MEMS vibrating structure using a single-crystal piezoelectric thin film layer
AssigneeRF Micro Devices, Inc.
InventorsSheng-Shian Li, Seungbae Lee, Kushal Bhattacharjee
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Abstract
The present invention relates to a micro-electro-mechanical systems (MEMS) vibrating structure having dominant lateral vibrations supported by a MEMS anchor system, and includes a single-crystal piezoelectric thin-film layer that has been grown with a specific crystal orientation. Since the MEMS vibrating structure has dominant lateral vibrations, its resonant frequency may be controlled by its size and shape, rather than layer thickness, which provides high accuracy and enables multiple resonators having different resonant frequencies on a single substrate.
Claims27
A vibrating micro-electro-mechanical circuit comprising:
- a substrate having a substrate surface;
- a first anchor on the substrate surface;
- a second anchor on the substrate surface;
- and
- a micro-electro-mechanical systems (MEMS) vibrating structure comprising:
- a body:
- suspended between the first anchor and the second anchor;
- and
- comprising:
- a first surface and a second surface that are about parallel to the substrate surface;
- and
- a single-crystal piezoelectric thin-film having a substantially uniform crystalline orientation;
- a first conducting section residing on the first surface of the body;
- and
- a second conducting section residing on the second surface of the body, such that the MEMS vibrating structure has dominant lateral vibrations that are about parallel to the substrate surface when a first electrical signal is applied to the first conducting section and the second conducting section.
Dependencies are inferred from the claim text.