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US 7,591,201 B1Granted
MEMS structure having a compensated resonating member
AssigneeSilicon Clocks, Inc.
InventorsDavid H. Bernstein, Roger T. Howe, Emmanuel P. Quevy
Life of this patent
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Abstract
A MEMS structure having a compensated resonating member is described. In an embodiment, a MEMS structure comprises a resonating member coupled to a substrate by an anchor. A dynamic mass-load is coupled with the resonating member. The dynamic mass-load is provided for compensating a change in frequency of the resonating member by altering the moment of inertia of the resonating member by way of a positional change relative to the anchor.
Claims18
A MEMS structure, comprising:
- a cantilever resonating member;
- an anchor to couple said cantilever resonating member with a substrate;
- and
- a dynamic mass-load coupled with said cantilever resonating member, wherein said dynamic mass-load is for compensating a change in frequency of said cantilever resonating member by altering the moment of inertia of said cantilever resonating member by way of a positional change relative to said anchor.
1 more element
A MEMS structure, comprising:
- a resonator member disposed above a substrate;
- an anchor disposed between and end of said resonator member and said substrate, and coupled with both said end of said resonator member and said substrate;
- a mass-load comprising a multi-component arm coupled with said resonator member;
- and
- a pair of electrodes, each electrode coupled with said substrate and disposed on an opposing side of said resonator member, between said anchor and said mass-load.
2 more elements
Dependencies are inferred from the claim text.