Electro-optical device substrate, electro-optical device and electronic apparatus

An electro-optical device substrate comprising:

• a substrate;
• a plurality of data lines;
• a plurality of scanning lines intersecting the plurality of data lines in a display area formed on the substrate;
• pixel electrodes that are provided at positions corresponding to intersections of the plurality of data lines and the plurality of scanning lines;
• and
• transistors, each including;
• a semiconductor layer including:
• a channel region with a channel length along a first direction in the display area;
• a data line side source/drain region electrically connected to a corresponding one of the data lines;
• a pixel electrode side source/drain region electrically connected to a corresponding one of the pixel electrodes,
• a first junction region located between the channel region and the data line side source/drain region;
• and
• a second junction region formed between the channel region and the pixel electrode side source/drain region;
• and
• a gate electrode including;
• a body portion that is arranged in layer above the semiconductor layer through a first insulating film and that overlaps the channel region as viewed in plan;
• a first elongated portion extending from the body portion by a side of the semiconductor layer along the first direction to a side of the second junction region so as to adjoin at least the second junction region;
• a second elongated portion extending from at least a portion of the first elongated portion along a second direction that intersects with the first direction, and electrically connected to a corresponding one of the scanning lines;
• and
• a longitudinal groove formed in the first insulating film at a portion that overlaps the first elongated portion on the substrate as viewed in plan so as to extend along the second junction region,
• the first elongated portion having an inner groove portion that is at least partly formed inside the groove.