Automatic defect review and classification system
AssigneeHitachi High-Technologies Corporation
InventorsTakehiro Hirai, Kazuo Aoki, Kenji Obara
Life of this patent
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Abstract
An automatic defect review and classification system including at least one automatic defect review apparatus for specifically observing defect portions of a sample and at least one automatic defect classification apparatus for automatically classifying the defects, the system further comprising a device which outputs a status for combination of the automatic review apparatus and the automatic defect classification apparatus.
Claims2
An automatic defect review and classification system including at least one automatic defect review apparatus (hereinafter called “ADR apparatus”) for specifically observing defect portions of a sample and automatically acquiring images and at least one automatic defect classification apparatus (hereinafter called “ADC apparatus”) for automatically classifying the defects by using the images acquired by said ADR apparatus in accordance with the kind of the defects, the system further comprising:
- a computer which outputs a status for combination of said ADR apparatus and said ADC apparatus to a graphical user interface (hereinafter called “GUI”);
- wherein the computer calculates and displays an ADR processing time from a past history;
- wherein the computer calculates and displays an ADC processing time from the past history;
- wherein the computer calculates an estimation time on the basis of the calculated ADR and ADC processing times;
- wherein the computer decides and displays a number of sets of ADC necessary for executing an ADC processing without delay for one set of ADR on the basis of the calculated estimation time;
- and
- wherein said ADC apparatus to be connected to said ADR apparatus can be changed manually on the GUI.
Dependencies are inferred from the claim text.