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AssigneeTokyo Electron Limited
InventorsYasuharu Sasaki, Taketoshi Okajo
Estimating the term…
A method for diagnosing temporal deterioration of temperature controlling performance of an electrostatic chuck includes the steps of performing vacuum processing on the substrate wherein the substrate is adsorbed by the electrostatic chuck while a temperature control gas for controlling a temperature of the substrate is supplied between the substrate and the electrostatic chuck, and exposing, during the above step, a substrate absorbed by the electrostatic chuck to an atmosphere generated by using a processing recipe for diagnosis, detecting a temperature of the substrate. A pressure of the temperature control gas is controlled such that the detected temperature becomes a specific temperature, and the controlled pressure is stored in a storage unit. The method further includes a step of diagnosing the deterioration of the temperature controlling performance of the electrostatic chuck based on the pressure of the temperature control gas stored in the storage unit.
A method for diagnosing temporal deterioration of temperature controlling performance of an electrostatic chuck which is provided on a mounting table in a vacuum vessel and absorbs a substrate with an electrostatic force, the method comprising the steps of:
A vacuum processing apparatus which performs a vacuum processing on a substrate absorbed by an electrostatic chuck provided on a mounting table in a vacuum vessel, while a temperature control gas for controlling a temperature of the substrate is supplied between a rear surface of the substrate and a surface of the electrostatic chuck, the vacuum processing apparatus comprising:
Dependencies are inferred from the claim text.