Servo system for a two-dimensional micro-electromechanical system (MEMS)-based scanner and method therefor

A servo control system micro-electromechanical systems (MEMS)-based motion control system, comprising:

• a motion generator having an inherent stiffness component;
• a feed-forward element for canceling the inherent stiffness component of the motion generator of said micro-electromechanical systems (MEMS)-based motion control system;
• a node coupled to receive an input from said feed-forward element, wherein said feed-forward element comprises one of a linear stiffness unit and a look-up table for storing therein complex stiffnesses, for generating a stiffness component, based on a target position first-axis reference signal, for being input to said node;
• a servo controller for receiving a position error signal based on a target position first-axis reference signal, and a reference velocity;
• a node for receiving an input target position first axis-reference value;
• a kstiffness unit for a linear stiffness;
• a look-up table for storing values representing complex stiffnesses;
• and
• an amplifier for receiving and amplifying an output from said node, to provide an output to the motion generator,
• wherein said node further receives a measured motion generator position first axis-signal from the motion generator,
• wherein said node for receiving determines a difference between the input target position first axis-reference value and the measured motion generator position first axis-signal and, based on the difference, said node for receiving outputs a position error signal to said servo controller,
• wherein said servo controller outputs a signal to a summing node, which also receives inputs from said kstiffness unit and said look-up table, said summing node providing an output signal to said motion generator,
• wherein the stiffness term is fed forward without waiting for the servo controller to build up,
• wherein the stiffness of said scanner, when counterbalanced by said feed forward component, minimizes a position error of said scanner due to a ramp motion,
• wherein an electronically-generated force is applied to the scanner to eliminate the stiffness,
• wherein said motion generator provides an output position signal to said node, and
• wherein said motion comprises two-dimensional motion.