US 7,583,433 B2 · Multi mirror system for an illumination system

Abstract

There is provided a multi-mirror-system for an illumination system, especially for lithography with wavelengths ≦193 nm. The system includes light rays traveling along a light oath from an object plane to an image plane, and an arc-shaped field in the image plane, whereby a radial direction in the middle of the arc-shaped field defines a scanning direction. The first mirror and the second mirror are arranged in the light path in such a position and having such a shape, that the edge sharpness of the arc-shaped field in the image plane is smaller than 5 mm in the scanning direction. Furthermore, the light rays are impinging on the first mirror and the second mirror with incidence angles ≦30° or ≧60° relative to a surface normal of the first and second mirror.

Claims25

Dependent claims

An optical system, comprising:

an illumination system having:
a field plane in which a mask is located;
a conjugated plane, conjugated to said field plane, and having a field stop situated therein, wherein said conjugated plane is situated in a light path from a light source to said field plane, before said field plane, so that light from said light source traverses through said conjugated plane;
a first optical element having a first raster element in said light path before said conjugated plane;
a second optical element having a second raster element in said light path after said first optical element;
and
at least a first mirror, in said light path, after said conjugated plane, for imaging a field in said conjugated plane into an image in said field plane.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

10/921,447Filed 19 Aug 2004 · continuation

Priority

DE 199 35 56830 Jul 1999

Published

US 2005/0083503 A121 Apr 2005

Granted

1 Sep 2009

Term ends

Not estimatedThe source records don’t support an estimate.

Classification18 codes

G02B 27/0983
Reflective elements: being curved
G02B 17/0621
Using two curved mirrors: off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least…
G02B 19/0023
Having reflective surfaces only: at least one surface having optical power
G02B 19/0028
Characterised by the optical means employed: refractive and reflective surfaces, e.g. non-imaging catadioptric systems

Family

PCT/EP00/07258Parent of this continuation · filed 28 Jul 2000

Application10/060,909Parent of this continuation · filed 30 Jan 2002

US 2005/0083503 A1Pre-grant publication · published 21 Apr 2005

US 6,840,640 B2Parent of this continuation

US 2003/0076607 A1Published application

US 7,583,433 B2This patent

From the US filing history. Foreign family members aren’t listed.

Multi mirror system for an illumination system

Life of this patent

Multi mirror system for an illumination system

Life of this patent

Abstract

Claims25