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US 7,584,162 B2Granted
Manufacture data analysis method and manufacture data analyzer apparatus
AssigneeFujitsu Microelectronics Limited
InventorsHidehiro Shirai, Hidetaka Tsuda
Life of this patent
Estimating the term…
Abstract
It is an object of the present invention to improve analysis accuracy of manufacture data with missing values. First, an analysis target explanatory variable is selected. The manufacture data acquired from each process is separated into a set with missing values and a set without missing values. An evaluation value for evaluating the influence of the explanatory variable on the objective variable is calculated from the manufacture data in the set with missing value and the set without missing values. The manufacture data is analyzed by matching the calculated evaluation value with a reference.
Claims21
A manufacture data analysis method running on a processor, comprising:
- acquiring and storing manufacture data comprising a plurality of values of explanatory variables of a plurality of manufacture processes and an objective variable indicating quality of a product manufactured by a plurality of the manufacture processes;
- separating a plurality of the stored manufacture data into a set of manufacture data in which an explanatory variable value is missing and a set of manufacture data in which an explanatory variable value is not missing;
- separating the set of manufacture data in which the explanatory variable value is not missing, into a first set and a second set, calculating value of influence data based on a difference between a mean value of an objective variable of the first set and a mean value of an objective variable of the second set, and separating the first set and the second set so that the value of the influence data becomes a maximum;
- calculating a deficiency influence rate indicating a probability of having different analysis results between when the analysis includes the sets of manufacture data in which the explanatory variable is missing and when the analysis does not include the manufacture data in which the explanatory variable is missing but includes the first and second sets of the manufacture data;
- evaluating whether or not a missing value of the explanatory variable influences an analysis result based on the value of the influence data and the deficiency influence rate;
- and
- generating the analysis result for later use.
4 more elements
A manufacture data analysis apparatus comprising:
- a data acquisition unit configured to acquire manufacture data comprising a plurality of values of explanatory variable of a plurality of manufacture processes and an objective variable indicating quality of a product manufactured by a plurality of the manufacture processes;
- a separation unit configured to separate a plurality of the manufacture data acquired by the data acquisition unit into a set of manufacture data in which an explanatory variable value is missing and a set of manufacture data in which an explanatory variable value is not missing, to separate the set of manufacture data in which the explanatory variable value is not missing first set and a second set, calculating a value of influence data based on a difference between a mean value of an objective variable of the first set and a mean value of an objective variable of the second set, and to separate the first set and the second set so that the value of the influence data becomes a maximum;
- calculating unit configured to calculate a deficiency influence rate indicating a probability of having different analysis results between when the analysis includes the sets of manufacture data in which the explanatory variable is missing and when the analysis does not include the manufacture data in which the explanatory variable is missing but includes the first and second sets of the manufacture data;
- and
- an analysis unit configured to calculate whether or not a missing value of the explanatory variable influences an analysis result based on the value of the influence data and the deficiency influence rate.
2 more elements
A computer-readable recording medium for storing a manufacture data analysis program comprising:
- a process of acquiring and storing manufacture data comprising a plurality of values of explanatory variables of a plurality of manufacture processes and an objective variable indicating quality of a product manufactured by a plurality of the manufacture processes;
- separating a plurality of the stored manufacture data into a set of manufacture data in which an explanatory variable value is missing and a set of manufacture data in which an explanatory variable value is not missing;
- a process of separating the set of manufacture data in which the explanatory variable value is not missing, into a first set and a second set, calculating value of influence data based on a difference between a mean value of an objective variable of the first set and a mean value of an objective variable of the second set, and separating the first set and the second set so that the value of the influence data becomes a maximum;
- a process of calculating a deficiency influence rate indicating a probability of having different analysis results between when the analysis includes the sets of manufacture data in which the explanatory variable is missing and when the analysis does not include the manufacture data in which the explanatory variable is missing but includes the first and second sets of the manufacture data;
- a process of evaluating whether or not a missing value of the explanatory variable influences an analysis result based on the value of the influence data and the deficiency influence rate;
- and a process of generating the analysis result for later use.
3 more elements
Dependencies are inferred from the claim text.