Electrostatic chuck to limit particle deposits thereon
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorScott Peitzsch
Life of this patent
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Abstract
An ion implanter includes an electrostatic chuck. The electrostatic chuck is configured to repel charged particles from a surface of the electrostatic chuck to limit deposits of the charged particles on the surface when the electrostatic chuck is not supporting any workpiece. An electrostatic chuck including a dielectric layer and at least one electrode is also provided. The at least one electrode is configured to accept a DC voltage signal to produce a first charge to repel charged particles from the dielectric layer when the dielectric layer is not supporting any workpiece to thereby limit deposits of the charged particles on the dielectric layer.
Claims4
A method comprising:
- clamping a workpiece to a surface of an electrostatic chuck of an ion implanter during a first time interval;
- implanting said workpiece with an ion beam during a portion of said first time interval;
- translating said electrostatic chuck out of a trajectory of said ion beam;
- and
- repelling positively charged particles from all of said surface of said electrostatic chuck with a positive first charge to limit deposits of said positively charged particles on said surface while said electrostatic chuck is not supporting any workpiece and while said ion beam is being directed at a Faraday cup during a second time interval only.
Dependencies are inferred from the claim text.