Micro heat engine and method of manufacturing
AssigneeUniversity of Manitoba
InventorsGregory Frank Naterer, Peter Stephen Glockner
Life of this patent
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Abstract
The present invention relates generally to micro heat engines (MHEs) and methods of manufacture. More particularly, the present invention relates to an MHE including a substrate having a sealed microchannel for operatively containing a liquid droplet within the microchannel and a thermal bridge for providing a heat source or heat sink to the microchannel. The MHE also includes a piezoelectric sensor responsive to a pressure change within the microchannel to induce voltage across the piezoelectric sensor and a power output.
Claims14
A micro heat engine comprising:
- a substrate having a sealed microchannel, the microchannel having a first end and a second end;
- a liquid operatively contained within the microchannel between the first and second ends, thereby defining a first gas chamber adjacent the first end and a second gas chamber adjacent the second end;
- a thermal bridge in operative communication with the first gas chamber for providing a thermal gradient to the first gas chamber;
- a piezoelectric sensor in operative communication with the second gas chamber, the piezoelectric sensor responsive to a pressure change within the second gas chamber to induce a voltage across the piezoelectric sensor and a power output.
A process for manufacturing a micro heat engine comprising the steps of:
- a) etching a microchannel having a first end and a second end on a first side of a substrate;
- etching a thermal bridge recess on a second side the substrate adjacent the first end of the microchannel;
- etching a piezoelectric recess on the second side of the substrate adjacent the second end of the microchannel;
- etching a droplet filling channel on the second side of the substrate;
- b) operatively attaching a thermal bridge to the thermal bridge recess, and piezoelectric sensor to the piezoelectric recess;
- and,
- c) filling and sealing the microchannel.
Dependencies are inferred from the claim text.