Distributor and distributing method, plasma processing system and method, and process for fabricating LCD

A plasma processing system comprising:

• a stage to place a target object thereon;
• a processing vessel to accommodate said stage;
• an antenna assembly having a plurality of radiation waveguides with slots;
• and
• a distributor which distributes electromagnetic waves to said radiation waveguides,
• wherein said radiation waveguides are arrayed in a widthwise direction perpendicular to tube axes with respect to said processing vessel,
• said distributor comprises
• an oscillator which outputs the electromagnetic waves,
• a first square waveguide to be connected to said oscillator, and
• a second square wave guide to be connected to one end of each of said radiation waveguides through a plurality of openings formed therein,
• wherein said first square waveguide and said second square waveguide communicate with each other through a communication hole formed in a first narrow wall of each of said first square waveguide and said second square waveguide,
• wherein said first square waveguide comprises a first guide wall which projects from a second narrow wall toward the communication hole and guides the electromagnetic waves propagating in said first square waveguide toward the communication hole,
• wherein said second square waveguide comprises a plurality of second guide walls which project from said first narrow wall of the second square waveguide toward each of the plurality of openings, and
• wherein electromagnetic waves reflected by said first guide wall that travel in an opposite direction in said first square waveguide cancels the electromagnetic waves which are reflected by an end of said first square waveguide.

A distributing method comprising:

• a first step of introducing electromagnetic waves propagating in a first square waveguide into a second square waveguide through a communication hole formed in a first narrow wall of each of the first square waveguide and the second square waveguide;
• and
• a second step of distributing the electromagnetic waves introduced into the second square waveguide to a plurality of radiation waveguides arrayed in a widthwise direction perpendicular to tube axes, through a plurality of openings formed in the second square waveguide,
• wherein in the first step, the electromagnetic waves propagating in the first square waveguide are guided toward the communication hole by a guide wall which projects from a second narrow wall of the first square waveguide toward the communication hole, and
• wherein electromagnetic waves reflected by said first guide wall that travel in an opposite direction in said first square waveguide cancels the electromagnetic waves which are reflected by an end of said first square wave guide.

A plasma processing method comprising:

• a first step of introducing electromagnetic waves propagating in a first square waveguide into a second square waveguide through a communication hole formed in a first narrow wall of each of the first square waveguide and the second square waveguide;
• a second step of distributing the electromagnetic waves introduced into the second square waveguide to a plurality of radiation waveguides arrayed in a widthwise direction perpendicular to tube axes, through a plurality of openings formed in the second square waveguide;
• a third step of supplying the electromagnetic waves introduced into the radiation waveguides to a processing vessel through a slot formed in each of the radiation waveguides;
• and
• a fourth step of processing a target object placed in the processing vessel utilizing a plasma which is generated by the electromagnetic waves supplied to the processing vessel,
• wherein in the first step, the electromagnetic waves propagating in the first square waveguide are guided toward the communication hole by a first guide wall which projects from a second narrow wall of the first square wave guide toward the communication hole,
• wherein in the second step, the electromagnetic waves propagating in the second square waveguide are guided toward the opening by a plurality of second guide walls which project from said first narrow wall of the second square waveguide toward each of the plurality of openings, and
• wherein electromagnetic waves reflected by said first guide wall that travel in an opposite direction in said first square waveguide cancels the electromagnetic waves which are reflected by an end of said first square waveguide.

A process for fabricating an LCD, comprising:

• a first step of introducing electromagnetic waves propagating in a first square waveguide into a second square waveguide through a communication hole formed in a first narrow wall of each of the first square waveguide and the second square waveguide;
• a second step of distributing the electromagnetic waves introduced into the second square waveguide to a plurality of radiation waveguides arrayed in a widthwise direction perpendicular to tube axes, through a plurality of openings formed in the second square waveguide;
• a third step of supplying the electromagnetic waves introduced into the radiation waveguides to a processing vessel through a slot formed in each of the radiation waveguides;
• and
• a fourth step of subjecting a surface of an LCD substrate arranged in the processing vessel to a process such as etching, ashing, oxidation, nitridation, or CVD utilizing a plasma which is generated by the electromagnetic waves supplied to the processing vessel,
• wherein in the first step, the electromagnetic waves propagating in the first square waveguide are guided toward the communication hole by a first guide wall which projects from a second narrow wall of the first square waveguide toward the communication hole,
• wherein in the second step, the electromagnetic waves propagating in the second square waveguide are guided toward the opening by a plurality of second guide walls which project from said first narrow wall of the second square waveguide toward each of the plurality of openings, and
• wherein electromagnetic waves reflected by said first guide wall that travel in an opposite direction in said first square waveguide cancels the electromagnetic waves which are reflected by an end of said first square waveguide.