Semiconductor device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsKiyoshi Kato, Toshihiko Saito
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Abstract
A variable capacitor is formed from a pair of electrodes and a dielectric interposed between the electrodes over a substrate, and an external input is detected by changing capacitance of the variable capacitor by a physical or electrical force. Specifically, a variable capacitor and a sense amplifier are provided over the same substrate, and the sense amplifier reads the change of capacitance of the variable capacitor and transmits a signal in accordance with the input to a control circuit.
Claims64
A semiconductor device comprising:
- an insulating substrate;
- a variable capacitor including a pair of electrodes and a dielectric, which is formed over the insulating substrate;
- and
- a display device over the insulating substrate,
- wherein a capacitance of the variable capacitor is changed corresponding to a distance between the pair of the electrodes, and
- wherein the semiconductor device includes a means for converting change of capacitance of the variable capacitor into an electrical signal.
A semiconductor device comprising:
- an insulating substrate;
- a plurality of variable capacitors each including a pair of electrodes and a dielectric, which are formed over the insulating substrate;
- and
- a display device over the insulating substrate,
- wherein a capacitance of the variable capacitor is changed corresponding to a distance between the pair of the electrodes, and
- wherein the semiconductor device includes a means for converting change of capacitance of each variable capacitor into an electrical signal.
A semiconductor device comprising:
- an insulating substrate;
- a variable capacitor including a pair of electrodes and a dielectric interposed therebetween, wherein a capacitance of the variable capacitor is changed corresponding to a distance between the pair of the electrodes;
- a read-out circuit that detects change of capacitance of the variable capacitor;
- and
- a display device,
- wherein the variable capacitor, the read-out circuit, and the display device are provided over the insulating substrate.
A semiconductor device comprising:
- an insulating substrate;
- a plurality of variable capacitors each including a pair of electrodes and a dielectric interposed therebetween, wherein a capacitance of the variable capacitor is changed corresponding to a distance between the pair of the electrodes;
- a read-out circuit that detects change of capacitance of each variable capacitor;
- and
- a display device,
- wherein the variable capacitors, the read-out circuit, and the display device are provided over the insulating substrate.
Dependencies are inferred from the claim text.