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US 7,583,165 B2Granted
High Q cavity resonators for microelectronics
AssigneeTessera, Inc.
InventorRonald Green
Life of this patent
Estimating the term…
Abstract
A cavity resonator is provided which includes a shielded enclosure enclosing a volume and a unitary conductor disposed within the volume, the unitary conductor having a first inductor portion and a transmission line portion. The transmission line portion is included in a transmission line having a reference conductor separated from the transmission line portion by a dielectric element. An active semiconductor device is coupled to the unitary conductor, and is operable to conduct a current to the unitary conductor at a resonant frequency of the unitary conductor.
Claims30
A cavity resonator, comprising:
- a dielectric element having one or more dielectric layers;
- a shielded enclosure overlying at least a portion of said dielectric element, said shielded enclosure enclosing a first volume and a second volume and having a metallic divider separating the first volume from the second volume;
- a first unitary trace disposed within the first volume, said first unitary trace including a first transmission line trace having a major surface extending along a surface of said dielectric element and a first inductor trace having a major surface extending along a surface of said dielectric element;
- and
- a first reference trace extending along said dielectric element and separated from said first transmission line trace of said first unitary trace by at least one dielectric layer of said dielectric element;
- a second unitary trace disposed within the second volume, said second unitary trace including a second transmission line trace having a major surface extending along a surface of said dielectric element and a second inductor trace having a major surface extending along said surface of said dielectric element;
- and
- a second reference trace extending along said dielectric element and separated from said second transmission line trace of said second unitary trace by at least one dielectric layer of said dielectric element;
- wherein said metallic divider has an opening adapted to permit a predetermined proportion of energy of an electromagnetic field excited by the first inductor trace to be coupled onto the second inductor trace.
6 more elements
A cavity resonator, comprising:
- a shielded enclosure enclosing a first volume and a second volume, having a shield separating the first volume from the second volume;
- a first unitary conductor extending within the first volume and a first reference conductor extending within the first volume, the first unitary conductor having a first inductor portion disposed within the first volume and a first transmission line portion, a first dielectric element extending between the first transmission line portion and the first reference conductor so that the first transmission line portion of the first unitary conductor, the first dielectric element and the first reference conductor define a first transmission line and wherein the first inductor portion and the first transmission line portion have a major surface extending along a surface of said first dielectric element;
- and
- a second unitary conductor extending within the second volume and a second reference conductor extending within the second volume, the second unitary conductor having a second inductor portion disposed within the second volume and a second transmission line portion, a second dielectric element extending between the second transmission line portion and the second reference conductor so that the second transmission line portion of the second unitary conductor, the second dielectric element and the second reference conductor define a second transmission line and wherein the second inductor portion and the second transmission line portion have a major surface extending along a surface of said second dielectric element,
- wherein the shield has an opening allowing a predetermined proportion of energy radiated by the first inductor portion to be radiatively coupled to the second inductor portion.
2 more elements
Dependencies are inferred from the claim text.