Method of manufacturing thin film magnetic head having lower shield layer embedded in insulating
AssigneeTDK Corporation
InventorsKenji Ichinohe, Yosuke Goto
Life of this patent
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Abstract
The method of manufacturing a thin film magnetic head includes forming a first recessed portion for insulation and a second recessed portion for contact that reach the substrate through the first insulating layer from a side of the first insulating layer of the substrate having the first insulating layer thereon; forming a second insulating layer on the substrate in the first recessed portion; and forming the lower shield layer in the first recessed portion and a contact portion in the second recessed portion.
Claims11
A method of manufacturing a thin film magnetic head having a thin film magnetic head element, including a magneto-resistive effect element between an upper shield layer and a lower shield layer, provided on a substrate, the method comprising:
- providing the substrate with a first insulating layer thereon;
- processing the substrate and the first insulating layer to form a recessed portion in the substrate and the first insulating layer for a lower shield layer;
- forming a second insulating layer on the substrate and in the recessed portion;
- and
- forming the lower shield layer on the second insulating layer formed in the recessed portion.
A method of manufacturing a thin film magnetic head having a thin film magnetic head element, including a magneto-resistive effect element between an upper shield layer and the a lower shield layer, provided on a substrate, the method comprising:
- providing a substrate with a first insulating layer thereon;
- processing the substrate and the first insulating layer to form a first recessed portion for a lower shield layer and a second recessed portion for a contact layer in the substrate and the first insulating layer;
- forming a second insulating layer on the substrate and in the first recessed portion;
- and
- forming the lower shield layer on the second insulating layer formed in the first recessed portion and forming a contact layer on the substrate the contact layer in the second recessed portion.
Dependencies are inferred from the claim text.