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US 7,595,708 B2Granted
MEMS resonator array structure
AssigneeRobert Bosch GmbH
InventorsMarkus Lutz, Aaron Partridge, Zhiyu Pan
Life of this patent
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Abstract
A MEMS array structure includes MEMS resonators that form an array. Each MEMS resonator includes beam sections. At least one of the beam sections of a first one of the MEMS resonators is a shared beam section that is also included in another of the MEMS resonators adjacent to the first MEMS resonator.
Claims19
A MEMS array structure, comprising:
- a plurality of MEMS resonators forming an array, each MEMS resonator including a plurality of beam sections, wherein at least one of the beam sections is a shared beam section that is also included in another of the plurality of MEMS resonators which is adjacent to the respective MEMS resonator.
Dependencies are inferred from the claim text.