US 7,583,788 B2 · Measuring device for the shortwavelength x ray diffraction and a method thereof

Abstract

A measuring device for the short-wavelength X-ray diffraction for test samples or work pieces made of lower-atomic-number crystalline and a method thereof are disclosed in the present invention. The measuring device comprises: an X-ray tube, an incident diaphragm, a table, a position-restricting receiving slit for a position-restricted part of a measured sample or work piece, a goniometer, a detector and an energy analyzer, the said X-ray tube and detector are arranged in the two sides of the table on which the sample or work pieces is located, the detector is intended to receive the transmitted diffracted ray. With the short-wavelength X-ray diffraction transmission method in the present invention X-ray diffracting patterns at different depths and different parts of a thicker test sample or work piece made of crystalline material and their distribution can be obtained without destructing the test sample or work piece, and then the data are processed by a computer to obtain phase, residual stress, etc. of any part and its distribution in the measured sample or work piece. The present invention has the advantages of easy operation, shorter detection time, and high trueness and reliability of the measured diffracting pattern.

Claims44

Dependent claims

A short-wavelength X-ray diffraction measuring device, comprising an X-ray tube, an entrance diaphragm, a table, a goniometer, a detector, and an energy analyzer;

wherein, the X-ray tube and the detector are located at two sides of the table, respectively, so that the X-ray tube and the detector are also located at two sides of a work piece placed on the table, respectively, and the detector receives short-wavelength X-rays diffracted by and transmitted through the work piece;
wherein the table with the work piece placed thereon is translatable in X, Y, Z three dimensions, rotatable around a rotating axis of the goniometer to an angle Ψ, or movable in X, Y, Z three dimensions and to an angle Ψ in a cooperative manner, so that different parts of the work piece can be measured;
and
wherein, during the measurement, the detector is scanned within a scan range 2θ.

1 more element

Dependencies are inferred from the claim text.

Measuring device for the shortwavelength x ray diffraction and a method thereof

Life of this patent

Measuring device for the shortwavelength x ray diffraction and a method thereof

Life of this patent

Abstract

Claims44