Multi-photon polymerizable pre-ceramic polymeric compositions
Assignee3M Innovative Properties Company
InventorsDavid S. Arney, Feng Bai
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Abstract
A multi-photon reactive composition comprises an ethylenically unsaturated liquid polysilazane precursor, a multi-functional thiol additive, a multi-ethylenically-unsaturated additive different from the polysilazane, and a multi-photon photocuring composition. The invention can be used to provide ceramic-based microstructures as, for example, high temperature resistant materials, including devices such as microcombustors, micro-heat-exchangers, sensor and actuator systems, microfluidic devices, and micro-optics systems that can be used independently or integrated into other systems.
Claims20
A composition comprising
- a) an ethylenically-unsaturated liquid polysilazane precursor,
- b) a multi-functional thiol additive,
- c) a multi-functional ethylenically unsaturated additive different from the polysilazane, and
- d) a multi-photon photocuring composition.
A method comprising:
- a) providing a multi-photon reactive composition comprising
- i) an ethylenically unsaturated liquid polysilazane,
- ii) a multi-functional thiol additive,
- iii) a multi-ethylenically unsaturated additive different from the polysilazane;
- and
- iv) a multi-photon photocuring composition,
- b) imagewise irradiating the composition with sufficient light to at least partially react the composition,
- c) optionally, removing a soluble portion of the at least partially reacted composition, and
- d) optionally, subjecting any remaining portion of the at least partially reacted composition to an elevated temperature for sufficient time to at least partially pyrolyze the polysilazane.
Dependencies are inferred from the claim text.