Method for fabricating light-emitting device through inspection
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorMasaaki Hiroki
Life of this patent
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Abstract
A light-emitting device is produced at a decreased cost by inspecting defects in the pixels in the step of fabrication. TFTs possessed by the pixels on the element substrate and TFTs possessed by the peripheral drive circuits are inspected by using the inspection device to detect defects in a step in a process for finishing the light-emitting device. This makes it possible to decrease the loss that results when the defective products are processed through up to the final step, and to improve the yield by repairing the defective products in a step of repairing.
Claims24
A device for inspecting a semiconductor device including an element substrate comprising:
- an opposing detector substrate;
- a source of an electromagnetic wave comprising a soft X-ray;
- and
- a shielding plate having a hole and shielding the electromagnetic wave,
- wherein the electromagnetic wave passes through the hole, and
- wherein a gas present between the element substrate and the opposing detector substrate is ionized by the electromagnetic wave.
A device for inspecting a semiconductor device including an element substrate comprising:
- an opposing detector substrate;
- a source of an electromagnetic wave comprising a soft X-ray;
- and
- a shielding plate having a hole and shielding the electromagnetic wave,
- wherein the electromagnetic wave passes through the hole, and
- wherein a gas present between a pixel provided on the element substrate and the opposing detector substrate is ionized by the electromagnetic wave.
A device for inspecting a semiconductor device including an element substrate comprising:
- an opposing detector substrate;
- a source of an electromagnetic wave comprising a soft X-ray;
- and
- a shielding plate having a hole and shielding the electromagnetic wave,
- wherein the electromagnetic wave passes through the hole, and
- wherein a gas present between a pixel provided on the element substrate and the opposing detector substrate is ionized by the electromagnetic wave,
- wherein the shielding plate comprises lead glass.
Dependencies are inferred from the claim text.