Solid state image pickup device and method of producing solid state image pickup device

A method of producing a solid state image pickup device comprising a semiconductor substrate having an image pickup pixel portion with a plurality of pixels each comprising a photo-electric conversion device and a field effect transistor and a peripheral circuit portion comprising a driving circuit for driving said image pickup pixel portion and a signal processing circuit for processing a pixel signal output from said image pickup pixel portion, a wiring layer for driving said field effect transistors in said image pickup pixel portion, said wiring layer being provided on a first side of said semiconductor substrate, and a light-receiving surface of said photo-electric conversion device being provided on a second side of said semiconductor substrate, wherein the method comprises:

• forming a registration mark during formation of an active region, a silicide film, or a gate layer for said field effect transistors arranged on said first side of said semiconductor substrate, and thereafter forming one or more of any one of a light-shielding film, a color filter, or a micro lens on said second side in subsequent processing with reference to said registration mark.