Piezoelectric element and method for manufacturing piezoelectric element

A piezoelectric element comprising:

• a substrate;
• a first electrode film disposed on the substrate;
• a piezoelectric film disposed on the first electrode film;
• and
• a second electrode film disposed on the piezoelectric film,
• wherein,
• the piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films, and
• the second electrode film comprises a driving electrode disposed on the piezoelectric film and a pair of detection electrodes sandwiching the driving electrode.

A piezoelectric element comprising:

• a substrate;
• a first electrode film disposed on the substrate;
• a piezoelectric film disposed on the first electrode film;
• and
• a second electrode film disposed on the piezoelectric film,
• wherein,
• the piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films, and
• the center electric field strength of an alternating-current signal applied between the first electrode film and the second electrode film is set at a position shifted in the positive direction from the center of a hysteresis loop of the piezoelectric film.