Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods

A micro-electro-mechanical system (MEMS) variable capacitor, comprising:

• (a) a movable component being movable with respect to a substrate and comprising first, second, and third portions;
• (b) first and second stationary actuation electrodes attached to the substrate;
• (c) first and second movable actuation electrodes spaced apart from the first and second stationary actuation electrodes, respectively, wherein the first movable actuation electrode is attached to the first portion of the movable component, wherein the second movable actuation electrode is attached to the second portion of the movable component, and wherein the first and second movable actuation electrodes are movable with respect to the first and second stationary actuation electrodes when a voltage is applied across the movable actuation electrodes and the stationary actuation electrodes;
• (d) a stationary capacitive electrode attached to the substrate;
• (e) a movable capacitive electrode attached to the third portion of the movable component and spaced from the stationary capacitive electrode for movement of the movable capacitive electrode with respect to the stationary capacitive electrode upon application of voltage across the movable actuation electrodes and the stationary actuation electrodes to change the capacitance between the capacitive electrodes;
• and
• (f) first, second, and third tethers comprising an end, the ends of the first, second, and third tethers being directly fixed to the first, second, and third portions, respectively, of the movable component to the substrate, wherein the tethers are flexible for allowing movement of the first movable actuation electrode, the second movable actuation electrode, and the movable capacitive electrode, respectively, with respect to the first stationary actuation electrode, the second stationary actuation electrode, and the stationary capacitive electrode, respectively.

A micro-electro-mechanical system (MEMS) variable capacitor, comprising:

• (a) first and second stationary actuation electrodes attached to a substrate;
• (b) first and second movable actuation electrodes spaced apart from the first and second stationary actuation electrodes, respectively, wherein the first and second movable actuation electrodes are movable with respect to the first and second stationary actuation electrodes when a voltage is applied across the movable actuation electrodes and the stationary actuation electrodes;
• (c) a stationary capacitive electrode attached to the substrate;
• (d) a movable capacitive electrode attached to the first and second movable actuation electrodes and spaced from the stationary capacitive electrode for movement of the movable capacitive electrode with respect to the stationary capacitive electrode upon application of the voltage across the movable actuation electrodes and the stationary actuation electrodes to change the capacitance between the capacitive electrodes, wherein the movable capacitive electrode includes first and second conductive components;
• (e) first and second tethers attached to the first and second movable actuation electrodes, respectively, wherein the first and second tethers are flexible for allowing movement of the first and second movable actuation electrodes, respectively, with respect to the first and second stationary actuation electrodes, respectively, and wherein the first and second tethers extend outward from attachment to the first and second movable actuation electrodes, respectively, at an acute angle with respect to the movable actuation electrodes and in a substantially same rotational direction about the movable capacitive electrode;
• and
• (f) third and fourth tethers attached to the movable capacitive electrode, wherein the third and fourth tethers are flexible for allowing movement of the movable capacitive electrode with respect to the stationary capacitive electrode, wherein the first and second conductive components of the movable capacitive electrode extend along the third and fourth tethers, respectively.