Back to results
US 7,583,390 B2Granted
Accelerometer comprising an optically resonant cavity
AssigneeSymphony Acoustics, Inc.
InventorDustin Wade Carr
Life of this patent
Estimating the term…
Abstract
An accelerometer based on an optical displacement sensor is disclosed. An embodiment of the present invention directs a light beam toward an optically resonant cavity and detects both the reflected and transmitted optical beams that result from interaction with the optically resonant cavity. The optically resonant cavity has a cavity length that is based on the position of a proof mass that moves in response to an acceleration.
Claims19
An apparatus comprising:
- a first surface;
- a second surface, wherein said second surface and said first surface are substantially parallel and form an optically-resonant cavity having a cavity length, and wherein said cavity length varies in response to an acceleration;
- a first detector for generating a first electrical signal based on energy reflected by at least one of said first surface and said second surface;
- and
- a second detector for generating a second electrical signal based on energy that transits at least one of said first surface and said second surface;
- wherein the second surface and a proof mass are mechanically coupled, and wherein the proof mass has a physical adaptation that enables the proof mass to move in response to the acceleration.
3 more elements
An apparatus comprising:
- a source for providing optical energy;
- a Fabry-Perot interferometer for receiving the optical energy and distributing the optical energy into reflected optical energy and transmitted optical energy, wherein the Fabry-Perot interferometer comprises a first surface and a second surface, and wherein the second surface and a movable membrane are mechanically coupled;
- a first detector for detecting at least a portion of the reflected optical energy;
- and
- a second detector for detecting at least a portion of the transmitted optical energy;
- wherein the cavity length of the Fabry-Perot interferometer varies in response to an acceleration.
3 more elements
A method for sensing an acceleration comprising:
- providing an optically resonant cavity comprising a first surface and a second surface, wherein the optically resonant cavity has a cavity length that is based on the position of a proof mass, and further wherein the position of the proof mass is based on an acceleration;
- receiving input optical energy at the optically resonant cavity;
- distributing the input optical energy into a reflected signal and a transmitted signal, wherein the ratio of optical energy in the reflected signal and transmitted signal is based on the cavity length;
- generating a first electrical signal based on the reflected signal;
- and
- generating a second electrical signal based on the transmitted signal.
3 more elements
Dependencies are inferred from the claim text.