a second fluid to a surface of the rotating wafer;
• collecting the second fluid spun from the surface of the rotating wafer through the opening of the channel at the inner surface of the annular manifold such that the collected second fluid is directed through the opening of the channel at the bottom surface of the annular manifold to the catch basin;
• and
• controllably dispensing the second fluid from the catch basin to a second collection tank.