US 7,582,411 B2 · Antireflective film and exposure method

An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of:

providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit:
nm) described below;
and
exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 0.93≦NA ≦1.0, the antireflective film including an upper layer having a complex refractive index N1, and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the equations N1=n1−k1i and N2=n2−k2i, respectively;
wherein assuming that the thickness of the upper layer is d1 (unit:
nm) and the thickness of the lower layer is d2 (unit:
nm) , when any one of the combinations of values of [n10, k10, d10, n20, k20, d20]described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1, n2, k2, and d2 satisfy the relational expression
{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1;
a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10;
a value of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10;
a value of d1m in a corresponding case is selected on the basis of a magnitude relation between d1 and d10;
a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20;
a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20;
and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20;
and
in the tables below, in the line of “When n1≧n10,n1m=”, each value in the right columns is “n1m−n10”;
in the line of “When n1<n10, n1m=”, each value in the right columns is “n10−n1m”;
in the line of “When k1≧k10,k1m”, each value in the right columns is “k1m−k10”;
in the line of “When k1<k10, k1m=”, each value in the right columns is “k10−k1m”;
in the line of “When d1≧d10, d1m (nm) =”, each value (unit:
nm) in the right columns is “d1m−d10”;
in the line of “When d1<d10, d1m (nm) =”, each value (unit:
nm) in the right columns is “d10−d1m”;
in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”;
in the line of “When n2<n20, n2m=”, each value in the right columns is “n20−n2m”;
in the line of “When k2≧k20, k2m=”, each value in the right columns is “k2m−k20”;
in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”;
in the line of “When d2≧d20, d2m (nm) =”, each value (unit:
nm) in the right columns is “d2m−d20”;
and in the line of “When d2<d20, d2m (nm) =”, each value (unit:
nm) in the right columns is “d20−d2m”.
0.93 ≦ NA ≦ 1.0
2 ≦ T ≦ 15
1/35
Case
1-01
1-02
1-03
1-04
1-05
n10
2.0730
1.8547
1.8612
1.8596
1.7706
k10
0.1156
0.1676
0.1279
0.0953
0.0916
d10 (nm)
23.93
29.84
20.21
19.98
91.02
n20
2.6749
2.1886
1.8193
1.8569
1.9614
k20
1.5696
0.6118
0.4029
0.3274
0.4555
d20 (nm)
9.886
59.76
139.99
190.30
69.22
When n1 ≧ n10, n1m =
0.0910
0.0882
0.0964
0.0950
0.0763
When n1 < n10, n1m =
0.872
0.0704
0.0762
0.0765
0.0467
When k1 ≧ k10, k1m =
0.819
0.0750
0.0869
0.0875
0.0772
When k1 < k10, k1m =
0.0960
0.0840
0.0907
0.0915
0.0546
When d1 ≧ d10, d1m
4.108
7.919
8.786
9.587
17.28
(nm) =
When d1 < d10, d1m
3.280
5.652
6.074
6.698
8.396
(nm) =
When n2 ≧ n20, n2m =
0.2209
0.1796
0.1515
0.1552
0.1445
When n2 < n20, n2m =
0.2126
0.1920
0.1780
0.1777
0.1565
When k2 ≧ k20, k2m =
0.2324
0.2171
0.1921
0.1983
0.1809
When k2 < k20, k2m =
0.1960
0.1512
0.1220
0.1107
0.1235
When d2 ≧ d20, d2m
1.175
13.99
∞
∞
9.907
(nm) =
When d2 < d20, d2m
1.606
9.166
63.12
76.29
9.171
(nm) =
0.93 ≦ NA ≦ 1.0
2 ≦ T ≦ 15
Case
1-06
1-07
1-08
1-09
1-10
n10
1.7660
1.7540
1.7206
1.7312
1.7318
k10
0.0861
0.0810
0.0766
0.0743
0.0746
d10 (nm)
89.67
89.26
163.7
158.4
156.0
n20
1.8683
1.7976
2.0073
1.9328
1.8226
k20
0.3142
0.2441
0.9100
0.4029
0.2736
d20 (nm)
129.4
193.6
15.11
69.39
132.3
When n1 ≧
0.0725061
0.0712122
0.0876196
0.0743347
0.0699963
n10, n1m =
When n1 <
0.0454077
0.0429834
0.0318030
0.0375427
0.0339148
n10, n1m =
When k1 ≧
0.0772620
0.0743579
0.0711646
0.0773767
0.0733899
k10, k1m =
When k1 <
0.0551843
0.0575049
0.0410327
0.0412244
0.0408972
k10, k1m =
When d1 ≧
18.782
23.348
40.469
35.317
38.161
d10, d1m
(nm) =
When d1 <
8.456
8.860
9.958
10.342
9.052
d10, d1m
(nm) =
When n2 ≧
0.1498401
0.1584961
0.1682336
0.1348816
0.1376196
n20, n2m =
When n2 <
0.1510144
0.1511060
0.2304688
0.1582874
0.1516028
n20, n2m =
When k2 ≧
0.2049341
0.2252979
0.1710974
0.1537598
0.1868274
k20, k2m =
When k2 <
0.0962390
0.0820935
0.1771240
0.1169067
0.0881860
k20, k2m =
When d2 ≧
∞
∞
3.180
8.501
∞
d20, d2m
(nm) =
When d2 <
17.963
68.303
3.157
8.798
14.016
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
2 ≦ T ≦ 15
2/35
Case
1-11
1-12
1-13
1-14
1-15
n10
1.7235310
1.7093992
1.7192548
1.7183512
1.7097773
k10
0.0712769
0.0595462
0.0668813
0.0690717
0.0638868
d10 (nm)
155.759
237.275
223.222
220.755
221.916
n20
1.7500411
5.0249130
1.9244861
1.7884626
1.7175992
k20
0.2147794
2.4786958
0.3767470
0.2530536
0.2031308
d20 (nm)
197.972
1.776
68.925
134.430
199.649
When n1 ≧
0.0687000
0.1022864
0.0758325
0.0727087
0.0697119
n10, n1m =
When n1 <
0.0322229
0.0397070
0.0389722
0.0346118
0.0564209
n10, n1m =
When k1 ≧
0.0698975
0.0795508
0.0762329
0.0700171
0.0722595
k10, k1m =
When k1 <
0.0415723
0.0393457
0.0338635
0.0308765
0.0321350
k10, k1m =
When d1 ≧
∞
∞
∞
∞
∞
d10, d1m
(nm) =
When d1 <
9.616
78.998
12.815
10.464
72.402
d10, d1m
(nm) =
When n2 ≧
0.1855957
0.5207629
0.1343335
0.1358569
0.2333704
n20, n2m =
When n2 <
0.1501331
0.6523560
0.1703552
0.1672083
0.1693542
n20, n2m =
When k2 ≧
0.2047339
0.5424048
0.1363831
0.1710950
0.1947412
k20, k2m =
When k2 <
0.0758948
0.5487781
0.1192529
0.0892212
0.0778406
k20, k2m =
When d2 ≧
∞
0.325
8.509
∞
∞
d20, d2m
(nm) =
When d2 <
29.087
0.351
7.511
11.451
31.610
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
15 < T ≦ 25
Case
2-01
2-02
2-03
2-04
2-05
n10
1.8890717
1.8040788
1.8569330
1.8246631
1.8713633
k10
0.2231211
0.2224671
0.1887211
0.1852786
0.1359350
d10 (nm)
31.297
38.783
31.358
29.866
20.765
n20
2.2536461
3.4285504
2.3482559
2.0267942
1.8449284
k20
1.9138327
0.7115044
0.7139401
0.6589875
0.4410677
d20 (nm)
8.426
30.090
49.395
61.419
129.533
When n1 ≧
0.0874390
0.0895227
0.0867871
0.0862964
0.0944556
n10, n1m =
When n1 <
0.0734485
0.0679480
0.0711365
0.0665735
0.0748743
n10, n1m =
When k1 ≧
0.0762256
0.0781921
0.0754639
0.0735010
0.0845789
k10, k1m =
When k1 <
0.0847852
0.0785486
0.0835657
0.0812061
0.0905493
k10, k1m =
When d1 ≧
5.734
7.070
7.156
8.156
8.180
d10, d1m
(nm) =
When d1 <
4.509
5.331
5.325
5.713
5.655
d10, d1m
(nm) =
When n2 ≧
0.3151672
0.1904419
0.1878015
0.1893945
0.1561475
n20, n2m =
When n2 <
0.3095313
0.2189575
0.2044202
0.1933459
0.1801416
n20, n2m =
When k2 ≧
0.3390149
0.2463513
0.2322900
0.2311047
0.2037732
k20, k2m =
When k2 <
0.3041187
0.1774133
0.1676416
0.1568945
0.1265381
k20, k2m =
When d2 ≧
1.987
2.182
8.431
∞
∞
d20, d2m
(nm) =
When d2 <
1.727
2.068
6.571
10.427
56.577
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
15 < T ≦ 25
3/35
Case
2-06
2-07
2-08
2-09
2-10
n10
1.8537764
1.8773918
1.7913209
1.7961812
1.7719309
k10
0.1095380
0.0811836
0.1069315
0.0967122
0.0907051
d10 (nm)
19.190
15.072
93.104
91.592
89.644
n20
1.8083352
1.7885130
2.1120296
2.2985234
1.8982310
k20
0.3385915
0.2812935
1.5705728
0.5621108
0.3437292
d20 (nm)
190.096
250.952
8.709
49.876
119.550
When n1 ≧
0.0970691
0.1116003
0.0785193
0.0746387
0.0710254
n10, n1m =
When n1 <
0.0765894
0.0899463
0.0387744
0.0446472
0.0434424
n10, n1m =
When k1 ≧
0.0900769
0.1037891
0.0704041
0.0743225
0.0753088
k10, k1m =
When k1 <
0.0922754
0.0811836
0.0518481
0.0540869
0.0544885
k10, k1m =
When d1 ≧
9.442
8.843
12.610
13.182
16.111
d10, d1m
(nm) =
When d1 <
6.479
6.242
5.884
6.895
7.619
d10, d1m
(nm) =
When n2 ≧
0.1545007
0.1511414
0.2353479
0.1499768
0.1563330
n20, n2m =
When n2 <
0.1780847
0.1773486
0.2901843
0.1659082
0.1527185
n20, n2m =
When k2 ≧
0.1867920
0.1671802
0.2909924
0.1840894
0.2027185
k20, k2m =
When k2 <
0.1126624
0.1034778
0.2557275
0.1387183
0.1013330
k20, k2m =
When d2 ≧
∞
∞
1.972
5.095
∞
d20, d2m
(nm) =
When d2 <
76.056
121.855
1.716
4.880
15.622
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
15 < T ≦ 25
Case
2-11
2-12
2-13
2-14
2-15
n10
1.7573553
1.7321027
1.7251448
1.7347815
1.7337052
k10
0.0844391
0.0771807
0.0782108
0.0789970
0.0782079
d10 (nm)
89.273
89.432
166.474
158.854
156.164
n20
1.8090385
1.7181480
2.6560327
2.0166404
1.8413069
k20
0.2599016
0.2108133
2.0752579
0.4697089
0.2975845
d20 (nm)
184.203
254.601
4.495
58.957
122.955
When n1 ≧
0.0699780
0.0690137
0.0832959
0.0721558
0.0683105
n10, n1m =
When n1 <
0.0410315
0.0429553
0.0305981
0.0341260
0.0308228
n10, n1m =
When k1 ≧
0.0723608
0.0738831
0.0729456
0.0742798
0.0703467
k10, k1m =
When k1 <
0.0569189
0.0588879
0.0382764
0.0397253
0.0396069
k10, k1m =
When d1 ≧
21.648
30.736
32.939
31.041
34.229
d10, d1m
(nm) =
When d1 <
8.068
11.084
9.096
8.972
7.917
d10, d1m
(nm) =
When n2 ≧
0.1631897
0.1805151
0.3419739
0.1438672
0.1358447
n20, n2m =
When n2 <
0.1518018
0.1480249
0.4228455
0.1667273
0.1539514
n20, n2m =
When k2 ≧
0.2316443
0.1895435
0.3584204
0.1604712
0.1864905
k20, k2m =
When k2 <
0.0850049
0.0772852
0.3668774
0.1323413
0.0930493
k20, k2m =
When d2 ≧
∞
∞
0.935
6.683
16.067
d20, d2m
(nm) =
When d2 <
28.321
80.547
0.940
6.845
12.170
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
15 < T ≦ 25
4/35
Case
2-16
2-17
2-18
2-19
2-20
n10
1.7245076
1.7100620
1.7130788
1.7208745
1.7192161
k10
0.0739010
0.0639207
0.0658962
0.0708686
0.0720786
d10 (nm)
155.712
155.553
233.281
223.560
220.745
n20
1.7533528
1.6863114
3.3653368
1.9877972
1.7983405
k20
0.2275719
0.1891021
2.7431658
0.4366658
0.2740582
d20 (nm)
189.273
256.528
2.501
59.393
125.643
When n1 ≧
0.0671997
0.0648059
0.0864783
0.0735278
0.0707983
n10, n1m =
When n1 <
0.0293323
0.0484583
0.0327734
0.0316724
0.0279663
n10, n1m =
When k1 ≧
0.0671045
0.0758130
0.0759729
0.0721252
0.0662109
k10, k1m =
When k1 <
0.0403235
0.0462146
0.0340283
0.0320007
0.0290771
k10, k1m =
When d1 ≧
∞
∞
∞
∞
∞
d10, d1m
(nm) =
When d1 <
8.393
77.190
14.014
10.040
8.344
d10, d1m
(nm) =
When n2 ≧
0.1922314
0.2150586
0.5377722
0.1455798
0.1365283
n20, n2m =
When n2 <
0.1495129
0.1388159
0.5848816
0.1787549
0.1689587
n20, n2m =
When k2 ≧
0.2035803
0.1600281
0.4555420
0.1361926
0.1635962
k20, k2m =
When k2 <
0.0785095
0.0698242
0.5466174
0.1332434
0.0942200
k20, k2m =
When d2 ≧
∞
∞
0.540
6.979
∞
d20, d2m
(nm) =
When d2 <
26.645
77.267
0.568
6.255
9.480
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
15 < T ≦ 25
Case
2-21
2-22
n10
1.7100814
1.7028062
k10
0.0661341
0.0572529
d10 (nm)
221.783
219.613
n20
1.7179584
1.6741304
k20
0.2146738
0.1784680
d20 (nm)
191.114
256.090
When n1 ≧ n10, n1m =
0.0687488
0.0693079
When n1 < n10, n1m =
0.0502954
0.0688196
When k1 ≧ k10, k1m =
0.0691418
0.0820508
When k1 < k10, k1m =
0.0305945
0.0409924
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
70.999
88.114
When n2 ≧ n20, n2m =
0.2426611
0.2482605
When n2 < n20, n2m =
0.1649829
0.1563098
When k2 ≧ k20, k2m =
0.1903906
0.1488330
When k2 < k20, k2m =
0.0805981
0.0682654
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
28.403
77.092
0.93 ≦ NA ≦ 1.0
25 < T ≦ 35
5/35
Case
3-01
3-02
3-03
3-04
3-05
n10
1.7462297
1.7852920
1.8064124
1.8761841
1.8732427
k10
0.2650661
0.2379686
0.2063789
0.1465026
0.1107685
d10 (nm)
38.584
38.995
31.400
22.050
18.888
n20
1.8811342
3.2453891
2.0415396
1.8871554
1.8328297
k20
2.5474890
0.8215227
0.7493942
0.4863835
0.3644393
d20 (nm)
6.719
29.990
55.163
118.487
179.928
When n1 ≧
0.0769434
0.0851318
0.0833228
0.0906799
0.0968079
n10, n1m =
When n1 <
0.0572766
0.0631555
0.0636389
0.0722144
0.0767554
n10, n1m =
When k1 ≧
0.0723669
0.0784412
0.0735730
0.0819336
0.0896667
k10, k1m =
When k1 <
0.0683887
0.0725391
0.0776208
0.0882788
0.0940442
k10, k1m =
When d1 ≧
6.007
6.642
7.652
7.684
8.502
d10, d1m
(nm) =
When d1 <
4.614
4.982
5.411
5.323
5.843
d10, d1m
(nm) =
When n2 ≧
0.4302271
0.2240894
0.2116187
0.1663196
0.1573621
n20, n2m =
When n2 <
0.3679468
0.2518726
0.2012903
0.1828064
0.1779138
n20, n2m =
When k2 ≧
0.4458606
0.2938757
0.2488452
0.2239661
0.1924353
k20, k2m =
When k2 <
0.4071558
0.2090601
0.1700916
0.1317957
0.1155774
k20, k2m =
When d2 ≧
1.849
2.793
∞
∞
∞
d20, d2m
(nm) =
When d2 <
1.467
2.486
8.980
27.259
71.144
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
25 < T ≦ 35
Case
3-06
3-07
3-08
3-09
3-10
n10
1.8809997
1.8353407
1.8107063
1.7800259
1.7589519
k10
0.0844859
0.1336488
0.1074834
0.0966903
0.0885227
d10 (nm)
15.636
86.851
91.200
89.638
89.033
n20
1.8003278
1.6000470
2.5616901
1.9474319
1.8081258
k20
0.2965881
1.7695220
0.6655713
0.3779800
0.2753975
d20 (nm)
241.202
10.059
40.111
109.424
177.335
When n1 ≧
0.1079370
0.0607556
0.0690979
0.0686230
0.0682776
n10, n1m =
When n1 <
0.0864404
0.0389355
0.0418872
0.0404956
0.0386047
n10, n1m =
When k1 ≧
0.0999365
0.0690637
0.0736157
0.0727942
0.0702844
k10, k1m =
When k1 <
0.0844859
0.0492517
0.0507898
0.0531238
0.0559766
k10, k1m =
When d1 ≧
8.565
8.192
11.124
13.835
18.997
d10, d1m
(nm) =
When d1 <
5.996
4.465
5.820
6.603
7.278
d10, d1m
(nm) =
When n2 ≧
0.1541260
0.2930249
0.1702905
0.1595251
0.1700037
n20, n2m =
When n2 <
0.1764270
0.2694421
0.1785315
0.1557800
0.1515491
n20, n2m =
When k2 ≧
0.1720203
0.3061462
0.2081555
0.2039343
0.2313416
k20, k2m =
When k2 <
0.1058716
0.3107410
0.1597290
0.1070007
0.0874585
k20, k2m =
When d2 ≧
∞
2.242
3.729
17.032
∞
d20, d2m
(nm) =
When d2 <
115.662
2.067
3.416
13.482
26.550
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
25 < T ≦ 35
6/35
Case
3-11
3-12
3-13
3-14
3-15
n10
1.7385561
1.7392392
1.7355979
1.7252169
1.7185486
k10
0.0961686
0.0859424
0.0828161
0.0770491
0.0788457
d10 (nm)
161.111
158.474
155.982
155.656
229.847
n20
1.8448216
2.1008270
1.8545146
1.7550901
3.2610273
k20
2.2148249
0.5469970
0.3232472
0.2413910
4.4183916
d20 (nm)
5.861
50.862
115.179
181.353
1.558
When n1 ≧
0.0629041
0.0674426
0.0657153
0.0649670
0.0703149
n10, n1m =
When n1 <
0.0253882
0.0295728
0.0268335
0.0256165
0.0220850
n10, n1m =
When k1 ≧
0.0668323
0.0703247
0.0663293
0.0632434
0.0659778
k10, k1m =
When k1 <
0.0332373
0.0369910
0.0375085
0.0384131
0.0277441
k10, k1m =
When d1 ≧
20.469
26.314
30.753
47.147
42.683
d10, d1m
(nm) =
When d1 <
5.969
7.197
6.584
7.042
7.213
d10, d1m
(nm) =
When n2 ≧
0.3836914
0.1608313
0.1425024
0.2021899
0.7624707
n20, n2m =
When n2 <
0.3601526
0.1749219
0.1554919
0.1482849
0.7156897
n20, n2m =
When k2 ≧
0.3156946
0.1638635
0.1816882
0.2013940
0.5159863
k20, k2m =
When k2 <
0.4014783
0.1464551
0.0974072
0.0811682
0.8313574
k20, k2m =
When d2 ≧
1.291
5.616
13.990
∞
0.296
d20, d2m
(nm) =
When d2 <
1.319
5.535
10.236
24.868
0.387
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
25 < T ≦ 35
Case
3-16
3-17
3-18
n10
1.7228369
1.7199449
1.7101979
k10
0.0769315
0.0760859
0.0687675
d10 (nm)
222.858
220.491
221.639
n20
2.0210736
1.8037789
1.7165312
k20
0.5011654
0.2965908
0.2274377
d20 (nm)
52.892
118.134
183.246
When n1 ≧ n10, n1m =
0.0694470
0.0680798
0.0669543
When n1 < n10, n1m =
0.0241309
0.0211279
0.0442908
When k1 ≧ k10, k1m =
0.0659106
0.0606384
0.0650562
When k1 < k10, k1m =
0.0287354
0.0259912
0.0284460
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
7.193
6.146
69.475
When n2 ≧ n20, n2m =
0.1641553
0.1445947
0.2568982
When n2 < n20, n2m =
0.1866541
0.1696143
0.1583826
When k2 ≧ k20, k2m =
0.1286877
0.1503394
0.1843665
When k2 < k20, k2m =
0.1457922
0.0990405
0.0813123
When d2 ≧ d20, d2m (nm) =
6.290
17.763
∞
When d2 < d20, d2m (nm) =
5.002
7.323
26.072
0.93 ≦ NA ≦ 1.0
35 < T ≦ 45
7/35
Case
4-01
4-02
4-03
4-04
4-05
n10
1.8047095
1.8098021
1.8915289
1.8869810
1.8679863
k10
0.2694194
0.2379756
0.1677232
0.1583242
0.1633407
d10 (nm)
36.421
31.711
26.420
22.598
22.571
n20
2.9911125
2.1295160
2.1348336
1.9270572
1.8682373
k20
1.0218786
0.9059492
0.5678980
0.5352831
0.5190358
d20 (nm)
30.087
46.199
93.459
108.068
112.596
When n1 ≧
0.0783740
0.0796436
0.0844666
0.0882751
0.0886218
n10, n1m =
When n1 <
0.0596716
0.0601453
0.0678638
0.0698572
0.0685303
n10, n1m =
When k1 ≧
0.0745129
0.0734180
0.0774060
0.0809473
0.0815564
k10, k1m =
When k1 <
0.0737073
0.0756104
0.0846094
0.0871533
0.0855286
k10, k1m =
When d1 ≧
5.498
6.440
6.660
7.044
7.454
d10, d1m
(nm) =
When d1 <
4.112
4.536
4.657
4.822
5.013
d10, d1m
(nm) =
When n2 ≧
0.2827258
0.2488782
0.2107483
0.1777197
0.1733423
n20, n2m =
When n2 <
0.2979187
0.2268945
0.2048547
0.1904834
0.1888538
n20, n2m =
When k2 ≧
0.3686462
0.2854443
0.2568164
0.2416882
0.2270508
k20, k2m =
When k2 <
0.2566187
0.1919458
0.1493335
0.1371973
0.1348743
k20, k2m =
When d2 ≧
4.536
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
3.441
7.549
17.368
24.447
26.666
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
35 < T ≦ 45
Case
4-06
4-07
4-08
4-09
4-10
n10
1.8894047
1.9013640
1.7974174
1.7778270
1.7589001
k10
0.1134244
0.0821095
0.1211843
0.1038067
0.0931193
d10 (nm)
18.623
14.880
88.331
88.747
88.775
n20
1.8513003
1.8106171
2.0615819
1.9023003
1.8006679
k20
0.3877744
0.3102506
0.7049601
0.4013081
0.2880356
d20 (nm)
170.528
232.433
48.141
106.512
170.885
When n1 ≧
0.0963379
0.1102368
0.0634644
0.0662390
0.0666211
n10, n1m =
When n1 <
0.0760864
0.0881848
0.0372961
0.0368457
0.0352515
n10, n1m =
When k1 ≧
0.0891541
0.1015222
0.0717737
0.0709473
0.0673779
k10, k1m =
When k1 <
0.0954272
0.0821095
0.0478455
0.0509119
0.0546045
k10, k1m =
When d1 ≧
7.796
7.721
10.517
12.746
16.898
d10, d1m
(nm) =
When d1 <
5.302
5.383
5.078
5.794
6.421
d10, d1m
(nm) =
When n2 ≧
0.1607617
0.1549121
0.2063647
0.1805920
0.1791541
n20, n2m =
When n2 <
0.1802881
0.1767310
0.1869873
0.1622900
0.1552356
n20, n2m =
When k2 ≧
0.1971570
0.1718066
0.1998254
0.2205994
0.2284485
k20, k2m =
When k2 <
0.1177856
0.1071863
0.1537903
0.1082654
0.0890710
k20, k2m =
When d2 ≧
∞
∞
7.208
∞
∞
d20, d2m
(nm) =
When d2 <
68.041
110.260
5.967
13.288
26.909
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
35 < T ≦ 45
8/35
Case
4-11
4-12
4-13
4-14
4-15
n10
1.7310401
1.7404520
1.7353985
1.7244370
1.7094852
k10
0.0827558
0.0960720
0.0882239
0.0802890
0.0677575
d10 (nm)
89.146
155.339
154.960
155.397
155.056
n20
1.7041670
1.9461112
1.8293633
1.7457172
1.6751093
k20
0.2282102
0.5942640
0.3421815
0.2519901
0.2044537
d20 (nm)
240.157
50.887
110.529
174.646
241.084
When n1 ≧
0.0658081
0.0609131
0.0631018
0.0626184
0.0606677
n10, n1m =
When n1 <
0.0392627
0.0232361
0.0219373
0.0213806
0.0433704
n10, n1m =
When k1 ≧
0.0703406
0.0642554
0.0612463
0.0585852
0.0715100
k10, k1m =
When k1 <
0.0569983
0.0328662
0.0342212
0.0355737
0.0444800
k10, k1m =
When d1 ≧
25.085
16.735
27.723
38.964
∞
d10, d1m
(nm) =
When d1 <
9.551
5.135
5.136
5.707
18.661
d10, d1m
(nm) =
When n2 ≧
0.1952173
0.1934106
0.1684375
0.2170105
0.2364917
n20, n2m =
When n2 <
0.1461670
0.1873682
0.1611987
0.1494055
0.1341663
n20, n2m =
When k2 ≧
0.1811243
0.1365161
0.1602917
0.1917432
0.1477625
k20, k2m =
When k2 <
0.0805774
0.1412585
0.0980115
0.0826819
0.0722742
k20, k2m =
When d2 ≧
∞
6.877
15.552
∞
∞
d20, d2m
(nm) =
When d2 <
77.061
5.982
8.340
24.666
73.559
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
35 < T ≦ 45
Case
4-16
4-17
4-18
4-19
4-20
n10
1.7305468
1.7234847
1.7196555
1.7094719
1.7026367
k10
0.1083688
0.0859582
0.0809985
0.0713058
0.0605694
d10 (nm)
224.105
219.529
219.492
221.454
219.016
n20
3.7612310
1.8940064
1.7865237
1.7085534
1.6670562
k20
9.7520181
0.5381566
0.3130643
0.2375210
0.1929642
d20 (nm)
0.557
52.122
112.555
175.858
239.742
When n1 ≧
0.0498926
0.0642505
0.0656738
0.0636218
0.0649512
n10, n1m =
When n1 <
0.0031824
0.0153259
0.0138647
0.0294287
0.0615662
n10, n1m =
When k1 ≧
0.0271924
0.0553479
0.0526111
0.0605078
0.0781384
k10, k1m =
When k1 <
0.0108813
0.0230212
0.0207922
0.0257751
0.0395862
k10, k1m =
When d1 ≧
12.324
42.526
∞
∞
∞
d10, d1m
(nm) =
When d1 <
0.823
4.181
3.891
14.979
80.387
d10, d1m
(nm) =
When n2 ≧
0.4580664
0.1955493
0.1665735
0.2757410
0.2666089
n20, n2m =
When n2 <
1.0705701
0.1254541
0.1755249
0.1566431
0.1466138
n20, n2m =
When k2 ≧
0.1823242
0.0953308
0.1233594
0.1752612
0.1390967
k20, k2m =
When k2 <
1.8675439
0.1410535
0.1010315
0.0760974
0.0711597
k20, k2m =
When d2 ≧
0.019
7.428
∞
∞
∞
d20, d2m
(nm) =
When d2 <
0.155
3.724
4.890
25.232
73.082
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
45 < T ≦ 55
9/35
Case
5-01
5-02
5-03
5-04
5-05
n10
1.7952075
1.8907711
1.9054716
1.9347861
1.9562331
k10
0.2631488
0.1709411
0.1139096
0.0660701
0.1018371
d10 (nm)
28.407
22.060
18.051
14.149
10.504
n20
1.7975159
1.9054700
1.8637077
1.8512928
1.7371318
k20
0.9080589
0.5625340
0.4032117
0.3248351
0.3049135
d20 (nm)
49.215
101.512
161.182
218.499
238.789
When n1 ≧
0.0796008
0.0882104
0.0968323
0.1120276
0.1430420
n10, n1m =
When n1 <
0.0558337
0.0676855
0.0756775
0.0900916
0.1115369
n10, n1m =
When k1 ≧
0.0737183
0.0824512
0.0899622
0.1015723
0.1322839
k10, k1m =
When k1 <
0.0714771
0.0859058
0.0970459
0.0660701
0.1018371
k10, k1m =
When d1 ≧
6.136
6.696
7.231
6.738
5.941
d10, d1m
(nm) =
When d1 <
3.959
4.421
4.830
4.663
4.082
d10, d1m
(nm) =
When n2 ≧
0.2206628
0.1836475
0.1640088
0.1560229
0.1493176
n20, n2m =
When n2 <
0.2514893
0.2026611
0.1850330
0.1781982
0.1793958
n20, n2m =
When k2 ≧
0.2648120
0.2363086
0.1980701
0.1765576
0.1456726
k20, k2m =
When k2 <
0.1661694
0.1390979
0.1188672
0.1083618
0.1075342
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
11.142
25.966
67.131
101.947
116.324
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
45 < T ≦ 55
Case
5-06
5-07
5-08
5-09
5-10
n10
1.7844085
1.7702622
1.7541370
1.7279592
1.7375980
k10
0.1367381
0.1105738
0.0973387
0.0846136
0.1054836
d10 (nm)
84.299
87.211
88.132
88.943
150.710
n20
1.7096132
1.8115599
1.7670571
1.6883751
1.7055974
k20
0.6495191
0.4022198
0.2903421
0.2308596
0.5608974
d20 (nm)
54.242
106.122
167.020
233.281
53.799
When n1 ≧
0.0647021
0.0659351
0.0664050
0.0646069
0.0607947
n10, n1m =
When n1 <
0.0336169
0.0333887
0.0319458
0.0381165
0.0178674
n10, n1m =
When k1 ≧
0.0728796
0.0707520
0.0653967
0.0692603
0.0616235
k10, k1m =
When k1 <
0.0421851
0.0477087
0.0524451
0.0553516
0.0270422
k10, k1m =
When d1 ≧
9.564
12.156
16.406
23.344
13.595
d10, d1m
(nm) =
When d1 <
4.227
5.119
5.747
9.303
3.589
d10, d1m
(nm) =
When n2 ≧
0.2254211
0.1928967
0.1889099
0.2061182
0.2563867
n20, n2m =
When n2 <
0.1907227
0.1764453
0.1616943
0.1463477
0.1201587
n20, n2m =
When k2 ≧
0.1398059
0.1815479
0.2086975
0.1714539
0.0974426
k20, k2m =
When k2 <
0.1320325
0.1038733
0.0888391
0.0812170
0.1216650
k20, k2m =
When d2 ≧
14.246
∞
∞
∞
10.184
d20, d2m
(nm) =
When d2 <
7.856
11.965
30.548
77.806
4.856
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
45 < T ≦ 55
10/35
Case
5-11
5-12
5-13
5-14
5-15
n10
1.7329681
1.7221048
1.7083331
1.7220084
1.7182277
k10
0.0932680
0.0829100
0.0687145
0.0940320
0.0857940
d10 (nm)
153.145
154.966
154.712
214.741
217.589
n20
1.7707311
1.7249696
1.6656993
1.7051250
1.7452872
k20
0.3436851
0.2554267
0.2071468
0.5097600
0.3145186
d20 (nm)
107.979
168.643
233.037
53.504
108.615
When n1 ≧
0.0625659
0.0612402
0.0592444
0.0643567
0.0658276
n10, n1m =
When n1 <
0.0170984
0.0172632
0.0416833
0.0078064
0.0068054
n10, n1m =
When k1 ≧
0.0565161
0.0540405
0.0705188
0.0454688
0.0426636
k10, k1m =
When k1 <
0.0297095
0.0318542
0.0432507
0.0149841
0.0129956
k10, k1m =
When d1 ≧
26.425
34.880
∞
35.694
∞
d10, d1m
(nm) =
When d1 <
3.834
4.536
17.051
1.969
1.835
d10, d1m
(nm) =
When n2 ≧
0.2299866
0.2362512
0.2473572
0.2585364
0.2705701
n20, n2m =
When n2 <
0.1752441
0.1521826
0.1336328
0.0467419
0.0530518
n20, n2m =
When k2 ≧
0.1260229
0.1759094
0.1395569
0.0560938
0.0808508
k20, k2m =
When k2 <
0.0941040
0.0829492
0.0726111
0.1239917
0.0993604
k20, k2m =
When d2 ≧
∞
∞
∞
10.256
∞
d20, d2m
(nm) =
When d2 <
6.312
26.413
73.432
2.024
2.346
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
45 < T ≦ 55
Case
5-16
5-17
n10
1.7079026
1.7021324
k10
0.0731017
0.0613637
d10 (nm)
221.285
218.642
n20
1.6934483
1.6620357
k20
0.2412999
0.1957858
d20 (nm)
168.585
230.920
When n1 ≧ n10, n1m =
0.0611572
0.0632739
When n1 < n10, n1m =
0.0235156
0.0581824
When k1 ≧ k10, k1m =
0.0566406
0.0776050
When k1 < k10, k1m =
0.0230566
0.0386719
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
8.641
78.699
When n2 ≧ n20, n2m =
0.2946387
0.2760742
When n2 < n20, n2m =
0.1554272
0.1463647
When k2 ≧ k20, k2m =
0.1654895
0.1344739
When k2 < k20, k2m =
0.0676013
0.0719324
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
26.199
53.085
0.93 ≦ NA ≦ 1.0
55 < T ≦ 65
11/35
Case
6-01
6-02
6-03
6-04
6-05
n10
1.7605068
1.8816347
1.9020430
1.9458467
1.9584022
k10
0.2771672
0.1829378
0.1268282
0.0703715
0.1032605
d10 (nm)
28.706
20.725
16.538
13.048
10.534
n20
1.6786286
1.8151288
1.7976518
1.8275971
1.7382432
k20
0.9008770
0.5496963
0.3935708
0.3251874
0.3086817
d20 (nm)
43.735
99.755
160.685
213.311
229.129
When n1 ≧
0.0840430
0.0931677
0.1035986
0.1192371
0.1431311
n10, n1m =
When n1 <
0.0576428
0.0681458
0.0779578
0.0939172
0.1097058
n10, n1m =
When k1 ≧
0.0662097
0.0857654
0.0958630
0.1068726
0.1305750
k10, k1m =
When k1 <
0.0706262
0.0861902
0.1004041
0.0703715
0.1032605
k10, k1m =
When d1 ≧
6.461
6.864
7.218
6.428
5.908
d10, d1m
(nm) =
When d1 <
4.241
4.337
4.665
4.365
3.988
d10, d1m
(nm) =
When n2 ≧
0.2053870
0.1760388
0.1592407
0.1556714
0.1505713
n20, n2m =
When n2 <
0.2197400
0.2099182
0.1887061
0.1809558
0.1813904
n20, n2m =
When k2 ≧
0.2532373
0.2078381
0.1779785
0.1687073
0.1458105
k20, k2m =
When k2 <
0.1729968
0.1382983
0.1186841
0.1101477
0.1094250
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
9.750
24.367
71.258
104.445
116.852
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
55 < T ≦ 65
Case
6-06
6-07
6-08
6-09
6-10
n10
1.7915017
1.7682864
1.7517777
1.7257399
1.7391311
k10
0.1460711
0.1152280
0.1000283
0.0854213
0.1111219
d10 (nm)
82.108
86.246
87.803
88.823
148.271
n20
1.6599684
1.7730752
1.7495420
1.6774661
1.6415570
k20
0.6598461
0.3999868
0.2902721
0.2313191
0.5493559
d20 (nm)
47.036
100.473
159.986
224.881
47.977
When n1 ≧
0.0707507
0.0678174
0.0671436
0.0642444
0.0613611
n10, n1m =
When n1 <
0.0347034
0.0316797
0.0297241
0.0379114
0.0170081
n10, n1m =
When k1 ≧
0.0716638
0.0707349
0.0637610
0.0688733
0.0614063
k10, k1m =
When k1 <
0.0419373
0.0459045
0.0509448
0.0544250
0.0258569
k10, k1m =
When d1 ≧
8.814
11.596
15.946
22.736
12.264
d10, d1m
(nm) =
When d1 <
3.999
4.706
5.289
9.347
3.219
d10, d1m
(nm) =
When n2 ≧
0.2110352
0.2040027
0.1980566
0.2150256
0.2303101
n20, n2m =
When n2 <
0.1684949
0.1890479
0.1666223
0.1461719
0.0970691
n20, n2m =
When k2 ≧
0.1438293
0.1667627
0.2003491
0.1648621
0.0994629
k20, k2m =
When k2 <
0.1447302
0.1052173
0.0896777
0.0819421
0.1292871
k20, k2m =
When d2 ≧
15.339
∞
∞
∞
12.574
d20, d2m
(nm) =
When d2 <
6.489
10.552
32.474
78.570
4.088
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
55 < T ≦ 65
12/35
Case
6-11
6-12
6-13
6-14
6-15
n10
1.7320844
1.7076855
1.7203924
1.7223192
1.7173463
k10
0.0968192
0.0689521
0.0842770
0.0985051
0.0890019
d10 (nm)
152.055
154.586
154.911
212.081
216.420
n20
1.7411899
1.6612710
1.7118542
1.6387426
1.7205682
k20
0.3409343
0.2081961
0.2561923
0.4904233
0.3116849
d20 (nm)
101.751
223.547
160.544
48.284
102.035
When n1 ≧
0.0640808
0.0590295
0.0609424
0.0598975
0.0677930
n10, n1m =
When n1 <
0.0141614
0.0412158
0.0147046
0.0053711
0.0022900
n10, n1m =
When k1 ≧
0.0532275
0.0702893
0.0510400
0.0410706
0.0340332
k10, k1m =
When k1 <
0.0265625
0.0427490
0.0291602
0.0117297
0.0056226
k10, k1m =
When d1 ≧
25.992
∞
33.192
33.998
50.996
d10, d1m
(nm) =
When d1 <
3.082
16.525
3.853
1.301
0.604
d10, d1m
(nm) =
When n2 ≧
0.2268713
0.2531177
0.2476831
0.2556775
0.2704236
n20, n2m =
When n2 <
0.1878772
0.1338721
0.1536694
0.0287537
0.0146338
n20, n2m =
When k2 ≧
0.1099695
0.1355603
0.1692993
0.0485706
0.0433569
k20, k2m =
When k2 <
0.0948242
0.0734631
0.0770691
0.1286780
0.0774121
k20, k2m =
When d2 ≧
∞
∞
∞
12.209
∞
d20, d2m
(nm) =
When d2 <
4.972
56.744
27.273
1.327
0.772
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
55 < T ≦ 65
Case
6-16
6-17
n10
1.7068337
1.7019545
k10
0.0738736
0.0615388
d10 (nm)
221.446
218.498
n20
1.6845656
1.6606500
k20
0.2425094
0.1970435
d20 (nm)
159.621
220.941
When n1 ≧ n10, n1m =
0.0603540
0.0631677
When n1 < n10, n1m =
0.0209692
0.0568018
When k1 ≧ k10, k1m =
0.0545837
0.0777637
When k1 < k10, k1m =
0.0216589
0.0384106
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
7.750
78.234
When n2 ≧ n20, n2m =
0.3057288
0.2826660
When n2 < n20, n2m =
0.1553943
0.1472412
When k2 ≧ k20, k2m =
0.1625220
0.1326501
When k2 < k20, k2m =
0.0624280
0.0731104
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
26.805
48.201
0.93 ≦ NA ≦ 1.0
65 < T ≦ 75
13/35
Case
7-01
7-02
7-03
7-04
7-05
n10
1.7659038
1.8645399
1.8986420
1.9431410
1.8260230
k10
0.3040912
0.1945245
0.1330684
0.1068639
0.1610409
d10 (nm)
29.683
22.504
17.099
11.420
82.141
n20
1.6951746
1.8232494
1.7981378
1.7406778
1.8123655
k20
1.0159152
0.5745287
0.4053118
0.3159076
0.8416018
d20 (nm)
32.660
88.735
150.314
217.432
29.750
When n1 ≧
0.0851306
0.0913562
0.1021387
0.1343896
0.0697156
n10, n1m =
When n1 <
0.0579541
0.0649255
0.0759912
0.1029980
0.0329614
n10, n1m =
When k1 ≧
0.0588293
0.0796277
0.0923560
0.1221460
0.0674365
k10, k1m =
When k1 <
0.0718896
0.0854541
0.0996875
0.1068639
0.0435559
k10, k1m =
When d1 ≧
5.966
7.118
7.275
6.222
7.298
d10, d1m
(nm) =
When d1 <
4.222
4.395
4.641
4.200
3.443
d10, d1m
(nm) =
When n2 ≧
0.2227673
0.1853540
0.1622253
0.1538269
0.2762463
n20, n2m =
When n2 <
0.2074731
0.2178162
0.1908838
0.1813525
0.2757544
n20, n2m =
When k2 ≧
0.3106860
0.2340100
0.1838708
0.1497839
0.2030774
k20, k2m =
When k2 <
0.2037939
0.1485229
0.1235767
0.1116138
0.1923645
k20, k2m =
When d2 ≧
∞
∞
∞
∞
12.449
d20, d2m
(nm) =
When d2 <
7.750
24.931
70.207
113.565
5.408
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
65 < T ≦ 75
Case
7-06
7-07
7-08
7-09
7-10
n10
1.7771488
1.7544343
1.7270080
1.7474077
1.7344421
k10
0.1183021
0.1010010
0.0859818
0.1187907
0.0986199
d10 (nm)
86.874
88.257
88.900
148.872
153.031
n20
1.8193233
1.7618403
1.6808707
1.6925268
1.7617910
k20
0.4301648
0.3008540
0.2360835
0.6251022
0.3597954
d20 (nm)
86.325
147.888
214.142
34.244
89.143
When n1 ≧
0.0673694
0.0664294
0.0644080
0.0590649
0.0632410
n10, n1m =
When n1 <
0.0307617
0.0294727
0.0379211
0.0149548
0.0133545
n10, n1m =
When k1 ≧
0.0672144
0.0623938
0.0685620
0.0548840
0.0510083
k10, k1m =
When k1 <
0.0467444
0.0514600
0.0549805
0.0255261
0.0262878
k10, k1m =
When d1 ≧
10.761
15.121
22.543
10.466
24.985
d10, d1m
(nm) =
When d1 <
4.433
5.189
9.219
2.761
2.901
d10, d1m
(nm) =
When n2 ≧
0.2196216
0.2049475
0.2147473
0.2786914
0.2464575
n20, n2m =
When n2 <
0.1907739
0.1643323
0.1459814
0.1244519
0.1858276
n20, n2m =
When k2 ≧
0.1969482
0.2144763
0.1668457
0.1106995
0.1237866
k20, k2m =
When k2 <
0.1161511
0.0943396
0.0836194
0.1556311
0.1032104
k20, k2m =
When d2 ≧
∞
∞
∞
9.505
∞
d20, d2m
(nm) =
When d2 <
10.265
27.730
76.727
3.667
4.914
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
65 < T ≦ 75
14/35
Case
7-11
7-12
7-13
7-14
7-15
n10
1.7082851
1.7212227
1.7256274
1.7180408
1.7074443
k10
0.0693971
0.0845898
0.1038247
0.0895343
0.0742263
d10 (nm)
154.668
155.411
212.824
218.202
221.707
n20
1.6632564
1.7183974
1.6530934
1.7315716
1.6896767
k20
0.2120421
0.2642962
0.5317369
0.3280557
0.2496384
d20 (nm)
213.175
149.129
36.133
89.506
148.627
When n1 ≧
0.0593945
0.0606384
0.0541980
0.0647742
0.0609387
n10, n1m =
When n1 <
0.0413879
0.0149182
0.0029968
0.0021960
0.0208508
n10, n1m =
When k1 ≧
0.0699487
0.0507495
0.0335364
0.0342871
0.0542102
k10, k1m =
When k1 <
0.0433142
0.0298535
0.0082080
0.0055542
0.0221802
k10, k1m =
When d1 ≧
∞
32.689
15.980
48.365
∞
d10, d1m
(nm) =
When d1 <
16.649
3.913
0.723
0.594
7.641
d10, d1m
(nm) =
When n2 ≧
0.2553577
0.2564221
0.2715186
0.1988367
0.3137769
n20, n2m =
When n2 <
0.1341199
0.1522119
0.0214917
0.0208643
0.1570667
n20, n2m =
When k2 ≧
0.1361841
0.1775061
0.0327844
0.0526038
0.1632751
k20, k2m =
When k2 <
0.0749841
0.0809204
0.1462024
0.0801404
0.0667383
k20, k2m =
When d2 ≧
∞
∞
9.604
∞
∞
d20, d2m
(nm) =
When d2 <
57.367
24.447
0.813
0.826
24.310
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
65 < T ≦ 75
Case
7-16
n10
1.7023147
k10
0.0619030
d10 (nm)
218.598
n20
1.6620389
k20
0.2005572
d20 (nm)
210.752
When n1 ≧ n10, n1m =
0.0637036
When n1 < n10, n1m =
0.0577161
When k1 ≧ k10, k1m =
0.0772327
When k1 < k10, k1m =
0.0389124
When d1 ≧ d10, d1m (nm) =
∞
When d1 < d10, d1m (nm) =
78.427
When n2 ≧ n20, n2m =
0.2845728
When n2 < n20, n2m =
0.1478259
When k2 ≧ k20, k2m =
0.1321912
When k2 < k20, k2m =
0.0745581
When d2 ≧ d20, d2m (nm) =
∞
When d2 < d20, d2m (nm) =
48.632
0.93 ≦ NA ≦ 1.0
75 < T ≦ 85
15/35
Case
8-01
8-02
8-03
8-04
8-05
n10
1.7563588
1.8511230
1.8843188
1.9287462
1.8353218
k10
0.3324096
0.2092311
0.1443736
0.1105115
0.1759033
d10 (nm)
35.374
25.991
18.736
12.655
87.389
n20
1.9274523
1.9063465
1.8018968
1.7494498
2.1171648
k20
1.4642575
0.6506745
0.4300566
0.3311673
1.3140425
d20 (nm)
17.251
73.686
139.851
205.772
13.979
When n1 ≧
0.0785156
0.0867322
0.0972815
0.1243994
0.0679163
n10, n1m =
When n1 <
0.0545728
0.0619702
0.0719873
0.0956885
0.0326843
n10, n1m =
When k1 ≧
0.0474365
0.0710938
0.0861206
0.1128003
0.0573657
k10, k1m =
When k1 <
0.0515906
0.0859790
0.0958850
0.1105115
0.0462488
k10, k1m =
When d1 ≧
5.195
7.048
7.475
6.554
6.786
d10, d1m
(nm) =
When d1 <
4.054
4.401
4.771
4.433
3.439
d10, d1m
(nm) =
When n2 ≧
0.3717346
0.2089124
0.1658667
0.1550732
0.3935315
n20, n2m =
When n2 <
0.2566504
0.2226855
0.1899609
0.1803442
0.3930750
n20, n2m =
When k2 ≧
0.3327271
0.2900549
0.1962512
0.1555261
0.4058423
k20, k2m =
When k2 <
0.2814465
0.1644043
0.1285254
0.1140686
0.2980408
k20, k2m =
When d2 ≧
7.242
∞
∞
∞
4.246
d20, d2m
(nm) =
When d2 <
5.453
18.064
63.635
86.244
4.110
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
75 < T ≦ 85
Case
8-06
8-07
8-08
8-09
8-10
n10
1.7950810
1.7627960
1.7313791
1.7608801
1.7394221
k10
0.1221034
0.1022278
0.0877850
0.1266208
0.0996664
d10 (nm)
88.670
88.862
88.999
153.509
155.305
n20
1.9787137
1.8048095
1.6945552
1.9275665
1.8479873
k20
0.5126318
0.3274205
0.2478313
0.9887124
0.4176577
d20 (nm)
67.257
133.479
202.902
15.987
72.839
When n1 ≧
0.0661450
0.0654504
0.0644836
0.0595581
0.0618579
n10, n1m =
When n1 <
0.0313049
0.0305920
0.0369946
0.0131787
0.0145801
n10, n1m =
When k1 ≧
0.0629285
0.0615845
0.0676172
0.0466980
0.0504663
k10, k1m =
When k1 <
0.0495715
0.0531104
0.0563220
0.0260303
0.0287866
k10, k1m =
When d1 ≧
9.764
13.747
21.746
9.118
15.633
d10, d1m
(nm) =
When d1 <
4.261
5.184
8.521
2.425
3.180
d10, d1m
(nm) =
When n2 ≧
0.1949426
0.2017102
0.2072998
0.3193018
0.1671875
n20, n2m =
When n2 <
0.1905188
0.1606116
0.1458716
0.3499829
0.1826196
n20, n2m =
When k2 ≧
0.2324365
0.2397180
0.1749133
0.1658679
0.1587329
k20, k2m =
When k2 <
0.1375964
0.1005615
0.0861584
0.2502869
0.1212964
k20, k2m =
When d2 ≧
11.495
∞
∞
4.383
10.247
d20, d2m
(nm) =
When d2 <
10.836
22.009
72.908
4.573
5.928
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
75 < T ≦ 85
16/35
Case
8-11
8-12
8-13
8-14
8-15
n10
1.7245671
1.7098549
1.7314445
1.7204815
1.7093097
k10
0.0857616
0.0711157
0.1087664
0.0894136
0.0755678
d10 (nm)
155.774
154.844
218.242
220.453
221.580
n20
1.7414131
1.6689951
1.7862714
1.7885409
1.7021793
k20
0.2835597
0.2212317
0.7962122
0.3769446
0.2655853
d20 (nm)
136.971
203.148
18.394
74.763
137.968
When n1 ≧
0.0606116
0.0594177
0.0511572
0.0630383
0.0616895
n10, n1m =
When n1 <
0.0160718
0.0405298
0.0015906
0.0046008
0.0190027
n10, n1m =
When k1 ≧
0.0512000
0.0681555
0.0265222
0.0380334
0.0531970
k10, k1m =
When k1 <
0.0318042
0.0441748
0.0055811
0.0106726
0.0222839
k10, k1m =
When d1 ≧
31.466
∞
12.528
43.958
∞
d10, d1m
(nm) =
When d1 <
4.121
15.106
0.395
1.266
6.425
d10, d1m
(nm) =
When n2 ≧
0.2472620
0.2537585
0.2927209
0.1651587
0.3131763
n20, n2m =
When n2 <
0.1515137
0.1338916
0.0324463
0.1927209
0.1573535
n20, n2m =
When k2 ≧
0.1857507
0.1391650
0.0225110
0.0800281
0.1575110
k20, k2m =
When k2 <
0.0929626
0.0771277
0.2211072
0.1242517
0.0780078
k20, k2m =
When d2 ≧
∞
∞
5.339
11.602
∞
d20, d2m
(nm) =
When d2 <
20.462
30.027
0.679
1.920
20.783
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
75 < T ≦ 85
Case
8-16
n10
1.7029357
k10
0.0634027
d10 (nm)
218.717
n20
1.6626290
k20
0.2083407
d20 (nm)
201.624
When n1 ≧ n10, n1m =
0.0636414
When n1 < n10, n1m =
0.0583008
When k1 ≧ k10, k1m =
0.0748706
When k1 < k10, k1m =
0.0393835
When d1 ≧ d10, d1m (nm) =
∞
When d1 < d10, d1m (nm) =
77.927
When n2 ≧ n20, n2m =
0.2855005
When n2 < n20, n2m =
0.1457190
When k2 ≧ k20, k2m =
0.1308728
When k2 < k20, k2m =
0.0761951
When d2 ≧ d20, d2m (nm) =
∞
When d2 < d20, d2m (nm) =
30.691
0.93 ≦ NA ≦ 1.0
85 < T ≦ 95
17/35
Case
9-01
9-02
9-03
9-04
9-05
n10
1.7289685
1.8452520
1.8988873
1.8877112
1.9267904
k10
0.3314086
0.2255929
0.1475831
0.1535471
0.0947520
d10 (nm)
44.247
26.855
20.944
19.669
15.612
n20
5.1412592
1.9037614
1.8997324
1.8220692
1.8437835
k20
5.4454539
0.7221490
0.4893775
0.4687151
0.3693724
d20 (nm)
1.484
66.898
122.094
129.650
183.529
When n1 ≧
0.0720642
0.0846375
0.0908557
0.0941199
0.1057788
n10, n1m =
When n1 <
0.0586633
0.0599194
0.0695422
0.0700256
0.0833301
n10, n1m =
When k1 ≧
0.0476758
0.0671912
0.0784241
0.0821533
0.0936853
k10, k1m =
When k1 <
0.0453955
0.0846301
0.0932227
0.0950391
0.0947520
k10, k1m =
When d1 ≧
4.793
6.632
6.977
7.158
6.784
d10, d1m
(nm) =
When d1 <
4.550
4.181
4.538
4.591
4.595
d10, d1m
(nm) =
When n2 ≧
1.1337476
0.2089880
0.1771472
0.1681067
0.1597327
n20, n2m =
When n2 <
1.1352368
0.2210583
0.1914734
0.1898022
0.1792920
n20, n2m =
When k2 ≧
0.8630298
0.2922070
0.2387195
0.2089600
0.1845532
k20, k2m =
When k2 <
1.0641260
0.1706519
0.1365454
0.1328516
0.1184924
k20, k2m =
When d2 ≧
0.527
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
0.379
14.827
35.595
55.475
73.593
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
85 < T ≦ 95
Case
9-06
9-07
9-08
9-09
9-10
n10
1.9311024
1.9377300
1.8321358
1.8340055
1.7711711
k10
0.1132645
0.0882760
0.1783607
0.1409526
0.1059247
d10 (nm)
13.318
11.094
92.959
90.549
89.053
n20
1.7624681
1.7478213
3.8484718
2.7003837
1.8505388
k20
0.3523973
0.2927773
3.7040697
0.6754163
0.3612112
d20 (nm)
195.472
252.908
2.442
40.010
121.432
When n1 ≧
0.1192212
0.1370740
0.0646143
0.0640906
0.0642236
n10, n1m =
When n1 <
0.0917322
0.1105750
0.0342749
0.0314893
0.0302832
n10, n1m =
When k1 ≧
0.1074902
0.1261145
0.0537451
0.0578040
0.0599036
k10, k1m =
When k1 <
0.1132645
0.0882760
0.0424707
0.0518921
0.0535962
k10, k1m =
When d1 ≧
6.457
6.373
6.914
7.622
12.267
d10, d1m
(nm) =
When d1 <
4.357
4.610
3.684
3.553
4.848
d10, d1m
(nm) =
When n2 ≧
0.1546643
0.1575439
0.8768713
0.1918994
0.1964832
n20, n2m =
When n2 <
0.1796094
0.1753381
0.8006409
0.2240674
0.1600745
n20, n2m =
When k2 ≧
0.1600171
0.1481116
0.9241052
0.2582642
0.2396375
k20, k2m =
When k2 <
0.1162842
0.1079150
0.8229163
0.1769763
0.1063232
k20, k2m =
When d2 ≧
∞
∞
0.854
4.088
∞
d20, d2m
(nm) =
When d2 <
79.416
123.401
0.636
4.130
18.235
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
85 < T ≦ 95
18/35
Case
9-11
9-12
9-13
9-14
9-15
n10
1.7360863
1.7197908
1.7660895
1.7439719
1.7279356
k10
0.0911204
0.0799131
0.1278221
0.1032091
0.0888807
d10 (nm)
88.900
88.028
159.319
156.425
155.640
n20
1.7067614
1.6618119
4.3535883
1.9650733
1.7635448
k20
0.2637604
0.2120965
4.0919379
0.4980866
0.3088945
d20 (nm)
192.941
257.777
1.526
59.654
126.749
When n1 ≧
0.0638330
0.0656592
0.0584094
0.0605725
0.0597937
n10, n1m =
When n1 <
0.0350525
0.0511377
0.0141675
0.0144019
0.0151697
n10, n1m =
When k1 ≧
0.0655725
0.0796582
0.0444238
0.0479309
0.0488806
k10, k1m =
When k1 <
0.0571082
0.0562439
0.0291333
0.0298792
0.0316455
k10, k1m =
When d1 ≧
20.203
29.484
8.864
13.240
29.427
d10, d1m
(nm) =
When d1 <
7.546
13.995
2.626
3.070
3.728
d10, d1m
(nm) =
When n2 ≧
0.2021118
0.1991125
0.8787561
0.1681836
0.2119507
n20, n2m =
When n2 <
0.1462866
0.1442920
0.9231299
0.1869897
0.1520459
n20, n2m =
When k2 ≧
0.1808130
0.1431189
0.6934375
0.1601843
0.1789355
k20, k2m =
When k2 <
0.0887085
0.0763562
1.0372803
0.1399158
0.0974194
k20, k2m =
When d2 ≧
∞
∞
0.372
7.404
∞
d20, d2m
(nm) =
When d2 <
33.573
81.452
0.412
5.841
17.631
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
85 < T ≦ 95
Case
9-16
9-17
9-18
9-19
9-20
n10
1.7114085
1.7070625
1.7347333
1.7230132
1.7111302
k10
0.0740744
0.0641745
0.1100034
0.0920219
0.0786417
d10 (nm)
154.740
153.245
225.621
220.898
221.002
n20
1.6716288
1.6634512
4.2666617
1.8597675
1.7127614
k20
0.2338686
0.1921909
4.0109081
0.4430799
0.2870105
d20 (nm)
194.347
254.410
1.346
63.229
128.848
When n1 ≧
0.0584460
0.0617004
0.0476050
0.0625842
0.0612109
n10, n1m =
When n1 <
0.0344641
0.0580713
0.0023816
0.0042908
0.0142651
n10, n1m =
When k1 ≧
0.0648608
0.0822974
0.0260010
0.0346094
0.0487000
k10, k1m =
When k1 <
0.0443103
0.0454309
0.0085535
0.0110950
0.0198962
k10, k1m =
When d1 ≧
∞
∞
11.896
40.249
∞
d10, d1m
(nm) =
When d1 <
12.619
28.388
0.607
1.162
4.464
d10, d1m
(nm) =
When n2 ≧
0.2496582
0.2459351
0.6243091
0.1726245
0.1878369
n20, n2m =
When n2 <
0.1333875
0.1351294
0.9687061
0.0992944
0.1569519
n20, n2m =
When k2 ≧
0.1378833
0.1234607
0.1299146
0.0597583
0.1385217
k20, k2m =
When k2 <
0.0791492
0.0682422
1.1651697
0.1405090
0.0853906
k20, k2m =
When d2 ≧
∞
∞
0.085
8.765
∞
d20, d2m
(nm) =
When d2 <
27.415
76.157
0.398
1.778
18.221
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
85 < T ≦ 95
19/35
Case
9-21
9-22
9-23
n10
1.7035342
1.7027484
1.7001226
k10
0.0659797
0.0572097
0.0542621
d10 (nm)
218.617
216.627
277.695
n20
1.6615801
1.6695991
1.6762439
k20
0.2195726
0.1821496
0.1770375
d20 (nm)
193.289
251.116
248.521
When n1 ≧ n10, n1m =
0.0623376
0.0678125
0.0799658
When n1 < n10, n1m =
0.0535010
0.0686682
0.1014282
When k1 ≧ k10, k1m =
0.0710327
0.0861914
0.0881311
When k1 < k10, k1m =
0.0393738
0.0410693
0.0390344
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
76.543
86.880
145.024
When n2 ≧ n20, n2m =
0.2919910
0.2682678
0.2949561
When n2 < n20, n2m =
0.1427539
0.1485803
0.2037488
When k2 ≧ k20, k2m =
0.1267480
0.1253760
0.1874854
When k2 < k20, k2m =
0.0781458
0.0670801
0.0719922
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
27.736
75.187
78.004
0.93 ≦ NA ≦ 1.0
95 < T ≦ 105
Case
10-01
10-02
10-03
10-04
10-05
n10
1.8593145
1.9010800
1.9204218
1.9438629
1.8201241
k10
0.2496127
0.1636004
0.1149718
0.1088618
0.1437532
d10 (nm)
26.535
19.815
15.218
10.610
89.353
n20
1.9155767
1.8411706
1.7975616
1.7190727
2.3681639
k20
0.8329906
0.5121692
0.3794158
0.2999844
0.7410526
d20 (nm)
59.684
120.535
182.059
250.015
43.212
When n1 ≧
0.0816284
0.0922021
0.1074707
0.1413159
0.0582056
n10, n1m =
When n1 <
0.0571204
0.0681042
0.0820581
0.1125684
0.0261719
n10, n1m =
When k1 ≧
0.0635767
0.0796045
0.0956897
0.1313098
0.0522705
k10, k1m =
When k1 <
0.0810986
0.0930249
0.1101465
0.1088618
0.0503638
k10, k1m =
When d1 ≧
5.728
6.581
6.674
6.005
7.527
d10, d1m
(nm) =
When d1 <
3.587
4.159
4.431
4.306
3.047
d10, d1m
(nm) =
When n2 ≧
0.2110999
0.1699976
0.1589343
0.1579346
0.2155920
n20, n2m =
When n2 <
0.2273865
0.1928259
0.1800378
0.1714307
0.2110571
n20, n2m =
When k2 ≧
0.3068860
0.2171289
0.1741077
0.1426062
0.2751843
k20, k2m =
When k2 <
0.1756396
0.1352295
0.1186548
0.1082129
0.1794531
k20, k2m =
When d2 ≧
∞
∞
∞
∞
5.764
d20, d2m
(nm) =
When d2 <
12.732
34.057
73.872
121.675
5.150
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
95 < T ≦ 105
20/35
Case
10-06
10-07
10-08
10-09
10-10
n10
1.7719135
1.7372876
1.7204595
1.7445424
1.7286821
k10
0.1119845
0.0953951
0.0830085
0.1106490
0.0936244
d10 (nm)
88.526
88.555
87.798
155.347
154.936
n20
1.8420973
1.7021944
1.6574450
1.9643384
1.7602486
k20
0.3885265
0.2779787
0.2209480
0.5665503
0.3317476
d20 (nm)
115.256
185.353
249.744
53.939
119.649
When n1 ≧
0.0621143
0.0621887
0.0641711
0.0553430
0.0576575
n10, n1m =
When n1 <
0.0270313
0.0323645
0.0489441
0.0092163
0.0110840
n10, n1m =
When k1 ≧
0.0562158
0.0627490
0.0779517
0.0376074
0.0417603
k10, k1m =
When k1 <
0.0520581
0.0564075
0.0555945
0.0251758
0.0276855
k10, k1m =
When d1 ≧
11.132
18.518
24.475
10.852
25.311
d10, d1m
(nm) =
When d1 <
4.165
6.637
12.657
1.885
2.611
d10, d1m
(nm) =
When n2 ≧
0.1959729
0.2028772
0.1967151
0.1949902
0.2380078
n20, n2m =
When n2 <
0.1629126
0.1469397
0.1441541
0.1889697
0.1549414
n20, n2m =
When k2 ≧
0.2347974
0.1750098
0.1399744
0.1001758
0.1456445
k20, k2m =
When k2 <
0.1074329
0.0897974
0.0774023
0.1436816
0.0981848
k20, k2m =
When d2 ≧
∞
∞
∞
7.077
∞
d20, d2m
(nm) =
When d2 <
17.579
32.188
79.555
4.014
9.652
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
95 < T ≦ 105
Case
10-11
10-12
10-13
10-14
10-15
n10
1.7117780
1.7072616
1.7114074
1.7035514
1.7027912
k10
0.0773392
0.0664543
0.0830146
0.0688006
0.0591414
d10 (nm)
154.355
152.987
220.011
218.183
216.340
n20
1.6664488
1.6597858
1.7075466
1.6565327
1.6669294
k20
0.2460450
0.2000883
0.3068810
0.2307053
0.1896158
d20 (nm)
186.501
246.239
121.613
185.316
242.803
When n1 ≧
0.0563684
0.0596582
0.0593091
0.0598755
0.0652673
n10, n1m =
When n1 <
0.0298474
0.0556995
0.0074023
0.0481897
0.0654077
n10, n1m =
When k1 ≧
0.0607349
0.0799170
0.0390686
0.0670154
0.0838220
k10, k1m =
When k1 <
0.0430676
0.0448303
0.0134863
0.0384473
0.0405530
k10, k1m =
When d1 ≧
∞
∞
∞
∞
∞
d10, d1m
(nm) =
When d1 <
9.756
23.688
2.192
28.661
83.384
d10, d1m
(nm) =
When n2 ≧
0.2552490
0.2502368
0.2301306
0.3057727
0.2764221
n20, n2m =
When n2 <
0.1325989
0.1345728
0.1592334
0.1419543
0.1480603
n20, n2m =
When k2 ≧
0.1285986
0.1190894
0.0974548
0.1182935
0.1218213
k20, k2m =
When k2 <
0.0799036
0.0691528
0.0735474
0.0793201
0.0682898
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
26.413
74.134
17.074
26.587
73.152
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
105 < T ≦ 115
21/35
Case
11-01
11-02
11-03
11-04
11-05
n10
1.8881577
1.9218914
1.9458883
1.9409291
1.7882093
k10
0.2795127
0.1797398
0.1322078
0.1179060
0.1515662
d10 (nm)
22.871
17.442
13.080
10.849
85.800
n20
1.7550786
1.7746647
1.7478516
1.7108849
1.7933752
k20
0.8705815
0.5227186
0.3833699
0.3088835
0.6703287
d20 (nm)
60.032
119.813
181.809
241.776
55.966
When n1 ≧
0.0826208
0.0977563
0.1186780
0.1376917
0.0543359
n10, n1m =
When n1 <
0.0520789
0.0682861
0.0872974
0.1088391
0.0162500
n10, n1m =
When k1 ≧
0.0630823
0.0841675
0.1052368
0.1278345
0.0453015
k10, k1m =
When k1 <
0.0771240
0.0966394
0.1209399
0.1179060
0.0399414
k10, k1m =
When d1 ≧
4.844
5.864
5.837
5.925
7.044
d10, d1m
(nm) =
When d1 <
2.746
3.528
3.770
4.232
1.998
d10, d1m
(nm) =
When n2 ≧
0.1779102
0.1610864
0.1553113
0.1599890
0.1976709
n20, n2m =
When n2 <
0.2409973
0.1978687
0.1825439
0.1715320
0.2140332
n20, n2m =
When k2 ≧
0.2513745
0.1848108
0.1557214
0.1414282
0.1190186
k20, k2m =
When k2 <
0.1529724
0.1289783
0.1162878
0.1089014
0.1251477
k20, k2m =
When d2 ≧
∞
∞
∞
∞
22.520
d20, d2m
(nm) =
When d2 <
14.459
47.581
76.951
118.169
7.215
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
105 < T ≦ 115
Case
11-06
11-07
11-08
11-09
11-10
n10
1.7649059
1.7337710
1.7199633
1.7259527
1.7103936
k10
0.1193411
0.0996522
0.0855558
0.0989978
0.0800216
d10 (nm)
87.339
88.039
87.477
153.714
153.726
n20
1.7745734
1.6760618
1.6497564
1.7204930
1.6497935
k20
0.3964773
0.2847568
0.2267213
0.3415865
0.2528816
d20 (nm)
113.800
179.842
241.489
115.571
179.482
When n1 ≧
0.0601648
0.0599890
0.0628394
0.0551172
0.0538281
n10, n1m =
When n1 <
0.0211145
0.0296448
0.0487646
0.0042871
0.0282654
n10, n1m =
When k1 ≧
0.0504663
0.0599475
0.0772742
0.0278052
0.0572974
k10, k1m =
When k1 <
0.0475183
0.0544922
0.0541711
0.0166541
0.0416528
k10, k1m =
When d1 ≧
10.266
16.506
22.112
22.094
29.214
d10, d1m
(nm) =
When d1 <
3.195
5.968
12.188
0.978
9.029
d10, d1m
(nm) =
When n2 ≧
0.1995813
0.2097351
0.1798193
0.2563574
0.2736133
n20, n2m =
When n2 <
0.1736548
0.1494116
0.1464758
0.1632507
0.1337610
n20, n2m =
When k2 ≧
0.1791345
0.1568970
0.1341675
0.0805750
0.1130872
k20, k2m =
When k2 <
0.1012146
0.0889111
0.0780908
0.0849402
0.0789160
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
14.312
35.616
79.447
3.314
27.322
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
105 < T ≦ 115
22/35
Case
11-11
11-12
11-13
n10
1.7070930
1.7028018
1.7027432
k10
0.0681638
0.0710148
0.0605235
d10 (nm)
152.585
217.506
215.929
n20
1.6551703
1.6456663
1.6646615
k20
0.2055639
0.2376270
0.1950188
d20 (nm)
237.501
177.429
233.713
When n1 ≧ n10, n1m =
0.0578955
0.0572009
0.0625354
When n1 < n10, n1m =
0.0537671
0.0422668
0.0608704
When k1 ≧ k10, k1m =
0.0790588
0.0645129
0.0827734
When k1 < k10, k1m =
0.0435974
0.0363208
0.0394031
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
20.858
18.787
80.567
When n2 ≧ n20, n2m =
0.1279260
0.3212610
0.2872583
When n2 < n20, n2m =
0.1371912
0.1436340
0.1515588
When k2 ≧ k20, k2m =
0.1138037
0.1091870
0.1188855
When k2 < k20, k2m =
0.0699854
0.0793604
0.0696228
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
73.529
27.402
72.558
0.93 ≦ NA ≦ 1.0
115 < T ≦ 125
Case
12-01
12-02
12-03
12-04
12-05
n10
1.8909431
1.9524263
1.9741784
1.9011191
1.7812655
k10
0.3085424
0.1909748
0.1389140
0.1449022
0.1647646
d10 (nm)
20.418
15.444
11.832
11.795
82.868
n20
1.5964478
1.7414925
1.7353816
1.6673230
1.6154117
k20
0.8353138
0.5288169
0.3892797
0.3043383
0.6141968
d20 (nm)
60.909
116.361
176.360
237.538
58.066
When n1 ≧
0.0896326
0.1058130
0.1273743
0.1294861
0.0526233
n10, n1m =
When n1 <
0.0482068
0.0693359
0.0898755
0.1018958
0.0089111
n10, n1m =
When k1 ≧
0.0687769
0.0897180
0.1101831
0.1230750
0.0397290
k10, k1m =
When k1 <
0.0788684
0.1029199
0.1292102
0.1244238
0.0264612
k10, k1m =
When d1 ≧
4.348
5.029
5.176
6.485
6.077
d10, d1m
(nm) =
When d1 <
2.275
2.981
3.260
4.641
1.033
d10, d1m
(nm) =
When n2 ≧
0.1653235
0.1570801
0.1545581
0.1637158
0.2122083
n20, n2m =
When n2 <
0.1924231
0.2075879
0.1868823
0.1636792
0.1151331
n20, n2m =
When k2 ≧
0.1706042
0.1628406
0.1476868
0.1368591
0.0534973
k20, k2m =
When k2 <
0.1411853
0.1262378
0.1172034
0.1087061
0.1078625
k20, k2m =
When d2 ≧
∞
∞
∞
∞
22.263
d20, d2m
(nm) =
When d2 <
15.932
41.005
77.327
119.056
3.631
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
115 < T ≦ 125
23/35
Case
12-06
12-07
12-08
12-09
12-10
n10
1.7599364
1.7294022
1.7193592
1.7088052
1.7070991
k10
0.1268761
0.1028924
0.0869972
0.0815889
0.0689994
d10 (nm)
86.158
87.627
87.259
153.347
152.325
n20
1.7200975
1.6470339
1.6442041
1.6346844
1.6535493
k20
0.3928633
0.2862372
0.2301394
0.2563356
0.2091466
d20 (nm)
111.244
173.600
231.990
171.193
227.454
When n1 ≧
0.0606738
0.0583850
0.0624988
0.0517444
0.0574902
n10, n1m =
When n1 <
0.0144922
0.0280688
0.0507288
0.0284387
0.0507019
n10, n1m =
When k1 ≧
0.0425989
0.0573376
0.0776721
0.0554700
0.0798230
k10, k1m =
When k1 <
0.0406250
0.0512256
0.0527991
0.0388428
0.0424304
k10, k1m =
When d1 ≧
9.315
15.226
20.570
23.760
∞
d10, d1m
(nm) =
When d1 <
2.129
5.657
12.499
8.630
19.101
d10, d1m
(nm) =
When n2 ≧
0.2113904
0.2168030
0.1303113
0.0779236
0.1123853
n20, n2m =
When n2 <
0.1965198
0.1502832
0.1490173
0.1347925
0.1407104
n20, n2m =
When k2 ≧
0.1312354
0.1404419
0.1299280
0.1034583
0.1115356
k20, k2m =
When k2 <
0.0975891
0.0892358
0.0798267
0.0797656
0.0721289
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
8.212
56.813
80.756
28.524
74.263
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
115 < T ≦ 125
Case
12-11
12-12
n10
1.7021164
1.7030336
k10
0.0722203
0.0611451
d10 (nm)
217.158
215.722
n20
1.6379690
1.6657846
k20
0.2419462
0.1987136
d20 (nm)
168.107
223.276
When n1 ≧ n10, n1m =
0.0559460
0.0616492
When n1 < n10, n1m =
0.0369629
0.0571216
When k1 ≧ k10, k1m =
0.0643591
0.0831226
When k1 < k10, k1m =
0.0338867
0.0383716
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
15.623
78.766
When n2 ≧ n20, n2m =
0.1071765
0.1574146
When n2 < n20, n2m =
0.1467676
0.1563452
When k2 ≧ k20, k2m =
0.1072412
0.1188721
When k2 < k20, k2m =
0.0815015
0.0722400
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
28.758
73.194
0.93 ≦ NA ≦ 1.0
125 < T ≦ 135
24/35
Case
13-01
13-02
13-03
13-04
13-05
n10
1.8737564
1.9697383
1.9916260
1.9141720
1.7868889
k10
0.3367363
0.2020294
0.1477036
0.1461879
0.1795709
d10 (nm)
20.276
14.764
11.315
11.459
80.605
n20
1.5133470
1.7299638
1.7257470
1.6683491
1.5409994
k20
0.8454522
0.5429087
0.3987910
0.3122132
0.6011754
d20 (nm)
55.480
109.268
168.578
226.037
53.925
When n1 ≧
0.0919055
0.1108435
0.1324426
0.1321936
0.0477332
n10, n1m =
When n1 <
0.0465112
0.0677783
0.0890894
0.1050525
0.0054248
n10, n1m =
When k1 ≧
0.0634827
0.0913306
0.1103125
0.1242993
0.0376343
k10, k1m =
When k1 <
0.0777942
0.1046863
0.1330994
0.1263855
0.0172180
k10, k1m =
When d1 ≧
4.127
4.585
4.757
6.157
5.240
d10, d1m
(nm) =
When d1 <
2.100
2.651
2.937
4.469
0.576
d10, d1m
(nm) =
When n2 ≧
0.1485144
0.1609766
0.1572363
0.1614685
0.1647119
n20, n2m =
When n2 <
0.1669641
0.2206506
0.1915698
0.1618420
0.0427734
n20, n2m =
When k2 ≧
0.1498572
0.1556653
0.1444165
0.1361792
0.0323462
k20, k2m =
When k2 <
0.1523499
0.1322424
0.1219958
0.1118262
0.1188306
k20, k2m =
When d2 ≧
∞
∞
∞
∞
20.169
d20, d2m
(nm) =
When d2 <
11.040
31.054
70.606
112.796
1.698
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
125 < T ≦ 135
Case
13-06
13-07
13-08
13-09
13-10
n10
1.7600620
1.7276490
1.7199953
1.7084320
1.7077870
k10
0.1342170
0.1044918
0.0874837
0.0820944
0.0691595
d10 (nm)
85.615
87.663
87.278
153.448
152.438
n20
1.6974715
1.6338870
1.6452183
1.6304269
1.6574806
k20
0.3980869
0.2915200
0.2346970
0.2625567
0.2137196
d20 (nm)
104.529
164.129
221.092
160.685
216.250
When n1 ≧
0.0556421
0.0573047
0.0630432
0.0509070
0.0582422
n10, n1m =
When n1 <
0.0086938
0.0280566
0.0524658
0.0272729
0.0496997
n10, n1m =
When k1 ≧
0.0327625
0.0552051
0.0782056
0.0552515
0.0808813
k10, k1m =
When k1 <
0.0328357
0.0492957
0.0525903
0.0375085
0.0423645
k10, k1m =
When d1 ≧
8.316
14.598
20.258
22.646
∞
d10, d1m
(nm) =
When d1 <
1.229
5.725
12.785
8.439
18.783
d10, d1m
(nm) =
When n2 ≧
0.2312317
0.1156555
0.1151941
0.0670740
0.1089307
n20, n2m =
When n2 <
0.2128992
0.1481116
0.1498755
0.1344946
0.1425024
n20, n2m =
When k2 ≧
0.1020886
0.1348413
0.1299255
0.1027795
0.1131628
k20, k2m =
When k2 <
0.1027185
0.0927148
0.0827966
0.0840479
0.0754407
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
4.085
34.120
79.786
26.736
37.465
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
125 < T ≦ 135
25/35
Case
13-11
13-12
n10
1.7022055
1.7036940
k10
0.0725208
0.0612465
d10 (nm)
217.368
215.927
n20
1.6389178
1.6705104
k20
0.2487144
0.2029113
d20 (nm)
157.041
212.129
When n1 ≧ n10, n1m =
0.0559827
0.0624561
When n1 < n10, n1m =
0.0346814
0.0563831
When k1 ≧ k10, k1m =
0.0655139
0.0838672
When k1 < k10, k1m =
0.0329700
0.0384436
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
14.691
78.542
When n2 ≧ n20, n2m =
0.0987000
0.1459375
When n2 < n20, n2m =
0.1477222
0.1585510
When k2 ≧ k20, k2m =
0.1107947
0.1206909
When k2 < k20, k2m =
0.0868396
0.0754724
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
26.886
30.205
0.93 ≦ NA ≦ 1.0
135 < T ≦ 145
Case
14-01
14-02
14-03
14-04
14-05
n10
1.8402862
1.9646387
1.9624104
1.9059084
1.8166660
k10
0.3700261
0.2123233
0.1584699
0.1473615
0.1977639
d10 (nm)
23.403
16.447
12.893
12.089
79.798
n20
1.4966418
1.7618069
1.7211612
1.6694213
1.5572201
k20
1.0039549
0.5971846
0.4176484
0.3203376
0.7204992
d20 (nm)
41.463
94.995
156.173
216.011
40.224
When n1 ≧
0.0906067
0.1022083
0.1191650
0.1272498
0.0481567
n10, n1m =
When n1 <
0.0460486
0.0622925
0.0801978
0.1004968
0.0053052
n10, n1m =
When k1 ≧
0.0548682
0.0821582
0.0987952
0.1188953
0.0360181
k10, k1m =
When k1 <
0.0585999
0.0953162
0.1207214
0.1220581
0.0169287
k10, k1m =
When d1 ≧
4.196
4.611
5.209
6.343
4.539
d10, d1m
(nm) =
When d1 <
2.216
2.591
3.134
4.582
0.509
d10, d1m
(nm) =
When n2 ≧
0.1766626
0.1806128
0.1668896
0.1603455
0.2142871
n20, n2m =
When n2 <
0.1712292
0.2330798
0.1905432
0.1645447
0.0564514
n20, n2m =
When k2 ≧
0.2110498
0.1844238
0.1540930
0.1380908
0.0433691
k20, k2m =
When k2 <
0.1916614
0.1446765
0.1279346
0.1140405
0.1534607
k20, k2m =
When d2 ≧
∞
∞
∞
∞
18.289
d20, d2m
(nm) =
When d2 <
8.143
21.467
66.145
96.079
1.264
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
135 < T ≦ 145
26/35
Case
14-06
14-07
14-08
14-09
14-10
n10
1.7655719
1.7293285
1.7214396
1.7092770
1.7085071
k10
0.1384976
0.1055583
0.0882507
0.0826318
0.0697446
d10 (nm)
86.596
87.952
87.451
153.805
152.663
n20
1.7129955
1.6364176
1.6482275
1.6322979
1.6592624
k20
0.4320226
0.3040668
0.2416232
0.2733763
0.2197085
d20 (nm)
91.539
153.339
210.993
150.296
206.543
When n1 ≧
0.0570667
0.0566760
0.0630505
0.0509021
0.0584448
n10, n1m =
When n1 <
0.0070447
0.0278870
0.0524426
0.0272241
0.0508081
n10, n1m =
When k1 ≧
0.0284875
0.0544165
0.0773682
0.0546399
0.0801599
k10, k1m =
When k1 <
0.0304980
0.0499133
0.0532507
0.0383374
0.0431470
k10, k1m =
When d1 ≧
7.855
14.249
20.142
22.873
∞
d10, d1m
(nm) =
When d1 <
0.972
5.625
12.498
8.268
18.904
d10, d1m
(nm) =
When n2 ≧
0.2760107
0.1009705
0.1137622
0.0657813
0.1088953
n20, n2m =
When n2 <
0.1995349
0.1448511
0.1471863
0.1316589
0.1395239
n20, n2m =
When k2 ≧
0.1305078
0.1378174
0.1321667
0.1037769
0.1143506
k20, k2m =
When k2 <
0.1154834
0.0970654
0.0846460
0.0880420
0.0769495
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
3.137
27.699
76.164
22.775
33.816
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
135 < T ≦ 145
Case
14-11
14-12
n10
1.7027802
1.7041709
k10
0.0728517
0.0617202
d10 (nm)
217.779
216.194
n20
1.6405373
1.6719897
k20
0.2588103
0.2085423
d20 (nm)
146.936
202.593
When n1 ≧ n10, n1m =
0.0566504
0.0631152
When n1 < n10, n1m =
0.0353162
0.0583606
When k1 ≧ k10, k1m =
0.0649280
0.0832544
When k1 < k10, k1m =
0.0337988
0.0392310
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
15.495
79.231
When n2 ≧ n20, n2m =
0.0962402
0.1448450
When n2 < n20, n2m =
0.1459131
0.1542615
When k2 ≧ k20, k2m =
0.1100769
0.1205054
When k2 < k20, k2m =
0.0901184
0.0767920
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
22.790
28.928
0.93 ≦ NA ≦ 1.0
145 < T ≦ 155
27/35
Case
15-01
15-02
15-03
15-04
15-05
n10
1.8199816
1.9318464
1.9476580
1.9400781
1.9152409
k10
0.4068444
0.2280177
0.1546474
0.1580344
0.1421080
d10 (nm)
29.022
20.237
15.042
15.180
12.506
n20
1.5974175
1.8212470
1.7660961
1.7558824
1.6892699
k20
1.4701111
0.6871951
0.4559575
0.4525330
0.3391765
d20 (nm)
24.558
79.181
140.877
141.749
204.998
When n1 ≧
0.0783313
0.0902905
0.1062402
0.1057410
0.1233240
n10, n1m =
When n1 <
0.0485986
0.0576099
0.0737439
0.0730676
0.0958533
n10, n1m =
When k1 ≧
0.0424463
0.0706348
0.0877539
0.0877856
0.1136047
k10, k1m =
When k1 <
0.0340247
0.0852002
0.1066162
0.1062646
0.1201245
k10, k1m =
When d1 ≧
3.673
5.078
5.535
5.630
6.208
d10, d1m
(nm) =
When d1 <
2.651
2.819
3.357
3.413
4.390
d10, d1m
(nm) =
When n2 ≧
0.2911646
0.2069556
0.1703650
0.1705981
0.1609875
n20, n2m =
When n2 <
0.1897607
0.2328674
0.1899780
0.1895239
0.1746619
n20, n2m =
When k2 ≧
0.2661255
0.2545776
0.1755676
0.1739502
0.1429504
k20, k2m =
When k2 <
0.2599438
0.1612646
0.1333740
0.1331494
0.1167700
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
5.427
21.100
63.576
64.042
84.536
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
145 < T ≦ 155
Case
15-06
15-07
15-08
15-09
15-10
n10
1.8773964
1.7792899
1.7347668
1.7234258
1.7112569
k10
0.2151408
0.1408151
0.1082989
0.0907869
0.0850611
d10 (nm)
81.211
87.880
88.119
87.442
153.930
n20
1.7568637
1.7944868
1.6522930
1.6482492
1.6361524
k20
1.2210655
0.5090378
0.3260600
0.2516544
0.2898839
d20 (nm)
20.666
75.457
142.664
202.556
141.116
When n1 ≧
0.0535974
0.0567944
0.0566736
0.0621204
0.0507385
n10, n1m =
When n1 <
0.0100415
0.0103674
0.0259888
0.0480981
0.0259363
n10, n1m =
When k1 ≧
0.0386597
0.0332520
0.0534692
0.0749170
0.0514124
k10, k1m =
When k1 <
0.0268323
0.0369287
0.0521716
0.0541968
0.0401160
k10, k1m =
When d1 ≧
4.095
7.577
13.934
19.192
22.547
d10, d1m
(nm) =
When d1 <
0.855
1.369
4.946
11.117
7.637
d10, d1m
(nm) =
When n2 ≧
0.4215723
0.2684375
0.1205920
0.1204028
0.0675806
n20, n2m =
When n2 <
0.3791321
0.1854980
0.1442749
0.1439111
0.1298389
n20, n2m =
When k2 ≧
0.1639099
0.2106580
0.1452100
0.1328479
0.0998340
k20, k2m =
When k2 <
0.2423328
0.1335254
0.1007751
0.0850952
0.0900806
k20, k2m =
When d2 ≧
5.052
14.783
∞
∞
∞
d20, d2m
(nm) =
When d2 <
1.977
4.929
23.591
72.330
19.479
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
145 < T ≦ 155
28/35
Case
15-11
15-12
15-13
n10
1.7092054
1.7036310
1.7042855
k10
0.0717413
0.0749476
0.0635030
d10 (nm)
152.725
217.788
216.233
n20
1.6572540
1.6384900
1.6687346
k20
0.2283199
0.2727185
0.2164860
d20 (nm)
198.410
138.609
194.709
When n1 ≧ n10, n1m =
0.0574158
0.0563904
0.0624048
When n1 < n10, n1m =
0.0505359
0.0361853
0.0601721
When k1 ≧ k10, k1m =
0.0766162
0.0604248
0.0800598
When k1 < k10, k1m =
0.0439771
0.0350879
0.0400427
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
17.754
14.415
78.936
When n2 ≧ n20, n2m =
0.1103052
0.0951196
0.1487622
When n2 < n20, n2m =
0.1349475
0.1401550
0.1481909
When k2 ≧ k20, k2m =
0.1121790
0.1001306
0.1166199
When k2 < k20, k2m =
0.0769556
0.0916321
0.0768066
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
28.953
19.518
28.644
0.93 ≦ NA ≦ 1.0
155 < T ≦ 165
Case
16-01
16-02
16-03
16-04
16-05
n10
1.8175791
1.9193642
1.9516445
1.9419697
1.9282358
k10
0.4385823
0.2501320
0.1607715
0.1648951
0.1504554
d10 (nm)
37.187
21.908
15.944
16.094
12.282
n20
2.9488620
1.8321620
1.7911399
1.7764317
1.6857745
k20
3.6605721
0.7789298
0.4964603
0.4910919
0.3551730
d20 (nm)
5.671
69.456
129.934
131.139
198.143
When n1 ≧
0.0604736
0.0852295
0.1013757
0.1010083
0.1240356
n10, n1m =
When n1 <
0.0333899
0.0547046
0.0713342
0.0704993
0.0944006
n10, n1m =
When k1 ≧
0.0318896
0.0632361
0.0833032
0.0834521
0.1140308
k10, k1m =
When k1 <
0.0127527
0.0803174
0.1011133
0.1007434
0.1227710
k10, k1m =
When d1 ≧
2.684
4.937
5.403
5.524
5.825
d10, d1m
(nm) =
When d1 <
1.056
2.746
3.284
3.349
4.015
d10, d1m
(nm) =
When n2 ≧
0.8885571
0.1992395
0.1663013
0.1663708
0.1592810
n20, n2m =
When n2 <
0.4338977
0.2305408
0.1904468
0.1899951
0.1750964
n20, n2m =
When k2 ≧
0.2239417
0.2871423
0.1858569
0.1831470
0.1419360
k20, k2m =
When k2 <
0.5593811
0.1675525
0.1346912
0.1341003
0.1171777
k20, k2m =
When d2 ≧
2.121
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
1.497
16.789
53.787
54.606
81.510
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
155 < T ≦ 165
29/35
Case
16-06
16-07
16-08
16-09
16-10
n10
1.8704725
1.7960814
1.7418606
1.7257176
1.7136245
k10
0.2299368
0.1479091
0.1134159
0.0948039
0.0896483
d10 (nm)
88.746
88.347
87.888
87.264
153.565
n20
2.8158519
1.9330235
1.6717189
1.6472351
1.6392609
k20
3.0739838
0.6225271
0.3550776
0.2650084
0.3111392
d20 (nm)
4.992
60.492
132.384
194.269
132.434
When n1 ≧
0.0496790
0.0539771
0.0559290
0.0605103
0.0493213
n10, n1m =
When n1 <
0.0158618
0.0116589
0.0229565
0.0427002
0.0176343
n10, n1m =
When k1 ≧
0.0339600
0.0324597
0.0502661
0.0714246
0.0448999
k10, k1m =
When k1 <
0.0196045
0.0413477
0.0524426
0.0547058
0.0377209
k10, k1m =
When d1 ≧
4.203
6.741
12.890
17.512
20.755
d10, d1m
(nm) =
When d1 <
1.412
1.425
4.045
9.285
4.775
d10, d1m
(nm) =
When n2 ≧
0.7568213
0.2080432
0.1385022
0.1276587
0.0653149
n20, n2m =
When n2 <
0.6339124
0.1864246
0.1456726
0.1431897
0.1296729
n20, n2m =
When k2 ≧
0.5784314
0.2482080
0.1472144
0.1310840
0.0863611
k20, k2m =
When k2 <
0.6241199
0.1496924
0.1027478
0.0854395
0.0904016
k20, k2m =
When d2 ≧
1.695
9.818
∞
∞
∞
d20, d2m
(nm) =
When d2 <
1.276
6.130
21.225
35.287
17.454
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
155 < T ≦ 165
Case
16-11
16-12
16-13
16-14
n10
1.7097149
1.7044725
1.7041849
1.7061658
k10
0.0750113
0.0790614
0.0664191
0.0592006
d10 (nm)
152.537
217.265
215.910
215.675
n20
1.6527377
1.6350180
1.6625759
1.6951633
k20
0.2392317
0.2903973
0.2261823
0.1893046
d20 (nm)
190.639
130.687
187.261
240.772
When n1 ≧ n10, n1m =
0.0553772
0.0545740
0.0600366
0.0676270
When n1 < n10, n1m =
0.0477368
0.0344788
0.0568494
0.0690149
When k1 ≧ k10, k1m =
0.0715491
0.0525977
0.0752148
0.0835681
When k1 < k10, k1m =
0.0443665
0.0337817
0.0404053
0.0425281
When d1 ≧ d10, d1m
∞
∞
∞
∞
(nm) =
When d1 < d10, d1m
16.235
12.121
77.039
86.324
(nm) =
When n2 ≧ n20, n2m =
0.1116882
0.0916113
0.1582788
0.1718628
When n2 < n20, n2m =
0.1331189
0.1411133
0.1443433
0.1614490
When k2 ≧ k20, k2m =
0.1061816
0.0827698
0.1097974
0.1248706
When k2 < k20, k2m =
0.0766345
0.0918372
0.0766272
0.0699548
When d2 ≧ d20, d2m
∞
∞
∞
∞
(nm) =
When d2 < d20, d2m
27.428
17.505
27.098
73.085
(nm) =
0.93 ≦ NA ≦ 1.0
165 < T ≦ 175
30/35
Case
17-01
17-02
17-03
17-04
17-05
n10
1.9650460
1.9384951
1.9139584
1.7857662
1.7433983
k10
0.1748342
0.1550287
0.1299465
0.1574086
0.1202381
d10 (nm)
15.368
12.323
11.343
86.539
87.036
n20
1.7719438
1.6895811
1.6883766
1.7907030
1.6559011
k20
0.5219218
0.3734128
0.3007198
0.6497694
0.3733381
d20 (nm)
124.100
189.293
246.427
59.718
125.629
When n1 ≧
0.1023816
0.1220520
0.1341687
0.0495288
0.0535669
n10, n1m =
When n1 <
0.0697961
0.0912976
0.1083984
0.0051111
0.0188965
n10, n1m =
When k1 ≧
0.0830420
0.1112122
0.1288184
0.0186707
0.0452673
k10, k1m =
When k1 <
0.1016052
0.1222986
0.1299465
0.0330212
0.0491577
k10, k1m =
When d1 ≧
5.001
5.526
6.413
5.954
11.233
d10, d1m
(nm) =
When d1 <
2.956
3.739
4.697
0.624
3.144
d10, d1m
(nm) =
When n2 ≧
0.1581653
0.1572925
0.1540161
0.0858301
0.1199121
n20, n2m =
When n2 <
0.1927075
0.1754407
0.1685632
0.1889197
0.1519067
n20, n2m =
When k2 ≧
0.1753381
0.1419458
0.1368945
0.0730774
0.1241467
k20, k2m =
When k2 <
0.1306897
0.1171997
0.1067334
0.1258240
0.0983862
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
51.895
79.651
119.351
3.741
21.467
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
165 < T ≦ 175
Case
17-06
17-07
17-08
17-09
17-10
n10
1.7262549
1.7236673
1.7140199
1.7096017
1.7107217
k10
0.0993784
0.0842645
0.0949670
0.0783956
0.0680252
d10 (nm)
86.812
87.109
152.601
152.026
152.100
n20
1.6373093
1.6685549
1.6238426
1.6437329
1.6799600
k20
0.2753256
0.2274459
0.3258368
0.2483227
0.2063397
d20 (nm)
186.729
241.120
125.450
182.921
236.403
When n1 ≧
0.0583655
0.0638147
0.0459595
0.0526709
0.0601990
n10, n1m =
When n1 <
0.0389001
0.0503784
0.0111768
0.0448047
0.0600891
n10, n1m =
When k1 ≧
0.0685583
0.0805896
0.0359302
0.0672742
0.0800940
k10, k1m =
When k1 <
0.0538513
0.0560901
0.0310425
0.0434424
0.0457349
k10, k1m =
When d1 ≧
15.725
22.939
17.229
∞
∞
d10, d1m
(nm) =
When d1 <
8.012
11.976
2.824
14.351
24.120
d10, d1m
(nm) =
When n2 ≧
0.1242969
0.1275708
0.0486890
0.1084961
0.1263135
n20, n2m =
When n2 <
0.1456055
0.1521838
0.1337903
0.1356079
0.1464233
n20, n2m =
When k2 ≧
0.1234131
0.1338855
0.0591821
0.0969312
0.1151416
k20, k2m =
When k2 <
0.0846008
0.0776428
0.0858325
0.0756372
0.0703125
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
66.105
78.842
17.102
28.470
72.561
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
165 < T ≦ 175
31/35
Case
17-11
17-12
17-13
n10
1.7042582
1.7037677
1.7056779
k10
0.0836625
0.0692974
0.0609868
d10 (nm)
216.186
215.313
215.198
n20
1.6202806
1.6544674
1.6903958
k20
0.3033538
0.2346728
0.1952987
d20 (nm)
123.599
179.446
232.683
When n1 ≧ n10, n1m =
0.0501758
0.0567249
0.0651611
When n1 < n10, n1m =
0.0271130
0.0522852
0.0658081
When k1 ≧ k10, k1m =
0.0439600
0.0710352
0.0811584
When k1 < k10, k1m =
0.0300366
0.0394434
0.0413635
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
9.341
23.552
82.870
When n2 ≧ n20, n2m =
0.0785254
0.1613647
0.1758447
When n2 < n20, n2m =
0.1457166
0.1478357
0.1648547
When k2 ≧ k20, k2m =
0.0611975
0.1025415
0.1200317
When k2 < k20, k2m =
0.0887231
0.0762732
0.0707166
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
17.421
28.206
71.908
0.93 ≦ NA ≦ 1.0
175 < T ≦ 185
Case
18-01
18-02
18-03
18-04
18-05
n10
1.9750220
1.9943589
1.9365478
1.8874503
1.7406539
k10
0.3055970
0.1905841
0.1715491
0.1503402
0.1271964
d10 (nm)
17.312
13.627
12.200
12.006
86.109
n20
1.6357631
1.7309349
1.6649916
1.6561886
1.6157675
k20
0.8207912
0.5263943
0.3790440
0.2991899
0.3771605
d20 (nm)
66.973
122.033
183.216
242.151
120.682
When n1 ≧
0.0935791
0.1114148
0.1215747
0.1285913
0.0513330
n10, n1m =
When n1 <
0.0459473
0.0702148
0.0894250
0.1026367
0.0144434
n10, n1m =
When k1 ≧
0.0590857
0.0871582
0.1112146
0.1261365
0.0386914
k10, k1m =
When k1 <
0.0823853
0.1098083
0.1208740
0.1243677
0.0453528
k10, k1m =
When d1 ≧
3.436
4.283
5.306
6.728
10.132
d10, d1m
(nm) =
When d1 <
1.707
2.491
3.559
4.870
2.323
d10, d1m
(nm) =
When n2 ≧
0.1368286
0.1494128
0.1559277
0.1523608
0.0829712
n20, n2m =
When n2 <
0.2106677
0.1994727
0.1768091
0.1649011
0.1612537
n20, n2m =
When k2 ≧
0.1566431
0.1521973
0.1368372
0.1332068
0.0933081
k20, k2m =
When k2 <
0.1361353
0.1253687
0.1152344
0.1052795
0.0942554
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
18.814
47.829
81.274
118.000
24.527
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
175 < T ≦ 185
32/35
Case
18-06
18-07
18-08
18-09
18-10
n10
1.7253418
1.7237735
1.7126639
1.7091592
1.7108527
k10
0.1032843
0.0864157
0.0996282
0.0809109
0.0696108
d10 (nm)
86.339
86.885
151.701
151.551
151.827
n20
1.6224018
1.6650124
1.5953952
1.6344497
1.6784072
k20
0.2809650
0.2327133
0.3310599
0.2545275
0.2111338
d20 (nm)
178.956
231.784
118.977
174.271
226.839
When n1 ≧
0.0565039
0.0626416
0.0424548
0.0505127
0.0583557
n10, n1m =
When n1 <
0.0377893
0.0495728
0.0068591
0.0425964
0.0570093
n10, n1m =
When k1 ≧
0.0671277
0.0801477
0.0264331
0.0654321
0.0790332
k10, k1m =
When k1 <
0.0514600
0.0546265
0.0262610
0.0409290
0.0440662
k10, k1m =
When d1 ≧
14.314
20.851
14.034
22.266
∞
d10, d1m
(nm) =
When d1 <
7.519
11.390
1.678
12.457
21.354
d10, d1m
(nm) =
When n2 ≧
0.1133289
0.1230408
0.0286230
0.1046033
0.1258447
n20, n2m =
When n2 <
0.1506311
0.1572058
0.1416589
0.1413440
0.1529517
n20, n2m =
When k2 ≧
0.1148096
0.1304126
0.0346130
0.0907129
0.1118689
k20, k2m =
When k2 <
0.0848999
0.0792493
0.0817810
0.0764514
0.0721448
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
64.642
80.544
18.599
31.028
73.232
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
175 < T ≦ 185
Case
18-11
18-12
18-13
n10
1.7032995
1.7035257
1.7058486
k10
0.0874338
0.0712651
0.0623526
d10 (nm)
215.388
214.888
214.924
n20
1.6000078
1.6490638
1.6902455
k20
0.3100603
0.2413259
0.1999123
d20 (nm)
116.088
170.219
222.958
When n1 ≧ n10, n1m =
0.0459119
0.0540906
0.0637158
When n1 < n10, n1m =
0.0201135
0.0472498
0.0624988
When k1 ≧ k10, k1m =
0.0380823
0.0692078
0.0795654
When k1 < k10, k1m =
0.0261584
0.0371997
0.0400098
When d1 ≧ d10, d1m (nm) =
25.691
∞
∞
When d1 < d10, d1m (nm) =
6.401
18.086
80.109
When n2 ≧ n20, n2m =
0.0666833
0.1564661
0.1701733
When n2 < n20, n2m =
0.1555847
0.1549194
0.1734229
When k2 ≧ k20, k2m =
0.0497668
0.0999182
0.1182764
When k2 < k20, k2m =
0.0866650
0.0781360
0.0731396
When d2 ≧ d20, d2m (nm) =
13.606
∞
∞
When d2 < d20, d2m (nm) =
18.924
29.474
72.740
0.93 ≦ NA ≦ 1.0
185 < T ≦ 195
33/35
Case
19-01
19-02
19-03
19-04
19-05
n10
2.0157422
1.9298641
1.9158213
1.9035507
1.7387191
k10
0.3310994
0.1874025
0.1413868
0.0919796
0.1333266
d10 (nm)
15.233
12.335
11.496
11.593
85.772
n20
1.5732193
1.6401635
1.6782430
1.7330388
1.5838112
k20
0.8191417
0.3856200
0.3150440
0.2716233
0.3839989
d20 (nm)
66.313
174.874
226.685
274.138
113.170
When n1 ≧
0.0908862
0.1198010
0.1318933
0.1353418
0.0494861
n10, n1m =
When n1 <
0.0435144
0.0881482
0.1071143
0.1119397
0.0110315
n10, n1m =
When k1 ≧
0.0607654
0.1097412
0.1276587
0.1301843
0.0306482
k10, k1m =
When k1 <
0.0886279
0.1159265
0.1266907
0.0919796
0.0445325
k10, k1m =
When d1 ≧
2.825
5.183
6.173
7.339
9.205
d10, d1m
(nm) =
When d1 <
1.353
3.517
4.556
5.508
1.748
d10, d1m
(nm) =
When n2 ≧
0.1250940
0.1513354
0.1454334
0.1421106
0.0499280
n20, n2m =
When n2 <
0.1772742
0.1779919
0.1691821
0.1744556
0.1654175
n20, n2m =
When k2 ≧
0.1164954
0.1335864
0.1351135
0.1421582
0.0743848
k20, k2m =
When k2 <
0.1392041
0.1184119
0.1117639
0.1051697
0.0978845
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
17.571
78.501
112.763
138.595
25.987
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
185 < T ≦ 195
Case
19-06
19-07
19-08
19-09
19-10
n10
1.7256246
1.7253546
1.7287042
1.7096582
1.7121643
k10
0.1055723
0.0874820
0.0760165
0.0821714
0.0705329
d10 (nm)
86.279
86.928
87.515
151.624
152.001
n20
1.6177137
1.6696157
1.7081188
1.6358848
1.6853812
k20
0.2895611
0.2389730
0.2041866
0.2635969
0.2167566
d20 (nm)
168.375
220.361
272.150
162.984
215.233
When n1 ≧
0.0562903
0.0628687
0.0679712
0.0505103
0.0586621
n10, n1m =
When n1 <
0.0396094
0.0498669
0.0509912
0.0389160
0.0543164
n10, n1m =
When k1 ≧
0.0670349
0.0806128
0.0832776
0.0662488
0.0789514
k10, k1m =
When k1 <
0.0491772
0.0538904
0.0576746
0.0390271
0.0434973
k10, k1m =
When d1 ≧
13.425
20.169
39.294
20.568
∞
d10, d1m
(nm) =
When d1 <
7.774
11.144
12.836
11.141
20.056
d10, d1m
(nm) =
When n2 ≧
0.1053076
0.1213562
0.1287134
0.1062195
0.1257849
n20, n2m =
When n2 <
0.1536951
0.1604126
0.1670996
0.1450281
0.1574817
n20, n2m =
When k2 ≧
0.1136377
0.1320007
0.1531152
0.0931067
0.1145862
k20, k2m =
When k2 <
0.0898669
0.0840454
0.0776611
0.0825256
0.0770361
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
45.429
80.918
110.597
30.017
74.310
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
185 < T ≦ 195
34/35
Case
19-11
19-12
19-13
19-14
19-15
n10
1.7151566
1.7029318
1.7041956
1.7070069
1.7080920
k10
0.0645755
0.0900998
0.0721897
0.0633145
0.0595697
d10 (nm)
152.412
215.656
215.114
215.207
215.250
n20
1.7135234
1.5920483
1.6533659
1.6971996
1.7125257
k20
0.1842756
0.3226491
0.2502000
0.2048445
0.1741269
d20 (nm)
268.692
105.543
158.704
211.558
267.229
When n1 ≧
0.0656799
0.0437866
0.0537561
0.0639758
0.0752185
n10, n1m =
When n1 <
0.0585193
0.0130481
0.0437659
0.0602637
0.0712415
n10, n1m =
When k1 ≧
0.0803796
0.0379236
0.0696973
0.0785339
0.0793298
k10, k1m =
When k1 <
0.0475867
0.0209644
0.0354407
0.0397900
0.0383728
k10, k1m =
When d1 ≧
∞
20.412
∞
∞
∞
d10, d1m
(nm) =
When d1 <
76.169
3.912
15.725
78.897
136.900
d10, d1m
(nm) =
When n2 ≧
0.1359851
0.0436487
0.1238757
0.1440674
0.1618445
n20, n2m =
When n2 <
0.1709363
0.1590417
0.1491174
0.1814563
0.2117529
n20, n2m =
When k2 ≧
0.1377368
0.0580493
0.1037561
0.1202234
0.1371057
k20, k2m =
When k2 <
0.0711096
0.0823193
0.0849219
0.0779297
0.0717078
k20, k2m =
When d2 ≧
∞
9.984
∞
∞
∞
d20, d2m
(nm) =
When d2 <
82.771
19.617
23.813
73.684
77.607
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
195 < T ≦ 205
Case
20-01
20-02
20-03
20-04
20-05
n10
1.9115074
1.9153788
1.8712999
1.7275221
1.7279210
k10
0.1960527
0.1490337
0.0897979
0.1065695
0.0881248
d10 (nm)
13.258
11.515
14.536
86.590
87.122
n20
1.6255021
1.6682692
1.7614462
1.6227655
1.6778177
k20
0.3984556
0.3197853
0.2821612
0.3041284
0.2471127
d20 (nm)
164.068
218.507
257.799
156.467
209.069
When n1 ≧
0.1142444
0.1325989
0.1158582
0.0562817
0.0637024
n10, n1m =
When n1 <
0.0852515
0.1080505
0.0942114
0.0426550
0.0501379
n10, n1m =
When k1 ≧
0.1044482
0.1295020
0.1096521
0.0681348
0.0804810
k10, k1m =
When k1 <
0.1084790
0.1269031
0.0897979
0.0488770
0.0543994
k10, k1m =
When d1 ≧
5.346
6.134
8.659
13.270
20.006
d10, d1m
(nm) =
When d1 <
3.730
4.524
6.443
8.305
10.905
d10, d1m
(nm) =
When n2 ≧
0.1424097
0.1416443
0.1412390
0.1051294
0.1236353
n20, n2m =
When n2 <
0.1779224
0.1667200
0.1823743
0.1526196
0.1593042
n20, n2m =
When k2 ≧
0.1351575
0.1341370
0.1542419
0.1188623
0.1364233
k20, k2m =
When k2 <
0.1244714
0.1144324
0.1102271
0.0976929
0.0887854
k20, k2m =
When d2 ≧
∞
∞
∞
∞
∞
d20, d2m
(nm) =
When d2 <
70.107
105.511
128.903
31.502
77.053
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
195 < T ≦ 205
35/35
Case
20-06
20-07
20-08
20-09
20-10
n10
1.7316602
1.7109076
1.7140510
1.7169074
1.7034522
k10
0.0769958
0.0825870
0.0712311
0.0659464
0.0912009
d10 (nm)
87.563
152.078
152.368
152.739
216.873
n20
1.7153560
1.6429824
1.6947912
1.7201685
1.5969711
k20
0.2092703
0.2767726
0.2239389
0.1888883
0.3506487
d20 (nm)
261.518
151.325
204.003
258.117
92.838
When n1 ≧
0.0685693
0.0512622
0.0601404
0.0671716
0.0436548
n10, n1m =
When n1 <
0.0495715
0.0375720
0.0532251
0.0484131
0.0089709
n10, n1m =
When k1 ≧
0.0827515
0.0683850
0.0790723
0.0783716
0.0369128
k10, k1m =
When k1 <
0.0588892
0.0391077
0.0446033
0.0456335
0.0165588
k10, k1m =
When d1 ≧
35.460
20.848
∞
∞
19.781
d10, d1m
(nm) =
When d1 <
11.967
10.711
16.311
17.445
2.680
d10, d1m
(nm) =
When n2 ≧
0.1321082
0.1010400
0.1225134
0.1362366
0.0345703
n20, n2m =
When n2 <
0.1646814
0.1448950
0.1569727
0.1688831
0.1562476
n20, n2m =
When k2 ≧
0.1585754
0.0998694
0.1194824
0.1443347
0.0797021
k20, k2m =
When k2 <
0.0798230
0.0905042
0.0814771
0.0735376
0.0638440
k20, k2m =
When d2 ≧
∞
∞
∞
∞
10.032
d20, d2m
(nm) =
When d2 <
87.011
25.146
71.899
78.182
16.775
d20, d2m
(nm) =
0.93 ≦ NA ≦ 1.0
195 < T ≦ 205
Case
20-11
20-12
20-13
n10
1.7053294
1.7084550
1.7088490
k10
0.0723641
0.0642090
0.0611230
d10 (nm)
215.802
215.782
215.750
n20
1.6624125
1.7063284
1.7155496
k20
0.2625944
0.2112603
0.1784523
d20 (nm)
147.133
200.541
257.296
When n1 ≧ n10, n1m =
0.0548254
0.0651489
0.0765845
When n1 < n10, n1m =
0.0418201
0.0593726
0.0732715
When k1 ≧ k10, k1m =
0.0710583
0.0775024
0.0765796
When k1 < k10, k1m =
0.0355750
0.0411511
0.0355579
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
15.640
79.525
76.637
When n2 ≧ n20, n2m =
0.1192065
0.1417981
0.1626379
When n2 < n20, n2m =
0.1432642
0.1798657
0.2073511
When k2 ≧ k20, k2m =
0.1091699
0.1229614
0.1404065
When k2 < k20, k2m =
0.0923608
0.0791760
0.0746033
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
19.545
71.258
73.210.

8,260 more elements

An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of:

providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit:
nm) described below;
and
exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.0 <NA ≦1.1, the antireflective film including an upper layer having a complex refractive index N1, and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the equations N1=n1−k1i and N2=n2−k2i, respectively;
wherein assuming that the thickness of the upper layer is d1 (unit:
nm) and the thickness of the lower layer is d2 (unit:
nm) , when any one of the combinations of values of [n10, k10, d10, n20 , k20 , d20] described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1, n2, k2, and d2 satisfy the relational expression
{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10) }2+{(n2−n20)/(n2m−n20) }2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20) }2≦1;
a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10;
a value of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10;
a value of dim in a corresponding case is selected on the basis of a magnitude relation between d1 and d10;
a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20;
a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20;and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20;
and
in the tables below, in the line of “When n1≧n10, n1m=”, each value in the right columns is “n1m−n10”;
in the line of “When n1<n10, n1m=”, each value in the right columns is “n10−n1m”;
in the line of “When k1≧k10, k1m”, each value in the right columns is “k1m−k10”;
in the line of “When k1<k10, k1m=”, each value in the right columns is “k10−k1m”;
in the line of “When d1≧d10, d1m (nm) =”, each value (unit:
nm) in the right columns is “d1m−d10”;
in the line of “When d1<d10, d1m (nm) =”, each value (unit:
nm) in the right columns is “d10−d1m”;
in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”;
in the line of “When n2<n20, n2m=”, each value in the right columns is ”n20−n2m”;
in the line of “When k2≧k20, k2m=”, each value in the right columns is “k2m−k20”;
in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”;
in the line of “When d2≧d20, d2m (nm) =”, each value (unit:
nm) in the right columns is “d2m−d20”;
and in the line of “When d2<d20, d2m (nm) =”, each value (unit:
nm) in the right columns is “d20−d2m”.
1.0 < NA ≦ 1.1
2 ≦ T ≦ 15
1/34
Case
1-01
1-02
1-03
1-04
1-05
n10
2.1002530
1.9014716
1.8817545
1.8713707
1.8894555
k10
0.0458360
0.1897321
0.1528631
0.1131033
0.1025295
d10 (nm)
25.245
35.107
29.787
20.680
13.808
n20
3.6613926
3.6832791
2.2496615
1.8471360
1.7319643
k20
2.0917723
0.6232721
0.5909670
0.3799287
0.2879285
d20 (nm)
4.980
30.030
58.673
139.609
214.126
When n1 ≧ n10, n1m =
0.0805884
0.0768188
0.0754700
0.0824719
0.1060120
When n1 < n10, n1m =
0.0800293
0.0653833
0.0584985
0.0566113
0.0706006
When k1 ≧ k10, k1m =
0.0719092
0.0582312
0.0563574
0.0660449
0.0898218
When k1 < k10, k1m =
0.0458360
0.0865906
0.0835730
0.0866101
0.1025295
When d1 ≧ d10, d1m (nm) =
3.502
5.628
6.909
7.972
7.080
When d1 < d10, d1m (nm) =
2.843
4.121
4.441
4.574
4.198
When n2 ≧ n20, n2m =
0.2511194
0.1375208
0.1500757
0.1234998
0.1256079
When n2 < n20, n2m =
0.2478674
0.1642285
0.1673572
0.1560254
0.1556494
When k2 ≧ k20, k2m =
0.2675171
0.1813342
0.1899841
0.1681030
0.1175488
When k2 < k20, k2m =
0.2241895
0.1363525
0.1337048
0.1033130
0.0926782
When d2 ≧ d20, d2m (nm) =
0.668
1.453
8.618
∞
∞
When d2 < d20, d2m (nm) =
0.632
1.466
7.778
59.745
82.499
1.0 < NA ≦ 1.1
2 ≦ T ≦ 15
Case
1-06
1-07
1-08
1-09
1-10
n10
1.8919474
1.8730447
1.7734811
1.7581396
1.7209511
k10
0.0886250
0.0995044
0.0942049
0.0894114
0.0778149
d10 (nm)
14.825
12.107
96.210
94.485
94.005
n20
1.7713589
1.6971361
2.0242448
1.8216770
1.6746822
k20
0.2959415
0.2384266
0.4293783
0.2841737
0.2144041
d20 (nm)
207.437
276.341
66.416
135.446
211.729
When n1 ≧ n10, n1m =
0.1001855
0.1196069
0.0579333
0.0504431
0.0487988
When n1 < n10, n1m =
0.0678418
0.0862451
0.0202832
0.0122217
0.0195996
When k1 ≧ k10, k1m =
0.0828455
0.1086084
0.0429993
0.0327991
0.0449207
When k1 < k10, k1m =
0.0886250
0.0995044
0.0440173
0.0383289
0.0441089
When d1 ≧ d10, d1m (nm) =
7.253
7.622
12.574
14.854
20.756
When d1 < d10, d1m (nm) =
4.294
5.017
3.736
2.430
5.594
When n2 ≧ n20, n2m =
0.1250818
0.1274023
0.1038489
0.1178979
0.0654700
When n2 < n20, n2m =
0.1542432
0.1390320
0.1236121
0.1075012
0.0984851
When k2 ≧ k20, k2m =
0.1281506
0.1059973
0.1023560
0.1052271
0.0726978
When k2 < k20, k2m =
0.0937659
0.0853320
0.1026587
0.0735156
0.0618335
When d2 ≧ d20, d2m (nm) =
∞
∞
5.946
13.526
∞
When d2 < d20, d2m (nm) =
79.532
130.356
6.729
7.895
26.663
1.0 < NA ≦ 1.1
2 ≦ T ≦ 15
2/34
Case
1-11
1-12
1-13
1-14
1-15
n10
1.7166765
1.7166130
1.7322234
1.7049421
1.7064564
k10
0.0677623
0.0755230
0.0835200
0.0655754
0.0573750
d10 (nm)
92.667
182.689
166.765
163.194
160.636
n20
1.6766991
6.5634515
1.9262925
1.6664527
1.6879767
k20
0.1797231
3.2079655
0.3700807
0.1954874
0.1655431
d20 (nm)
270.198
1.017
69.546
208.736
264.028
When n1 ≧ n10, n1m =
0.0538269
0.0791455
0.0502930
0.0463574
0.0530786
When n1 < n10, n1m =
0.0365198
0.0150903
0.0019495
0.0298389
0.0507080
When k1 ≧ k10, k1m =
0.0633020
0.0382202
0.0176428
0.0426367
0.0606909
When k1 < k10, k1m =
0.0490027
0.0352063
0.0101367
0.0363086
0.0412036
When d1 ≧ d10, d1m (nm) =
∞
44.970
29.513
∞
∞
When d1 < d10, d1m (nm) =
11.921
5.503
0.534
14.465
82.763
When n2 ≧ n20, n2m =
0.0746594
0.3760779
0.0943127
0.0451807
0.0846008
When n2 < n20, n2m =
0.1088159
0.6761377
0.0252344
0.0894604
0.1080103
When k2 ≧ k20, k2m =
0.0728833
0.4281982
0.0109839
0.0413684
0.0543652
When k2 < k20, k2m =
0.0561267
0.6156824
0.0921399
0.0546765
0.0510388
When d2 ≧ d20, d2m (nm) =
∞
0.095
5.760
∞
∞
When d2 < d20, d2m (nm) =
76.266
0.159
0.905
22.049
32.675
1.0 < NA ≦ 1.1
2 ≦ T ≦ 15
Case
1-16
1-17
1-18
1-19
1-20
n10
1.6929499
1.6905856
1.6919500
1.6995270
1.6946661
k10
0.0758677
0.0724871
0.0673580
0.0541447
0.0598692
d10 (nm)
218.538
210.998
207.119
221.890
292.769
n20
1.7888879
1.7113381
1.6973679
1.6914313
5.7902895
k20
0.3373861
0.2424201
0.1951159
0.1602785
2.6464640
d20 (nm)
83.914
155.877
222.394
261.841
1.370
When n1 ≧ n10, n1m =
0.0154590
0.0284326
0.0459937
0.0695007
0.0688428
When n1 < n10, n1m =
0.0644519
0.0618115
0.0647253
0.0614612
0.0576074
When k1 ≧ k10, k1m =
0.0296802
0.0451062
0.0571143
0.0607031
0.0650110
When k1 < k10, k1m =
0.0222290
0.0323779
0.0391223
0.0380823
0.0345483
When d1 ≧ d10, d1m (nm) =
8.212
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
25.706
29.733
39.073
91.262
43.839
When n2 ≧ n20, n2m =
0.1222742
0.1267554
0.1643848
0.2245898
0.7013342
When n2 < n20, n2m =
0.0248633
0.0660693
0.1720679
0.1025806
0.7193848
When k2 ≧ k20, k2m =
0.0580225
0.0965234
0.1267737
0.1053369
0.5239075
When k2 < k20, k2m =
0.0934216
0.0846191
0.0756384
0.0566919
0.6531299
When d2 ≧ d20, d2m (nm) =
16.998
∞
∞
∞
0.304
When d2 < d20, d2m (nm) =
2.716
12.405
72.248
75.278
0.354
1.0 < NA ≦ 1.1
2 ≦ T ≦ 15
3/34
Case
1-21
1-22
1-23
1-24
n10
1.6927273
1.6938682
1.6959215
1.6965163
k10
0.0641185
0.0632641
0.0601626
0.0560943
d10 (nm)
275.960
269.814
266.236
263.874
n20
1.7993913
1.7248410
1.7076727
1.6984359
k20
0.3510467
0.2487428
0.2009217
0.1709410
d20 (nm)
81.101
150.052
214.823
277.894
When n1 ≧ n10, n1m =
0.0462292
0.0536658
0.0656104
0.0800903
When n1 < n10, n1m =
0.0484851
0.0418225
0.0432129
0.0552332
When k1 ≧ k10, k1m =
0.0620630
0.0619458
0.0615613
0.0629382
When k1 < k10, k1m =
0.0362708
0.0377515
0.0406262
0.0422571
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
29.467
27.448
97.485
175.134
When n2 ≧ n20, n2m =
0.1596558
0.1810303
0.3970593
0.3365332
When n2 < n20, n2m =
0.1100391
0.2908167
0.2424414
0.2178503
When k2 ≧ k20, k2m =
0.1557141
0.1886804
0.2145630
0.2194727
When k2 < k20, k2m =
0.1210901
0.1012720
0.0897449
0.0805957
When d2 ≧ d20, d2m (nm) =
25.591
∞
∞
∞
When d2 < d20, d2m (nm) =
9.432
27.332
78.495
131.894
1.0 < NA ≦ 1.1
15 < T ≦ 25
Case
2-01
2-02
2-03
2-04
2-05
n10
1.8588603
1.8671897
1.8793061
1.8953035
1.8743725
k10
0.2152026
0.2000001
0.1213485
0.0980077
0.1084578
d10 (nm)
37.726
35.681
21.414
14.908
12.201
n20
5.0977045
3.0932325
1.8727645
1.7635602
1.6884757
k20
0.6974562
0.7063642
0.4149520
0.3109442
0.2470663
d20 (nm)
19.647
34.687
129.308
200.446
269.437
When n1 ≧ n10, n1m =
0.0758728
0.0747766
0.0798340
0.0988049
0.1178149
When n1 < n10, n1m =
0.0592542
0.0589661
0.0549634
0.0658325
0.0841418
When k1 ≧ k10, k1m =
0.0598401
0.0578650
0.0632202
0.0814417
0.1076917
When k1 < k10, k1m =
0.0788342
0.0811694
0.0865027
0.0980077
0.1084578
When d1 ≧ d10, d1m (nm) =
5.593
5.891
7.449
6.933
7.359
When d1 < d10, d1m (nm) =
4.233
4.238
4.249
4.053
4.794
When n2 ≧ n20, n2m =
0.1534875
0.1581152
0.1275403
0.1254932
0.1262524
When n2 < n20, n2m =
0.1697559
0.1894849
0.1565967
0.1540796
0.1389709
When k2 ≧ k20, k2m =
0.1955396
0.2168408
0.1812842
0.1267053
0.1044556
When k2 < k20, k2m =
0.1505579
0.1602844
0.1066724
0.0950110
0.0860864
When d2 ≧ d20, d2m (nm) =
0.659
2.512
∞
∞
∞
When d2 < d20, d2m (nm) =
0.674
2.526
26.047
76.118
126.536
1.0 < NA ≦ 1.1
15 < T ≦ 25
4/34
Case
2-06
2-07
2-08
2-09
2-10
n10
1.7693190
1.8089249
1.7628339
1.7223442
1.7176215
k10
0.1013402
0.1064114
0.0939832
0.0810686
0.0701007
d10 (nm)
103.520
98.052
94.416
93.840
92.613
n20
3.2583829
3.5132584
1.8414170
1.6728089
1.6759231
k20
2.5781374
0.5501157
0.3092618
0.2260423
0.1876577
d20 (nm)
3.121
29.615
125.923
203.086
261.422
When n1 ≧ n10, n1m =
0.0673926
0.0573926
0.0482458
0.0469287
0.0525317
When n1 < n10, n1m =
0.0182031
0.0185083
0.0097595
0.0170142
0.0338733
When k1 ≧ k10, k1m =
0.0401636
0.0390552
0.0281750
0.0413513
0.0608655
When k1 < k10, k1m =
0.0427917
0.0434326
0.0360242
0.0422778
0.0485864
When d1 ≧ d10, d1m (nm) =
13.610
8.991
12.525
18.295
32.066
When d1 < d10, d1m (nm) =
3.396
2.738
1.840
4.621
10.547
When n2 ≧ n20, n2m =
0.2210974
0.0961951
0.1120178
0.0558118
0.0724255
When n2 < n20, n2m =
0.3992041
0.1262915
0.1064856
0.0968689
0.1070728
When k2 ≧ k20, k2m =
0.3438342
0.0862598
0.0939502
0.0666077
0.0700989
When k2 < k20, k2m =
0.3502100
0.1067542
0.0758923
0.0625208
0.0568274
When d2 ≧ d20, d2m (nm) =
0.375
0.986
11.083
∞
∞
When d2 < d20, d2m (nm) =
0.497
1.167
5.972
24.056
73.630
1.0 < NA ≦ 1.1
15 < T ≦ 25
Case
2-11
2-12
2-13
2-14
2-15
n10
1.7053748
1.7067869
1.7234396
1.7309823
1.6924662
k10
0.0681661
0.0592936
0.0819972
0.0887627
0.0804140
d10 (nm)
163.030
160.569
177.819
175.110
219.254
n20
1.6640911
1.6873274
5.0800961
9.5526510
1.8031504
k20
0.2056957
0.1726858
4.2173316
0.4602806
0.3794202
d20 (nm)
200.113
255.377
1.054
10.232
74.951
When n1 ≧ n10, n1m =
0.0438354
0.0515637
0.0646301
0.0589197
0.0054749
When n1 < n10, n1m =
0.0254907
0.0493457
0.0095056
0.0049573
0.0624841
When k1 ≧ k10, k1m =
0.0375134
0.0575159
0.0321326
0.0226172
0.0163196
When k1 < k10, k1m =
0.0331799
0.0410168
0.0264954
0.0199707
0.0128040
When d1 ≧ d10, d1m (nm) =
∞
∞
31.849
25.868
2.747
When d1 < d10, d1m (nm) =
12.067
30.487
3.026
1.416
23.308
When n2 ≧ n20, n2m =
0.0383606
0.0825500
0.3294275
0.0929846
0.1306152
When n2 < n20, n2m =
0.0871460
0.1052795
0.6618042
0.0695691
0.0087109
When k2 ≧ k20, k2m =
0.0339417
0.0505530
0.2910742
0.0198328
0.0299487
When k2 < k20, k2m =
0.0549512
0.0515552
0.6908167
0.0870068
0.0872510
When d2 ≧ d20, d2m (nm) =
∞
∞
0.079
0.102
14.451
When d2 < d20, d2m (nm) =
19.637
29.589
0.186
0.076
0.824
1.0 < NA ≦ 1.1
15 < T ≦ 25
5/34
Case
2-16
2-17
2-18
2-19
2-20
n10
1.6899914
1.6915311
1.6993450
1.6920076
1.6934597
k10
0.0755734
0.0696615
0.0558443
0.0677866
0.0658489
d10 (nm)
211.286
207.258
221.722
276.645
270.093
n20
1.7113670
1.6964473
1.6905618
1.8143335
1.7261499
k20
0.2592681
0.2049428
0.1670525
0.3967808
0.2668883
d20 (nm)
147.090
213.635
253.347
72.378
141.360
When n1 ≧ n10, n1m =
0.0235022
0.0424463
0.0685596
0.0429663
0.0523279
When n1 < n10, n1m =
0.0594971
0.0645703
0.0572424
0.0479932
0.0410938
When k1 ≧ k10, k1m =
0.0403162
0.0547461
0.0583691
0.0593103
0.0600049
When k1 < k10, k1m =
0.0289734
0.0380127
0.0376013
0.0355176
0.0379749
When d1 ≧ d10, d1m (nm) =
18.036
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
26.582
37.673
84.779
28.006
25.642
When n2 ≧ n20, n2m =
0.1259094
0.1555469
0.2302234
0.1717712
0.1831995
When n2 < n20, n2m =
0.0501526
0.1747144
0.0944592
0.1059167
0.2850769
When k2 ≧ k20, k2m =
0.0866736
0.1221960
0.1032471
0.1537634
0.1870032
When k2 < k20, k2m =
0.0848877
0.0779785
0.0578296
0.1330688
0.1069617
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
19.935
∞
When d2 < d20, d2m (nm) =
9.771
69.780
73.090
7.607
20.837
1.0 < NA ≦ 1.1
15 < T ≦ 25
Case
2-21
2-22
n10
1.6956703
1.6963391
k10
0.0621151
0.0576411
d10 (nm)
266.327
263.935
n20
1.7069279
1.6975975
k20
0.2113995
0.1780179
d20 (nm)
206.262
269.259
When n1 ≧ n10, n1m =
0.0646936
0.0790869
When n1 < n10, n1m =
0.0423181
0.0536755
When k1 ≧ k10, k1m =
0.0600012
0.0616785
When k1 < k10, k1m =
0.0403015
0.0417126
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
96.199
173.391
When n2 ≧ n20, n2m =
0.4184778
0.3488293
When n2 < n20, n2m =
0.2491736
0.2216455
When k2 ≧ k20, k2m =
0.2142920
0.2197681
When k2 < k20, k2m =
0.0934741
0.0831250
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
76.168
129.228
1.0 < NA ≦ 1.1
25 < T ≦ 35
6/34
Case
3-01
3-02
3-03
3-04
3-05
n10
1.8231304
1.8934062
1.9014262
1.8787814
1.8198973
k10
0.2426967
0.1289044
0.1029443
0.1135143
0.1197953
d10 (nm)
38.982
22.067
15.306
12.334
96.975
n20
4.7825941
1.9169501
1.7714781
1.6867670
4.7572984
k20
0.7852430
0.4577317
0.3309508
0.2583639
0.6218490
d20 (nm)
19.992
118.684
191.572
261.269
20.274
When n1 ≧ n10, n1m =
0.0699695
0.0767236
0.0951282
0.1154443
0.0479663
When n1 < n10, n1m =
0.0498486
0.0532642
0.0626563
0.0817676
0.0146021
When k1 ≧ k10, k1m =
0.0588489
0.0605774
0.0772998
0.1052600
0.0370215
When k1 < k10, k1m =
0.0707385
0.0857886
0.1011462
0.1135143
0.0364331
When d1 ≧ d10, d1m (nm) =
5.137
6.730
6.574
7.047
7.725
When d1 < d10, d1m (nm) =
3.775
3.826
3.782
4.562
2.005
When n2 ≧ n20, n2m =
0.1872302
0.1343799
0.1259058
0.1236719
0.1156909
When n2 < n20, n2m =
0.2029309
0.1567590
0.1523523
0.1408569
0.1282800
When k2 ≧ k20, k2m =
0.2449841
0.2003137
0.1294177
0.1036865
0.0748242
When k2 < k20, k2m =
0.1832959
0.1099609
0.0962476
0.0870068
0.1199268
When d2 ≧ d20, d2m (nm) =
0.864
∞
∞
∞
0.532
When d2 < d20, d2m (nm) =
0.839
21.916
71.881
121.487
0.552
1.0 < NA ≦ 1.1
25 < T ≦ 35
Case
3-06
3-07
3-08
3-09
3-10
n10
1.7669399
1.7235821
1.7188964
1.7058208
1.7073313
k10
0.0997580
0.0847397
0.0726255
0.0710513
0.0613671
d10 (nm)
94.208
93.618
92.505
162.764
160.462
n20
1.8558060
1.6692590
1.6760484
1.6616172
1.6880654
k20
0.3364471
0.2394056
0.1967286
0.2176394
0.1807904
d20 (nm)
117.969
195.006
252.779
191.801
246.769
When n1 ≧ n10, n1m =
0.0449036
0.0442456
0.0506409
0.0405530
0.0497949
When n1 < n10, n1m =
0.0058435
0.0142969
0.0314514
0.0176917
0.0472620
When k1 ≧ k10, k1m =
0.0200403
0.0369336
0.0583228
0.0316150
0.0541370
When k1 < k10, k1m =
0.0309863
0.0404504
0.0477759
0.0303076
0.0405200
When d1 ≧ d10, d1m (nm) =
10.713
16.167
24.298
∞
∞
When d1 < d10, d1m (nm) =
1.043
3.709
9.337
7.078
23.845
When n2 ≧ n20, n2m =
0.1063135
0.0450122
0.0699963
0.0309314
0.0781641
When n2 < n20, n2m =
0.1037158
0.0932996
0.1043005
0.0818408
0.1014221
When k2 ≧ k20, k2m =
0.0686243
0.0581018
0.0668628
0.0258777
0.0465137
When k2 < k20, k2m =
0.0768091
0.0625977
0.0574854
0.0546838
0.0521045
When d2 ≧ d20, d2m (nm) =
9.637
∞
∞
13.452
∞
When d2 < d20, d2m (nm) =
3.465
21.705
32.653
17.168
25.940
1.0 < NA ≦ 1.1
25 < T ≦ 35
7/34
Case
3-11
3-12
3-13
3-14
3-15
3-16
n10
1.6893950
1.6912149
1.6993872
1.6931110
1.6955537
1.6962507
k10
0.0792587
0.0722082
0.0576769
0.0689939
0.0643335
0.0593120
d10 (nm)
211.356
207.241
221.603
270.168
266.333
263.960
n20
1.7121469
1.6964479
1.6911809
1.7281714
1.7074500
1.6977843
k20
0.2795726
0.2163033
0.1749036
0.2885226
0.2235939
0.1860709
d20 (nm)
139.203
205.754
244.825
133.446
198.195
261.024
When n1 ≧ n10, n1m =
0.0187524
0.0389221
0.0673108
0.0502356
0.0624109
0.0782690
When n1 < n10, n1m =
0.0561719
0.0620898
0.0525073
0.0397852
0.0411060
0.0522693
When k1 ≧ k10, k1m =
0.0323267
0.0510889
0.0557678
0.0576538
0.0581616
0.0602515
When k1 < k10, k1m =
0.0242261
0.0363989
0.0368542
0.0366370
0.0397400
0.0408899
When d1 ≧ d10, d1m (nm) =
9.539
∞
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
23.792
36.062
80.743
23.618
94.755
119.700
When n2 ≧ n20, n2m =
0.1258521
0.1531580
0.2394678
0.1860962
0.4430444
0.3636609
When n2 < n20, n2m =
0.0334863
0.1783936
0.0871167
0.1489648
0.2583777
0.2256018
When k2 ≧ k20, k2m =
0.0734656
0.1167761
0.1010718
0.1855286
0.2138647
0.2198901
When k2 < k20, k2m =
0.0783704
0.0804089
0.0594067
0.1140149
0.0979895
0.0864600
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
6.823
66.025
33.786
17.363
72.201
97.445
1.0 < NA ≦ 1.1
35 < T ≦ 45
8/34
Case
4-01
4-02
4-03
4-04
4-05
n10
1.8741027
1.9162345
1.9099224
1.8839284
1.7973698
k10
0.2292405
0.1358555
0.1141224
0.1193744
0.1226911
d10 (nm)
31.502
21.455
14.789
12.268
93.176
n20
2.4589695
1.9418040
1.7536831
1.6821215
2.1323779
k20
0.9273915
0.4998799
0.3442834
0.2672652
0.6525391
d20 (nm)
39.688
110.373
186.067
253.238
46.828
When n1 ≧ n10, n1m =
0.0646472
0.0749023
0.0953894
0.1145032
0.0393335
When n1 < n10, n1m =
0.0466125
0.0512402
0.0611060
0.0810242
0.0058411
When k1 ≧ k10, k1m =
0.0535095
0.0588599
0.0769971
0.1049219
0.0222083
When k1 < k10, k1m =
0.0782300
0.0839917
0.1022253
0.1138464
0.0267273
When d1 ≧ d10, d1m (nm) =
4.763
5.873
6.052
6.690
7.237
When d1 < d10, d1m (nm) =
3.092
3.244
3.414
4.349
0.847
When n2 ≧ n20, n2m =
0.2061353
0.1383777
0.1254065
0.1201538
0.0908765
When n2 < n20, n2m =
0.1985669
0.1593604
0.1521448
0.1405737
0.1202173
When k2 ≧ k20, k2m =
0.2506677
0.2047961
0.1231897
0.1019714
0.0402307
When k2 < k20, k2m =
0.1792896
0.1103943
0.0960205
0.0872583
0.1042542
When d2 ≧ d20, d2m (nm) =
6.142
∞
∞
∞
4.028
When d2 < d20, d2m (nm) =
4.657
20.982
70.019
92.164
2.915
1.0 < NA ≦ 1.1
35 < T ≦ 45
Case
4-06
4-07
4-08
4-09
4-10
n10
1.7231751
1.7198225
1.7057007
1.7079030
1.6886446
k10
0.0881939
0.0748307
0.0735111
0.0631371
0.0826816
d10 (nm)
93.194
92.273
162.218
160.241
210.810
n20
1.6583398
1.6753837
1.6560667
1.6895692
1.7077667
k20
0.2493789
0.2040438
0.2270715
0.1875698
0.2975930
d20 (nm)
187.627
244.025
183.673
237.741
132.542
When n1 ≧ n10, n1m =
0.0413782
0.0488660
0.0374475
0.0482141
0.0106323
When n1 < n10, n1m =
0.0123999
0.0300476
0.0153528
0.0446057
0.0519153
When k1 ≧ k10, k1m =
0.0333630
0.0568799
0.0277051
0.0515784
0.0235608
When k1 < k10, k1m =
0.0393298
0.0467004
0.0300195
0.0397412
0.0190234
When d1 ≧ d10, d1m (nm) =
13.894
20.818
24.657
∞
6.948
When d1 < d10, d1m (nm) =
3.123
8.547
5.758
21.149
21.403
When n2 ≧ n20, n2m =
0.0360730
0.0689490
0.0276392
0.0753564
0.1220337
When n2 < n20, n2m =
0.0901636
0.1032593
0.0781885
0.0941541
0.0190320
When k2 ≧ k20, k2m =
0.0474146
0.0634253
0.0205627
0.0433423
0.0612073
When k2 < k20, k2m =
0.0610718
0.0577832
0.0533984
0.0526196
0.0606079
When d2 ≧ d20, d2m (nm) =
∞
∞
8.473
∞
∞
When d2 < d20, d2m (nm) =
20.321
31.703
15.881
21.519
3.543
1.0 < NA ≦ 1.1
35 < T ≦ 45
9/34
Case
4-11
4-12
4-13
4-14
n10
1.6995870
1.6927517
1.6954892
1.6961809
k10
0.0592337
0.0720967
0.0662812
0.0606151
d10 (nm)
221.497
269.568
265.955
263.663
n20
1.6927290
1.7225076
1.7055518
1.6966094
k20
0.1818275
0.3075740
0.2340649
0.1927366
d20 (nm)
235.781
126.653
190.864
253.572
When n1 ≧ n10, n1m =
0.0661182
0.0430298
0.0571948
0.0777271
When n1 < n10, n1m =
0.0480371
0.0376990
0.0396948
0.0514954
When k1 ≧ k10, k1m =
0.0532056
0.0552930
0.0563965
0.0590613
When k1 < k10, k1m =
0.0358557
0.0353455
0.0387683
0.0400696
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
78.174
21.398
89.629
112.221
When n2 ≧ n20, n2m =
0.2507446
0.1898645
0.4617859
0.3498169
When n2 < n20, n2m =
0.0793469
0.1193628
0.2673291
0.2271130
When k2 ≧ k20, k2m =
0.0998633
0.1866309
0.2129163
0.2195020
When k2 < k20, k2m =
0.0613184
0.1217163
0.1026648
0.0902368
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
33.021
15.026
69.134
84.327
1.0 < NA ≦ 1.1
45 < T ≦ 55
Case
5-01
5-02
5-03
5-04
5-05
n10
1.8808544
1.9316654
1.9082705
1.8785232
1.7211644
k10
0.2454152
0.1473610
0.1322705
0.1271526
0.0906139
d10 (nm)
24.855
18.765
14.189
12.435
92.694
n20
1.8495394
1.8569906
1.7144055
1.6714546
1.6423304
k20
0.8565648
0.5034890
0.3458924
0.2699971
0.2528050
d20 (nm)
51.788
110.667
182.182
245.412
180.257
When n1 ≧ n10, n1m =
0.0633093
0.0784436
0.0967798
0.1127563
0.0394434
When n1 < n10, n1m =
0.0379272
0.0483252
0.0593640
0.0800098
0.0123450
When k1 ≧ k10, k1m =
0.0520349
0.0606396
0.0782654
0.1046387
0.0323718
When k1 < k10, k1m =
0.0704724
0.0844775
0.1016626
0.1111450
0.0404236
When d1 ≧ d10, d1m (nm) =
4.463
5.359
5.721
6.653
12.460
When d1 < d10, d1m (nm) =
2.319
2.677
3.157
4.357
3.091
When n2 ≧ n20, n2m =
0.1530676
0.1305420
0.1246069
0.1153186
0.0322009
When n2 < n20, n2m =
0.1897241
0.1692273
0.1526025
0.1380359
0.0893225
When k2 ≧ k20, k2m =
0.1919946
0.1591870
0.1122729
0.0997217
0.0401709
When k2 < k20, k2m =
0.1170728
0.1032434
0.0948108
0.0869653
0.0592017
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
9.182
23.164
70.833
93.569
20.376
1.0 < NA ≦ 1.1
45 < T ≦ 55
10/34
Case
5-06
5-07
5-08
5-09
5-10
n10
1.7204079
1.7050622
1.7085349
1.6878153
1.6980473
k10
0.0761160
0.0748972
0.0642166
0.0847734
0.0703784
d10 (nm)
92.018
161.630
160.005
209.683
224.445
n20
1.6751968
1.6489715
1.6919631
1.6959203
1.6616204
k20
0.2080809
0.2315625
0.1914882
0.3070669
0.2238826
d20 (nm)
234.537
175.108
227.913
127.092
171.370
When n1 ≧ n10, n1m =
0.0481116
0.0356750
0.0469714
0.0053320
0.0535730
When n1 < n10, n1m =
0.0302478
0.0193359
0.0419556
0.0458972
0.0248047
When k1 ≧ k10, k1m =
0.0572302
0.0287097
0.0507117
0.0169995
0.0427319
When k1 < k10, k1m =
0.0456555
0.0334753
0.0389539
0.0159290
0.0235608
When d1 ≧ d10, d1m (nm) =
19.317
21.414
∞
2.347
∞
When d1 < d10, d1m (nm) =
8.336
7.128
19.272
19.688
12.738
When n2 ≧ n20, n2m =
0.0703723
0.0326379
0.0750854
0.1108911
0.0566052
When n2 < n20, n2m =
0.1049292
0.0778333
0.0787329
0.0108118
0.0780139
When k2 ≧ k20, k2m =
0.0616284
0.0216638
0.0424329
0.0606311
0.0720593
When k2 < k20, k2m =
0.0584753
0.0525964
0.0537231
0.0383350
0.0623987
When d2 ≧ d20, d2m (nm) =
∞
8.070
∞
32.807
∞
When d2 < d20, d2m (nm) =
32.758
15.758
17.351
1.915
21.521
1.0 < NA ≦ 1.1
45 < T ≦ 55
Case
5-11
5-12
5-13
5-14
n10
1.6999707
1.6924126
1.6955002
1.6961000
k10
0.0601951
0.0742318
0.0674212
0.0611797
d10 (nm)
221.512
268.357
265.225
263.146
n20
1.6952970
1.7068352
1.7004174
1.6940899
k20
0.1862586
0.3173492
0.2397614
0.1962440
d20 (nm)
225.852
120.697
183.997
246.462
When n1 ≧ n10, n1m =
0.0654663
0.0386316
0.0536462
0.0776611
When n1 < n10, n1m =
0.0445935
0.0350720
0.0381848
0.0515515
When k1 ≧ k10, k1m =
0.0509546
0.0537524
0.0551721
0.0583948
When k1 < k10, k1m =
0.0349414
0.0344934
0.0383105
0.0394385
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
76.496
19.128
37.283
109.648
When n2 ≧ n20, n2m =
0.1168579
0.1905981
0.3934021
0.3400916
When n2 < n20, n2m =
0.0700696
0.1027393
0.2743970
0.2283606
When k2 ≧ k20, k2m =
0.1002319
0.1933838
0.2120459
0.2188281
When k2 < k20, k2m =
0.0624707
0.1168652
0.1050110
0.0926550
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
28.597
13.909
67.541
81.764
1.0 < NA ≦ 1.1
55 < T ≦ 65
11/34
Case
6-01
6-02
6-03
6-04
6-05
n10
1.8609133
1.9462238
1.9002376
1.8750233
1.8816918
k10
0.2699154
0.1588548
0.1498745
0.1302055
0.0811209
d10 (nm)
23.275
16.938
13.880
12.592
12.084
n20
1.6780954
1.8061043
1.6764313
1.6672162
1.7277101
k20
0.8091000
0.4989592
0.3420875
0.2718902
0.2394028
d20 (nm)
51.309
107.791
176.900
235.718
282.393
When n1 ≧ n10, n1m =
0.0700366
0.0847327
0.0979871
0.1121912
0.1205115
When n1 < n10, n1m =
0.0352271
0.0459912
0.0579346
0.0799817
0.0890784
When k1 ≧ k10, k1m =
0.0520923
0.0625745
0.0794043
0.1043726
0.1106958
When k1 < k10, k1m =
0.0664282
0.0874719
0.0997217
0.1093811
0.0811209
When d1 ≧ d10, d1m (nm) =
4.496
4.952
5.583
6.704
7.616
When d1 < d10, d1m (nm) =
2.084
2.260
3.039
4.426
5.147
When n2 ≧ n20, n2m =
0.1454468
0.1290356
0.1219507
0.1104688
0.1083423
When n2 < n20, n2m =
0.1338672
0.1849402
0.1524817
0.1364417
0.1532007
When k2 ≧ k20, k2m =
0.1326758
0.1316541
0.1033948
0.0988464
0.1079004
When k2 < k20, k2m =
0.1106470
0.1010791
0.0949341
0.0882678
0.0854614
When d2 ≧ d20, d2m (nm) =
18.182
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
8.638
17.532
68.073
94.482
130.723
1.0 < NA ≦ 1.1
55 < T ≦ 65
Case
6-06
6-07
6-08
6-09
6-10
n10
1.7196449
1.7211216
1.7282121
1.7047574
1.7094298
k10
0.0916508
0.0765241
0.0683348
0.0753118
0.0647325
d10 (nm)
92.440
91.942
92.298
161.355
159.970
n20
1.6323282
1.6777604
1.7222619
1.6462273
1.6962571
k20
0.2539653
0.2105462
0.1825246
0.2341241
0.1938378
d20 (nm)
171.320
223.941
274.062
165.232
217.150
When n1 ≧ n10, n1m =
0.0390417
0.0485681
0.0546460
0.0358069
0.0474683
When n1 < n10, n1m =
0.0139282
0.0313391
0.0292078
0.0174304
0.0407373
When k1 ≧ k10, k1m =
0.0333240
0.0585132
0.0578357
0.0324670
0.0508789
When k1 < k10, k1m =
0.0406140
0.0454041
0.0481470
0.0321411
0.0389600
When d1 ≧ d10, d1m (nm) =
12.043
19.132
42.010
19.174
∞
When d1 < d10, d1m (nm) =
3.525
8.472
8.190
6.358
18.590
When n2 ≧ n20, n2m =
0.0324304
0.0734375
0.0906226
0.0327905
0.0764417
When n2 < n20, n2m =
0.0896448
0.1073743
0.1223853
0.0797839
0.0702637
When k2 ≧ k20, k2m =
0.0391357
0.0623755
0.0817871
0.0268372
0.0433899
When k2 < k20, k2m =
0.0597375
0.0603992
0.0593811
0.0545007
0.0559253
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
9.153
∞
When d2 < d20, d2m (nm) =
20.788
29.764
77.892
16.109
14.325
1.0 < NA ≦ 1.1
55 < T ≦ 65
12/34
Case
6-11
6-12
6-13
6-14
6-15
6-16
n10
1.6870964
1.6986314
1.7003667
1.6951156
1.6955653
1.6958377
k10
0.0858972
0.0705958
0.0607285
0.0571177
0.0680298
0.0528303
d10 (nm)
208.556
224.893
221.557
215.781
264.644
274.984
n20
1.6830399
1.6622291
1.6983916
1.6957463
1.6953987
1.6882898
k20
0.3090553
0.2274423
0.1887213
0.1617780
0.2417239
0.1657751
d20 (nm)
121.249
160.831
215.383
277.216
176.078
275.044
When n1 ≧ n10, n1m =
0.0051123
0.0520032
0.0662122
0.0842517
0.0515662
0.0590991
When n1 < n10, n1m =
0.0418372
0.0227649
0.0435059
0.0645801
0.0369092
0.0581189
When k1 ≧ k10, k1m =
0.0150793
0.0436267
0.0489954
0.0563855
0.0542810
0.0684131
When k1 < k10, k1m =
0.0179541
0.0228833
0.0348535
0.0371240
0.0381006
0.0375098
When d1 ≧ d10, d1m (nm) =
2.247
∞
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
18.385
11.933
75.920
58.822
33.649
113.219
When n2 ≧ n20, n2m =
0.1010083
0.0477234
0.1065527
0.2254480
0.3829150
0.2789856
When n2 < n20, n2m =
0.0100110
0.0759302
0.0611096
0.1540564
0.2775842
0.2219617
When k2 ≧ k20, k2m =
0.0726611
0.0766821
0.1015344
0.1236780
0.2119995
0.1981201
When k2 < k20, k2m =
0.0309253
0.0590527
0.0616418
0.0602039
0.1044287
0.0735400
When d2 ≧ d20, d2m (nm) =
25.845
22.079
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
1.717
20.127
24.695
81.257
67.124
97.500
1.0 < NA ≦ 1.1
65 < T ≦ 75
13/34
Case
7-01
7-02
7-03
7-04
7-05
n10
1.8339628
1.9445237
1.8939902
1.8811858
1.7203230
k10
0.2973905
0.1726202
0.1563846
0.0833966
0.0922740
d10 (nm)
24.925
17.287
14.253
12.228
92.527
n20
1.6419965
1.7953047
1.6659458
1.7269957
1.6328842
k20
0.8698975
0.5162004
0.3485215
0.2426363
0.2599948
d20 (nm)
41.723
98.907
167.112
272.914
160.703
When n1 ≧ n10, n1m =
0.0734924
0.0853552
0.0964307
0.1197986
0.0394055
When n1 < n10, n1m =
0.0377722
0.0427490
0.0559692
0.0877673
0.0144592
When k1 ≧ k10, k1m =
0.0448938
0.0589941
0.0770850
0.1096667
0.0331616
When k1 < k10, k1m =
0.0453357
0.0848169
0.0975195
0.0833966
0.0410388
When d1 ≧ d10, d1m (nm) =
4.571
4.784
5.590
7.648
12.091
When d1 < d10, d1m (nm) =
2.315
2.092
3.027
5.109
3.655
When n2 ≧ n20, n2m =
0.1366638
0.1348682
0.1167786
0.1080664
0.0326196
When n2 < n20, n2m =
0.1076978
0.1944104
0.1524536
0.1545313
0.0900854
When k2 ≧ k20, k2m =
0.1648022
0.1338904
0.1021130
0.1080652
0.0396484
When k2 < k20, k2m =
0.1324670
0.1078918
0.0977759
0.0865271
0.0625085
When d2 ≧ d20, d2m (nm) =
12.499
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
5.747
14.376
64.164
128.680
19.557
1.0 < NA ≦ 1.1
65 < T ≦ 75
Case
7-06
7-07
7-08
7-09
7-10
n10
1.7224265
1.7294779
1.7053201
1.7102741
1.7133466
k10
0.0770592
0.0692299
0.0757255
0.0654045
0.0629386
d10 (nm)
92.053
92.385
161.452
160.136
160.381
n20
1.6819841
1.7252879
1.6485370
1.7000507
1.7220503
k20
0.2150120
0.1858377
0.2399747
0.1977447
0.1698335
d20 (nm)
213.162
263.723
154.588
206.614
260.757
When n1 ≧ n10, n1m =
0.0490625
0.0548535
0.0366443
0.0483020
0.0569666
When n1 < n10, n1m =
0.0311902
0.0280200
0.0173645
0.0416309
0.0190027
When k1 ≧ k10, k1m =
0.0581604
0.0565332
0.0330920
0.0498926
0.0402344
When k1 < k10, k1m =
0.0461389
0.0475879
0.0324707
0.0390747
0.0240051
When d1 ≧ d10, d1m (nm) =
19.214
40.761
19.902
∞
∞
When d1 < d10, d1m (nm) =
8.328
7.705
6.285
18.989
5.694
When n2 ≧ n20, n2m =
0.0747375
0.0917908
0.0322156
0.0769946
0.1011584
When n2 < n20, n2m =
0.1078540
0.1217822
0.0813562
0.0689685
0.1343567
When k2 ≧ k20, k2m =
0.0634705
0.0827625
0.0283752
0.0430542
0.0435730
When k2 < k20, k2m =
0.0623401
0.0604163
0.0573535
0.0576453
0.0570081
When d2 ≧ d20, d2m (nm) =
∞
∞
9.136
38.239
∞
When d2 < d20, d2m (nm) =
27.810
75.918
15.379
13.085
10.847
1.0 < NA ≦ 1.1
65 < T ≦ 75
14/34
Case
7-11
7-12
7-13
7-14
7-15
7-16
n10
1.6861768
1.6990769
1.7003759
1.6946436
1.6954303
1.6957423
k10
0.0881028
0.0709373
0.0613969
0.0577579
0.0690806
0.0532811
d10 (nm)
208.148
225.005
221.468
215.315
264.876
274.848
n20
1.6733849
1.6647354
1.6998938
1.6946016
1.6937197
1.6878755
k20
0.3136681
0.2329033
0.1918751
0.1634050
0.2458138
0.1674492
d20 (nm)
112.385
150.349
205.497
268.128
165.269
265.685
When n1 ≧ n10, n1m =
0.0025806
0.0529590
0.0676086
0.0859229
0.0516138
0.0588110
When n1 < n10, n1m =
0.0409998
0.0231177
0.0444312
0.0666504
0.0367175
0.0575696
When k1 ≧ k10, k1m =
0.0094263
0.0435510
0.0474890
0.0560022
0.0529260
0.0681641
When k1 < k10, k1m =
0.0156848
0.0234912
0.0355322
0.0372656
0.0371912
0.0379443
When d1 ≧ d10, d1m (nm) =
1.037
∞
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
17.094
12.289
76.126
56.280
33.058
112.076
When n2 ≧ n20, n2m =
0.1039172
0.0468506
0.1077234
0.2240735
0.4022729
0.2806909
When n2 < n20, n2m =
0.0058093
0.0753308
0.0576575
0.1556287
0.2760486
0.2229114
When k2 ≧ k20, k2m =
0.0664124
0.0758972
0.1012000
0.1249744
0.2123950
0.1986609
When k2 < k20, k2m =
0.0178174
0.0630115
0.0645288
0.0620288
0.1063135
0.0745801
When d2 ≧ d20, d2m (nm) =
26.367
19.187
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
1.017
18.602
23.769
80.847
66.469
89.270
1.0 < NA ≦ 1.1
75 < T ≦ 85
15/34
Case
8-01
8-02
8-03
8-04
8-05
n10
1.9187259
1.8967518
1.8757876
1.8806788
1.7234296
k10
0.1881900
0.1527475
0.1318014
0.0899399
0.0945092
d10 (nm)
20.509
15.221
13.247
12.412
92.722
n20
1.8283337
1.6893708
1.6726776
1.7211162
1.6393014
k20
0.5739613
0.3734166
0.2883472
0.2492460
0.2743485
d20 (nm)
84.746
154.221
215.129
265.394
150.270
When n1 ≧ n10, n1m =
0.0766943
0.0922229
0.1080322
0.1177502
0.0391516
When n1 < n10, n1m =
0.0399988
0.0530884
0.0750195
0.0852625
0.0112524
When k1 ≧ k10, k1m =
0.0507166
0.0712622
0.0980225
0.1073047
0.0289392
When k1 < k10, k1m =
0.0771802
0.0964258
0.1069458
0.0899399
0.0412610
When d1 ≧ d10, d1m (nm) =
5.195
5.640
6.681
7.548
11.825
When d1 < d10, d1m (nm) =
2.249
2.987
4.301
4.972
2.719
When n2 ≧ n20, n2m =
0.1444995
0.1155615
0.1091333
0.1093396
0.0288635
When n2 < n20, n2m =
0.1897876
0.1532776
0.1435217
0.1541382
0.0890479
When k2 ≧ k20, k2m =
0.1811243
0.1099194
0.1006726
0.1075403
0.0356238
When k2 < k20, k2m =
0.1194946
0.1025110
0.0922131
0.0871228
0.0649683
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
15.313
64.664
82.555
124.472
16.892
1.0 < NA ≦ 1.1
75 < T ≦ 85
Case
8-06
8-07
8-08
8-09
8-10
n10
1.7235983
1.7294254
1.7064538
1.7103862
1.7133072
k10
0.0790587
0.0706491
0.0777504
0.0670250
0.0637197
d10 (nm)
92.129
92.482
161.668
160.278
160.467
n20
1.6815454
1.7233644
1.6498826
1.6983722
1.7219131
k20
0.2228770
0.1918670
0.2514894
0.2047961
0.1752501
d20 (nm)
204.187
255.172
145.038
197.922
251.781
When n1 ≧ n10, n1m =
0.0481958
0.0539050
0.0362122
0.0474792
0.0556775
When n1 < n10, n1m =
0.0281580
0.0270288
0.0158582
0.0428101
0.0187244
When k1 ≧ k10, k1m =
0.0546558
0.0547986
0.0255066
0.0459753
0.0391089
When k1 < k10, k1m =
0.0470496
0.0476624
0.0330371
0.0375122
0.0244470
When d1 ≧ d10, d1m (nm) =
18.433
40.484
19.881
∞
∞
When d1 < d10, d1m (nm) =
7.376
7.380
6.011
13.737
5.649
When n2 ≧ n20, n2m =
0.0719336
0.0903259
0.0311267
0.0755847
0.1032422
When n2 < n20, n2m =
0.1049182
0.1183936
0.0789893
0.0715295
0.1268079
When k2 ≧ k20, k2m =
0.0610889
0.0802148
0.0194653
0.0384314
0.0401990
When k2 < k20, k2m =
0.0626282
0.0606787
0.0584229
0.0575549
0.0569128
When d2 ≧ d20, d2m (nm) =
∞
∞
6.414
35.522
∞
When d2 < d20, d2m (nm) =
26.455
72.823
13.152
13.515
11.677
1.0 < NA ≦ 1.1
75 < T ≦ 85
16/34
Case
8-11
8-12
8-13
8-14
8-15
n10
1.6987335
1.6895310
1.6997408
1.6947661
1.6915645
k10
0.0728489
0.0798395
0.0628030
0.0583146
0.0796327
d10 (nm)
224.384
207.056
221.189
215.749
269.434
n20
1.6635130
1.6873868
1.6972371
1.6943199
1.7013553
k20
0.2423517
0.2464201
0.1976117
0.1671130
0.3520060
d20 (nm)
141.699
160.447
197.186
258.789
90.540
When n1 ≧ n10, n1m =
0.0550525
0.0211743
0.0680066
0.0840710
0.0339661
When n1 < n10, n1m =
0.0214722
0.0563281
0.0446484
0.0653711
0.0319580
When k1 ≧ k10, k1m =
0.0399634
0.0394690
0.0462439
0.0552136
0.0498462
When k1 < k10, k1m =
0.0230286
0.0247534
0.0358582
0.0373328
0.0319092
When d1 ≧ d10, d1m (nm) =
∞
18.382
∞
∞
29.764
When d1 < d10, d1m (nm) =
12.181
26.345
75.416
56.560
16.533
When n2 ≧ n20, n2m =
0.0460742
0.1451038
0.1164050
0.2251794
0.2068530
When n2 < n20, n2m =
0.0736353
0.0531665
0.0615222
0.1544678
0.0982214
When k2 ≧ k20, k2m =
0.0651685
0.0979858
0.0980493
0.1211584
0.1840808
When k2 < k20, k2m =
0.0709375
0.0696692
0.0675049
0.0632251
0.1287793
When d2 ≧ d20, d2m (nm) =
17.326
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
17.676
13.280
25.586
81.223
11.833
1.0 < NA ≦ 1.1
75 < T ≦ 85
Case
8-16
8-17
n10
1.6950499
1.6956172
k10
0.0706693
0.0541668
d10 (nm)
266.123
274.905
n20
1.6983222
1.6860233
k20
0.2573177
0.1712439
d20 (nm)
152.851
257.337
When n1 ≧ n10, n1m =
0.0524487
0.0590308
When n1 < n10, n1m =
0.0375452
0.0580872
When k1 ≧ k10, k1m =
0.0517285
0.0672278
When k1 < k10, k1m =
0.0352881
0.0380591
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
33.771
112.404
When n2 ≧ n20, n2m =
0.2704944
0.2806836
When n2 < n20, n2m =
0.2755872
0.2222266
When k2 ≧ k20, k2m =
0.2121143
0.1985229
When k2 < k20, k2m =
0.1128918
0.0743774
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
65.292
85.089
1.0 < NA ≦ 1.1
85 < T ≦ 95
17/34
Case
9-01
9-02
9-03
9-04
9-05
n10
1.8980776
1.9078109
1.8887573
1.8863613
1.7283563
k10
0.2063094
0.1489982
0.1336370
0.0963846
0.0991844
d10 (nm)
23.234
16.351
13.295
12.395
92.796
n20
1.8542997
1.7325536
1.6803356
1.7165602
1.6494143
k20
0.6486453
0.4126982
0.3065809
0.2596921
0.2975623
d20 (nm)
73.732
141.036
205.639
258.147
140.358
When n1 ≧ n10, n1m =
0.0711987
0.0870154
0.1059106
0.1162891
0.0375220
When n1 < n10, n1m =
0.0384509
0.0501709
0.0716760
0.0832544
0.0056213
When k1 ≧ k10, k1m =
0.0445569
0.0643555
0.0939661
0.1053198
0.0189441
When k1 < k10, k1m =
0.0730103
0.0941223
0.1072681
0.0963846
0.0324854
When d1 ≧ d10, d1m (nm) =
5.225
5.526
6.240
7.169
10.895
When d1 < d10, d1m (nm) =
2.347
2.839
3.908
4.670
1.261
When n2 ≧ n20, n2m =
0.1402551
0.1159338
0.1109766
0.1105359
0.0179150
When n2 < n20, n2m =
0.1828406
0.1543176
0.1513220
0.1539343
0.0865198
When k2 ≧ k20, k2m =
0.2259802
0.1235034
0.1018750
0.1065100
0.0230737
When k2 < k20, k2m =
0.1284644
0.1059631
0.0936096
0.0878577
0.0660486
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
14.635
When d2 < d20, d2m (nm) =
14.747
31.656
77.584
118.336
14.252
1.0 < NA ≦ 1.1
85 < T ≦ 95
Case
9-06
9-07
9-08
9-09
9-10
n10
1.7247011
1.7288637
1.7100270
1.7129082
1.6894084
k10
0.0825295
0.0727638
0.0697395
0.0648353
0.0825836
d10 (nm)
92.134
92.409
160.277
160.281
208.412
n20
1.6784446
1.7181265
1.6932584
1.7202855
1.6911413
k20
0.2345042
0.1997137
0.2147807
0.1822190
0.2636300
d20 (nm)
196.220
247.866
190.362
243.795
148.443
When n1 ≧ n10, n1m =
0.0458069
0.0520715
0.0445874
0.0530676
0.0168896
When n1 < n10, n1m =
0.0231628
0.0254517
0.0291443
0.0189783
0.0564331
When k1 ≧ k10, k1m =
0.0487341
0.0524194
0.0390308
0.0374463
0.0317554
When k1 < k10, k1m =
0.0471680
0.0474573
0.0341357
0.0249304
0.0174866
When d1 ≧ d10, d1m (nm) =
16.768
28.342
∞
∞
8.653
When d1 < d10, d1m (nm) =
5.875
6.859
8.481
5.666
22.933
When n2 ≧ n20, n2m =
0.0654785
0.0851550
0.0721350
0.0992358
0.1489941
When n2 < n20, n2m =
0.0999084
0.1129846
0.0702051
0.1184961
0.0323828
When k2 ≧ k20, k2m =
0.0550916
0.0742688
0.0299036
0.0348145
0.0701428
When k2 < k20, k2m =
0.0621350
0.0605774
0.0564990
0.0562878
0.0653857
When d2 ≧ d20, d2m (nm) =
∞
∞
30.126
∞
∞
When d2 < d20, d2m (nm) =
23.369
34.214
13.997
12.255
9.630
1.0 < NA ≦ 1.1
85 < T ≦ 95
18/34
Case
9-11
9-12
9-13
9-14
9-15
n10
1.6987536
1.6951804
1.6947043
1.6953534
1.6955317
k10
0.0651428
0.0592977
0.0728049
0.0654850
0.0555447
d10 (nm)
220.679
216.421
267.049
264.587
274.968
n20
1.6918669
1.6944812
1.7045529
1.6939885
1.6840742
k20
0.2062686
0.1733276
0.2758626
0.2171518
0.1777252
d20 (nm)
189.869
249.686
142.407
204.731
249.243
When n1 ≧ n10, n1m =
0.0676538
0.0804553
0.0514111
0.0772083
0.0594299
When n1 < n10, n1m =
0.0423462
0.0620581
0.0375159
0.0498364
0.0587244
When k1 ≧ k10, k1m =
0.0442505
0.0538220
0.0506982
0.0550830
0.0658191
When k1 < k10, k1m =
0.0341040
0.0375916
0.0340894
0.0384644
0.0372644
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
72.990
57.440
26.805
108.871
112.765
When n2 ≧ n20, n2m =
0.1307581
0.2319055
0.2365918
0.3979211
0.2850439
When n2 < n20, n2m =
0.0673376
0.1520984
0.2827087
0.2359326
0.2177148
When k2 ≧ k20, k2m =
0.0940100
0.1156787
0.2079443
0.2187415
0.1980774
When k2 < k20, k2m =
0.0673755
0.0629675
0.1183691
0.0982336
0.0755945
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
25.557
76.954
64.091
75.273
81.971
1.0 < NA ≦ 1.1
95 < T ≦ 105
Case
10-01
10-02
10-03
10-04
10-05
n10
1.9059589
1.9224042
1.8961620
1.8922593
1.7254583
k10
0.2274286
0.1550778
0.1385328
0.1041345
0.0865833
d10 (nm)
23.462
16.599
13.501
12.282
91.876
n20
1.8553331
1.7510181
1.6829419
1.7097147
1.6727903
k20
0.7355051
0.4490690
0.3248659
0.2697702
0.2465542
d20 (nm)
66.090
131.424
196.767
251.116
188.519
When n1 ≧ n10, n1m =
0.0671912
0.0841919
0.1023767
0.1153796
0.0426331
When n1 < n10, n1m =
0.0345654
0.0474304
0.0675305
0.0814563
0.0184045
When k1 ≧ k10, k1m =
0.0380615
0.0598425
0.0894568
0.1045068
0.0426917
When k1 < k10, k1m =
0.0683374
0.0902014
0.1054456
0.1041345
0.0441687
When d1 ≧ d10, d1m (nm) =
4.558
5.118
5.874
6.783
14.297
When d1 < d10, d1m (nm) =
1.985
2.531
3.589
4.355
4.476
When n2 ≧ n20, n2m =
0.1216980
0.1117603
0.1100940
0.1104114
0.0579919
When n2 < n20, n2m =
0.1802991
0.1554016
0.1498889
0.1534180
0.0956348
When k2 ≧ k20, k2m =
0.2165979
0.1264526
0.1015808
0.1042908
0.0462366
When k2 < k20, k2m =
0.1276270
0.1054065
0.0937561
0.0879675
0.0605090
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
11.858
29.189
73.755
91.689
21.669
1.0 < NA ≦ 1.1
95 < T ≦ 105
19/34
Case
10-06
10-07
10-08
10-09
10-10
n10
1.7286512
1.7096319
1.7125109
1.6891198
1.6979687
k10
0.0752622
0.0728333
0.0665034
0.0853163
0.0677690
d10 (nm)
92.185
159.923
159.852
208.173
220.140
n20
1.7137581
1.6877059
1.7181911
1.6918411
1.6871092
k20
0.2076205
0.2252670
0.1890952
0.2826173
0.2165239
d20 (nm)
240.302
182.766
235.934
141.112
182.186
When n1 ≧ n10, n1m =
0.0500330
0.0406897
0.0503772
0.0132690
0.0644641
When n1 < n10, n1m =
0.0231873
0.0169287
0.0155139
0.0507471
0.0375525
When k1 ≧ k10, k1m =
0.0495398
0.0307520
0.0335327
0.0250305
0.0414893
When k1 < k10, k1m =
0.0465039
0.0291895
0.0230286
0.0142859
0.0317957
When d1 ≧ d10, d1m (nm) =
22.149
∞
∞
5.803
∞
When d1 < d10, d1m (nm) =
6.093
5.010
4.544
20.171
66.095
When n2 ≧ n20, n2m =
0.0807422
0.0673730
0.0968713
0.1414526
0.1231934
When n2 < n20, n2m =
0.1109875
0.0569836
0.1140344
0.0176575
0.0690576
When k2 ≧ k20, k2m =
0.0671313
0.0201965
0.0272949
0.0516113
0.0909106
When k2 < k20, k2m =
0.0601733
0.0546924
0.0555640
0.0644128
0.0681702
When d2 ≧ d20, d2m (nm) =
∞
22.678
∞
∞
∞
When d2 < d20, d2m (nm) =
33.234
12.401
9.751
3.545
24.752
1.0 < NA ≦ 1.1
95 < T ≦ 105
Case
10-11
10-12
10-13
n10
1.6953920
1.6945041
1.6957904
k10
0.0607310
0.0754015
0.0613078
d10 (nm)
216.694
266.879
263.111
n20
1.6943518
1.7053190
1.6921380
k20
0.1805507
0.2962459
0.1886276
d20 (nm)
240.824
134.581
257.166
When n1 ≧ n10, n1m =
0.0773376
0.0489661
0.0744116
When n1 < n10, n1m =
0.0532397
0.0362244
0.0544775
When k1 ≧ k10, k1m =
0.0520667
0.0490686
0.0595886
When k1 < k10, k1m =
0.0373279
0.0329797
0.0399255
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
56.748
22.698
144.280
When n2 ≧ n20, n2m =
0.2401196
0.2258960
0.3617542
When n2 < n20, n2m =
0.1505750
0.2863916
0.2146826
When k2 ≧ k20, k2m =
0.1118237
0.2042285
0.2258594
When k2 < k20, k2m =
0.0641272
0.1247363
0.0874829
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
74.466
22.579
121.018
1.0 < NA ≦ 1.1
105 < T ≦ 115
20/34
Case
11-01
11-02
11-03
11-04
11-05
n10
1.9374125
1.9018997
1.8965439
1.7253637
1.7289764
k10
0.1704110
0.1487976
0.1142225
0.0900184
0.0775142
d10 (nm)
15.669
13.285
11.973
91.432
91.877
n20
1.7248980
1.6713435
1.6970963
1.6651786
1.7120256
k20
0.4663738
0.3352808
0.2748315
0.2549499
0.2134557
d20 (nm)
126.299
189.496
244.759
180.505
231.728
When n1 ≧ n10, n1m =
0.0844495
0.1011877
0.1161206
0.0397363
0.0483887
When n1 < n10, n1m =
0.0440234
0.0656897
0.0810999
0.0155029
0.0208545
When k1 ≧ k10, k1m =
0.0577478
0.0888123
0.1065247
0.0388269
0.0469031
When k1 < k10, k1m =
0.0914417
0.1045447
0.1142225
0.0417639
0.0449243
When d1 ≧ d10, d1m (nm) =
4.564
5.473
6.423
12.314
18.889
When d1 < d10, d1m (nm) =
2.111
3.313
4.088
3.639
5.309
When n2 ≧ n20, n2m =
0.1026855
0.1066711
0.1092859
0.0538538
0.0798657
When n2 < n20, n2m =
0.1573315
0.1496814
0.1507874
0.0957056
0.1124231
When k2 ≧ k20, k2m =
0.1109265
0.0973877
0.1006897
0.0382251
0.0609106
When k2 < k20, k2m =
0.0995313
0.0917126
0.0869214
0.0582397
0.0599487
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
32.204
71.551
94.669
21.979
35.901
1.0 < NA ≦ 1.1
105 < T ≦ 115
Case
11-06
11-07
11-08
11-09
11-10
n10
1.7092919
1.7124011
1.6891266
1.6977739
1.6952347
k10
0.0753499
0.0683625
0.0867081
0.0698574
0.0623107
d10 (nm)
159.318
159.365
206.818
219.869
216.627
n20
1.6830351
1.7169838
1.6858604
1.6842611
1.6937881
k20
0.2331189
0.1941891
0.2953498
0.2258219
0.1869159
d20 (nm)
174.468
227.412
138.155
173.345
231.738
When n1 ≧ n10, n1m =
0.0373157
0.0484546
0.0121899
0.0603870
0.0758545
When n1 < n10, n1m =
0.0105005
0.0089343
0.0409204
0.0315625
0.0474512
When k1 ≧ k10, k1m =
0.0240833
0.0270752
0.0251843
0.0382471
0.0501941
When k1 < k10, k1m =
0.0246826
0.0176978
0.0193188
0.0296948
0.0358765
When d1 ≧ d10, d1m (nm) =
22.059
∞
5.261
∞
∞
When d1 < d10, d1m (nm) =
3.023
2.568
16.255
V17.363
54.608
When n2 ≧ n20, n2m =
0.0659399
0.0944360
0.1154346
0.0831506
0.2493335
When n2 < n20, n2m =
0.0371252
0.1164661
0.0185925
0.0632410
0.1310596
When k2 ≧ k20, k2m =
0.0133044
0.0180847
0.0609753
0.0891687
0.1103210
When k2 < k20, k2m =
0.0529578
0.0555518
0.0785950
0.0680151
0.0652307
When d2 ≧ d20, d2m (nm) =
18.030
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
8.732
5.378
3.627
23.361
52.894
1.0 < NA ≦ 1.1
105 < T ≦ 115
21/34
Case
11-11
11-12
n10
1.6944699
1.6958800
k10
0.0775933
0.0528961
d10 (nm)
265.762
273.317
n20
1.6967397
1.6915993
k20
0.3115846
0.1649138
d20 (nm)
129.093
288.010
When n1 ≧ n10, n1m =
0.0466345
0.0703040
When n1 < n10, n1m =
0.0341467
0.0549121
When k1 ≧ k10, k1m =
0.0473621
0.0679175
When k1 < k10, k1m =
0.0320862
0.0389246
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
20.031
180.011
When n2 ≧ n20, n2m =
0.2202100
0.2749866
When n2 < n20, n2m =
0.1339246
0.2056653
When k2 ≧ k20, k2m =
0.2018127
0.2031665
When k2 < k20, k2m =
0.1244751
0.0729272
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
18.618
105.982
1.0 < NA ≦ 1.1
115 < T ≦ 125
Case
12-01
12-02
12-03
12-04
12-05
n10
1.9729972
1.9456051
1.9005953
1.8972956
1.7255330
k10
0.2768129
0.1915481
0.1591490
0.1121564
0.0922673
d10 (nm)
17.524
14.612
13.217
12.290
91.102
n20
1.6663342
1.6781309
1.6561276
1.7051607
1.6614760
k20
0.7544777
0.4665054
0.3399716
0.2822449
0.2607016
d20 (nm)
64.842
122.845
181.593
233.141
171.070
When n1 ≧ n10, n1m =
0.0730835
0.0862573
0.1002148
0.1132361
0.0385791
When n1 < n10, n1m =
0.0179053
0.0397437
0.0650696
0.0790137
0.0152405
When k1 ≧ k10, k1m =
0.0247314
0.0556897
0.0891748
0.1035071
0.0386047
When k1 < k10, k1m =
0.0592480
0.0960681
0.1016016
0.1121564
0.0414185
When d1 ≧ d10, d1m (nm) =
2.961
4.145
5.266
6.373
11.328
When d1 < d10, d1m (nm) =
0.729
1.739
3.220
4.072
3.483
When n2 ≧ n20, n2m =
0.0585083
0.0918945
0.1020654
0.1070825
0.0573608
When n2 < n20, n2m =
0.1382239
0.1611719
0.1504858
0.1560303
0.0993860
When k2 ≧ k20, k2m =
0.0616943
0.0914514
0.0935474
0.1016602
0.0359058
When k2 < k20, k2m =
0.0899731
0.0957678
0.0910632
0.0886353
0.0590588
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
11.368
38.474
71.143
98.322
22.477
1.0 < NA ≦ 1.1
115 < T ≦ 125
22/34
Case
12-06
12-07
12-08
12-09
12-10
n10
1.7304964
1.7097843
1.7129025
1.7059734
1.6983193
k10
0.0792452
0.0770210
0.0702809
0.0642321
0.0712405
d10 (nm)
91.709
159.025
159.249
159.600
220.143
n20
1.7154952
1.6841289
1.7178163
1.6898319
1.6860819
k20
0.2175998
0.2392980
0.1978132
0.1677546
0.2336364
d20 (nm)
221.560
164.463
217.770
279.371
162.903
When n1 ≧ n10, n1m =
0.0478430
0.0358972
0.0479553
0.0552173
0.0579871
When n1 < n10, n1m =
0.0188013
0.0078589
0.0015247
0.0299426
0.0264917
When k1 ≧ k10, k1m =
0.0447290
0.0214099
0.0152087
0.0363110
0.0340515
When k1 < k10, k1m =
0.0430518
0.0224402
0.0060950
0.0278772
0.0279150
When d1 ≧ d10, d1m (nm) =
17.323
17.500
∞
∞
∞
When d1 < d10, d1m (nm) =
4.626
2.208
0.436
70.406
11.462
When n2 ≧ n20, n2m =
0.0842468
0.0631323
0.0959070
0.1382263
0.0682983
When n2 < n20, n2m =
0.1172522
0.0247583
0.0076807
0.1296057
0.0493762
When k2 ≧ k20, k2m =
0.0583887
0.0111536
0.0046545
0.0357849
0.0882227
When k2 < k20, k2m =
0.0618323
0.0547961
0.0579968
0.0540967
0.0613330
When d2 ≧ d20, d2m (nm) =
∞
18.428
∞
∞
∞
When d2 < d20, d2m (nm) =
65.102
5.436
0.894
57.180
18.177
1.0 < NA ≦ 1.1
115 < T ≦ 125
Case
12-11
12-12
12-13
n10
1.6946755
1.6955425
1.6956989
k10
0.0639503
0.0535782
0.0539885
d10 (nm)
216.344
213.248
272.929
n20
1.6931001
1.6937343
1.6917939
k20
0.1919118
0.1415462
0.1683287
d20 (nm)
222.331
338.947
278.327
When n1 ≧ n10, n1m =
0.0359900
0.0869177
0.0714185
When n1 < n10, n1m =
0.0437024
0.0750378
0.0538635
When k1 ≧ k10, k1m =
0.0485352
0.0653857
0.0669263
When k1 < k10, k1m =
0.0346851
0.0370959
0.0388916
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
51.791
132.178
120.018
When n2 ≧ n20, n2m =
0.1409949
0.2291467
0.2819873
When n2 < n20, n2m =
0.1060889
0.1273120
0.2087952
When k2 ≧ k20, k2m =
0.1109827
0.1363989
0.2069556
When k2 < k20, k2m =
0.0639978
0.0571204
0.0743250
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
35.182
107.512
95.030
1.0 < NA ≦ 1.1
125 < T ≦ 135
23/34
Case
13-01
13-02
13-03
13-04
13-05
n10
1.8993435
1.9080238
1.7276770
1.7338076
1.7236449
k10
0.1093669
0.0778133
0.0934541
0.0808022
0.0736298
d10 (nm)
12.638
11.189
91.210
91.869
92.640
n20
1.7156529
1.7380285
1.6689251
1.7256843
1.7007078
k20
0.2903108
0.2474831
0.2700133
0.2232282
0.1887087
d20 (nm)
220.942
275.866
159.348
209.944
271.148
When n1 ≧ n10, n1m =
0.1116663
0.1266492
0.0395422
0.0484558
0.0522583
When n1 < n10, n1m =
0.0773999
0.0872168
0.0167297
0.0166711
0.0180103
When k1 ≧ k10, k1m =
0.1011877
0.1103088
0.0409973
0.0422058
0.0417761
When k1 < k10, k1m =
0.1093669
0.0778133
0.0410583
0.0409119
0.0443518
When d1 ≧ d10, d1m (nm) =
6.392
6.737
11.272
16.895
38.105
When d1 < d10, d1m (nm) =
4.063
4.214
3.733
3.952
5.177
When n2 ≧ n20, n2m =
0.1069678
0.1140796
0.0675769
0.0924780
0.1134937
When n2 < n20, n2m =
0.1606714
0.1563965
0.1033667
0.1197949
0.1230200
When k2 ≧ k20, k2m =
0.1040991
0.1083496
0.0397278
0.0600330
0.0739392
When k2 < k20, k2m =
0.0926990
0.0882825
0.0652539
0.0659766
0.0617065
When d2 ≧ d20, d2m (nm) =
∞
∞
29.488
∞
∞
When d2 < d20, d2m (nm) =
90.398
130.978
17.688
16.714
72.265
1.0 < NA ≦ 1.1
125 < T ≦ 135
Case
13-06
13-07
13-08
13-09
13-10
n10
1.7117973
1.7052523
1.6990979
1.6936455
1.6937228
k10
0.0782334
0.0648564
0.0723627
0.0657466
0.0602088
d10 (nm)
159.412
160.141
220.761
215.539
212.854
n20
1.6949465
1.6847092
1.6931390
1.6916565
1.6917935
k20
0.2480962
0.1699839
0.2421156
0.1962143
0.1651159
d20 (nm)
152.577
269.827
151.650
213.597
273.449
When n1 ≧ n10, n1m =
0.0367346
0.0551233
0.0594092
0.0311401
0.0698511
When n1 < n10, n1m =
0.0058984
0.0239478
0.0244397
0.0431714
0.0693030
When k1 ≧ k10, k1m =
0.0206287
0.0370862
0.0278687
0.0476123
0.0598901
When k1 < k10, k1m =
0.0197803
0.0307031
0.0272107
0.0341650
0.0364880
When d1 ≧ d10, d1m (nm) =
17.175
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
1.642
10.322
10.135
48.593
59.568
When n2 ≧ n20, n2m =
0.0634509
0.0441370
0.0646301
0.1417163
0.2349500
When n2 < n20, n2m =
0.0185107
0.1268359
0.0304773
0.0878235
0.1413928
When k2 ≧ k20, k2m =
0.0106982
0.0374109
0.0871985
0.1142444
0.1311609
When k2 < k20, k2m =
0.0614368
0.0554883
0.0573535
0.0648792
0.0616370
When d2 ≧ d20, d2m (nm) =
20.867
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
3.236
51.950
7.977
23.183
75.250
1.0 < NA ≦ 1.1
125 < T ≦ 135
24/34
Case
13-11
n10
1.6954835
k10
0.0549286
d10 (nm)
272.481
n20
1.6920522
k20
0.1709440
d20 (nm)
269.018
When n1 ≧ n10, n1m =
0.0732507
When n1 < n10, n1m =
0.0527002
When k1 ≧ k10, k1m =
0.0659570
When k1 < k10, k1m =
0.0396948
When d1 ≧ d10, d1m (nm) =
∞
When d1 < d10, d1m (nm) =
115.848
When n2 ≧ n20, n2m =
0.2876270
When n2 < n20, n2m =
0.2123071
When k2 ≧ k20, k2m =
0.2114355
When k2 < k20, k2m =
0.0767078
When d2 ≧ d20, d2m (nm) =
∞
When d2 < d20, d2m (nm) =
91.957
1.0 < NA ≦ 1.1
135 < T ≦ 145
Case
14-01
14-02
14-03
14-04
14-05
n10
1.9117383
1.8981283
1.9112943
1.7312914
1.7377087
k10
0.2302052
0.1070787
0.0649623
0.0945058
0.0827928
d10 (nm)
15.980
13.384
12.163
91.544
92.151
n20
1.5953517
1.7296497
1.7710787
1.6819509
1.7372931
k20
0.4940730
0.3022759
0.2605013
0.2846338
0.2321492
d20 (nm)
105.368
209.053
259.824
147.702
198.983
When n1 ≧ n10, n1m =
0.0781360
0.1075745
0.1181738
0.0408386
0.0487402
When n1 < n10, n1m =
0.0319177
0.0739868
0.0809961
0.0177930
0.0144653
When k1 ≧ k10, k1m =
0.0436902
0.0964282
0.0995044
0.0430859
0.0389966
When k1 < k10, k1m =
0.0819202
0.1070787
0.0649623
0.0421533
0.0388171
When d1 ≧ d10, d1m (nm) =
3.898
6.524
6.747
11.475
16.758
When d1 < d10, d1m (nm) =
1.590
4.095
4.185
3.862
3.299
When n2 ≧ n20, n2m =
0.0627563
0.1085400
0.1152271
0.0712305
0.0983997
When n2 < n20, n2m =
0.1565955
0.1599133
0.1627686
0.1038867
0.1174939
When k2 ≧ k20, k2m =
0.0810010
0.1085132
0.1160754
0.0447900
0.0617737
When k2 < k20, k2m =
0.1061572
0.0966113
0.0915161
0.0720264
0.0692358
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
26.800
∞
When d2 < d20, d2m (nm) =
27.538
81.885
123.147
14.572
12.208
1.0 < NA ≦ 1.1
135 < T ≦ 145
25/34
Case
14-06
14-07
14-08
14-09
14-10
n10
1.7228203
1.7144911
1.7050797
1.6925663
1.6991742
k10
0.0749158
0.0796518
0.0657099
0.0675694
0.0739382
d10 (nm)
92.874
160.015
160.534
214.049
220.936
n20
1.6951594
1.7090445
1.6817729
1.6900690
1.6992675
k20
0.1935801
0.2610315
0.1743389
0.2005073
0.2525134
d20 (nm)
262.590
141.223
260.739
206.287
141.832
When n1 ≧ n10, n1m =
0.0517419
0.0380176
0.0550000
0.0300269
0.0099573
When n1 < n10, n1m =
0.0171826
0.0033435
0.0205762
0.0461255
0.0255640
When k1 ≧ k10, k1m =
0.0402747
0.0176941
0.0369080
0.0452966
0.0196790
When k1 < k10, k1m =
0.0440662
0.0145313
0.0289917
0.0339844
0.0188269
When d1 ≧ d10, d1m (nm) =
34.339
18.702
∞
∞
∞
When d1 < d10, d1m (nm) =
4.946
0.924
8.433
45.536
10.412
When n2 ≧ n20, n2m =
0.1089246
0.0638684
0.0364478
0.1628357
0.0605127
When n2 < n20, n2m =
0.1178552
0.0117664
0.1214197
0.0809363
0.0143933
When k2 ≧ k20, k2m =
0.0721460
0.0078210
0.0372485
0.1200403
0.0864673
When k2 < k20, k2m =
0.0629919
0.0624194
0.0562036
0.0635217
0.0436145
When d2 ≧ d20, d2m (nm) =
∞
21.562
∞
∞
25.612
When d2 < d20, d2m (nm) =
67.089
1.645
48.128
21.535
3.107
1.0 < NA ≦ 1.1
135 < T ≦ 145
Case
14-11
14-12
n10
1.6955775
1.6953573
k10
0.0548747
0.0556511
d10 (nm)
213.500
272.231
n20
1.6934763
1.6917841
k20
0.1457299
0.1736649
d20 (nm)
319.743
260.476
When n1 ≧ n10, n1m =
0.0884082
0.0714819
When n1 < n10, n1m =
0.0760022
0.0518335
When k1 ≧ k10, k1m =
0.0634009
0.0652063
When k1 < k10, k1m =
0.0349133
0.0395740
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
128.996
113.518
When n2 ≧ n20, n2m =
0.2359680
0.2895325
When n2 < n20, n2m =
0.1212769
0.2158911
When k2 ≧ k20, k2m =
0.1345789
0.2124060
When k2 < k20, k2m =
0.0582837
0.0793396
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
94.216
91.728
1.0 < NA ≦ 1.1
145 < T ≦ 155
26/34
Case
15-01
15-02
15-03
15-04
15-05
n10
1.8842999
1.9020060
1.9176161
1.7347347
1.7402087
k10
0.1660082
0.1078045
0.0733974
0.0970436
0.0854812
d10 (nm)
15.542
13.884
11.927
91.613
92.221
n20
1.6642092
1.7406676
1.7608162
1.6897518
1.7427648
k20
0.3881866
0.3180988
0.2687301
0.3028107
0.2437105
d20 (nm)
148.595
199.025
254.127
138.166
190.058
When n1 ≧ n10, n1m =
0.0902356
0.1039673
0.1191321
0.0403284
0.0477295
When n1 < n10, n1m =
0.0608057
0.0712415
0.0806982
0.0168616
0.0123145
When k1 ≧ k10, k1m =
0.0796985
0.0922314
0.1003394
0.0414099
0.0352649
When k1 < k10, k1m =
0.0913672
0.1040308
0.0733974
0.0415906
0.0369519
When d1 ≧ d10, d1m (nm) =
5.569
6.401
6.478
11.141
16.036
When d1 < d10, d1m (nm) =
3.524
3.984
3.954
3.546
2.715
When n2 ≧ n20, n2m =
0.0975891
0.1093347
0.1166919
0.0721533
0.0993201
When n2 < n20, n2m =
0.1510022
0.1570532
0.1613013
0.0996582
0.1116626
When k2 ≧ k20, k2m =
0.1021082
0.1115308
0.1139111
0.0446167
0.0576575
When k2 < k20, k2m =
0.1042151
0.0981909
0.0922217
0.0735095
0.0699536
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
23.089
∞
When d2 < d20, d2m (nm) =
36.178
75.817
118.717
13.060
9.872
1.0 < NA ≦ 1.1
145 < T ≦ 155
Case
15-06
15-07
15-08
15-09
15-10
n10
1.7232674
1.7163169
1.7052425
1.6979604
1.6919325
k10
0.0768076
0.0822242
0.0670983
0.0765182
0.0693101
d10 (nm)
92.842
160.121
160.367
219.964
212.895
n20
1.6931409
1.7162208
1.6808978
1.6978817
1.6886216
k20
0.2010537
0.2770503
0.1806066
0.2641846
0.2063377
d20 (nm)
254.319
132.120
252.327
134.431
199.162
When n1 ≧ n10, n1m =
0.0505859
0.0375513
0.0535669
0.0055981
0.0297021
When n1 < n10, n1m =
0.0155139
0.0002051
0.0181250
0.0232141
0.0494775
When k1 ≧ k10, k1m =
0.0378564
0.0051208
0.0335376
0.0146118
0.0441443
When k1 < k10, k1m =
0.0427637
0.0032507
0.0275378
0.0178613
0.0327478
When d1 ≧ d10, d1m (nm) =
33.581
19.229
∞
4.817
∞
When d1 < d10, d1m (nm) =
4.347
0.056
6.999
10.286
43.553
When n2 ≧ n20, n2m =
0.0760803
0.0599353
0.0299109
0.0539575
0.2378027
When n2 < n20, n2m =
0.1135510
0.0008435
0.1135376
0.0106042
0.0839368
When k2 ≧ k20, k2m =
0.0671289
0.0005420
0.0313745
0.0886438
0.1159473
When k2 < k20, k2m =
0.0634387
0.0680176
0.0561853
0.0306653
0.0671289
When d2 ≧ d20, d2m (nm) =
∞
12.405
∞
21.650
∞
When d2 < d20, d2m (nm) =
64.219
0.105
32.640
2.145
24.441
1.0 < NA ≦ 1.1
145 < T ≦ 155
27/34
Case
15-11
15-12
n10
1.6933082
1.6953110
k10
0.0619759
0.0563706
d10 (nm)
212.839
272.392
n20
1.6904544
1.6905212
k20
0.1723582
0.1778331
d20 (nm)
255.647
252.170
When n1 ≧ n10, n1m =
0.0645605
0.0686462
When n1 < n10, n1m =
0.0718213
0.0516125
When k1 ≧ k10, k1m =
0.0578125
0.0646021
When k1 < k10, k1m =
0.0349402
0.0400220
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
54.857
112.777
When n2 ≧ n20, n2m =
0.2345605
0.2885852
When n2 < n20, n2m =
0.1388916
0.2180322
When k2 ≧ k20, k2m =
0.1280078
0.2117786
When k2 < k20, k2m =
0.0658081
0.0782971
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
73.297
86.154
1.0 < NA ≦ 1.1
155 < T ≦ 165
Case
16-01
16-02
16-03
16-04
16-05
n10
1.9162825
1.8960663
1.9085468
1.9232010
1.7368663
k10
0.2485644
0.1719364
0.1144956
0.0848488
0.1019026
d10 (nm)
18.297
15.704
13.923
11.624
91.322
n20
1.6104232
1.6708316
1.7385514
1.7455678
1.6869885
k20
0.6165991
0.4169686
0.3337318
0.2771185
0.3224919
d20 (nm)
83.442
139.520
191.444
248.983
130.342
When n1 ≧ n10, n1m =
0.0684412
0.0871606
0.1018298
0.1200745
0.0372510
When n1 < n10, n1m =
0.0186816
0.0568530
0.0690649
0.0803638
0.0125696
When k1 ≧ k10, k1m =
0.0233801
0.0734265
0.0893420
0.1020142
0.0332275
When k1 < k10, k1m =
0.0710925
0.0921472
0.1049048
0.0848488
0.0396851
When d1 ≧ d10, d1m (nm) =
3.544
5.170
6.051
6.159
10.019
When d1 < d10, d1m (nm) =
0.960
3.162
3.726
3.719
2.554
When n2 ≧ n20, n2m =
0.0392468
0.0938416
0.1080847
0.1165613
0.0639832
When n2 < n20, n2m =
0.1557959
0.1481714
0.1540210
0.1601440
0.0923059
When k2 ≧ k20, k2m =
0.0796021
0.1023108
0.1103064
0.1095667
0.0344885
When k2 < k20, k2m =
0.1143958
0.1026965
0.0973987
0.0917590
0.0690210
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
16.255
When d2 < d20, d2m (nm) =
16.079
31.215
71.737
92.392
12.361
1.0 < NA ≦ 1.1
155 < T ≦ 165
28/34
Case
16-06
16-07
16-08
16-09
16-10
n10
1.7401611
1.7243481
1.7054586
1.6959475
1.6918299
k10
0.0886217
0.0791015
0.0688139
0.0801582
0.0707672
d10 (nm)
92.017
92.538
159.721
218.084
213.401
n20
1.7381402
1.6930588
1.6812702
1.6891859
1.6865968
k20
0.2555882
0.2092609
0.1871719
0.2763746
0.2143676
d20 (nm)
182.755
245.988
244.029
128.431
190.286
When n1 ≧ n10, n1m =
0.0455261
0.0488196
0.0509851
0.0098682
0.0278625
When n1 < n10, n1m =
0.0098901
0.0131677
0.0163489
0.0140930
0.0421411
When k1 ≧ k10, k1m =
0.0306140
0.0345203
0.0271167
0.0171570
0.0425635
When k1 < k10, k1m =
0.0347180
0.0404199
0.0257288
0.0171082
0.0318542
When d1 ≧ d10, d1m (nm) =
14.632
33.648
∞
8.318
∞
When d1 < d10, d1m (nm) =
2.133
3.535
5.969
6.525
43.306
When n2 ≧ n20, n2m =
0.0895227
0.0573254
0.0211304
0.0441309
0.2430603
When n2 < n20, n2m =
0.1067090
0.1098926
0.1107275
0.0233423
0.0869226
When k2 ≧ k20, k2m =
0.0460217
0.0587354
0.0210486
0.0642297
0.1089050
When k2 < k20, k2m =
0.0680432
0.0628845
0.0551514
0.0464880
0.0738831
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
19.572
∞
When d2 < d20, d2m (nm) =
8.553
37.425
30.745
5.059
27.273
1.0 < NA ≦ 1.1
155 < T ≦ 165
Case
16-11
16-12
n10
1.6935501
1.6953216
k10
0.0625258
0.0573372
d10 (nm)
213.666
272.694
n20
1.6897170
1.6885432
k20
0.1780108
0.1839003
d20 (nm)
246.097
243.579
When n1 ≧ n10, n1m =
0.0658508
0.0696008
When n1 < n10, n1m =
0.0609790
0.0519751
When k1 ≧ k10, k1m =
0.0564087
0.0639087
When k1 < k10, k1m =
0.0340259
0.0390979
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
55.431
113.126
When n2 ≧ n20, n2m =
0.2425122
0.2917029
When n2 < n20, n2m =
0.1355713
0.2189172
When k2 ≧ k20, k2m =
0.1230981
0.2089771
When k2 < k20, k2m =
0.0647131
0.0785583
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
74.519
83.205
1.0 < NA ≦ 1.1
165 < T ≦ 175
29/34
Case
17-01
17-02
17-03
17-04
17-05
n10
1.9620125
1.9138120
1.9194872
1.9263431
1.7366416
k10
0.2671830
0.1838008
0.1265886
0.0918160
0.1083929
d10 (nm)
17.281
15.160
13.286
11.575
90.600
n20
1.6251877
1.6631095
1.7204546
1.7389610
1.6676220
k20
0.6875073
0.4399257
0.3440475
0.2853240
0.3363185
d20 (nm)
75.420
132.541
186.036
241.421
124.136
When n1 ≧ n10, n1m =
0.0681287
0.0852625
0.1025696
0.1184741
0.0323010
When n1 < n10, n1m =
0.0103625
0.0516760
0.0678894
0.0788623
0.0048279
When k1 ≧ k10, k1m =
0.0130603
0.0684912
0.0894849
0.1012756
0.0174634
When k1 < k10, k1m =
0.0671069
0.0945691
0.1086621
0.0918160
0.0305151
When d1 ≧ d10, d1m (nm) =
3.029
4.576
5.503
5.915
7.890
When d1 < d10, d1m (nm) =
0.441
2.597
3.327
3.560
0.944
When n2 ≧ n20, n2m =
0.0235046
0.0887256
0.1055566
0.1147229
0.0355994
When n2 < n20, n2m =
0.1565857
0.1459790
0.1532703
0.1591589
0.0840686
When k2 ≧ k20, k2m =
0.0495569
0.0950366
0.1036096
0.1065601
0.0135376
When k2 < k20, k2m =
0.1038318
0.0972864
0.0941003
0.0904578
0.0586487
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
9.834
When d2 < d20, d2m (nm) =
13.490
32.564
69.289
94.292
9.844
1.0 < NA ≦ 1.1
165 < T ≦ 175
Case
17-06
17-07
17-08
17-09
17-10
n10
1.7377165
1.7250070
1.7054487
1.6921136
1.6937452
k10
0.0918810
0.0812670
0.0704565
0.0719896
0.0634118
d10 (nm)
91.516
92.096
158.889
214.506
214.086
n20
1.7225143
1.6922454
1.6815182
1.6833735
1.6893106
k20
0.2640565
0.2155950
0.1921887
0.2231205
0.1840166
d20 (nm)
176.484
237.445
235.428
180.418
236.602
When n1 ≧ n10, n1m =
0.0420569
0.0467627
0.0482849
0.0256970
0.0615491
When n1 < n10, n1m =
0.0067480
0.0110010
0.0145544
0.0346619
0.0533179
When k1 ≧ k10, k1m =
0.0242395
0.0311426
0.0191064
0.0402332
0.0548975
When k1 < k10, k1m =
0.0306030
0.0379785
0.0179834
0.0315259
0.0339990
When d1 ≧ d10, d1m (nm) =
13.053
20.074
∞
∞
∞
When d1 < d10, d1m (nm) =
1.437
2.846
5.076
44.014
52.355
When n2 ≧ n20, n2m =
0.0699756
0.0474695
0.0119531
0.2616345
0.2513293
When n2 < n20, n2m =
0.1027979
0.1100684
0.1104504
0.0766565
0.1353430
When k2 ≧ k20, k2m =
0.0294397
0.0490112
0.0106458
0.1033704
0.1166565
When k2 < k20, k2m =
0.0637073
0.0613086
0.0537012
0.0738440
0.0656140
When d2 ≧ d20, d2m (nm) =
∞
∞
5.139
∞
∞
When d2 < d20, d2m (nm) =
7.091
63.320
32.177
24.892
75.277
1.0 < NA ≦ 1.1
165 < T ≦ 175
30/34
Case
17-11
17-12
n10
1.6937402
1.6958036
k10
0.0634247
0.0530688
d10 (nm)
214.067
271.703
n20
1.6892020
1.6918593
k20
0.1839903
0.1637010
d20 (nm)
236.644
291.452
When n1 ≧ n10, n1m =
0.0614392
0.0799048
When n1 < n10, n1m =
0.0533545
0.0613391
When k1 ≧ k10, k1m =
0.0548865
0.0657874
When k1 < k10, k1m =
0.0340295
0.0406555
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
52.349
186.337
When n2 ≧ n20, n2m =
0.2512048
0.2852795
When n2 < n20, n2m =
0.1353552
0.2060364
When k2 ≧ k20, k2m =
0.1167688
0.2088965
When k2 < k20, k2m =
0.0656104
0.0720715
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
75.294
119.308
1.0 < NA ≦ 1.1
175 < T ≦ 185
Case
18-01
18-02
18-03
18-04
18-05
n10
2.0247974
1.9282935
1.9213955
1.9262173
1.7355101
k10
0.2830183
0.1992550
0.1387890
0.1063571
0.0947091
d10 (nm)
15.097
14.428
13.062
11.253
91.033
n20
1.6266898
1.6428403
1.7027750
1.7173021
1.7079959
k20
0.7191283
0.4517072
0.3507816
0.2869739
0.2693832
d20 (nm)
71.681
126.823
179.475
236.027
169.192
When n1 ≧ n10, n1m =
0.0749963
0.0847278
0.1010168
0.1197595
0.0387598
When n1 < n10, n1m =
0.0029248
0.0471021
0.0652051
0.0785376
0.0037976
When k1 ≧ k10, k1m =
0.0038599
0.0655127
0.0884351
0.1039075
0.0170227
When k1 < k10, k1m =
0.0706714
0.0951611
0.1067810
0.1063571
0.0250378
When d1 ≧ d10, d1m (nm) =
2.365
4.047
5.170
5.710
10.979
When d1 < d10, d1m (nm) =
0.098
2.142
3.074
3.403
0.799
When n2 ≧ n20, n2m =
0.0068848
0.0841113
0.1036328
0.1139966
0.0477551
When n2 < n20, n2m =
0.1606787
0.1462891
0.1534180
0.1596240
0.1042908
When k2 ≧ k20, k2m =
0.0111658
0.0845300
0.0979260
0.1010864
0.0158423
When k2 < k20, k2m =
0.0939917
0.0914209
0.0916113
0.0894141
0.0611707
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
3.000
39.175
67.597
105.537
4.807
1.0 < NA ≦ 1.1
175 < T ≦ 185
31/34
Case
18-06
18-07
18-08
18-09
18-10
n10
1.7251933
1.7054174
1.6937830
1.6952847
1.6957027
k10
0.0829804
0.0718367
0.0647049
0.0582261
0.0542195
d10 (nm)
91.728
158.389
214.330
213.359
271.586
n20
1.6903561
1.6812041
1.6889835
1.6934588
1.6918383
k20
0.2192539
0.1954390
0.1894046
0.1611341
0.1679902
d20 (nm)
228.367
226.084
226.812
284.005
281.728
When n1 ≧ n10, n1m =
0.0450793
0.0463184
0.0575061
0.0820801
0.0778577
When n1 < n10, n1m =
0.0094861
0.0044336
0.0478479
0.0612256
0.0602185
When k1 ≧ k10, k1m =
0.0283801
0.0117395
0.0529968
0.0602039
0.0649841
When k1 < k10, k1m =
0.0362878
0.0115625
0.0337854
0.0347266
0.0400525
When d1 ≧ d10, d1m (nm) =
16.774
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
2.397
1.386
50.875
126.709
185.173
When n2 ≧ n20, n2m =
0.0407971
0.0052539
0.2620386
0.2460583
0.2888794
When n2 < n20, n2m =
0.1134692
0.1157361
0.1359692
0.1267810
0.2086084
When k2 ≧ k20, k2m =
0.0417627
0.0042761
0.1123547
0.1276489
0.2100842
When k2 < k20, k2m =
0.0604272
0.0538147
0.0667053
0.0613220
0.0762817
When d2 ≧ d20, d2m (nm) =
∞
1.973
∞
∞
∞
When d2 < d20, d2m (nm) =
63.259
35.408
73.536
81.916
101.090
1.0 < NA ≦ 1.1
185 < T ≦ 195
Case
19-01
19-02
19-03
19-04
19-05
n10
1.9316549
1.9193011
1.9209840
1.9114684
1.7364379
k10
0.2158025
0.1476126
0.1061325
0.1024475
0.0969838
d10 (nm)
14.297
13.272
11.842
10.224
91.033
n20
1.6202378
1.6935029
1.7241227
1.6976483
1.7085420
k20
0.4645248
0.3598725
0.2946413
0.2438294
0.2774318
d20 (nm)
119.165
170.049
224.030
285.021
158.680
When n1 ≧ n10, n1m =
0.0819873
0.0986853
0.1146375
0.1344971
0.0375342
When n1 < n10, n1m =
0.0431250
0.0625305
0.0746716
0.0933276
0.0023010
When k1 ≧ k10, k1m =
0.0616553
0.0860156
0.0981763
0.1190894
0.0118958
When k1 < k10, k1m =
0.0896899
0.1016528
0.1061325
0.1024475
0.0218677
When d1 ≧ d10, d1m (nm) =
3.700
5.023
5.787
6.264
9.942
When d1 < d10, d1m (nm) =
1.892
2.963
3.440
3.984
0.476
When n2 ≧ n20, n2m =
0.0797485
0.1030664
0.1135645
0.1221387
0.0340320
When n2 < n20, n2m =
0.1493750
0.1566296
0.1631348
0.1387097
0.1094446
When k2 ≧ k20, k2m =
0.0775891
0.0962708
0.1030847
0.0998328
0.0100928
When k2 < k20, k2m =
0.0909656
0.0941418
0.0920776
0.0860498
0.0649939
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
42.778
When d2 < d20, d2m (nm) =
39.461
66.761
95.735
134.721
2.964
1.0 < NA ≦ 1.1
185 < T ≦ 195
32/34
Case
19-06
19-07
19-08
19-09
19-10
n10
1.7258494
1.7176246
1.7057732
1.7053832
1.6928552
k10
0.0843222
0.0727056
0.0731106
0.0633918
0.0748243
d10 (nm)
91.766
91.617
158.709
158.181
216.444
n20
1.6907525
1.6784161
1.6805392
1.6859880
1.6825267
k20
0.2229229
0.1842107
0.1989479
0.1669818
0.2415835
d20 (nm)
218.067
277.206
215.842
272.384
158.548
When n1 ≧ n10, n1m =
0.0445569
0.0497937
0.0455957
0.0532361
0.0209436
When n1 < n10, n1m =
0.0086951
0.0298450
0.0022034
0.0367859
0.0248157
When k1 ≧ k10, k1m =
0.0263611
0.0534119
0.0080444
0.0507507
0.0311414
When k1 < k10, k1m =
0.0359253
0.0504663
0.0097656
0.0393250
0.0256995
When d1 ≧ d10, d1m (nm) =
15.734
41.766
∞
∞
12.676
When d1 < d10, d1m (nm) =
2.168
9.272
0.695
75.025
12.180
When n2 ≧ n20, n2m =
0.0361047
0.0638184
0.0029834
0.0794446
0.0872498
When n2 < n20, n2m =
0.1156152
0.1202979
0.1187366
0.1037524
0.0413367
When k2 ≧ k20, k2m =
0.0400842
0.0626270
0.0025122
0.0450354
0.0876147
When k2 < k20, k2m =
0.0626514
0.0561853
0.0563074
0.0506238
0.0672510
When d2 ≧ d20, d2m (nm) =
∞
∞
1.098
∞
∞
When d2 < d20, d2m (nm) =
62.415
80.313
33.556
35.245
14.500
1.0 < NA ≦ 1.1
185 < T ≦ 195
Case
19-11
19-12
19-13
n10
1.6935473
1.6950516
1.6954923
k10
0.0663823
0.0596605
0.0554795
d10 (nm)
214.407
213.429
271.226
n20
1.6888366
1.6925794
1.6917166
k20
0.1945007
0.1643538
0.1716832
d20 (nm)
217.060
274.430
272.356
When n1 ≧ n10, n1m =
0.0539099
0.0837012
0.0771448
When n1 < n10, n1m =
0.0450378
0.0604199
0.0593555
When k1 ≧ k10, k1m =
0.0507373
0.0587012
0.0639185
When k1 < k10, k1m =
0.0306738
0.0334839
0.0392737
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
49.334
125.965
183.474
When n2 ≧ n20, n2m =
0.1392200
0.1753748
0.2943286
When n2 < n20, n2m =
0.1378223
0.1262683
0.2110303
When k2 ≧ k20, k2m =
0.1089429
0.1267468
0.2119958
When k2 < k20, k2m =
0.0654358
0.0611353
0.0788904
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
37.875
75.613
93.291
1.0 < NA ≦ 1.1
195 < T ≦ 205
33/34
Case
20-01
20-02
20-03
20-04
20-05
n10
1.9124203
1.9240615
1.9069086
1.7409810
1.7270720
k10
0.1489422
0.1092971
0.1015424
0.0988730
0.0857435
d10 (nm)
14.330
12.001
10.748
91.533
92.142
n20
1.7039618
1.7245262
1.7018591
1.7256420
1.6923707
k20
0.3787231
0.3026113
0.2499950
0.2922591
0.2292874
d20 (nm)
157.291
214.201
273.963
146.253
207.814
When n1 ≧ n10, n1m =
0.0947424
0.1140125
0.1293140
0.0383984
0.0447009
When n1 < n10, n1m =
0.0592273
0.0732715
0.0895557
0.0020898
0.0081226
When k1 ≧ k10, k1m =
0.0804358
0.0961365
0.1132190
0.0106335
0.0246362
When k1 < k10, k1m =
0.0954272
0.1092971
0.1015424
0.0220923
0.0359277
When d1 ≧ d10, d1m (nm) =
5.168
5.724
6.406
9.801
15.595
When d1 < d10, d1m (nm) =
3.029
3.355
4.072
0.420
2.001
When n2 ≧ n20, n2m =
0.1047864
0.1153137
0.1226477
0.0347485
0.0318494
When n2 < n20, n2m =
0.1598962
0.1638757
0.1417261
0.1115564
0.1129541
When k2 ≧ k20, k2m =
0.1020288
0.1044775
0.1018286
0.0106042
0.0415295
When k2 < k20, k2m =
0.1029260
0.0959216
0.0891724
0.0737659
0.0663513
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
37.674
∞
When d2 < d20, d2m (nm) =
61.016
86.078
130.875
2.293
32.252
1.0 < NA ≦ 1.1
195 < T ≦ 205
Case
20-06
20-07
20-08
20-09
20-10
n10
1.7180387
1.7063746
1.7058520
1.6924739
1.6928977
k10
0.0734703
0.0744769
0.0640895
0.0767908
0.0684401
d10 (nm)
91.877
159.624
158.885
216.680
213.761
n20
1.6777924
1.6791348
1.6855365
1.6850078
1.6885850
k20
0.1881130
0.2047799
0.1710983
0.2520629
0.1999527
d20 (nm)
267.481
205.830
262.479
148.712
208.689
When n1 ≧ n10, n1m =
0.0499475
0.0454993
0.0542188
0.0126501
0.0501160
When n1 < n10, n1m =
0.0300122
0.0018469
0.0331775
0.0226819
0.0449377
When k1 ≧ k10, k1m =
0.0534277
0.0070447
0.0503931
0.0235315
0.0487341
When k1 < k10, k1m =
0.0493896
0.0111902
0.0386401
0.0180737
0.0270740
When d1 ≧ d10, d1m (nm) =
33.063
∞
∞
10.064
∞
When d1 < d10, d1m (nm) =
9.229
0.603
19.062
10.036
46.531
When n2 ≧ n20, n2m =
0.0633008
0.0027478
0.0774658
0.0675293
0.1390137
When n2 < n20, n2m =
0.1171533
0.1127539
0.1100610
0.0218616
0.1442749
When k2 ≧ k20, k2m =
0.0639148
0.0025830
0.0457581
0.0823975
0.1098364
When k2 < k20, k2m =
0.0580542
0.0529590
0.0524817
0.0502942
0.0628650
When d2 ≧ d20, d2m (nm) =
∞
1.007
∞
∞
∞
When d2 < d20, d2m (nm) =
77.001
28.132
32.836
6.408
22.345
1.0 < NA ≦ 1.1
195 < T ≦ 205
34/34
Case
20-11
20-12
n10
1.6947635
1.6952371
k10
0.0610999
0.0566636
d10 (nm)
213.366
270.653
n20
1.6918971
1.6914186
k20
0.1679521
0.1751623
d20 (nm)
265.388
263.994
When n1 ≧ n10, n1m =
0.0863086
0.0772644
When n1 < n10, n1m =
0.0626501
0.0586890
When k1 ≧ k10, k1m =
0.0572302
0.0627917
When k1 < k10, k1m =
0.0322180
0.0382104
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
124.819
121.330
When n2 ≧ n20, n2m =
0.1702917
0.3021582
When n2 < n20, n2m =
0.1249365
0.2142798
When k2 ≧ k20, k2m =
0.1249084
0.2136462
When k2 < k20, k2m =
0.0643469
0.0826477
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
66.113
91.025.

6,839 more elements

An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of:

providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit:
nm) described below;
and
exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.1<NA ≦1.2, the antireflective film including an upper layer having a complex refractive index N1 , and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the equations N1=n1−k1i and N2=n2−k2i, respectively;
wherein assuming that the thickness of the upper layer is d1 (unit:
nm) and the thickness of the. lower layer is d2 (unit:
nm) , when any one of the combinations of values of [n10, k10, d10, n20, k20, d20] described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1,n2,k2, and d2 satisfy the relational expression
{(n1−n10)/(n1m−n10) }2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1;
a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10;
a value of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10;
a value of d1m in a corresponding case is selected on the basis of a magnitude relation between d1 and d10;a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20;
a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20;
and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20;
and
in the tables below, in the line of “When n1≧n10, n1m=”, each value in the right columns is “n1m−n10”;
in the line of “When n1<N10, n1m=”, each value in the right columns is “n10−n1m”;
in the line of “When k1≧k10, k1m”, each value in the right columns is “k1m−k10”;
in the line of “When k1<k10, k1m=”, each value in the right columns is ”k1m”;
in the line of “When d1≧d10, d1m (nm) =”, each value (unit:
nm) in the right columns is “d1m−d10”;
in the line of “When d1<d10, d1m (nm) =”, each value (unit:
nm) in the right columns is “d10−d1m”;
in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”;
in the line of “When n2<n20, n2m=”, each value in the right columns is “n20−n2m”;
in the line of “When k2≧k20, k2m=”, each value in the right columns is “k2m−k20”;
in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”;
in the line of “When d2≧d20, d2m (nm) =”, each value (unit:
nm) in the right columns is “d2m−d20”;
and in the line of 37 When d2<d20, d2m (nm) =”, each value (unit:
nm) in the right columns is “d20−d2m”.
1.1 < NA ≦ 1.2
2 ≦ T ≦ 15
1/27
Case
1-01
1-02
1-03
1-04
1-05
n10
2.0940641
1.9168406
1.8970115
1.8805879
1.8778358
k10
0.0325844
0.1807255
0.1529573
0.1098415
0.1082679
d10 (nm)
26.090
35.662
31.182
13.577
19.930
n20
4.2290158
5.4932306
2.4318401
1.7032895
1.8340760
k20
2.3935124
0.6123354
0.5958382
0.2751108
0.3677230
d20 (nm)
3.632
19.087
52.406
218.193
142.226
When n1 ≧ n10, n1m =
0.0779846
0.0720874
0.0701013
0.1012354
0.0784314
When n1 < n10, n1m =
0.0750281
0.0636047
0.0555591
0.0635571
0.0497058
When k1 ≧ k10, k1m =
0.0672229
0.0527649
0.0494641
0.0853247
0.0590771
When k1 < k10, k1m =
0.0325844
0.0849731
0.0840393
0.1029980
0.0867822
When d1 ≧ d10, d1m (nm) =
3.416
5.199
6.198
6.716
7.382
When d1 < d10, d1m (nm) =
2.721
3.845
3.923
3.853
3.873
When n2 ≧ n20, n2m =
0.2775293
0.1187439
0.1333862
0.1147803
0.1115393
When n2 < n20, n2m =
0.2711597
0.1202087
0.1603455
0.1449023
0.1457849
When k2 ≧ k20, k2m =
0.2845105
0.1470557
0.1794812
0.0967163
0.1467151
When k2 < k20, k2m =
0.2499512
0.1180896
0.1302063
0.0855334
0.0954285
When d2 ≧ d20, d2m (nm) =
0.458
0.467
5.440
∞
∞
When d2 < d20, d2m (nm) =
0.433
0.450
5.242
81.747
30.656
1.1 < NA ≦ 1.2
2 ≦ T ≦ 15
Case
1-06
1-07
1-08
1-09
1-10
n10
1.8663312
1.7888608
1.7735009
1.7175310
1.7199475
k10
0.0978132
0.1060865
0.0957437
0.0751352
0.0655065
d10 (nm)
12.232
103.503
98.181
95.409
94.621
n20
1.6938400
4.4234099
2.0208865
1.6658936
1.6963762
k20
0.2288643
0.4526804
0.4158741
0.2054797
0.1762614
d20 (nm)
277.705
24.164
66.693
212.937
266.043
When n1 ≧ n10, n1m =
0.1143909
0.0588428
0.0489270
0.0419214
0.0484180
When n1 < n10, n1m =
0.0786536
0.0104822
0.0094507
0.0157727
0.0265735
When k1 ≧ k10, k1m =
0.1033447
0.0215918
0.0249109
0.0382361
0.0520056
When k1 < k10, k1m =
0.0978132
0.0439624
0.0358655
0.0399121
0.0459387
When d1 ≧ d10, d1m (nm) =
7.609
9.370
10.912
18.272
51.841
When d1 < d10, d1m (nm) =
4.794
1.739
1.766
4.805
8.596
When n2 ≧ n20, n2m =
0.1069236
0.0468066
0.0740674
0.0384924
0.0631091
When n2 < n20, n2m =
0.1302808
0.1036670
0.1052673
0.0829468
0.0987561
When k2 ≧ k20, k2m =
0.0918579
0.0409717
0.0495154
0.0385596
0.0522119
When k2 < k20, k2m =
0.0786169
0.0807788
0.0903577
0.0528296
0.0515430
When d2 ≧ d20, d2m (nm) =
∞
0.296
4.999
∞
∞
When d2 < d20, d2m (nm) =
128.233
0.621
5.371
23.038
34.154
1.1 < NA ≦ 1.2
2 ≦ T ≦ 15
2/27
Case
1-11
1-12
1-13
1-14
1-15
n10
1.7156729
1.7043499
1.7082412
1.6926126
1.6890888
k10
0.0770168
0.0644952
0.0577629
0.0683906
0.0745003
d10 (nm)
188.315
165.315
163.169
237.184
217.718
n20
6.9620048
1.6731418
1.7075031
6.7859369
1.7770504
k20
3.4231449
0.1899705
0.1626792
2.9992529
0.3401503
d20 (nm)
0.879
207.250
259.766
0.993
84.925
When n1 ≧ n10, n1m =
0.0649841
0.0417419
0.0509473
0.0348376
0.0194055
When n1 < n10, n1m =
0.0083154
0.0317078
0.0477380
0.0764368
0.0607605
When k1 ≧ k10, k1m =
0.0257251
0.0333704
0.0433435
0.0403589
0.0329480
When k1 < k10, k1m =
0.0275232
0.0338538
0.0333484
0.0319214
0.0242554
When d1 ≧ d10, d1m (nm) =
38.959
∞
∞
19.483
9.981
When d1 < d10, d1m (nm) =
3.134
16.146
77.216
43.463
24.681
When n2 ≧ n20, n2m =
0.2971887
0.0474377
0.0745630
0.5633252
0.1177502
When n2 < n20, n2m =
0.6091602
0.0721411
0.0651379
0.4300269
0.0317639
When k2 ≧ k20, k2m =
0.2827808
0.0222888
0.0325830
0.2436438
0.0560791
When k2 < k20, k2m =
0.6937878
0.0478259
0.0479700
0.5647217
0.0980969
When d2 ≧ d20, d2m (nm) =
0.055
16.772
∞
0.120
16.691
When d2 < d20, d2m (nm) =
0.135
19.208
16.504
0.176
3.670
1.1 < NA ≦ 1.2
2 ≦ T ≦ 15
Case
1-16
1-17
1-18
1-19
n10
1.6903292
1.6921355
1.6951475
1.7004017
k10
0.0721915
0.0670288
0.0546351
0.0599028
d10 (nm)
210.963
207.063
219.259
265.986
n20
1.7111030
1.6978167
1.6889102
1.7029410
k20
0.2426612
0.1954345
0.1606659
0.1992607
d20 (nm)
155.846
222.387
263.728
214.965
When n1 ≧ n10, n1m =
0.0284180
0.0456091
0.0773694
0.0612244
When n1 < n10, n1m =
0.0510327
0.0467078
0.0619885
0.0410486
When k1 ≧ k10, k1m =
0.0455554
0.0511133
0.0524768
0.0499927
When k1 < k10, k1m =
0.0320984
0.0388074
0.0353687
0.0377380
When d1 ≧ d10, d1m (nm) =
23.770
∞
∞
∞
When d1 < d10, d1m (nm) =
28.472
31.416
128.164
94.534
When n2 ≧ n20, n2m =
0.1260327
0.1631665
0.2120154
0.2674829
When n2 < n20, n2m =
0.0663647
0.1722144
0.1079456
0.2316101
When k2 ≧ k20, k2m =
0.0960291
0.1259009
0.1121619
0.2074023
When k2 < k20, k2m =
0.0846741
0.0757690
0.0591858
0.0894751
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
12.288
72.281
78.597
77.855
1.1 < NA ≦ 1.2
15 < T ≦ 25
3/27
Case
2-01
2-02
2-03
2-04
2-05
n10
1.8738578
1.8839217
1.8842367
1.8705650
1.7997475
k10
0.2051029
0.1169859
0.1130268
0.1010320
0.1076402
d10 (nm)
37.506
20.540
14.059
12.433
101.817
n20
6.9151921
1.8488520
1.7087850
1.6946915
5.7702673
k20
0.6847654
0.3990514
0.2917115
0.2394813
0.5312541
d20 (nm)
14.288
132.865
208.377
268.610
17.283
When n1 ≧ n10, n1m =
0.0713965
0.0757019
0.0971472
0.1115784
0.0520068
When n1 < n10, n1m =
0.0555054
0.0476453
0.0599609
0.0759399
0.0098120
When k1 ≧ k10, k1m =
0.0541125
0.0561304
0.0804553
0.1002258
0.0237036
When k1 < k10, k1m =
0.0773486
0.0843945
0.1004919
0.1010320
0.0377808
When d1 ≧ d10, d1m (nm) =
5.211
6.923
6.482
7.316
8.566
When d1 < d10, d1m (nm) =
3.920
3.580
3.648
4.569
1.552
When n2 ≧ n20, n2m =
0.1375024
0.1133521
0.1126624
0.1051160
0.0578821
When n2 < n20, n2m =
0.1468335
0.1457764
0.1432654
0.1327966
0.1020337
When k2 ≧ k20, k2m =
0.1698267
0.1546228
0.0978870
0.0916199
0.0398865
When k2 < k20, k2m =
0.1355151
0.0979541
0.0869165
0.0797766
0.0850256
When d2 ≧ d20, d2m (nm) =
0.302
∞
∞
∞
0.186
When d2 < d20, d2m (nm) =
0.308
25.359
77.278
123.573
0.315
1.1 < NA ≦ 1.2
15 < T ≦ 25
Case
2-06
2-07
2-08
2-09
2-10
n10
1.7189014
1.7208712
1.7236639
1.7047019
1.7084293
k10
0.0782837
0.0678223
0.0843652
0.0670962
0.0597123
d10 (nm)
95.289
94.558
181.922
165.192
163.108
n20
1.6643388
1.6960341
5.6387216
1.6715149
1.7074208
k20
0.2165956
0.1841027
4.7363270
0.1999125
0.1697699
d20 (nm)
204.139
257.386
0.821
198.564
251.199
When n1 ≧ n10, n1m =
0.0400110
0.0468091
0.0526855
0.0398865
0.0490320
When n1 < n10, n1m =
0.0126721
0.0238684
0.0001306
0.0279565
0.0460034
When k1 ≧ k10, k1m =
0.0335376
0.0489734
0.0020081
0.0268384
0.0389331
When k1 < k10, k1m =
0.0373218
0.0446973
0.0057251
0.0295178
0.0306982
When d1 ≧ d10, d1m (nm) =
16.137
28.984
27.528
∞
∞
When d1 < d10, d1m (nm) =
3.682
7.422
0.042
13.795
27.544
When n2 ≧ n20, n2m =
0.0331177
0.0610901
0.0075977
0.0397839
0.0734460
When n2 < n20, n2m =
0.0802783
0.0961804
0.6135461
0.0646704
0.0518091
When k2 ≧ k20, k2m =
0.0326062
0.0485974
0.0047754
0.0159570
0.0275537
When k2 < k20, k2m =
0.0528589
0.0519092
0.7998767
0.0474854
0.0482410
When d2 ≧ d20, d2m (nm) =
∞
∞
0.001
11.667
∞
When d2 < d20, d2m (nm) =
20.507
30.742
0.141
16.953
13.761
1.1 < NA ≦ 1.2
15 < T ≦ 25
4/27
Case
2-11
2-12
2-13
2-14
2-15
n10
1.6912240
1.6881032
1.6896993
1.6917374
1.6948846
k10
0.0750717
0.0788193
0.0752193
0.0692921
0.0562662
d10 (nm)
235.933
218.423
211.247
207.206
219.172
n20
5.6089359
1.7881557
1.7110684
1.6970724
1.6877325
k20
4.1789938
0.3823123
0.2595743
0.2053429
0.1673191
d20 (nm)
0.921
76.059
147.061
213.576
255.276
When n1 ≧ n10, n1m =
0.0197583
0.0081677
0.0235974
0.0421069
0.0510120
When n1 < n10, n1m =
0.0774451
0.0583032
0.0505896
0.0462817
0.0590515
When k1 ≧ k10, k1m =
0.0246448
0.0223682
0.0406641
0.0495398
0.0510083
When k1 < k10, k1m =
0.0218396
0.0175671
0.0286658
0.0376331
0.0343799
When d1 ≧ d10, d1m (nm) =
6.504
3.634
18.131
∞
∞
When d1 < d10, d1m (nm) =
42.587
22.206
26.432
29.901
81.491
When n2 ≧ n20, n2m =
0.6544434
0.1247424
0.1252808
0.1545593
0.2162573
When n2 < n20, n2m =
0.2325012
0.0171619
0.0503735
0.1749207
0.1048962
When k2 ≧ k20, k2m =
0.1484387
0.0366235
0.0860120
0.1212268
0.1092822
When k2 < k20, k2m =
0.6595715
0.1036670
0.0844458
0.0781323
0.0604700
When d2 ≧ d20, d2m (nm) =
0.071
14.060
∞
∞
∞
When d2 < d20, d2m (nm) =
0.195
1.711
9.636
69.774
76.197
1.1 < NA ≦ 1.2
15 < T ≦ 25
Case
2-16
2-17
n10
1.7002883
1.6987256
k10
0.0618224
0.0572006
d10 (nm)
266.113
264.952
n20
1.7025341
1.6934905
k20
0.2096252
0.1744162
d20 (nm)
206.193
266.771
When n1 ≧ n10, n1m =
0.0602454
0.0764587
When n1 < n10, n1m =
0.0381921
0.0594568
When k1 ≧ k10, k1m =
0.0482422
0.0536096
When k1 < k10, k1m =
0.0371497
0.0384741
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
92.805
173.726
When n2 ≧ n20, n2m =
0.2779004
0.2751611
When n2 < n20, n2m =
0.2377234
0.2053577
When k2 ≧ k20, k2m =
0.2066309
0.2211816
When k2 < k20, k2m =
0.0931018
0.0797998
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
73.805
125.295
1.1 < NA ≦ 1.2
25 < T ≦ 35
5/27
Case
3-01
3-02
3-03
3-04
3-05
n10
1.8384852
1.8997218
1.8867733
1.8774399
1.8168537
k10
0.2367471
0.1227276
0.1201944
0.1030917
0.1206742
d10 (nm)
38.632
21.226
14.426
12.555
98.976
n20
4.7928214
1.8945709
1.7066853
1.6978346
5.6725781
k20
0.7766058
0.4412749
0.3085187
0.2515853
0.5943855
d20 (nm)
20.034
121.762
200.277
259.495
16.950
When n1 ≧ n10, n1m =
0.0640527
0.0719128
0.0931812
0.1089819
0.0387244
When n1 < n10, n1m =
0.0455762
0.0458093
0.0565320
0.0737622
0.0048828
When k1 ≧ k10, k1m =
0.0510876
0.0524744
0.0764050
0.0973877
0.0168860
When k1 < k10, k1m =
0.0717981
0.0817957
0.0981750
0.1030917
0.0269836
When d1 ≧ d10, d1m (nm) =
4.733
6.228
6.172
6.944
6.776
When d1 < d10, d1m (nm) =
3.444
3.186
3.418
4.320
0.695
When n2 ≧ n20, n2m =
0.1712317
0.1175342
0.1094324
0.1025208
0.0610400
When n2 < n20, n2m =
0.1852917
0.1447205
0.1408899
0.1358679
0.1030127
When k2 ≧ k20, k2m =
0.2079944
0.1727771
0.0971545
0.0913745
0.0239368
When k2 < k20, k2m =
0.1709546
0.1005322
0.0873328
0.0807227
0.0995679
When d2 ≧ d20, d2m (nm) =
0.789
∞
∞
∞
0.191
When d2 < d20, d2m (nm) =
0.773
21.526
73.345
89.127
0.308
1.1 < NA ≦ 1.2
25 < T ≦ 35
Case
3-06
3-07
3-08
3-09
3-10
n10
1.7203847
1.7222308
1.7051744
1.7089344
1.6891179
k10
0.0818178
0.0703272
0.0699535
0.0618729
0.0788518
d10 (nm)
95.097
94.450
164.924
162.999
211.328
n20
1.6625491
1.6972414
1.6707295
1.7091982
1.7121044
k20
0.2295920
0.1929579
0.2115581
0.1777196
0.2799946
d20 (nm)
195.706
248.789
190.095
242.642
139.125
When n1 ≧ n10, n1m =
0.0370166
0.0449036
0.0362634
0.0468103
0.0189148
When n1 < n10, n1m =
0.0096326
0.0211206
0.0148706
0.0438916
0.0495532
When k1 ≧ k10, k1m =
0.0279895
0.0455884
0.0190686
0.0333899
0.0327563
When k1 < k10, k1m =
0.0346558
0.0433374
0.0247266
0.0269507
0.0238696
When d1 ≧ d10, d1m (nm) =
14.187
22.312
∞
∞
9.561
When d1 < d10, d1m (nm) =
2.673
6.291
5.065
24.312
23.646
When n2 ≧ n20, n2m =
0.0267200
0.0590454
0.0307410
0.0721521
0.1253455
When n2 < n20, n2m =
0.0766724
0.0932019
0.0523315
0.0386328
0.0336450
When k2 ≧ k20, k2m =
0.0255017
0.0445288
0.0095300
0.0215259
0.0725635
When k2 < k20, k2m =
0.0521814
0.0521948
0.0465356
0.0485632
0.0779358
When d2 ≧ d20, d2m (nm) =
∞
∞
7.007
43.167
∞
When d2 < d20, d2m (nm) =
18.077
28.239
14.543
10.181
6.908
1.1 < NA ≦ 1.2
25 < T ≦ 35
6/27
Case
3-11
3-12
3-13
3-14
n10
1.6914863
1.6947006
1.7002933
1.6987290
k10
0.0717884
0.0580661
0.0640004
0.0588877
d10 (nm)
207.154
219.137
266.055
264.992
n20
1.6970451
1.6875442
1.7022941
1.6933668
k20
0.2167627
0.1751428
0.2216801
0.1822428
d20 (nm)
205.768
246.865
198.139
258.415
When n1 ≧ n10, n1m =
0.0385889
0.0449475
0.0561011
0.0760583
When n1 < n10, n1m =
0.0454712
0.0531458
0.0356934
0.0583093
When k1 ≧ k10, k1m =
0.0478943
0.0493811
0.0460974
0.0520996
When k1 < k10, k1m =
0.0361658
0.0330811
0.0363293
0.0375061
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
28.219
77.448
91.180
121.680
When n2 ≧ n20, n2m =
0.1522107
0.2230298
0.2904858
0.2858545
When n2 < n20, n2m =
0.1781921
0.1009351
0.2457825
0.2068896
When k2 ≧ k20, k2m =
0.1157642
0.1063892
0.2056812
0.2216101
When k2 < k20, k2m =
0.0805957
0.0617065
0.0977039
0.0829004
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
66.127
48.464
70.211
121.644
1.1 < NA ≦ 1.2
35 < T ≦ 45
Case
4-01
4-02
4-03
4-04
4-05
n10
1.8909619
1.9211597
1.8908364
1.8788634
1.7209142
k10
0.2198688
0.1299283
0.1293290
0.1089981
0.0850231
d10 (nm)
30.886
20.325
14.409
12.666
94.685
n20
2.4457650
1.8999891
1.6971949
1.6934061
1.6569532
k20
0.9042920
0.4762728
0.3219355
0.2597468
0.2398462
d20 (nm)
40.480
114.977
192.850
251.595
187.582
When n1 ≧ n10, n1m =
0.0581348
0.0702795
0.0908240
0.1067529
0.0340771
When n1 < n10, n1m =
0.0408777
0.0430811
0.0541882
0.0719214
0.0077319
When k1 ≧ k10, k1m =
0.0449243
0.0499243
0.0741248
0.0961597
0.0239465
When k1 < k10, k1m =
0.0797229
0.0798120
0.0963696
0.1066907
0.0329150
When d1 ≧ d10, d1m (nm) =
4.322
5.448
5.786
6.719
11.856
When d1 < d10, d1m (nm) =
2.642
2.634
3.166
4.161
2.071
When n2 ≧ n20, n2m =
0.1853430
0.1162805
0.1041772
0.0995618
0.0224622
When n2 < n20, n2m =
0.1757385
0.1461218
0.1390881
0.1365247
0.0731372
When k2 ≧ k20, k2m =
0.2033411
0.1671118
0.0936316
0.0897620
0.0193579
When k2 < k20, k2m =
0.1615027
0.0988000
0.0865491
0.0806287
0.0502966
When d2 ≧ d20, d2m (nm) =
5.473
∞
∞
∞
13.590
When d2 < d20, d2m (nm) =
4.339
20.871
70.442
87.096
16.661
1.1 < NA ≦ 1.2
35 < T ≦ 45
7/27
Case
4-06
4-07
4-08
4-09
4-10
n10
1.7236493
1.7053690
1.7096103
1.6884398
1.6913141
k10
0.0725136
0.0723352
0.0638708
0.0822671
0.0737244
d10 (nm)
94.253
164.385
162.799
210.788
206.649
n20
1.6994520
1.6690598
1.7121782
1.7077650
1.6954335
k20
0.2004026
0.2212238
0.1844639
0.2979850
0.2262249
d20 (nm)
239.752
181.544
233.616
132.459
199.430
When n1 ≧ n10, n1m =
0.0432617
0.0328076
0.0449390
0.0103259
0.0357813
When n1 < n10, n1m =
0.0189111
0.0081836
0.0418201
0.0476318
0.0441882
When k1 ≧ k10, k1m =
0.0428613
0.0134167
0.0270105
0.0240100
0.0467419
When k1 < k10, k1m =
0.0419373
0.0221985
0.0217126
0.0186353
0.0353625
When d1 ≧ d10, d1m (nm) =
19.395
21.834
∞
7.013
∞
When d1 < d10, d1m (nm) =
5.406
2.666
6.246
21.283
26.527
When n2 ≧ n20, n2m =
0.0587073
0.0279724
0.0684412
0.1217639
0.1437500
When n2 < n20, n2m =
0.0913135
0.0359949
0.0242969
0.0190967
0.1057874
When k2 ≧ k20, k2m =
0.0407703
0.0058350
0.0150317
0.0602039
0.1122632
When k2 < k20, k2m =
0.0523291
0.0449670
0.0490210
0.0601965
0.0826379
When d2 ≧ d20, d2m (nm) =
∞
4.683
36.767
∞
∞
When d2 < d20, d2m (nm) =
25.916
13.275
6.151
3.566
25.291
1.1 < NA ≦ 1.2
35 < T ≦ 45
Case
4-11
4-12
4-13
n10
1.6945163
1.7002615
1.6987767
k10
0.0596605
0.0658973
0.0602453
d10 (nm)
219.093
265.562
264.538
n20
1.6879518
1.6991117
1.6924357
k20
0.1823501
0.2320843
0.1888152
d20 (nm)
237.943
190.875
250.808
When n1 ≧ n10, n1m =
0.0400159
0.0514929
0.0760449
When n1 < n10, n1m =
0.0454590
0.0339758
0.0578162
When k1 ≧ k10, k1m =
0.0478894
0.0439832
0.0508728
When k1 < k10, k1m =
0.0318921
0.0347144
0.0365662
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
53.950
89.870
117.603
When n2 ≧ n20, n2m =
0.2316992
0.3028357
0.2948633
When n2 < n20, n2m =
0.0956519
0.2532336
0.2085193
When k2 ≧ k20, k2m =
0.1045911
0.2056006
0.2209802
When k2 < k20, k2m =
0.0612427
0.1002246
0.0860327
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
40.957
67.613
80.377
1.1 < NA ≦ 1.2
45 < T ≦ 55
8/27
Case
5-01
5-02
5-03
5-04
5-05
n10
1.9413239
1.8877645
1.8798429
1.7202563
1.7249517
k10
0.1405566
0.1445306
0.1135692
0.0870823
0.0739360
d10 (nm)
18.043
14.095
12.637
94.214
94.041
n20
1.8442891
1.6688638
1.6888514
1.6489031
1.7027050
k20
0.4845639
0.3235014
0.2638544
0.2445724
0.2047377
d20 (nm)
113.109
187.292
243.053
179.182
229.905
When n1 ≧ n10, n1m =
0.0724768
0.0904346
0.1062329
0.0324084
0.0425623
When n1 < n10, n1m =
0.0387427
0.0534119
0.0716968
0.0082080
0.0177209
When k1 ≧ k10, k1m =
0.0483630
0.0753357
0.0968298
0.0243140
0.0418030
When k1 < k10, k1m =
0.0803040
0.0945715
0.1060376
0.0343469
0.0406653
When d1 ≧ d10, d1m (nm) =
4.823
5.486
6.573
10.670
17.560
When d1 < d10, d1m (nm) =
2.042
3.025
4.077
2.161
4.892
When n2 ≧ n20, n2m =
0.1074292
0.0972339
0.0967822
0.0242322
0.0621313
When n2 < n20, n2m =
0.1555688
0.1383643
0.1358411
0.0727905
0.0930249
When k2 ≧ k20, k2m =
0.1308459
0.0862097
0.0881348
0.0180859
0.0388489
When k2 < k20, k2m =
0.0911877
0.0843787
0.0806641
0.0488940
0.0530957
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
10.287
∞
When d2 < d20, d2m (nm) =
20.712
69.838
88.098
16.560
20.064
1.1 < NA ≦ 1.2
45 < T ≦ 55
Case
5-06
5-07
5-08
5-09
5-10
n10
1.7053831
1.7104785
1.6877471
1.6915115
1.6941672
k10
0.0736370
0.0654156
0.0844092
0.0739491
0.0608347
d10 (nm)
163.843
162.671
209.661
205.513
218.889
n20
1.6671854
1.7160090
1.6959640
1.6904122
1.6879018
k20
0.2267475
0.1885946
0.3073448
0.2298496
0.1872431
d20 (nm)
172.382
223.774
127.018
196.556
228.501
When n1 ≧ n10, n1m =
0.0309619
0.0440515
0.0051978
0.0335425
0.0357227
When n1 < n10, n1m =
0.0112268
0.0078247
0.0453333
0.0430493
0.0410388
When k1 ≧ k10, k1m =
0.0149072
0.0196375
0.0173291
0.0473206
0.0467871
When k1 < k10, k1m =
0.0262830
0.0141846
0.0154602
0.0372058
0.0305029
When d1 ≧ d10, d1m (nm) =
19.247
∞
2.276
∞
∞
When d1 < d10, d1m (nm) =
3.447
2.046
19.587
24.997
50.391
When n2 ≧ n20, n2m =
0.0348413
0.0672729
0.1107800
0.1391333
0.2394653
When n2 < n20, n2m =
0.0292676
0.0106921
0.0107263
0.0732312
0.0890649
When k2 ≧ k20, k2m =
0.0073389
0.0081616
0.0597644
0.1152246
0.1047815
When k2 < k20, k2m =
0.0445459
0.0504346
0.0379138
0.0797473
0.0602527
When d2 ≧ d20, d2m (nm) =
6.326
35.781
32.689
∞
∞
When d2 < d20, d2m (nm) =
11.802
2.505
1.901
20.558
36.515
1.1 < NA ≦ 1.2
45 < T ≦ 55
9/27
Case
5-11
5-12
5-13
n10
1.6941096
1.7000691
1.6987341
k10
0.0560046
0.0669711
0.0608862
d10 (nm)
215.482
264.757
263.855
n20
1.6938988
1.6924460
1.6911373
k20
0.1599964
0.2378630
0.1924284
d20 (nm)
287.470
184.028
243.250
When n1 ≧ n10, n1m =
0.0468335
0.0484424
0.0766663
When n1 < n10, n1m =
0.0625427
0.0333350
0.0582520
When k1 ≧ k10, k1m =
0.0574133
0.0424146
0.0503235
When k1 < k10, k1m =
0.0373425
0.0336023
0.0357239
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
47.031
45.336
115.043
When n2 ≧ n20, n2m =
0.2184277
0.3156848
0.3032751
When n2 < n20, n2m =
0.1528296
0.2586377
0.2107019
When k2 ≧ k20, k2m =
0.1238171
0.2073083
0.2191870
When k2 < k20, k2m =
0.0588196
0.0981323
0.0862329
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
85.352
66.135
78.131
1.1 < NA ≦ 1.2
55 < T ≦ 65
Case
6-01
6-02
6-03
6-04
6-05
n10
1.8998120
1.9599431
1.8792360
1.8920036
1.7198405
k10
0.2622743
0.1538418
0.1119058
0.0671877
0.0878543
d10 (nm)
21.573
15.993
12.895
11.926
93.971
n20
1.6944131
1.7907917
1.6940206
1.7462722
1.6452515
k20
0.7809017
0.4780154
0.2681658
0.2347435
0.2473168
d20 (nm)
53.320
111.028
231.714
280.522
169.419
When n1 ≧ n10, n1m =
0.0603137
0.0799158
0.1051331
0.1164221
0.0325574
When n1 < n10, n1m =
0.0246228
0.0339001
0.0713818
0.0790796
0.0109656
When k1 ≧ k10, k1m =
0.0436731
0.0463733
0.0957117
0.1011499
0.0282458
When k1 < k10, k1m =
0.0527222
0.0842969
0.1045093
0.0671877
0.0383301
When d1 ≧ d10, d1m (nm) =
3.630
4.315
6.630
7.111
10.486
When d1 < d10, d1m (nm) =
1.338
1.548
4.149
4.416
2.879
When n2 ≧ n20, n2m =
0.1220337
0.0996899
0.0944202
0.0992114
0.0312585
When n2 < n20, n2m =
0.0963342
0.1728088
0.1384424
0.1517053
0.0751245
When k2 ≧ k20, k2m =
0.0896167
0.0986731
0.0889478
0.0981226
0.0215662
When k2 < k20, k2m =
0.0868945
0.0892566
0.0826782
0.0802551
0.0503503
When d2 ≧ d20, d2m (nm) =
14.581
∞
∞
∞
10.833
When d2 < d20, d2m (nm) =
7.202
14.530
88.193
126.095
17.275
1.1 < NA ≦ 1.2
55 < T ≦ 65
10/27
Case
6-06
6-07
6-08
6-09
6-10
n10
1.7267515
1.7286377
1.7058235
1.6871196
1.6936372
k10
0.0746914
0.0697592
0.0740364
0.0856014
0.0616799
d10 (nm)
93.982
94.711
163.674
208.540
218.466
n20
1.7088385
1.7257237
1.6690540
1.6832134
1.6877720
k20
0.2076415
0.1796886
0.2306007
0.3092532
0.1900717
d20 (nm)
218.911
273.487
161.946
121.170
218.772
When n1 ≧ n10, n1m =
0.0431396
0.0483069
0.0312061
0.0049573
0.0327710
When n1 < n10, n1m =
0.0172424
0.0116125
0.0175793
0.0417786
0.0401648
When k1 ≧ k10, k1m =
0.0418896
0.0318958
0.0202844
0.0152393
0.0462805
When k1 < k10, k1m =
0.0396252
0.0362695
0.0328467
0.0174036
0.0298352
When d1 ≧ d10, d1m (nm) =
17.247
40.127
17.394
2.172
∞
When d1 < d10, d1m (nm) =
4.621
3.300
5.870
18.309
47.643
When n2 ≧ n20, n2m =
0.0684570
0.0868091
0.0312744
0.1009155
0.2431030
When n2 < n20, n2m =
0.0962207
0.1095422
0.0318677
0.0098169
0.0838513
When k2 ≧ k20, k2m =
0.0394080
0.0515259
0.0123767
0.0719922
0.1060815
When k2 < k20, k2m =
0.0553357
0.0549243
0.0471436
0.0304236
0.0607056
When d2 ≧ d20, d2m (nm) =
∞
∞
9.995
25.676
∞
When d2 < d20, d2m (nm) =
15.791
73.815
10.017
1.682
28.435
1.1 < NA ≦ 1.2
55 < T ≦ 65
Case
6-11
6-12
n10
1.6996002
1.6985143
k10
0.0674630
0.0611760
d10 (nm)
264.231
263.586
n20
1.6851097
1.6903246
k20
0.2396601
0.1936289
d20 (nm)
175.944
234.054
When n1 ≧ n10, n1m =
0.0469604
0.0772302
When n1 < n10, n1m =
0.0345850
0.0600415
When k1 ≧ k10, k1m =
0.0413989
0.0503625
When k1 < k10, k1m =
0.0326746
0.0352795
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
35.789
113.370
When n2 ≧ n20, n2m =
0.3361853
0.3175012
When n2 < n20, n2m =
0.2595898
0.2115027
When k2 ≧ k20, k2m =
0.2087170
0.2189661
When k2 < k20, k2m =
0.0954248
0.0859949
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
64.780
74.733
1.1 < NA ≦ 1.2
65 < T ≦ 75
11/27
Case
7-01
7-02
7-03
7-04
7-05
n10
1.8814830
1.9657443
1.8787154
1.8913468
1.7209187
k10
0.2936564
0.1688741
0.1109169
0.0695388
0.0883668
d10 (nm)
22.098
15.852
13.263
12.162
94.055
n20
1.6321609
1.7726563
1.6996278
1.7469121
1.6482914
k20
0.8097385
0.4923001
0.2745566
0.2387131
0.2540527
d20 (nm)
46.190
103.170
220.404
270.807
158.511
When n1 ≧ n10, n1m =
0.0656360
0.0817346
0.1037085
0.1149512
0.0333252
When n1 < n10, n1m =
0.0241089
0.0282544
0.0702112
0.0769897
0.0127490
When k1 ≧ k10, k1m =
0.0378577
0.0400220
0.0934888
0.0991272
0.0301257
When k1 < k10, k1m =
0.0323035
0.0824512
0.1025916
0.0695388
0.0388867
When d1 ≧ d10, d1m (nm) =
3.610
3.980
6.711
7.159
10.691
When d1 < d10, d1m (nm) =
1.297
1.237
4.191
4.366
3.330
When n2 ≧ n20, n2m =
0.1024585
0.0947095
0.0935791
0.1004138
0.0355066
When n2 < n20, n2m =
0.0645630
0.1828857
0.1422339
0.1540833
0.0767798
When k2 ≧ k20, k2m =
0.0898303
0.0894482
0.0904114
0.0989551
0.0244946
When k2 < k20, k2m =
0.1003796
0.0949036
0.0851941
0.0816284
0.0535193
When d2 ≧ d20, d2m (nm) =
11.613
∞
∞
∞
11.010
When d2 < d20, d2m (nm) =
4.416
10.112
84.053
124.915
16.505
1.1 < NA ≦ 1.2
65 < T ≦ 75
Case
7-06
7-07
7-08
7-09
7-10
n10
1.7288665
1.7286370
1.7068032
1.6862856
1.6931399
k10
0.0756184
0.0709992
0.0744994
0.0878163
0.0624918
d10 (nm)
94.090
94.923
163.814
208.124
217.968
n20
1.7153723
1.7241262
1.6739446
1.6736237
1.6872372
k20
0.2125971
0.1831189
0.2371534
0.3138657
0.1926334
d20 (nm)
207.924
263.961
151.052
112.320
209.546
When n1 ≧ n10, n1m =
0.0437573
0.0483350
0.0322754
0.0025049
0.0316833
When n1 < n10, n1m =
0.0164966
0.0099878
0.0175537
0.0409570
0.0419177
When k1 ≧ k10, k1m =
0.0410425
0.0291785
0.0221094
0.0095605
0.0459827
When k1 < k10, k1m =
0.0388428
0.0344531
0.0333215
0.0151172
0.0300720
When d1 ≧ d10, d1m (nm) =
17.329
38.775
18.851
1.009
∞
When d1 < d10, d1m (nm) =
4.318
2.813
6.154
17.032
45.887
When n2 ≧ n20, n2m =
0.0710437
0.0893457
0.0302136
0.1037878
0.2406421
When n2 < n20, n2m =
0.0969080
0.1083484
0.0331750
0.0056763
0.0830054
When k2 ≧ k20, k2m =
0.0400586
0.0500842
0.0147241
0.0658289
0.1059290
When k2 < k20, k2m =
0.0574512
0.0562378
0.0506323
0.0175342
0.0630762
When d2 ≧ d20, d2m (nm) =
∞
∞
10.293
26.205
∞
When d2 < d20, d2m (nm) =
13.701
72.849
8.984
0.992
28.220
1.1 < NA ≦ 1.2
65 < T ≦ 75
12/27
Case
7-11
7-12
7-13
n10
1.6935780
1.6987845
1.6982075
k10
0.0575917
0.0682876
0.0620058
d10 (nm)
214.501
264.829
264.409
n20
1.6927449
1.6826884
1.6907687
k20
0.1631490
0.2430960
0.1959423
d20 (nm)
269.036
164.540
222.065
When n1 ≧ n10, n1m =
0.0479456
0.0478223
0.0756042
When n1 < n10, n1m =
0.0597888
0.0375256
0.0523840
When k1 ≧ k10, k1m =
0.0567029
0.0406042
0.0502747
When k1 < k10, k1m =
0.0379382
0.0306238
0.0354358
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
42.775
36.115
105.289
When n2 ≧ n20, n2m =
0.2180396
0.3702002
0.3412915
When n2 < n20, n2m =
0.1575122
0.2565369
0.2093115
When k2 ≧ k20, k2m =
0.1278589
0.2070850
0.2215063
When k2 < k20, k2m =
0.0614197
0.0951270
0.0864294
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
81.766
63.144
76.945
1.1 < NA ≦ 1.2
75 < T ≦ 85
Case
8-01
8-02
8-03
8-04
8-05
n10
1.8508920
1.9432602
1.8788012
1.8809660
1.8914032
k10
0.3299462
0.1828608
0.1571474
0.1122948
0.0691945
d10 (nm)
26.713
18.534
15.200
13.670
12.762
n20
1.6561984
1.7922587
1.6553949
1.7045069
1.7559855
k20
1.0215947
0.5435792
0.3498651
0.2862016
0.2487147
d20 (nm)
31.481
89.452
157.519
210.391
259.753
When n1 ≧ n10, n1m =
0.0584900
0.0721143
0.0859290
0.1006885
0.1098987
When n1 < n10, n1m =
0.0118384
0.0258594
0.0490076
0.0672168
0.0736646
When k1 ≧ k10, k1m =
0.0281628
0.0341772
0.0681653
0.0888281
0.0935315
When k1 < k10, k1m =
0.0027112
0.0735254
0.0892920
0.1016174
0.0691945
When d1 ≧ d10, d1m (nm) =
3.227
4.317
5.436
6.605
7.111
When d1 < d10, d1m (nm) =
0.304
1.291
2.967
4.063
4.341
When n2 ≧ n20, n2m =
0.1267358
0.0961279
0.0835156
0.0933350
0.1000793
When n2 < n20, n2m =
0.0093018
0.1747852
0.1389221
0.1466003
0.1520386
When k2 ≧ k20, k2m =
0.0170300
0.1198535
0.0846472
0.0918018
0.1012305
When k2 < k20, k2m =
0.1219019
0.1040369
0.0912122
0.0867468
0.0829492
When d2 ≧ d20, d2m (nm) =
8.195
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
0.369
9.559
36.990
78.480
119.640
1.1 < NA ≦ 1.2
75 < T ≦ 85
13/27
Case
8-06
8-07
8-08
8-09
8-10
n10
1.7233184
1.7297992
1.7292921
1.7076375
1.6902915
k10
0.0905387
0.0774990
0.0722395
0.0765186
0.0790058
d10 (nm)
94.254
94.232
94.957
163.992
206.654
n20
1.6520214
1.7157415
1.7247476
1.6752795
1.6879680
k20
0.2670378
0.2209454
0.1892941
0.2482558
0.2475793
d20 (nm)
148.504
198.899
254.857
141.650
161.284
When n1 ≧ n10, n1m =
0.0327246
0.0427734
0.0473462
0.0318115
0.0212964
When n1 < n10, n1m =
0.0093958
0.0147302
0.0094299
0.0087695
0.0407813
When k1 ≧ k10, k1m =
0.0245129
0.0376636
0.0278931
0.0137170
0.0408545
When k1 < k10, k1m =
0.0384680
0.0381934
0.0341284
0.0285461
0.0259851
When d1 ≧ d10, d1m (nm) =
10.366
16.607
38.446
19.131
18.064
When d1 < d10, d1m (nm) =
2.389
3.804
2.614
2.661
24.299
When n2 ≧ n20, n2m =
0.0285376
0.0673352
0.0815320
0.0313904
0.1426208
When n2 < n20, n2m =
0.0743250
0.0929968
0.1051160
0.0237683
0.0535938
When k2 ≧ k20, k2m =
0.0198962
0.0371387
0.0465576
0.0076379
0.0976270
When k2 < k20, k2m =
0.0547290
0.0576892
0.0565930
0.0508740
0.0749768
When d2 ≧ d20, d2m (nm) =
8.585
∞
∞
6.981
∞
When d2 < d20, d2m (nm) =
13.959
13.822
33.284
7.469
13.904
1.1 < NA ≦ 1.2
75 < T ≦ 85
Case
8-11
8-12
8-13
8-14
8-15
n10
1.6929156
1.6935338
1.6984313
1.6980068
1.6970347
k10
0.0637318
0.0581307
0.0697413
0.0633264
0.0530849
d10 (nm)
217.693
214.870
266.256
265.782
275.682
n20
1.6856131
1.6920922
1.6871666
1.6912942
1.6884244
k20
0.1973081
0.1667488
0.2538157
0.2022310
0.1714348
d20 (nm)
201.188
259.776
152.235
210.360
256.304
When n1 ≧ n10, n1m =
0.0321716
0.0471802
0.0486719
0.0738318
0.0569543
When n1 < n10, n1m =
0.0414331
0.0603931
0.0363989
0.0470300
0.0427893
When k1 ≧ k10, k1m =
0.0451428
0.0559961
0.0398804
0.0494763
0.0598206
When k1 < k10, k1m =
0.0289417
0.0378210
0.0291638
0.0345105
0.0376172
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
45.410
42.667
37.515
100.900
104.445
When n2 ≧ n20, n2m =
0.2377576
0.2179382
0.2594739
0.3590393
0.2768311
When n2 < n20, n2m =
0.0859351
0.1565027
0.2556433
0.2089795
0.2197266
When k2 ≧ k20, k2m =
0.1024292
0.1246008
0.1994592
0.2211169
0.1929004
When k2 < k20, k2m =
0.0656946
0.0632471
0.1014087
0.0895886
0.0738538
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
33.167
82.155
62.366
73.160
83.598
1.1 < NA ≦ 1.2
85 < T ≦ 95
14/27
Case
9-01
9-02
9-03
9-04
9-05
n10
1.9192397
1.8910111
1.8874292
1.8928956
1.7266669
k10
0.1987767
0.1570861
0.1170062
0.0800147
0.0953661
d10 (nm)
21.654
15.844
13.907
12.695
94.323
n20
1.8264016
1.6782576
1.7063011
1.7424852
1.6542284
k20
0.6189774
0.3828036
0.3024107
0.2571531
0.2869718
d20 (nm)
76.882
146.288
201.867
254.323
139.595
When n1 ≧ n10, n1m =
0.0649170
0.0821021
0.0973254
0.1089844
0.0299609
When n1 < n10, n1m =
0.0262927
0.0442981
0.0631677
0.0721631
0.0018164
When k1 ≧ k10, k1m =
0.0313647
0.0611023
0.0836865
0.0928955
0.0075598
When k1 < k10, k1m =
0.0678699
0.0898816
0.1010254
0.0800147
0.0251917
When d1 ≧ d10, d1m (nm) =
4.482
5.181
6.239
6.859
9.178
When d1 < d10, d1m (nm) =
1.480
2.625
3.732
4.138
0.436
When n2 ≧ n20, n2m =
0.0987671
0.0845752
0.0932324
0.0997229
0.0068860
When n2 < n20, n2m =
0.1650610
0.1381567
0.1431714
0.1501294
0.0677319
When k2 ≧ k20, k2m =
0.1657446
0.0892700
0.0918542
0.0980688
0.0046692
When k2 < k20, k2m =
0.1121045
0.0937854
0.0873950
0.0830798
0.0530042
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
2.101
When d2 < d20, d2m (nm) =
12.789
29.518
73.873
87.951
11.267
1.1 < NA ≦ 1.2
85 < T ≦ 95
Case
9-06
9-07
9-08
9-09
9-10
n10
1.7296393
1.7299249
1.6899362
1.6928826
1.6935628
k10
0.0805906
0.0737621
0.0817785
0.0657282
0.0590519
d10 (nm)
94.242
94.784
208.164
217.665
215.464
n20
1.7097783
1.7252153
1.6924320
1.6832004
1.6914497
k20
0.2319224
0.1970612
0.2651701
0.2055611
0.1728158
d20 (nm)
191.543
246.491
148.618
193.166
250.826
When n1 ≧ n10, n1m =
0.0403186
0.0454016
0.0167883
0.0332178
0.0456592
When n1 < n10, n1m =
0.0112720
0.0089185
0.0424597
0.0374463
0.0611377
When k1 ≧ k10, k1m =
0.0312561
0.0265295
0.0332300
0.0436560
0.0547620
When k1 < k10, k1m =
0.0359937
0.0340186
0.0176221
0.0271997
0.0369495
When d1 ≧ d10, d1m (nm) =
14.915
25.988
8.734
∞
∞
When d1 < d10, d1m (nm) =
2.867
2.423
22.681
45.245
43.081
When n2 ≧ n20, n2m =
0.0542737
0.0673303
0.1469031
0.2426758
0.2225391
When n2 < n20, n2m =
0.0873267
0.0993994
0.0330542
0.0887622
0.1544177
When k2 ≧ k20, k2m =
0.0292090
0.0400476
0.0700159
0.0962317
0.1187769
When k2 < k20, k2m =
0.0563428
0.0561450
0.0687061
0.0675110
0.0629883
When d2 ≧ d20, d2m (nm) =
39.648
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
14.552
29.955
9.727
29.747
77.934
1.1 < NA ≦ 1.2
85 < T ≦ 95
15/27
Case
9-11
9-12
9-13
n10
1.6988269
1.6981501
1.6968464
k10
0.0719884
0.0650380
0.0544760
d10 (nm)
266.949
266.102
275.663
n20
1.6930572
1.6910453
1.6860880
k20
0.2717519
0.2123559
0.1778694
d20 (nm)
142.233
201.439
248.323
When n1 ≧ n10, n1m =
0.0467688
0.0728052
0.0574890
When n1 < n10, n1m =
0.0315735
0.0440601
0.0431165
When k1 ≧ k10, k1m =
0.0383911
0.0476294
0.0587781
When k1 < k10, k1m =
0.0284839
0.0337549
0.0370691
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
35.571
98.568
104.018
When n2 ≧ n20, n2m =
0.2475818
0.3536121
0.2819006
When n2 < n20, n2m =
0.2616077
0.2147424
0.2120007
When k2 ≧ k20, k2m =
0.1929529
0.2177991
0.1925061
When k2 < k20, k2m =
0.1103821
0.0937061
0.0749585
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
61.377
69.390
80.535
1.1 < NA ≦ 1.2
95 < T ≦ 105
Case
10-01
10-02
10-03
10-04
10-05
n10
1.9207610
1.9093240
1.8948938
1.8966282
1.7293323
k10
0.2195112
0.1610220
0.1257399
0.0900141
0.0843251
d10 (nm)
22.312
16.027
13.855
12.530
93.974
n20
1.8258536
1.6981498
1.7003095
1.7305926
1.7018671
k20
0.6986358
0.4189775
0.3177305
0.2658040
0.2432029
d20 (nm)
68.737
136.163
194.613
248.346
184.391
When n1 ≧ n10, n1m =
0.0601465
0.0788086
0.0949231
0.1082007
0.0364734
When n1 < n10, n1m =
0.0227283
0.0400269
0.0595679
0.0706311
0.0069092
When k1 ≧ k10, k1m =
0.0253723
0.0545032
0.0804407
0.0926099
0.0227478
When k1 < k10, k1m =
0.0628345
0.0889185
0.1005603
0.0900141
0.0311768
When d1 ≧ d10, d1m (nm) =
3.994
4.715
5.765
6.514
12.891
When d1 < d10, d1m (nm) =
1.248
2.209
3.348
3.879
1.711
When n2 ≧ n20, n2m =
0.0792419
0.0821826
0.0922205
0.0989185
0.0380920
When n2 < n20, n2m =
0.1602795
0.1375000
0.1411267
0.1492065
0.0806519
When k2 ≧ k20, k2m =
0.1589185
0.0905359
0.0891418
0.0944934
0.0182117
When k2 < k20, k2m =
0.1093127
0.0931641
0.0864453
0.0826196
0.0535706
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
26.631
When d2 < d20, d2m (nm) =
11.170
27.297
70.361
86.529
13.056
1.1 < NA ≦ 1.2
95 < T ≦ 105
16/27
Case
10-06
10-07
10-08
10-09
10-10
n10
1.7301568
1.6896128
1.6928686
1.6935394
1.6995193
k10
0.0757850
0.0845530
0.0680057
0.0604311
0.0747728
d10 (nm)
94.458
207.994
217.789
215.751
266.467
n20
1.7237225
1.6930315
1.6806392
1.6908086
1.6953349
k20
0.2045935
0.2839311
0.2160083
0.1799717
0.2921202
d20 (nm)
238.500
141.193
184.741
242.024
134.479
When n1 ≧ n10, n1m =
0.0430542
0.0132361
0.0331689
0.0442139
0.0436938
When n1 < n10, n1m =
0.0073706
0.0419458
0.0316418
0.0535156
0.0268311
When k1 ≧ k10, k1m =
0.0232617
0.0264368
0.0418604
0.0531323
0.0358801
When k1 < k10, k1m =
0.0323706
0.0142944
0.0250220
0.0355676
0.0274768
When d1 ≧ d10, d1m (nm) =
19.826
5.860
∞
∞
∞
When d1 < d10, d1m (nm) =
1.955
19.840
44.604
42.829
18.631
When n2 ≧ n20, n2m =
0.0534583
0.1398230
0.2538293
0.2308789
0.2386206
When n2 < n20, n2m =
0.0961475
0.0183801
0.0879700
0.1305579
0.2731067
When k2 ≧ k20, k2m =
0.0309888
0.0515918
0.0900964
0.1145776
0.1883105
When k2 < k20, k2m =
0.0550842
0.0676599
0.0668372
0.0642163
0.1153723
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
28.701
3.697
28.484
75.626
22.552
1.1 < NA ≦ 1.2
95 < T ≦ 105
Case
10-11
10-12
n10
1.6986281
1.6967467
k10
0.0669339
0.0559821
d10 (nm)
265.290
275.562
n20
1.6902923
1.6844237
k20
0.2238725
0.1853984
d20 (nm)
194.429
239.846
When n1 ≧ n10, n1m =
0.0728162
0.0573596
When n1 < n10, n1m =
0.0413391
0.0430261
When k1 ≧ k10, k1m =
0.0452283
0.0576135
When k1 < k10, k1m =
0.0327722
0.0361206
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
90.187
103.212
When n2 ≧ n20, n2m =
0.3400000
0.2868152
When n2 < n20, n2m =
0.2235767
0.2105566
When k2 ≧ k20, k2m =
0.2178235
0.1919788
When k2 < k20, k2m =
0.0973718
0.0774072
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
66.928
79.000
1.1 < NA ≦ 1.2
105 < T ≦ 115
17/27
Case
11-01
11-02
11-03
11-04
11-05
n10
1.9214172
1.9009993
1.8999222
1.7289797
1.7301397
k10
0.1753360
0.1351301
0.0954510
0.0876375
0.0779683
d10 (nm)
15.452
13.611
12.469
93.472
94.062
n20
1.6804411
1.6899586
1.7262130
1.6943958
1.7208177
k20
0.4367098
0.3280314
0.2728992
0.2513033
0.2098777
d20 (nm)
129.893
187.370
240.318
176.630
230.281
When n1 ≧ n10, n1m =
0.0769006
0.0933704
0.1067993
0.0330078
0.0410352
When n1 < n10, n1m =
0.0358716
0.0572852
0.0688867
0.0032751
0.0048413
When k1 ≧ k10, k1m =
0.0508276
0.0793042
0.0916321
0.0140979
0.0177686
When k1 < k10, k1m =
0.0888501
0.0996167
0.0954510
0.0244348
0.0282959
When d1 ≧ d10, d1m (nm) =
4.190
5.335
6.248
10.623
16.723
When d1 < d10, d1m (nm) =
1.818
3.051
3.681
0.787
1.251
When n2 ≧ n20, n2m =
0.0746777
0.0897961
0.0977148
0.0241113
0.0398962
When n2 < n20, n2m =
0.1378662
0.1400989
0.1490454
0.0784241
0.0968872
When k2 ≧ k20, k2m =
0.0793188
0.0846436
0.0920837
0.0085193
0.0207715
When k2 < k20, k2m =
0.0870862
0.0841199
0.0819739
0.0504102
0.0538818
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
17.196
∞
When d2 < d20, d2m (nm) =
28.725
67.570
87.835
8.245
10.621
1.1 < NA ≦ 1.2
105 < T ≦ 115
Case
11-06
11-07
11-08
11-09
n10
1.6897075
1.6928599
1.6933895
1.6967442
k10
0.0859154
0.0698704
0.0619572
0.0572224
d10 (nm)
206.600
218.100
215.832
275.439
n20
1.6860653
1.6784557
1.6904996
1.6838077
k20
0.2958058
0.2260347
0.1864736
0.1920294
d20 (nm)
138.770
175.355
232.785
230.401
When n1 ≧ n10, n1m =
0.0125659
0.0312329
0.0432227
0.0564172
When n1 < n10, n1m =
0.0403125
0.0252893
0.0462402
0.0423401
When k1 ≧ k10, k1m =
0.0275024
0.0399890
0.0513623
0.0566272
When k1 < k10, k1m =
0.0207617
0.0230298
0.0339783
0.0347253
When d1 ≧ d10, d1m (nm) =
5.565
∞
∞
∞
When d1 < d10, d1m (nm) =
15.751
15.335
41.797
102.062
When n2 ≧ n20, n2m =
0.1134778
0.0778406
0.2416541
0.2945471
When n2 < n20, n2m =
0.0212585
0.0821313
0.1144373
0.2197937
When k2 ≧ k20, k2m =
0.0640356
0.0874658
0.1126599
0.1918506
When k2 < k20, k2m =
0.0823962
0.0630994
0.0642725
0.0810107
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
4.190
25.396
50.058
79.342
1.1 < NA ≦ 1.2
115 < T ≦ 125
18/27
Case
12-01
12-02
12-03
12-04
12-05
n10
1.9907624
1.9229056
1.9003143
1.9049048
1.7296380
k10
0.2658843
0.1943367
0.1434936
0.0972823
0.0899801
d10 (nm)
16.877
14.896
13.590
12.362
93.128
n20
1.6777634
1.6435696
1.6791032
1.7269066
1.6935089
k20
0.7245088
0.4392836
0.3336019
0.2779612
0.2572784
d20 (nm)
66.041
124.711
179.139
230.763
167.093
When n1 ≧ n10, n1m =
0.0641870
0.0750415
0.0917773
0.1066382
0.0315833
When n1 < n10, n1m =
0.0020520
0.0319995
0.0559583
0.0680188
0.0015344
When k1 ≧ k10, k1m =
0.0028235
0.0481201
0.0790771
0.0912170
0.0085083
When k1 < k10, k1m =
0.0445386
0.0882983
0.0964502
0.0972823
0.0192114
When d1 ≧ d10, d1m (nm) =
2.498
3.792
5.133
6.031
9.518
When d1 < d10, d1m (nm) =
0.080
1.544
2.939
3.522
0.359
When n2 ≧ n20, n2m =
0.0064478
0.0655054
0.0877441
0.0975110
0.0182434
When n2 < n20, n2m =
0.1131567
0.1382288
0.1415613
0.1512451
0.0817859
When k2 ≧ k20, k2m =
0.0073132
0.0658899
0.0812854
0.0911096
0.0040100
When k2 < k20, k2m =
0.0730591
0.0825134
0.0835315
0.0828308
0.0509155
When d2 ≧ d20, d2m (nm) =
10.610
∞
∞
∞
14.228
When d2 < d20, d2m (nm) =
2.901
33.267
66.014
90.382
3.593
1.1 < NA ≦ 1.2
115 < T ≦ 125
Case
12-06
12-07
12-08
12-09
12-10
n10
1.7305285
1.6927568
1.6930586
1.6939267
1.6970265
k10
0.0799609
0.0712762
0.0635805
0.0583165
0.0526106
d10 (nm)
93.907
218.499
215.646
213.162
273.430
n20
1.7196209
1.6781695
1.6903056
1.6934648
1.6908020
k20
0.2133806
0.2348207
0.0196344
0.1626221
0.1682270
d20 (nm)
220.978
164.929
223.237
282.414
277.869
When n1 ≧ n10, n1m =
0.0401038
0.0280627
0.0367090
0.0617249
0.0695837
When n1 < n10, n1m =
0.0020569
0.0197937
0.0422595
0.0578455
0.0506836
When k1 ≧ k10, k1m =
0.0099243
0.0365027
0.0497717
0.0551318
0.0584485
When k1 < k10, k1m =
0.0219006
0.0215491
0.0327808
0.0369946
0.0381665
When d1 ≧ d10, d1m (nm) =
15.192
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
0.519
8.747
40.119
117.750
120.098
When n2 ≧ n20, n2m =
0.0185596
0.0673242
0.2516089
0.2302490
0.2819116
When n2 < n20, n2m =
0.1000403
0.0715613
0.0981323
0.1425830
0.2021863
When k2 ≧ k20, k2m =
0.0105981
0.0901270
0.1132849
0.1293579
0.1967712
When k2 < k20, k2m =
0.0546692
0.0589612
0.0634204
0.0595032
0.0741577
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
3.602
19.014
34.397
79.670
93.763
1.1 < NA ≦ 1.2
125 < T ≦ 135
19/27
Case
13-01
13-02
13-03
13-04
13-05
n10
1.8968086
1.9070303
1.9016797
1.7329805
1.7161015
k10
0.1457981
0.0954881
0.0905797
0.0916823
0.0708259
d10 (nm)
14.128
12.717
10.946
93.296
94.224
n20
1.6815336
1.7369802
1.7110902
1.7056329
1.6780965
k20
0.3444919
0.2856144
0.2381911
0.2670261
0.1788543
d20 (nm)
167.613
218.968
280.601
155.076
274.399
When n1 ≧ n10, n1m =
0.0900439
0.1048657
0.1226746
0.0324280
0.0442737
When n1 < n10, n1m =
0.0549670
0.0656934
0.0785547
0.0012561
0.0190796
When k1 ≧ k10, k1m =
0.0772925
0.0877979
0.1031616
0.0075342
0.0396033
When k1 < k10, k1m =
0.0920227
0.0954881
0.0905767
0.0177710
0.0448962
When d1 ≧ d10, d1m (nm) =
5.183
6.019
6.438
9.368
34.945
When d1 < d10, d1m (nm) =
2.993
3.453
3.787
0.285
6.328
When n2 ≧ n20, n2m =
0.0877783
0.0991382
0.1111206
0.0250049
0.0400305
When n2 < n20, n2m =
0.1446509
0.1532288
0.1362280
0.0542139
0.1016638
When k2 ≧ k20, k2m =
0.0828516
0.0936658
0.0912720
0.0036011
0.0409863
When k2 < k20, k2m =
0.0884485
0.0865161
0.0819922
0.0570435
0.0508105
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
16.698
∞
When d2 < d20, d2m (nm) =
63.831
86.162
129.598
1.884
53.218
1.1 < NA ≦ 1.2
125 < T ≦ 135
Case
13-06
13-07
13-08
13-09
n10
1.6922053
1.6924923
1.6935584
1.6967916
k10
0.0726320
0.0653867
0.0598502
0.0533770
d10 (nm)
218.650
214.871
212.072
273.133
n20
1.6800076
1.6897434
1.6927128
1.6904661
k20
0.2436881
0.1959626
0.1654173
0.1709158
d20 (nm)
154.426
214.392
274.211
268.389
When n1 ≧ n10, n1m =
0.0253528
0.0324316
0.0605591
0.0715686
When n1 < n10, n1m =
0.0165808
0.0420508
0.0560315
0.0516870
When k1 ≧ k10, k1m =
0.0318250
0.0487207
0.0537805
0.0575159
When k1 < k10, k1m =
0.0192969
0.0323987
0.0370093
0.0369739
When d1 ≧ d10, d1m (nm) =
16.057
∞
∞
∞
When d1 < d10, d1m (nm) =
7.067
37.738
59.298
116.516
When n2 ≧ n20, n2m =
0.0399280
0.1505237
0.2298792
0.2878638
When n2 < n20, n2m =
0.0570007
0.0843848
0.1463525
0.2044592
When k2 ≧ k20, k2m =
0.0949915
0.1174060
0.1308350
0.1989417
When k2 < k20, k2m =
0.0566089
0.0642029
0.0608850
0.0765625
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
13.778
24.202
76.110
90.681
1.1 < NA ≦ 1.2
135 < T ≦ 145
20/27
Case
14-01
14-02
14-03
14-04
14-05
n10
1.8931613
1.9086798
1.8957546
1.7383088
1.7163304
k10
0.1437464
0.0925277
0.1021679
0.0935643
0.0717315
d10 (nm)
15.228
13.463
11.154
93.735
94.330
n20
1.6981871
1.7547782
1.6965397
1.7255584
1.6763108
k20
0.3648670
0.2987738
0.2414267
0.2828024
0.1832109
d20 (nm)
154.635
206.696
273.752
142.972
265.207
When n1 ≧ n10, n1m =
0.0870447
0.1008179
0.1206177
0.0337476
0.0440930
When n1 < n10, n1m =
0.0533362
0.0620862
0.0768750
0.0007715
0.0201111
When k1 ≧ k10, k1m =
0.0736633
0.0819543
0.1022961
0.0054871
0.0403162
When k1 < k10, k1m =
0.0884546
0.0925277
0.1021679
0.0149585
0.0433484
When d1 ≧ d10, d1m (nm) =
5.366
6.051
6.474
9.539
32.676
When d1 < d10, d1m (nm) =
3.110
3.392
3.792
0.168
6.615
When n2 ≧ n20, n2m =
0.0905371
0.1017932
0.1131152
0.0305115
0.0401709
When n2 < n20, n2m =
0.1457471
0.1521191
0.1323865
0.0291541
0.0974780
When k2 ≧ k20, k2m =
0.0891467
0.0990112
0.0895691
0.0025757
0.0411877
When k2 < k20, k2m =
0.0964551
0.0905688
0.0826367
0.0641370
0.0518066
d2m (nm) =
∞
∞
∞
18.295
∞
When d2 < d20, d2m (nm) =
52.833
78.923
127.644
0.825
36.894
1.1 < NA ≦ 1.2
135 < T ≦ 145
Case
14-06
14-07
14-08
14-09
14-10
n10
1.7036586
1.6919166
1.6911838
1.6942185
1.6965335
k10
0.0640636
0.0672926
0.0743991
0.0545821
0.0539924
d10 (nm)
161.836
213.353
218.060
211.644
273.036
n20
1.6842842
1.6889376
1.6805827
1.6930391
1.6894839
k20
0.1670348
0.2002175
0.2524809
0.1466022
0.1738185
d20 (nm)
260.021
207.074
145.761
321.654
259.712
When n1 ≧ n10, n1m =
0.0516992
0.0312610
0.0190637
0.0570044
0.0731799
When n1 < n10, n1m =
0.0203174
0.0465454
0.0159326
0.0625537
0.0527673
When k1 ≧ k10, k1m =
0.0380640
0.0462256
0.0279297
0.0552405
0.0568201
When k1 < k10, k1m =
0.0285486
0.0325867
0.0168274
0.0356702
0.0362610
When d1 ≧ d10, d1m (nm) =
∞
∞
14.138
∞
∞
When d1 < d10, d1m (nm) =
9.049
34.771
6.640
127.140
114.401
When n2 ≧ n20, n2m =
0.0375000
0.2427722
0.0321863
0.2263916
0.2897119
When n2 < n20, n2m =
0.0655225
0.0802039
0.0495178
0.1240515
0.2069202
When k2 ≧ k20, k2m =
0.0303979
0.1193311
0.0877856
0.1337305
0.1994678
When k2 < k20, k2m =
0.0483228
0.0645337
0.0566711
0.0596594
0.0781824
When d2 ≧ d20, d2m (nm) =
29.338
∞
15.130
∞
∞
When d2 < d20, d2m (nm) =
27.139
22.617
11.351
93.024
88.496
1.1 < NA ≦ 1.2
145 < T ≦ 155
21/27
Case
15-01
15-02
15-03
15-04
15-05
n10
1.8962402
1.9162756
1.8972293
1.7171631
1.7039366
k10
0.1446868
0.0920008
0.1039493
0.0735355
0.0654419
d10 (nm)
16.058
13.917
11.503
94.241
161.496
n20
1.7149739
1.7705409
1.6986687
1.6756859
1.6849902
k20
0.3909951
0.3160160
0.2516185
0.1901883
0.1728826
d20 (nm)
143.691
196.340
264.437
256.660
251.490
When n1 ≧ n10, n1m =
0.0837915
0.0974329
0.1166235
0.0430017
0.0505029
When n1 < n10, n1m =
0.0514441
0.0592371
0.0737268
0.0188135
0.0178369
When k1 ≧ k10, k1m =
0.0700403
0.0772290
0.0977893
0.0384546
0.0357764
When k1 < k10, k1m =
0.0675134
0.0920008
0.1039493
0.0432324
0.0268848
When d1 ≧ d10, d1m (nm) =
5.323
5.852
6.362
32.246
∞
When d1 < d10, d1m (nm) =
3.062
3.205
3.699
5.981
7.380
When n2 ≧ n20, n2m =
0.0928162
0.1031079
0.1115686
0.0381177
0.0304712
When n2 < n20, n2m =
0.1435938
0.1490808
0.1351062
0.0929431
0.0597266
When k2 ≧ k20, k2m =
0.0944385
0.1027820
0.0897864
0.0382104
0.0277966
When k2 < k20, k2m =
0.0995911
0.0924023
0.0838245
0.0516921
0.0462678
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
23.493
When d2 < d20, d2m (nm) =
30.912
72.930
96.188
31.536
23.876
1.1 < NA ≦ 1.2
145 < T ≦ 155
Case
15-06
15-07
15-08
15-09
n10
1.6903081
1.6915399
1.6931731
1.6963857
k10
0.0771344
0.0690906
0.0615887
0.0546865
d10 (nm)
216.305
212.338
211.917
273.170
n20
1.6786590
1.6881028
1.6918937
1.6879125
k20
0.2613948
0.2062149
0.1729009
0.1780863
d20 (nm)
139.207
199.770
256.415
251.444
When n1 ≧ n10, n1m =
0.0195569
0.0307166
0.0591064
0.0699243
When n1 < n10, n1m =
0.0132800
0.0523120
0.0554614
0.0530347
When k1 ≧ k10, k1m =
0.0269897
0.04450159
0.0517236
0.0562524
When k1 < k10, k1m =
0.0101050
0.0313696
0.0355261
0.0367395
When d1 ≧ d10, d1m (nm) =
14.222
∞
∞
∞
When d1 < d10, d1m (nm) =
6.108
32.462
54.157
113.606
When n2 ≧ n20, n2m =
0.0246814
0.2330432
0.2286047
0.2890198
When n2 < n20, n2m =
0.0598340
0.0841870
0.1451465
0.2088098
When k2 ≧ k20, k2m =
0.0678235
0.1160620
0.1277832
0.1979041
When k2 < k20, k2m =
0.0514465
0.0682922
0.0664624
0.0771411
When d2 ≧ d20, d2m (nm) =
11.437
∞
∞
∞
When d2 < d20, d2m (nm) =
12.498
26.276
74.225
84.013
1.1 < NA ≦ 1.2
155 < T ≦ 165
22/27
Case
16-01
16-02
16-03
16-04
16-05
n10
1.9078860
1.9270939
1.9009914
1.7182026
1.7037276
k10
0.1508452
0.0963716
0.1079582
0.0759211
0.0670447
d10 (nm)
16.208
13.863
11.657
93.910
160.452
n20
1.7232027
1.7738090
1.6981472
1.6754262
1.6860603
k20
0.4201511
0.3331580
0.2622250
0.1979303
0.1785858
d20 (nm)
134.826
188.374
256.036
248.261
243.357
When n1 ≧ n10, n1m =
0.0807556
0.0955676
0.1136938
0.0410315
0.0482739
When n1 < n10, n1m =
0.0492212
0.0570374
0.0706995
0.0157471
0.0155554
When k1 ≧ k10, k1m =
0.0660083
0.0745215
0.0946643
0.0342603
0.0302344
When k1 < k10, k1m =
0.0885791
0.0963716
0.1079582
0.0433301
0.0248120
When d1 ≧ d10, d1m (nm) =
4.938
5.477
6.133
23.554
∞
When d1 < d10, d1m (nm) =
2.790
2.920
3.507
4.784
6.051
When n2 ≧ n20, n2m =
0.0912793
0.1022461
0.1087073
0.0334387
0.0216223
When n2 < n20, n2m =
0.1401233
0.1468384
0.1373413
0.0900842
0.0519312
When k2 ≧ k20, k2m =
0.0948535
0.1014905
0.0883215
0.0321790
0.0239026
When k2 < k20, k2m =
0.0976477
0.0917578
0.0837280
0.0507922
0.0474658
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
19.461
When d2 < d20, d2m (nm) =
27.641
68.596
90.537
29.710
21.259
1.1 < NA ≦ 1.2
155 < T ≦ 165
Case
16-06
16-07
16-08
16-09
n10
1.6914048
1.6932944
1.6971949
1.6963748
k10
0.0705280
0.0619823
0.0758678
0.0557064
d10 (nm)
212.904
213.027
268.193
273.316
n20
1.6862460
1.6912789
1.6840809
1.6860970
k20
0.2142065
0.1784688
0.2789945
0.1841499
d20 (nm)
190.804
246.475
135.240
242.973
When n1 ≧ n10, n1m =
0.0288806
0.0598267
0.0616260
0.0706445
When n1 < n10, n1m =
0.0419739
0.0573401
0.0320642
0.0521814
When k1 ≧ k10, k1m =
0.0434460
0.0510059
0.0409424
0.0555554
When k1 < k10, k1m =
0.0304883
0.0343054
0.0217456
0.0379871
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
31.951
51.898
19.489
113.780
When n2 ≧ n20, n2m =
0.2364844
0.2370337
0.2474512
0.2927136
When n2 < n20, n2m =
0.0869409
0.1403040
0.2270129
0.2100537
When k2 ≧ k20, k2m =
0.1067354
0.1223047
0.1872974
0.1959326
When k2 < k20, k2m =
0.0726953
0.0652295
0.1039441
0.0773071
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
34.355
75.037
36.050
81.214
1.1 < NA ≦ 1.2
165 < T ≦ 175
23/27
Case
17-01
17-02
17-03
17-04
17-05
n10
1.9345747
1.9100928
1.9218874
1.7188695
1.7031385
k10
0.1082213
0.1149883
0.1634556
0.0782891
0.0685384
d10 (nm)
13.373
11.317
15.608
93.463
159.293
n20
1.7554016
1.6916658
1.7091703
1.6745648
1.6866422
k20
0.3434593
0.2694423
0.4402763
0.2040549
0.1829170
d20 (nm)
183.042
248.707
128.647
239.614
234.977
When n1 ≧ n10, n1m =
0.0953882
0.1140894
0.0784595
0.0386694
0.0460681
When n1 < n10, n1m =
0.0550098
0.0698865
0.0459766
0.0121814
0.0133398
When k1 ≧ k10, k1m =
0.0742224
0.0954895
0.0620923
0.0290149
0.0227319
When k1 < k10, k1m =
0.1051392
0.1149883
0.0876528
0.0413110
0.0203333
When d1 ≧ d10, d1m (nm) =
5.105
5.733
4.388
16.599
∞
When d1 < d10, d1m (nm) =
2.628
3.226
2.376
3.551
4.956
When n2 ≧ n20, n2m =
0.0995532
0.1061743
0.0849316
0.0275488
0.0132971
When n2 < n20, n2m =
0.1453674
0.1364294
0.1372107
0.0877344
0.0449780
When k2 ≧ k20, k2m =
0.0936926
0.0848206
0.0864539
0.0249731
0.0152673
When k2 < k20, k2m =
0.0884937
0.0821777
0.0909717
0.0487439
0.0459656
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
6.034
When d2 < d20, d2m (nm) =
65.841
91.823
28.009
30.737
19.612
1.1 < NA ≦ 1.2
165 < T ≦ 175
Case
17-06
17-07
17-08
17-09
n10
1.6934237
1.6934242
1.6985617
1.6963947
k10
0.0627890
0.0627998
0.0777714
0.0569261
d10 (nm)
213.592
213.572
264.836
273.344
n20
1.6908665
1.6907829
1.6854326
1.6845211
k20
0.1844160
0.1843934
0.2962369
0.1907955
d20 (nm)
236.853
236.891
131.733
233.824
When n1 ≧ n10, n1m =
0.0574976
0.0574353
0.0522168
0.0698511
When n1 < n10, n1m =
0.0521313
0.0521704
0.0296216
0.0506372
When k1 ≧ k10, k1m =
0.0502954
0.0502856
0.0369763
0.0547412
When k1 < k10, k1m =
0.0341577
0.0341846
0.0234509
0.0366406
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
When d1 < d10, d1m (nm) =
50.284
50.272
18.034
113.943
When n2 ≧ n20, n2m =
0.2442261
0.2441003
0.2108032
0.3045251
When n2 < n20, n2m =
0.1394958
0.1395251
0.2567761
0.2115186
When k2 ≧ k20, k2m =
0.1187415
0.1187610
0.1954675
0.1950378
When k2 < k20, k2m =
0.0660913
0.0660889
0.1128296
0.0795361
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
75.634
75.652
33.470
80.767
1.1 < NA ≦ 1.2
175 < T ≦ 185
24/27
Case
18-01
18-02
18-03
18-04
18-05
n10
1.9329388
1.9368237
1.9141366
1.7191879
1.7029035
k10
0.1795701
0.1224596
0.1196035
0.0801581
0.0699625
d10 (nm)
14.789
12.921
11.206
93.133
158.805
n20
1.6812994
1.7305084
1.6882344
1.6734445
1.6865116
k20
0.4483886
0.3477304
0.2744889
0.2077092
0.1862225
d20 (nm)
123.825
177.704
240.000
230.286
225.674
When n1 ≧ n10, n1m =
0.0768433
0.0949634
0.1131592
0.0367419
0.0441357
When n1 < n10, n1m =
0.0412451
0.0529919
0.0684998
0.0095679
0.0109912
When k1 ≧ k10, k1m =
0.0578772
0.0744714
0.0949390
0.0247339
0.0167639
When k1 < k10, k1m =
0.0896887
0.1065430
0.1185388
0.0386743
0.0152380
When d1 ≧ d10, d1m (nm) =
3.840
4.794
5.495
14.453
∞
When d1 < d10, d1m (nm) =
1.946
2.409
3.066
2.710
3.941
When n2 ≧ n20, n2m =
0.0764294
0.0962097
0.1038733
0.0230908
0.0081592
When n2 < n20, n2m =
0.1359412
0.1466211
0.1367029
0.0895520
0.0398572
When k2 ≧ k20, k2m =
0.0734753
0.0852112
0.0825085
0.0197388
0.0086536
When k2 < k20, k2m =
0.0828125
0.0854419
0.0815332
0.0475061
0.0463342
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
20.793
3.280
When d2 < d20, d2m (nm) =
32.854
63.574
95.894
33.693
18.574
1.1 < NA ≦ 1.2
175 < T ≦ 185
Case
18-06
18-07
18-08
n10
1.6933701
1.6939475
1.6969386
k10
0.0640425
0.0576888
0.0533290
d10 (nm)
213.864
212.435
271.986
n20
1.6904005
1.6925921
1.6924288
k20
0.1898312
0.1618810
0.1673219
d20 (nm)
227.117
285.048
281.091
When n1 ≧ n10, n1m =
0.0547229
0.0510974
0.0676453
When n1 < n10, n1m =
0.0462109
0.0603149
0.0497070
When k1 ≧ k10, k1m =
0.0493457
0.0532312
0.0592920
When k1 < k10, k1m =
0.0339734
0.0351465
0.0390295
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
49.384
120.643
177.975
When n2 ≧ n20, n2m =
0.2555811
0.2373071
0.2892273
When n2 < n20, n2m =
0.1402515
0.1279663
0.2010315
When k2 ≧ k20, k2m =
0.1146326
0.1254919
0.2051270
When k2 < k20, k2m =
0.0655762
0.0607678
0.0750598
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
70.972
82.029
98.942
1.1 < NA ≦ 1.2
185 < T ≦ 195
25/27
Case
19-01
19-02
19-03
19-04
19-05
n10
1.9315873
1.9153217
1.8972445
1.7198506
1.7209927
k10
0.1333486
0.1206110
0.1001874
0.0813984
0.0705203
d10 (nm)
13.169
11.351
10.604
93.215
93.408
n20
1.7169625
1.6899751
1.6952918
1.6740113
1.6975541
k20
0.3552140
0.2797802
0.2334251
0.2110946
0.1793898
d20 (nm)
168.729
229.265
285.679
219.867
273.456
When n1 ≧ n10, n1m =
0.0918945
0.1114490
0.1257397
0.0361377
0.0445178
When n1 < n10, n1m =
0.0499878
0.0671436
0.0846338
0.0086279
0.0205615
When k1 ≧ k10, k1m =
0.0714844
0.0926733
0.1116675
0.0228809
0.0433899
When k1 < k10, k1m =
0.1000085
0.1179578
0.1001874
0.0379150
0.0444836
When d1 ≧ d10, d1m (nm) =
4.647
5.413
6.402
13.674
40.701
When d1 < d10, d1m (nm) =
2.318
3.021
3.978
2.409
6.133
When n2 ≧ n20, n2m =
0.0938611
0.1021985
0.1009766
0.0217163
0.0601978
When n2 < n20, n2m =
0.1488745
0.1392834
0.1303809
0.0916943
0.1077124
When k2 ≧ k20, k2m =
0.0821570
0.0826257
0.0865845
0.0185046
0.0416394
When k2 < k20, k2m =
0.0869946
0.0832629
0.0782239
0.0491125
0.0501843
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
19.431
∞
When d2 < d20, d2m (nm) =
61.773
92.529
127.146
32.148
73.073
1.1 < NA ≦ 1.2
185 < T ≦ 195
Case
19-06
19-07
19-08
19-09
19-10
n10
1.7035608
1.6916743
1.6930483
1.6936984
1.6968810
k10
0.0713918
0.0742011
0.0657083
0.0591625
0.0544417
d10 (nm)
159.462
216.137
213.861
212.273
271.786
n20
1.6857491
1.6815589
1.6902271
1.6918699
1.6922876
k20
0.1901066
0.2413942
0.1951191
0.1652801
0.1708476
d20 (nm)
215.251
158.897
217.477
275.792
271.501
When n1 ≧ n10, n1m =
0.0427405
0.0223779
0.0519324
0.0514441
0.0684033
When n1 < n10, n1m =
0.0090222
0.0227649
0.0431079
0.0594763
0.0491284
When k1 ≧ k10, k1m =
0.0150232
0.0325586
0.0481873
0.0521765
0.0581763
When k1 < k10, k1m =
0.0160400
0.0253345
0.0315527
0.0340894
0.0370996
When d1 ≧ d10, d1m (nm) =
∞
13.469
∞
∞
∞
When d1 < d10, d1m (nm) =
3.174
10.839
47.894
119.682
177.263
When n2 ≧ n20, n2m =
0.0074805
0.0864617
0.1377869
0.2440918
0.2955884
When n2 < n20, n2m =
0.0361890
0.0461035
0.1429895
0.1282532
0.2018481
When k2 ≧ k20, k2m =
0.0083386
0.0888440
0.1120801
0.1247546
0.2080872
When k2 < k20, k2m =
0.0485754
0.0635596
0.0642932
0.0606433
0.0779761
When d2 ≧ d20, d2m (nm) =
3.092
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
17.439
14.439
35.904
75.946
92.429
1.1 < NA ≦ 1.2
195 < T ≦ 205
26/27
Case
20-01
20-02
20-03
20-04
20-05
n10
1.9249373
1.9134695
1.8970797
1.7208445
1.7215107
k10
0.1361664
0.1202777
0.0999072
0.0825059
0.0711590
d10 (nm)
14.155
11.822
10.899
93.633
93.747
n20
1.7251855
1.6947701
1.6978665
1.6746972
1.6977852
k20
0.3723543
0.2878755
0.2388400
0.2167421
0.1834377
d20 (nm)
156.237
218.180
275.054
209.700
263.540
When n1 ≧ n10, n1m =
0.0879163
0.1083789
0.1230811
0.0362378
0.0448303
When n1 < n10, n1m =
0.0472876
0.0648938
0.0826709
0.0083032
0.0200745
When k1 ≧ k10, k1m =
0.0660645
0.0884607
0.1084424
0.0221863
0.0429114
When k1 < k10, k1m =
0.0933167
0.1148511
0.0999072
0.0377161
0.0440771
When d1 ≧ d10, d1m (nm) =
4.725
5.477
6.424
13.579
31.897
When d1 < d10, d1m (nm) =
2.353
3.040
3.984
2.294
5.957
When n2 ≧ n20, n2m =
0.0937048
0.1017651
0.1009302
0.0215295
0.0601208
When n2 < n20, n2m =
0.1501685
0.1443250
0.1325146
0.0892346
0.1044958
When k2 ≧ k20, k2m =
0.0870276
0.0848474
0.0878162
0.0191504
0.0424573
When k2 < k20, k2m =
0.0940491
0.0866907
0.0808813
0.0520386
0.0521252
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
59.976
84.859
127.060
27.072
71.102
1.1 < NA ≦ 1.2
195 < T ≦ 205
Case
20-06
20-07
20-08
20-09
20-10
n10
1.7046380
1.7071945
1.6911424
1.6924731
1.6944113
k10
0.0728087
0.0643745
0.0761042
0.0678273
0.0547711
d10 (nm)
160.840
160.796
216.237
212.933
211.610
n20
1.6842748
1.7036838
1.6835271
1.6899027
1.6931553
k20
0.1961079
0.1674255
0.2518702
0.2006809
0.1468072
d20 (nm)
204.946
259.158
149.208
209.434
323.528
When n1 ≧ n10, n1m =
0.0417468
0.0534717
0.0144385
0.0489441
0.0528149
When n1 < n10, n1m =
0.0080798
0.0311902
0.0202490
0.0431433
0.0592456
When k1 ≧ k10, k1m =
0.0160498
0.0272644
0.0259192
0.0470654
0.0582300
When k1 < k10, k1m =
0.0189954
0.0257520
0.0204919
0.0289844
0.0354419
When d1 ≧ d10, d1m (nm) =
∞
∞
11.042
∞
∞
When d1 < d10, d1m (nm) =
2.830
21.473
8.826
44.978
116.569
When n2 ≧ n20, n2m =
0.0092676
0.0660242
0.0583154
0.1383105
0.2397107
When n2 < n20, n2m =
0.0345349
0.0284167
0.0279346
0.1133557
0.1358362
When k2 ≧ k20, k2m =
0.0098743
0.0192883
0.0839758
0.1160754
0.1327747
When k2 < k20, k2m =
0.0439319
0.0493506
0.0539001
0.0650562
0.0582056
When d2 ≧ d20, d2m (nm) =
4.069
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
16.537
9.202
10.084
22.297
94.005
1.1 < NA ≦ 1.2
195 < T ≦ 205
27/27
Case
20-11
n10
1.6967389
k10
0.0554960
d10 (nm)
271.524
n20
1.6919127
k20
0.1743507
d20 (nm)
262.739
When n1 ≧ n10, n1m =
0.0690857
When n1 < n10, n1m =
0.0487012
When k1 ≧ k10, k1m =
0.0571155
When k1 < k10, k1m =
0.0354016
When d1 ≧ d10, d1m (nm) =
∞
When d1 < d10, d1m (nm) =
122.531
When n2 ≧ n20, n2m =
0.3042639
When n2 < n20, n2m =
0.2009363
When k2 ≧ k20, k2m =
0.2111316
When k2 < k20, k2m =
0.0800171
When d2 ≧ d20, d2m (nm) =
∞
When d2 < d20, d2m (nm) =
82.974.

5,632 more elements

An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of:

providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate having a thickness T (unit:
nm) described below;
and
exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.2<NA≦1.3, the antireflective film including an upper layer having a complex refractive index N1, and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the equations N1=n1−k1i and N2=n2−k2i, respectively;
wherein assuming that the thickness of the upper layer is d1 (unit:
nm) and the thickness of the lower layer is d2 (unit:
nm), when any one of the combinations of values of [n10, k10, d10, n20, k20, d20] described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1, n2, k2, and d2 satisfy the relational expression
{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1;
a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10;
a value Of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10;
a value of d1m in a corresponding case is selected on the basis of a magnitude relation between d1 and d10;
a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20;
a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20;
and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20;
and
in the tables below, in the line of “When n1≧n10, n1m=”, each value in the right columns is “n1m−n10;
in the line of “When n1<n10, n1m=”, each value in the right columns is “n10−n1m”;
in the line of “When k1≧k10, k1m”, each value in the right columns is “k1m−k10”;
in the line of “When k1<k10, k1m=”, each value in the right columns is “k10−k1m”;
in the line of “When d1≧d10, d1m (nm) =”, each value (unit:
nm) in the right columns is “d1m−d10”;
in the line of “When d1<d10, d1m (nm) =”, each value (unit:
nm) in the right columns is “d10−d1m”;
in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”;
in the line of “When n2<n20, n2m=”, each value in the right columns is “n20−n2m”;
in the line of “When k2≧k20, k2m”, each value in the right columns is “k2m−k20”;
in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”;
in the line of “When d2≧d20 , d2m (nm) =”, each value (unit:
nm) in the right columns is “d2m−d20”;
and in the line of “When d2<d20, d2m (nm) =”, each value (unit:
nm) in the right columns is “d20−d2m”.
1.2 < NA ≦ 1.3
2 ≦ T ≦ 15
1/21
Case
1-01
1-02
1-03
1-04
1-05
n10
2.070
1.955
1.895
1.875
1.870
k10
0.020
0.138
0.133
0.110
0.101
d10 (nm)
27.974
34.826
29.218
17.990
13.959
n20
5.553
9.284
2.177
1.753
1.700
k20
3.053
0.606
0.543
0.330
0.255
d20 (nm)
2.024
10.907
63.407
152.930
218.765
When n1 ≧ n10, n1m =
2.141
2.017
1.952
1.943
1.957
When n1 < n10, n1m =
2.006
1.896
1.854
1.843
1.821
When k1 ≧ k10, k1m =
0.075
0.180
0.166
0.155
0.171
When k1 < k10, k1m =
0.000
0.061
0.055
0.028
0.009
When d1 ≧ d10,
31.254
39.247
35.017
23.926
20.211
d1m (nm) =
When d1 < d10,
25.519
31.618
26.178
15.560
10.679
d1m (nm) =
When n2 ≧ n20, n2m =
5.876
9.377
2.281
1.832
1.773
When n2 < n20, n2m =
5.233
9.207
2.051
1.635
1.577
When k2 ≧ k20, k2m =
3.362
0.715
0.699
0.412
0.320
When k2 < k20, k2m =
2.751
0.513
0.439
0.253
0.185
When d2 ≧ d20,
2.251
11.023
70.023
∞
∞
d2m (nm) =
When d2 < d20,
1.807
10.812
58.076
125.396
142.606
d2m (nm) =
1.2 < NA ≦ 1.3
2 ≦ T ≦ 15
Case
1-06
1-07
1-08
1-09
1-10
n10
1.867
1.699
1.693
1.692
1.694
k10
0.070
0.063
0.058
0.069
0.074
d10 (nm)
13.235
165.016
157.920
236.756
217.672
n20
1.732
1.698
1.698
6.942
1.788
k20
0.221
0.180
0.154
3.076
0.339
d20 (nm)
270.745
204.222
265.886
0.950
84.006
When n1 ≧ n10, n1m =
1.964
1.701
1.708
1.727
1.710
When n1 < n10, n1m =
1.810
1.683
1.664
1.662
1.674
When k1 ≧ k10, k1m =
0.149
0.068
0.084
0.108
0.106
When k1 < k10, k1m =
0.000
0.043
0.031
0.039
0.053
When d1 ≧ d10,
20.519
166.410
170.845
255.389
226.062
d1m (nm) =
When d1 < d10,
9.259
155.941
111.504
217.630
206.257
d1m (nm) =
When n2 ≧ n20, n2m =
1.809
1.721
1.754
7.503
1.909
When n2 < n20, n2m =
1.603
1.694
1.667
6.491
1.763
When k2 ≧ k20, k2m =
0.293
0.188
0.194
3.321
0.395
When k2 < k20, k2m =
0.152
0.139
0.113
2.487
0.243
When d2 ≧ d20,
∞
217.552
∞
1.062
100.609
d2m (nm) =
When d2 < d20,
182.495
202.082
249.694
0.781
81.237
d2m (nm) =
1.2 < NA ≦ 1.3
2 ≦ T ≦ 15
2/21
Case
1-11
1-12
1-13
n10
1.699
1.698
1.695
k10
0.071
0.065
0.054
d10 (nm)
210.274
207.280
219.181
n20
1.718
1.695
1.688
k20
0.242
0.194
0.161
d20 (nm)
154.667
219.490
263.755
When n1 ≧ n10, n1m =
1.720
1.737
1.738
When n1 < n10, n1m =
1.683
1.675
1.660
When k1 ≧ k10, k1m =
0.099
0.097
0.100
When k1 < k10, k1m =
0.045
0.035
0.019
When d1 ≧ d10, d1m (nm) =
229.005
∞
∞
When d1 < d10, d1m (nm) =
200.369
189.200
189.609
When n2 ≧ n20, n2m =
1.849
1.855
1.900
When n2 < n20, n2m =
1.670
1.540
1.583
When k2 ≧ k20, k2m =
0.332
0.307
0.271
When k2 < k20, k2m =
0.164
0.122
0.102
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
143.819
154.002
185.363
1.2 < NA ≦ 1.3
1 < < T ≦ 25
3/21
Case
2-01
2-02
2-03
2-04
2-05
n10
1.894
1.881
1.874
1.872
1.693
k10
0.182
0.116
0.105
0.074
0.060
d10 (nm)
37.493
18.625
14.298
13.408
158.097
n20
9.246
1.766
1.701
1.733
1.697
k20
0.662
0.358
0.269
0.231
0.160
d20 (nm)
10.628
142.939
209.610
261.989
257.142
When n1 ≧ n10, n1m =
1.954
1.946
1.957
1.966
1.703
When n1 < n10, n1m =
1.847
1.852
1.828
1.817
1.667
When k1 ≧ k10, k1m =
0.222
0.156
0.171
0.149
0.081
When k1 < k10, k1m =
0.111
0.037
0.015
0.000
0.035
When d1 ≧ d10,
41.975
24.164
20.222
20.345
165.590
d1m (nm) =
When d1 < d10,
34.168
16.466
11.264
9.664
137.726
d1m (nm) =
When n2 ≧ n20, n2m =
9.356
1.841
1.772
1.809
1.744
When n2 < n20, n2m =
9.153
1.650
1.579
1.602
1.674
When k2 ≧ k20, k2m =
0.784
0.442
0.334
0.302
0.195
When k2 < k20, k2m =
0.549
0.280
0.198
0.162
0.120
When d2 ≧ d20,
10.759
∞
∞
∞
∞
d2m (nm) =
When d2 < d20,
10.519
119.178
137.341
178.243
243.996
d2m (nm) =
1.2 < NA ≦ 1.3
1 < < T ≦ 25
Case
2-06
2-07
2-08
2-09
2-10
n10
1.690
1.693
1.699
1.698
1.695
k10
0.074
0.078
0.074
0.067
0.055
d10 (nm)
235.203
218.334
210.503
207.468
219.130
n20
5.632
1.803
1.719
1.694
1.687
k20
4.204
0.382
0.259
0.203
0.167
d20 (nm)
0.919
74.994
145.797
210.546
255.274
When n1 ≧ n10, n1m =
1.708
1.699
1.715
1.733
1.737
When n1 < n10, n1m =
1.661
1.675
1.684
1.676
1.661
When k1 ≧ k10, k1m =
0.102
0.098
0.100
0.097
0.100
When k1 < k10, k1m =
0.051
0.067
0.052
0.039
0.022
When d1 ≧ d10,
241.533
220.890
225.049
∞
∞
d1m (nm) =
When d1 < d10,
217.317
207.766
201.595
191.244
190.979
d1m (nm) =
When n2 ≧ n20, n2m =
6.262
1.931
1.852
1.853
1.902
When n2 < n20, n2m =
5.366
1.793
1.684
1.538
1.584
When k2 ≧ k20, k2m =
4.338
0.416
0.339
0.310
0.275
When k2 < k20, k2m =
3.555
0.288
0.182
0.132
0.107
When d2 ≧ d20,
0.986
89.025
∞
∞
∞
d2m (nm) =
When d2 < d20,
0.720
74.083
139.178
147.776
179.334
d2m (nm) =
1.2 < NA ≦ 1.3
25 < T ≦ 35
4/21
Case
3-01
3-02
3-03
3-04
3-05
n10
1.855
1.894
1.879
1.879
1.692
k10
0.222
0.121
0.110
0.076
0.062
d10 (nm)
38.795
19.092
14.598
13.458
158.198
n20
9.554
1.787
1.702
1.736
1.697
k20
0.714
0.392
0.285
0.242
0.168
d20 (nm)
10.003
133.195
201.011
253.439
248.709
When n1 ≧ n10, n1m =
1.905
1.955
1.958
1.971
1.699
When n1 < n10, n1m =
1.821
1.868
1.836
1.826
1.670
When k1 ≧ k10, k1m =
0.258
0.156
0.172
0.149
0.078
When k1 < k10, k1m =
0.159
0.047
0.022
0.000
0.041
When d1 ≧ d10,
42.560
24.067
20.129
19.949
161.711
d1m (nm) =
When d1 < d10,
36.125
17.295
11.822
9.987
144.941
d1m (nm) =
When n2 ≧ n20, n2m =
9.681
1.856
1.769
1.811
1.737
When n2 < n20, n2m =
9.446
1.674
1.584
1.608
1.683
When k2 ≧ k20, k2m =
0.829
0.479
0.348
0.313
0.196
When k2 < k20, k2m =
0.587
0.314
0.215
0.173
0.129
When d2 ≧ d20,
10.138
∞
∞
∞
∞
d2m (nm) =
When d2 < d20,
9.892
112.716
132.762
173.492
239.168
d2m (nm) =
1.2 < NA ≦ 1.3
25 < T ≦ 35
Case
3-06
3-07
3-08
n10
1.699
1.698
1.695
k10
0.078
0.070
0.057
d10 (nm)
210.437
207.381
219.158
n20
1.720
1.693
1.687
k20
0.280
0.215
0.175
d20 (nm)
137.855
202.487
246.765
When n1 ≧ n10, n1m =
1.710
1.730
1.737
When n1 < n10, n1m =
1.686
1.678
1.661
When k1 ≧ k10, k1m =
0.100
0.097
0.101
When k1 < k10, k1m =
0.063
0.046
0.025
When d1 ≧ d10, d1m (nm) =
216.379
∞
∞
When d1 < d10, d1m (nm) =
202.875
193.042
192.539
When n2 ≧ n20, n2m =
1.855
1.841
1.910
When n2 < n20, n2m =
1.702
1.535
1.588
When k2 ≧ k20, k2m =
0.336
0.312
0.280
When k2 < k20, k2m =
0.208
0.146
0.114
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
134.716
142.289
200.270
1.2 < NA ≦ 1.3
35 < T ≦ 45
5/21
Case
4-01
4-02
4-03
4-04
4-05
n10
1.921
1.907
1.883
1.885
1.692
k10
0.198
0.132
0.117
0.078
0.064
d10 (nm)
29.852
18.597
14.666
13.425
158.019
n20
2.410
1.779
1.698
1.738
1.697
k20
0.850
0.418
0.298
0.251
0.174
d20 (nm)
42.336
126.566
192.788
244.904
240.368
When n1 ≧ n10, n1m =
1.964
1.964
1.959
1.975
1.694
When n1 < n10, n1m =
1.894
1.886
1.843
1.834
1.673
When k1 ≧ k10, k1m =
0.224
0.160
0.175
0.149
0.073
When k1 < k10, k1m =
0.152
0.061
0.031
0.000
0.048
When d1 ≧ d10,
33.127
22.917
19.812
19.537
159.270
d1m (nm) =
When d1 < d10,
28.245
17.267
12.114
10.202
147.983
d1m (nm) =
When n2 ≧ n20, n2m =
2.530
1.833
1.762
1.812
1.732
When n2 < n20, n2m =
2.288
1.667
1.583
1.611
1.691
When k2 ≧ k20, k2m =
0.928
0.492
0.359
0.320
0.195
When k2 < k20, k2m =
0.730
0.344
0.229
0.182
0.145
When d2 ≧ d20,
46.411
∞
∞
∞
274.107
d2m (nm) =
When d2 < d20,
39.931
107.536
154.271
167.375
234.670
d2m (nm) =
1.2 < NA ≦ 1.3
35 < T ≦ 45
Case
4-06
4-07
4-08
4-09
n10
1.700
1.698
1.695
1.705
k10
0.081
0.072
0.059
0.053
d10 (nm)
209.560
206.609
219.174
283.412
n20
1.716
1.692
1.688
1.691
k20
0.298
0.225
0.183
0.185
d20 (nm)
131.419
195.862
237.750
233.362
When n1 ≧ n10, n1m =
1.701
1.721
1.734
1.751
When n1 < n10, n1m =
1.689
1.680
1.662
1.675
When k1 ≧ k10, k1m =
0.099
0.097
0.101
0.092
When k1 < k10, k1m =
0.076
0.050
0.027
0.024
When d1 ≧ d10, d1m (nm) =
210.753
∞
∞
∞
When d1 < d10, d1m (nm) =
203.620
194.085
194.045
189.814
When n2 ≧ n20, n2m =
1.846
1.812
1.920
1.889
When n2 < n20, n2m =
1.712
1.528
1.594
1.515
When k2 ≧ k20, k2m =
0.319
0.315
0.285
0.358
When k2 < k20, k2m =
0.257
0.159
0.121
0.115
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
130.894
179.580
197.417
162.566
1.2 < NA ≦ 1.3
45 < T ≦ 55
6/21
Case
5-01
5-02
5-03
5-04
5-05
n10
1.943
1.907
1.884
1.891
1.691
k10
0.213
0.153
0.123
0.078
0.066
d10 (nm)
22.907
17.372
14.585
13.392
157.377
n20
1.902
1.716
1.691
1.743
1.696
k20
0.785
0.418
0.305
0.257
0.178
d20 (nm)
53.731
124.143
184.536
235.129
232.195
When n1 ≧ n10, n1m =
1.979
1.963
1.959
1.980
1.692
When n1 < n10, n1m =
1.934
1.892
1.845
1.841
1.676
When k1 ≧ k10, k1m =
0.223
0.175
0.181
0.148
0.067
When k1 < k10, k1m =
0.198
0.080
0.039
0.000
0.057
When d1 ≧ d10,
25.447
21.108
19.487
19.257
157.441
d1m (nm) =
When d1 < d10,
22.431
16.482
12.133
10.346
149.670
d1m (nm) =
When n2 ≧ n20, n2m =
1.937
1.752
1.753
1.817
1.727
When n2 < n20, n2m =
1.871
1.605
1.576
1.616
1.695
When k2 ≧ k20, k2m =
0.813
0.464
0.362
0.326
0.187
When k2 < k20, k2m =
0.724
0.351
0.237
0.188
0.173
When d2 ≧ d20,
58.954
∞
∞
∞
254.885
d2m (nm) =
When d2 < d20,
51.905
103.951
122.545
158.102
231.812
d2m (nm) =
1.2 < NA ≦ 1.3
45 < T ≦ 55
Case
5-06
5-07
5-08
n10
1.699
1.695
1.704
k10
0.072
0.060
0.054
d10 (nm)
204.994
219.095
283.255
n20
1.688
1.689
1.689
k20
0.231
0.188
0.189
d20 (nm)
192.230
228.102
224.255
When n1 ≧ n10, n1m =
1.718
1.729
1.749
When n1 < n10, n1m =
1.682
1.663
1.676
When k1 ≧ k10, k1m =
0.096
0.102
0.091
When k1 < k10, k1m =
0.048
0.030
0.025
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
194.149
195.371
190.682
When n2 ≧ n20, n2m =
1.788
1.929
1.898
When n2 < n20, n2m =
1.641
1.601
1.530
When k2 ≧ k20, k2m =
0.326
0.290
0.362
When k2 < k20, k2m =
0.165
0.127
0.117
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
176.978
195.845
153.544
1.2 < NA ≦ 1.3
55 < T ≦ 65
7/21
Case
6-01
6-02
6-03
6-04
6-05
n10
1.895
1.882
1.690
1.701
1.693
k10
0.076
0.126
0.068
0.084
0.070
d10 (nm)
13.537
14.752
155.845
206.275
221.382
n20
1.753
1.688
1.693
1.686
1.667
k20
0.262
0.309
0.181
0.310
0.231
d20 (nm)
223.848
174.672
224.616
122.505
161.928
When n1 ≧ n10, n1m =
1.983
1.956
1.691
1.703
1.726
When n1 < n10, n1m =
1.846
1.842
1.680
1.695
1.686
When k1 ≧ k10, k1m =
0.143
0.185
0.071
0.096
0.105
When k1 < k10, k1m =
0.000
0.045
0.054
0.076
0.063
When d1 ≧ d10,
19.333
19.661
156.188
207.561
253.974
d1m (nm) =
When d1 < d10,
10.604
12.234
149.873
203.306
217.847
d1m (nm) =
When n2 ≧ n20, n2m =
1.828
1.751
1.713
1.791
1.691
When n2 < n20, n2m =
1.623
1.571
1.692
1.682
1.585
When k2 ≧ k20, k2m =
0.332
0.365
0.184
0.352
0.284
When k2 < k20, k2m =
0.191
0.239
0.171
0.280
0.201
When d2 ≧ d20,
∞
∞
244.114
149.549
170.132
d2m (nm) =
When d2 < d20,
146.194
124.203
224.269
121.948
139.231
d2m (nm) =
1.2 < NA ≦ 1.3
55 < T ≦ 65
Case
6-06
6-07
6-08
n10
1.695
1.695
1.703
k10
0.060
0.055
0.049
d10 (nm)
218.851
215.764
278.302
n20
1.689
1.693
1.691
k20
0.190
0.162
0.159
d20 (nm)
218.129
277.062
273.241
When n1 ≧ n10, n1m =
1.726
1.740
1.751
When n1 < n10, n1m =
1.665
1.662
1.653
When k1 ≧ k10, k1m =
0.102
0.097
0.092
When k1 < k10, k1m =
0.031
0.021
0.015
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
196.531
170.235
166.884
When n2 ≧ n20, n2m =
1.935
1.919
1.925
When n2 < n20, n2m =
1.606
1.543
1.498
When k2 ≧ k20, k2m =
0.294
0.280
0.278
When k2 < k20, k2m =
0.130
0.102
0.095
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
191.652
197.142
190.724
1.2 < NA ≦ 1.3
65 < T ≦ 75
8/21
Case
7-01
7-02
7-03
7-04
7-05
n10
1.881
1.879
1.898
1.873
1.715
k10
0.189
0.125
0.073
0.092
0.067
d10 (nm)
17.242
15.444
14.029
12.003
99.925
n20
1.617
1.697
1.767
1.696
1.686
k20
0.409
0.320
0.271
0.218
0.167
d20 (nm)
111.921
162.536
211.582
280.785
269.056
When n1 ≧ n10, n1m =
1.933
1.953
1.985
1.975
1.746
When n1 < n10, n1m =
1.873
1.839
1.852
1.816
1.710
When k1 ≧ k10, k1m =
0.202
0.184
0.136
0.174
0.081
When k1 < k10, k1m =
0.122
0.046
0.000
0.000
0.037
When d1 ≧ d10,
20.550
20.523
19.818
18.551
136.285
d1m (nm) =
When d1 < d10,
16.700
12.791
11.204
8.554
98.008
d1m (nm) =
When n2 ≧ n20, n2m =
1.633
1.761
1.845
1.780
1.699
When n2 < n20, n2m =
1.511
1.579
1.638
1.585
1.620
When k2 ≧ k20, k2m =
0.430
0.380
0.344
0.283
0.175
When k2 < k20, k2m =
0.344
0.246
0.196
0.150
0.131
When d2 ≧ d20,
∞
∞
∞
∞
278.211
d2m (nm) =
When d2 < d20,
91.266
127.980
136.666
158.294
243.285
d2m (nm) =
1.2 < NA ≦ 1.3
65 < T ≦ 75
Case
7-06
7-07
7-08
n10
1.693
1.695
1.695
k10
0.070
0.061
0.055
d10 (nm)
221.230
218.569
215.552
n20
1.668
1.689
1.692
k20
0.236
0.193
0.164
d20 (nm)
151.884
208.598
267.637
When n1 ≧ n10, n1m =
1.724
1.724
1.741
When n1 < n10, n1m =
1.686
1.666
1.661
When k1 ≧ k10, k1m =
0.105
0.101
0.097
When k1 < k10, k1m =
0.064
0.031
0.021
When d1 ≧ d10, d1m (nm) =
247.645
∞
∞
When d1 < d10, d1m (nm) =
218.101
197.493
171.385
When n2 ≧ n20, n2m =
1.689
1.934
1.918
When n2 < n20, n2m =
1.586
1.609
1.542
When k2 ≧ k20, k2m =
0.286
0.296
0.281
When k2 < k20, k2m =
0.205
0.130
0.101
When d2 ≧ d20, d2m (nm) =
159.193
∞
∞
When d2 < d20, d2m (nm) =
130.698
183.027
188.504
1.2 < NA ≦ 1.3
75 < T ≦ 85
9/21
Case
8-01
8-02
8-03
8-04
8-05
n10
1.880
1.901
1.874
1.716
1.692
k10
0.126
0.074
0.095
0.068
0.072
d10 (nm)
16.279
14.624
12.218
99.848
220.366
n20
1.709
1.778
1.694
1.687
1.668
k20
0.340
0.284
0.225
0.173
0.244
d20 (nm)
151.148
201.087
271.916
259.863
143.647
When n1 ≧ n10, n1m =
1.951
1.984
1.974
1.746
1.725
When n1 < n10, n1m =
1.842
1.857
1.818
1.712
1.688
When k1 ≧ k10, k1m =
0.181
0.134
0.175
0.079
0.106
When k1 < k10, k1m =
0.048
0.000
0.000
0.042
0.068
When d1 ≧ d10,
21.358
20.311
18.650
135.917
245.491
d1m (nm) =
When d1 < d10,
13.627
11.922
8.869
98.660
218.637
d1m (nm) =
When n2 ≧ n20, n2m =
1.774
1.856
1.776
1.696
1.688
When n2 < n20, n2m =
1.592
1.651
1.582
1.624
1.581
When k2 ≧ k20, k2m =
0.403
0.360
0.289
0.178
0.280
When k2 < k20, k2m =
0.263
0.208
0.157
0.137
0.214
When d2 ≧ d20,
∞
∞
∞
265.927
149.336
d2m (nm) =
When d2 < d20,
123.537
130.884
183.486
237.438
121.404
d2m (nm) =
1.2 < NA ≦ 1.3
75 < T ≦ 85
Case
8-06
8-07
n10
1.695
1.695
k10
0.062
0.056
d10 (nm)
218.447
215.754
n20
1.688
1.691
k20
0.198
0.167
d20 (nm)
200.044
258.621
When n1 ≧ n10, n1m =
1.724
1.740
When n1 < n10, n1m =
1.667
1.661
When k1 ≧ k10, k1m =
0.102
0.097
When k1 < k10, k1m =
0.033
0.022
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
198.178
171.868
When n2 ≧ n20, n2m =
1.931
1.916
When n2 < n20, n2m =
1.605
1.542
When k2 ≧ k20, k2m =
0.296
0.282
When k2 < k20, k2m =
0.132
0.105
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
172.147
178.623
1.2 < NA ≦ 1.3
85 < T ≦ 95
10/21
Case
9-01
9-02
9-03
9-04
9-05
n10
1.888
1.903
1.880
1.693
1.695
k10
0.130
0.081
0.095
0.063
0.064
d10 (nm)
16.763
14.911
12.432
156.037
218.418
n20
1.718
1.775
1.700
1.696
1.685
k20
0.366
0.299
0.236
0.165
0.207
d20 (nm)
141.793
193.492
262.434
252.531
192.031
When n1 ≧ n10, n1m =
1.955
1.983
1.976
1.693
1.725
When n1 < n10, n1m =
1.853
1.862
1.827
1.659
1.667
When k1 ≧ k10, k1m =
0.178
0.137
0.171
0.071
0.102
When k1 < k10, k1m =
0.053
0.000
0.000
0.062
0.036
When d1 ≧ d10,
21.482
20.338
18.582
156.116
252.664
d1m (nm) =
When d1 < d10,
14.427
12.369
9.315
108.678
198.579
d1m (nm) =
When n2 ≧ n20, n2m =
1.777
1.851
1.779
1.766
1.934
When n2 < n20, n2m =
1.605
1.653
1.583
1.688
1.600
When k2 ≧ k20, k2m =
0.429
0.373
0.299
0.166
0.298
When k2 < k20, k2m =
0.289
0.223
0.167
0.129
0.138
When d2 ≧ d20,
∞
∞
∞
252.906
∞
d2m (nm) =
When d2 < d20,
118.585
127.262
178.673
249.872
164.058
d2m (nm) =
1.2 < NA ≦ 1.3
85 < T ≦ 95
Case
9-06
9-07
n10
1.695
1.704
k10
0.057
0.051
d10 (nm)
216.093
278.289
n20
1.691
1.691
k20
0.173
0.173
d20 (nm)
249.945
246.105
When n1 ≧ n10, n1m =
1.738
1.752
When n1 < n10, n1m =
1.662
1.653
When k1 ≧ k10, k1m =
0.098
0.092
When k1 < k10, k1m =
0.022
0.016
When d1 ≧ d10,
∞
∞
d1m (nm) =
When d1 < d10,
175.267
172.533
d1m (nm) =
When n2 ≧ n20, n2m =
1.919
1.830
When n2 < n20, n2m =
1.543
1.507
When k2 ≧ k20, k2m =
0.284
0.291
When k2 < k20, k2m =
0.111
0.108
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
173.633
172.262
1.2 < NA ≦ 1.3
95 < T ≦ 105
11/21
Case
10-01
10-02
10-03
10-04
10-05
10-06
n10
1.902
1.906
1.888
1.694
1.695
1.704
k10
0.140
0.093
0.096
0.066
0.059
0.052
d10 (nm)
16.621
14.821
12.503
218.392
216.276
278.098
n20
1.717
1.761
1.706
1.682
1.691
1.689
k20
0.393
0.312
0.247
0.217
0.180
0.180
d20 (nm)
134.110
187.587
253.021
183.765
241.184
237.690
When n1 ≧ n10, n1m =
1.964
1.983
1.982
1.725
1.737
1.752
When n1 < n10, n1m =
1.874
1.867
1.838
1.666
1.663
1.658
When k1 ≧ k10, k1m =
0.179
0.146
0.168
0.103
0.098
0.091
When k1 < k10, k1m =
0.062
0.004
0.000
0.041
0.024
0.019
When d1 ≧ d10, d1m (nm) =
20.729
19.885
18.297
250.100
∞
∞
When d1 < d10, d1m (nm) =
14.862
12.520
9.652
198.830
185.832
180.136
When n2 ≧ n20, n2m =
1.767
1.831
1.783
1.944
1.927
1.847
When n2 < n20, n2m =
1.609
1.641
1.584
1.598
1.559
1.512
When k2 ≧ k20, k2m =
0.449
0.380
0.309
0.303
0.288
0.296
When k2 < k20, k2m =
0.320
0.238
0.178
0.149
0.117
0.113
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
113.506
124.690
172.558
157.077
167.184
165.978
1.2 < NA ≦ 1.3
105 < T ≦ 115
12/21
Case
11-01
11-02
11-03
11-04
11-05
n10
1.915
1.908
1.895
1.692
1.694
k10
0.153
0.105
0.097
0.060
0.068
d10 (nm)
15.972
14.452
12.386
153.833
218.491
n20
1.700
1.741
1.708
1.696
1.679
k20
0.410
0.319
0.254
0.152
0.227
d20 (nm)
128.035
181.864
244.026
294.292
174.638
When n1 ≧ n10, n1m =
1.973
1.983
1.987
1.719
1.723
When n1 < n10, n1m =
1.893
1.872
1.847
1.655
1.669
When k1 ≧ k10, k1m =
0.185
0.156
0.167
0.093
0.104
When k1 < k10, k1m =
0.078
0.017
0.000
0.039
0.045
When d1 ≧ d10,
19.455
19.144
17.845
∞
247.764
d1m (nm) =
When d1 < d10,
14.744
12.421
9.756
107.765
205.861
d1m (nm) =
When n2 ≧ n20, n2m =
1.741
1.806
1.782
1.782
1.753
When n2 < n20, n2m =
1.596
1.623
1.583
1.640
1.603
When k2 ≧ k20, k2m =
0.453
0.379
0.315
0.185
0.311
When k2 < k20, k2m =
0.345
0.249
0.187
0.106
0.163
When d2 ≧ d20,
∞
∞
∞
∞
∞
d2m (nm) =
When d2 < d20,
107.965
122.284
164.682
240.729
150.727
d2m (nm) =
1.2 < NA ≦ 1.3
105 < T ≦ 115
Case
11-06
11-07
n10
1.695
1.705
k10
0.060
0.054
d10 (nm)
216.291
277.828
n20
1.691
1.688
k20
0.187
0.185
d20 (nm)
231.949
228.622
When n1 ≧ n10, n1m =
1.736
1.751
When n1 < n10, n1m =
1.664
1.660
When k1 ≧ k10, k1m =
0.099
0.091
When k1 < k10, k1m =
0.026
0.021
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
188.964
182.620
When n2 ≧ n20, n2m =
1.938
1.860
When n2 < n20, n2m =
1.577
1.505
When k2 ≧ k20, k2m =
0.293
0.298
When k2 < k20, k2m =
0.122
0.117
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
190.206
157.223
1.2 < NA ≦ 1.3
115 < T ≦ 125
13/21
Case
12-01
12-02
12-03
12-04
12-05
n10
1.919
1.909
1.897
1.692
1.694
k10
0.168
0.114
0.102
0.061
0.069
d10 (nm)
15.470
14.219
12.252
153.490
218.807
n20
1.675
1.728
1.703
1.695
1.679
k20
0.416
0.323
0.257
0.154
0.236
d20 (nm)
121.998
174.431
235.332
285.775
164.294
When n1 ≧ n10, n1m =
1.974
1.983
1.989
1.719
1.720
When n1 < n10, n1m =
1.903
1.876
1.851
1.657
1.674
When k1 ≧ k10, k1m =
0.194
0.163
0.171
0.093
0.104
When k1 < k10, k1m =
0.095
0.028
0.000
0.043
0.048
When d1 ≧ d10,
18.537
18.641
17.506
176.125
245.819
d1m (nm) =
When d1 < d10,
14.577
12.379
9.747
108.056
210.037
d1m (nm) =
When n2 ≧ n20, n2m =
1.708
1.790
1.776
1.773
1.745
When n2 < n20, n2m =
1.572
1.608
1.579
1.640
1.616
When k2 ≧ k20, k2m =
0.448
0.378
0.316
0.184
0.323
When k2 < k20, k2m =
0.357
0.255
0.190
0.115
0.176
When d2 ≧ d20,
∞
∞
∞
∞
∞
d2m (nm) =
When d2 < d20,
99.374
118.240
154.295
239.447
146.164
d2m (nm) =
1.2 < NA ≦ 1.3
115 < T ≦ 125
Case
12-06
12-07
12-08
n10
1.695
1.696
1.706
k10
0.061
0.056
0.051
d10 (nm)
216.166
214.076
276.333
n20
1.690
1.694
1.706
k20
0.192
0.163
0.162
d20 (nm)
222.296
280.805
273.925
When n1 ≧ n10, n1m =
1.728
1.750
1.770
When n1 < n10, n1m =
1.664
1.664
1.647
When k1 ≧ k10, k1m =
0.099
0.099
0.090
When k1 < k10, k1m =
0.029
0.023
0.020
When d1 ≧ d10, d1m (nm) =
∞
∞
∞
When d1 < d10, d1m (nm) =
190.492
185.642
181.694
When n2 ≧ n20, n2m =
1.826
1.931
1.851
When n2 < n20, n2m =
1.594
1.560
1.519
When k2 ≧ k20, k2m =
0.297
0.283
0.279
When k2 < k20, k2m =
0.128
0.103
0.095
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
When d2 < d20, d2m (nm) =
188.671
203.385
188.718
1.2 < NA ≦ 1.3
125 < T ≦ 135
14/21
Case
13-01
13-02
13-03
13-04
13-05
n10
1.909
1.895
1.879
1.694
1.695
k10
0.116
0.106
0.083
0.071
0.063
d10 (nm)
14.671
12.483
11.828
219.020
215.746
n20
1.733
1.700
1.710
1.682
1.690
k20
0.334
0.261
0.220
0.245
0.197
d20 (nm)
163.102
225.249
280.433
153.670
212.983
When n1 ≧ n10, n1m =
1.981
1.985
1.982
1.717
1.723
When n1 < n10, n1m =
1.878
1.850
1.819
1.677
1.665
When k1 ≧ k10, k1m =
0.162
0.173
0.169
0.103
0.099
When k1 < k10, k1m =
0.035
0.004
0.000
0.051
0.034
When d1 ≧ d10,
19.040
17.738
18.242
233.783
∞
d1m (nm) =
When d1 < d10,
12.910
9.987
8.329
211.731
191.269
d1m (nm) =
When n2 ≧ n20, n2m =
1.795
1.771
1.785
1.724
1.797
When n2 < n20, n2m =
1.610
1.575
1.592
1.634
1.609
When k2 ≧ k20, k2m =
0.389
0.319
0.285
0.337
0.302
When k2 < k20, k2m =
0.261
0.192
0.153
0.187
0.133
When d2 ≧ d20,
∞
∞
∞
∞
∞
d2m (nm) =
When d2 < d20,
109.327
144.773
164.318
140.585
192.523
d2m (nm) =
1.2 < NA ≦ 1.3
125 < T ≦ 135
Case
13-06
13-07
n10
1.696
1.706
k10
0.057
0.052
d10 (nm)
213.723
276.363
n20
1.693
1.706
k20
0.165
0.164
d20 (nm)
271.596
264.087
When n1 ≧ n10, n1m =
1.749
1.772
When n1 < n10, n1m =
1.664
1.645
When k1 ≧ k10, k1m =
0.099
0.090
When k1 < k10, k1m =
0.026
0.022
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
186.782
182.830
When n2 ≧ n20, n2m =
1.934
1.851
When n2 < n20, n2m =
1.561
1.521
When k2 ≧ k20, k2m =
0.285
0.282
When k2 < k20, k2m =
0.104
0.097
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
198.444
183.298
1.2 < NA ≦ 1.3
135 < T ≦ 145
15/21
Case
14-01
14-02
14-03
14-04
14-05
n10
1.910
1.892
1.879
1.694
1.694
k10
0.115
0.109
0.084
0.072
0.064
d10 (nm)
15.725
12.960
12.187
218.706
215.091
n20
1.755
1.698
1.712
1.684
1.689
k20
0.355
0.268
0.226
0.254
0.201
d20 (nm)
150.207
215.505
270.397
144.577
204.614
When n1 ≧ n10, n1m =
1.980
1.980
1.979
1.708
1.720
When n1 < n10, n1m =
1.881
1.848
1.820
1.676
1.666
When k1 ≧ k10, k1m =
0.157
0.174
0.167
0.100
0.099
When k1 < k10, k1m =
0.036
0.011
0.000
0.054
0.038
When d1 ≧ d10,
20.158
18.254
18.627
231.071
∞
d1m (nm) =
When d1 < d10,
14.003
10.450
8.694
211.497
191.698
d1m (nm) =
When n2 ≧ n20, n2m =
1.818
1.767
1.787
1.721
1.802
When n2 < n20, n2m =
1.632
1.571
1.592
1.649
1.619
When k2 ≧ k20, k2m =
0.415
0.327
0.291
0.345
0.308
When k2 < k20, k2m =
0.275
0.197
0.157
0.200
0.145
When d2 ≧ d20,
∞
∞
∞
160.527
∞
d2m (nm) =
When d2 < d20,
119.641
139.482
181.534
134.106
186.758
d2m (nm) =
1.2 < NA ≦ 1.3
135 < T ≦ 145
Case
14-06
14-07
n10
1.696
1.706
k10
0.058
0.052
d10 (nm)
213.482
276.472
n20
1.692
1.707
k20
0.169
0.168
d20 (nm)
262.678
254.823
When n1 ≧ n10, n1m =
1.748
1.771
When n1 < n10, n1m =
1.665
1.644
When k1 ≧ k10, k1m =
0.100
0.090
When k1 < k10, k1m =
0.028
0.024
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
188.144
184.314
When n2 ≧ n20, n2m =
1.933
1.854
When n2 < n20, n2m =
1.561
1.522
When k2 ≧ k20, k2m =
0.288
0.286
When k2 < k20, k2m =
0.109
0.100
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
191.540
174.816
1.2 < NA ≦ 1.3
145 < T ≦ 155
16/21
Case
15-01
15-02
15-03
15-04
15-05
n10
1.919
1.893
1.882
1.694
1.694
k10
0.115
0.113
0.085
0.074
0.065
d10 (nm)
16.638
13.413
12.438
217.741
214.737
n20
1.785
1.697
1.715
1.683
1.687
k20
0.385
0.281
0.235
0.264
0.207
d20 (nm)
138.580
206.656
261.237
137.032
196.488
When n1 ≧ n10, n1m =
1.986
1.976
1.980
1.705
1.718
When n1 < n10, n1m =
1.892
1.851
1.826
1.676
1.666
When k1 ≧ k10, k1m =
0.151
0.174
0.165
0.099
0.100
When k1 < k10, k1m =
0.037
0.018
0.000
0.060
0.040
When d1 ≧ d10,
20.946
18.588
18.692
227.547
∞
d1m (nm) =
When d1 < d10,
15.073
10.996
9.087
210.480
192.120
d1m (nm) =
When n2 ≧ n20, n2m =
1.846
1.763
1.789
1.722
1.834
When n2 < n20, n2m =
1.665
1.571
1.591
1.652
1.629
When k2 ≧ k20, k2m =
0.451
0.339
0.301
0.337
0.312
When k2 < k20, k2m =
0.301
0.209
0.166
0.217
0.151
When d2 ≧ d20,
∞
∞
∞
149.574
∞
d2m (nm) =
When d2 < d20,
113.921
135.398
177.745
128.876
178.069
d2m (nm) =
1.2 < NA ≦ 1.3
145 < T ≦ 155
Case
15-06
15-07
n10
1.695
1.707
k10
0.059
0.053
d10 (nm)
213.710
276.548
n20
1.692
1.707
k20
0.173
0.174
d20 (nm)
253.675
246.168
When n1 ≧ n10, n1m =
1.747
1.770
When n1 < n10, n1m =
1.665
1.645
When k1 ≧ k10, k1m =
0.100
0.089
When k1 < k10, k1m =
0.029
0.025
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
189.864
185.926
When n2 ≧ n20, n2m =
1.910
1.858
When n2 < n20, n2m =
1.562
1.520
When k2 ≧ k20, k2m =
0.289
0.291
When k2 < k20, k2m =
0.109
0.103
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
189.584
169.414
1.2 < NA ≦ 1.3
155 < T ≦ 165
17/21
Case
16-01
16-02
16-03
16-04
16-05
n10
1.937
1.898
1.890
1.694
1.694
k10
0.118
0.119
0.087
0.077
0.067
d10 (nm)
16.771
13.576
12.460
216.630
214.866
n20
1.806
1.695
1.718
1.679
1.684
k20
0.418
0.295
0.246
0.277
0.215
d20 (nm)
129.251
198.434
252.589
129.875
188.027
When n1 ≧ n10, n1m =
2.001
1.978
1.985
1.707
1.716
When n1 < n10, n1m =
1.914
1.859
1.836
1.685
1.666
When k1 ≧ k10, k1m =
0.148
0.176
0.164
0.101
0.100
When k1 < k10, k1m =
0.045
0.025
0.000
0.067
0.040
When d1 ≧ d10,
20.691
18.424
18.356
225.238
231.093
d1m (nm) =
When d1 < d10,
15.556
11.376
9.363
212.673
192.697
d1m (nm) =
When n2 ≧ n20, n2m =
1.861
1.756
1.791
1.715
1.840
When n2 < n20, n2m =
1.690
1.574
1.591
1.643
1.628
When k2 ≧ k20, k2m =
0.481
0.351
0.310
0.328
0.314
When k2 < k20, k2m =
0.336
0.225
0.176
0.223
0.151
When d2 ≧ d20,
∞
∞
∞
139.199
∞
d2m (nm) =
When d2 < d20,
109.768
131.712
172.718
120.241
167.595
d2m (nm) =
1.2 < NA ≦ 1.3
155 < T ≦ 165
Case
16-06
16-07
n10
1.695
1.707
k10
0.060
0.054
d10 (nm)
214.034
276.376
n20
1.692
1.707
k20
0.179
0.181
d20 (nm)
244.657
237.806
When n1 ≧ n10, n1m =
1.745
1.770
When n1 < n10, n1m =
1.666
1.653
When k1 ≧ k10, k1m =
0.101
0.089
When k1 < k10, k1m =
0.030
0.027
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
191.630
187.468
When n2 ≧ n20, n2m =
1.889
1.864
When n2 < n20, n2m =
1.562
1.515
When k2 ≧ k20, k2m =
0.290
0.295
When k2 < k20, k2m =
0.115
0.110
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
179.119
164.223
1.2 < NA ≦ 1.3
165 < T ≦ 175
18/21
Case
17-01
17-02
17-03
17-04
17-05
n10
1.958
1.903
1.898
1.694
1.694
k10
0.128
0.127
0.090
0.080
0.068
d10 (nm)
15.815
13.420
12.296
215.821
215.165
n20
1.794
1.688
1.719
1.668
1.681
k20
0.439
0.307
0.254
0.290
0.224
d20 (nm)
123.830
190.984
244.231
122.663
179.093
When n1 ≧ n10, n1m =
2.020
1.981
1.991
1.707
1.716
When n1 < n10, n1m =
1.942
1.867
1.846
1.692
1.665
When k1 ≧ k10, k1m =
0.150
0.182
0.165
0.103
0.101
When k1 < k10, k1m =
0.058
0.033
0.000
0.077
0.041
When d1 ≧ d10,
19.257
17.848
17.802
223.701
230.268
d1m (nm) =
When d1 < d10,
15.087
11.461
9.465
215.120
195.890
d1m (nm) =
When n2 ≧ n20, n2m =
1.832
1.743
1.790
1.677
1.826
When n2 < n20, n2m =
1.680
1.570
1.590
1.625
1.625
When k2 ≧ k20, k2m =
0.483
0.357
0.316
0.321
0.315
When k2 < k20, k2m =
0.365
0.239
0.186
0.252
0.151
When d2 ≧ d20,
∞
∞
∞
127.631
∞
d2m (nm) =
When d2 < d20,
111.992
128.672
166.465
109.461
158.121
d2m (nm) =
1.2 < NA ≦ 1.3
165 < T ≦ 175
Case
17-06
17-07
n10
1.696
1.707
k10
0.061
0.056
d10 (nm)
214.210
275.996
n20
1.692
1.705
k20
0.185
0.187
d20 (nm)
235.479
229.352
When n1 ≧ n10, n1m =
1.744
1.770
When n1 < n10, n1m =
1.667
1.657
When k1 ≧ k10, k1m =
0.101
0.088
When k1 < k10, k1m =
0.031
0.030
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
193.216
188.863
When n2 ≧ n20, n2m =
1.887
1.872
When n2 < n20, n2m =
1.561
1.509
When k2 ≧ k20, k2m =
0.292
0.295
When k2 < k20, k2m =
0.120
0.115
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
161.210
156.975
1.2 < NA ≦ 1.3
175 < T ≦ 185
19/21
Case
18-01
18-02
18-03
18-04
18-05
n10
1.907
1.904
1.694
1.696
1.704
k10
0.135
0.092
0.070
0.062
0.051
d10 (nm)
13.188
12.121
215.718
214.371
274.345
n20
1.679
1.720
1.679
1.692
1.687
k20
0.313
0.260
0.233
0.190
0.159
d20 (nm)
183.151
235.214
169.072
225.802
280.556
When n1 ≧ n10, n1m =
1.982
1.997
1.715
1.743
1.760
When n1 < n10, n1m =
1.873
1.854
1.666
1.668
1.658
When k1 ≧ k10, k1m =
0.188
0.166
0.102
0.102
0.090
When k1 < k10, k1m =
0.044
0.000
0.044
0.032
0.018
When d1 ≧ d10,
17.244
17.308
229.740
∞
∞
d1m (nm) =
When d1 < d10,
11.395
9.486
201.461
194.630
174.558
d1m (nm) =
When n2 ≧ n20, n2m =
1.730
1.790
1.771
1.836
1.900
When n2 < n20, n2m =
1.562
1.589
1.630
1.559
1.518
When k2 ≧ k20, k2m =
0.359
0.319
0.318
0.293
0.259
When k2 < k20, k2m =
0.249
0.193
0.159
0.124
0.097
When d2 ≧ d20,
∞
∞
∞
∞
∞
d2m (nm) =
When d2 < d20,
128.127
156.903
151.088
157.464
192.992
d2m (nm) =
1.2 < NA ≦ 1.3
185 < T ≦ 195
20/21
Case
19-01
19-02
19-03
19-04
19-05
n10
1.908
1.906
1.889
1.693
1.696
k10
0.140
0.092
0.087
0.071
0.064
d10 (nm)
13.288
12.370
11.418
216.427
214.510
n20
1.676
1.726
1.707
1.681
1.692
k20
0.321
0.266
0.223
0.243
0.195
d20 (nm)
172.696
223.910
283.898
158.126
215.938
When n1 ≧ n10, n1m =
1.981
1.996
1.994
1.713
1.742
When n1 < n10, n1m =
1.875
1.857
1.834
1.670
1.669
When k1 ≧ k10, k1m =
0.190
0.163
0.168
0.103
0.102
When k1 < k10, k1m =
0.055
0.000
0.000
0.051
0.037
When d1 ≧ d10,
17.148
17.446
17.407
228.093
∞
d1m (nm) =
When d1 < d10,
11.532
9.791
8.458
205.012
195.805
d1m (nm) =
When n2 ≧ n20, n2m =
1.725
1.797
1.791
1.767
1.825
When n2 < n20, n2m =
1.558
1.592
1.590
1.647
1.558
When k2 ≧ k20, k2m =
0.365
0.327
0.286
0.323
0.294
When k2 < k20, k2m =
0.256
0.198
0.157
0.178
0.130
When d2 ≧ d20,
∞
∞
∞
∞
∞
d2m (nm) =
When d2 < d20,
125.060
143.864
171.207
144.997
180.034
d2m (nm) =
1.2 < NA ≦ 1.3
185 < T ≦ 195
Case
19-06
19-07
n10
1.696
1.704
k10
0.057
0.052
d10 (nm)
213.492
274.677
n20
1.691
1.687
k20
0.166
0.162
d20 (nm)
273.809
270.432
When n1 ≧ n10, n1m =
1.742
1.760
When n1 < n10, n1m =
1.666
1.659
When k1 ≧ k10, k1m =
0.097
0.090
When k1 < k10, k1m =
0.026
0.022
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
178.602
175.003
When n2 ≧ n20, n2m =
1.857
1.904
When n2 < n20, n2m =
1.570
1.518
When k2 ≧ k20, k2m =
0.281
0.262
When k2 < k20, k2m =
0.104
0.096
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
199.693
186.949
1.2 < NA ≦ 1.3
195 < T ≦ 205
21/21
Case
20-01
20-02
20-03
20-04
20-05
n10
1.907
1.904
1.887
1.693
1.696
k10
0.139
0.091
0.088
0.073
0.065
d10 (nm)
13.915
13.010
11.752
216.656
214.259
n20
1.684
1.734
1.707
1.683
1.692
k20
0.334
0.275
0.227
0.253
0.201
d20 (nm)
160.500
212.141
273.737
148.279
206.980
When n1 ≧ n10, n1m =
1.978
1.992
1.990
1.700
1.743
When n1 < n10, n1m =
1.874
1.857
1.833
1.671
1.670
When k1 ≧ k10, k1m =
0.186
0.158
0.167
0.098
0.102
When k1 < k10, k1m =
0.059
0.000
0.000
0.062
0.044
When d1 ≧ d10,
17.817
18.151
17.811
226.068
265.367
d1m (nm) =
When d1 < d10,
12.124
10.391
8.783
207.088
196.420
d1m (nm) =
When n2 ≧ n20, n2m =
1.731
1.806
1.791
1.746
1.815
When n2 < n20, n2m =
1.564
1.602
1.588
1.669
1.556
When k2 ≧ k20, k2m =
0.381
0.338
0.291
0.321
0.294
When k2 < k20, k2m =
0.265
0.202
0.159
0.212
0.142
When d2 ≧ d20,
∞
∞
∞
∞
∞
d2m (nm) =
When d2 < d20,
125.465
136.447
180.411
144.423
187.001
d2m (nm) =
1.2 < NA ≦ 1.3
195 < T ≦ 205
Case
20-06
20-07
n10
1.696
1.704
k10
0.058
0.053
d10 (nm)
213.637
275.120
n20
1.690
1.687
k20
0.169
0.165
d20 (nm)
264.528
260.887
When n1 ≧ n10, n1m =
1.742
1.760
When n1 < n10, n1m =
1.666
1.661
When k1 ≧ k10, k1m =
0.097
0.090
When k1 < k10, k1m =
0.030
0.025
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
183.526
175.348
When n2 ≧ n20, n2m =
1.856
1.912
When n2 < n20, n2m =
1.571
1.519
When k2 ≧ k20, k2m =
0.282
0.268
When k2 < k20, k2m =
0.108
0.102
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
202.896
181.779.

3,861 more elements

An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of:

providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit:
nm) described below;
and
exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.3<NA≦1.4, the antireflective film including an upper layer having a complex refractive index N1, and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the equations N1=n1−k1i and N2=n2−k2i, respectively;
wherein assuming that the thickness of the upper layer is d1 (unit:
nm) and the thickness of the lower layer is d2 (unit:
nm) , when any one of the combinations of values of [n10, k10, d10, n20, k20, d20] described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1, n2, k2, and d2 satisfy the relational expression
{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1;
a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10;
a value of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10;
a value of d1m in a corresponding case is selected on the basis of a magnitude relation between d1 and d10;
a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20;
a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20;
and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20;
and
in the tables below, in the line of “When n1≧n10, n1m=”, each value in the right columns is “n1m−n10”;
in the line of “When n1<n10, n1m=”, each value in the right columns is “n10−n1m”;
in the line of “When k1≧k10, k1m=”, each value in the right columns is “k1m−k10”;
in the line of “When k1<k10, k1m=” each value in the right columns is “k1m”;
in the line of “When d1≧d10, d1m (nm) =”, each value (unit:
nm) in the right columns is “d1m−d10”;
in the line of “When d1<d10, d1m (nm) =”, each value (unit:
nm) in the right columns is “d10−d1m”;
in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”;
in the line of “When n2<n20, n2m=”, each value in the right columns is “n20−n2m”;
in the line of “When k2≧k20, k2m=”, each value in the right columns is “k2m−k20”;
in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”;
in the line of “When d2≧d20, d2m (nm) =”, each value (unit:
nm) in the right columns is “d2m−d20”;
and in the line of “When d2<d20, d2m (nm) =”, each value (unit:
nm) in the right columns is “d20−d2m”.
1.3 < NA ≦ 1.4
2 ≦ T ≦ 15
1/20
Case
1-01
1-02
1-03
1-04
1-05
n10
2.047
1.887
1.871
1.868
1.862
k10
0.012
0.120
0.106
0.075
0.065
d10 (nm)
29.751
26.980
17.106
15.339
13.830
n20
6.274
1.973
1.713
1.738
1.730
k20
3.305
0.477
0.298
0.245
0.208
d20 (nm)
1.566
76.285
158.161
212.612
271.884
When n1 ≧ n10, n1m =
2.109
1.929
1.924
1.935
1.940
When n1 < n10, n1m =
1.990
1.877
1.852
1.835
1.823
When k1 ≧ k10, k1m =
0.055
0.138
0.136
0.123
0.124
When k1 < k10, k1m =
0.000
0.089
0.036
0.000
0.000
When d1 ≧ d10,
32.767
31.708
21.551
20.868
20.183
d1m (nm) =
When d1 < d10,
27.509
26.309
15.640
12.771
10.913
d1m (nm) =
When n2 ≧ n20, n2m =
6.594
2.028
1.750
1.789
1.793
When n2 < n20, n2m =
5.978
1.933
1.627
1.639
1.618
When k2 ≧ k20, k2m =
3.556
0.507
0.335
0.292
0.258
When k2 < k20, k2m =
3.013
0.403
0.242
0.188
0.152
When d2 ≧ d20,
1.715
83.056
∞
∞
∞
d2m (nm) =
When d2 < d20,
1.418
75.266
136.202
175.723
191.206
d2m (nm) =
1.3 < NA ≦ 1.4
2 ≦ T ≦ 15
Case
1-06
1-07
1-08
1-09
1-10
n10
1.691
1.692
1.711
1.704
1.705
k10
0.062
0.057
0.070
0.057
0.050
d10 (nm)
161.852
157.460
239.891
226.155
221.451
n20
1.688
1.697
7.420
1.689
1.695
k20
0.179
0.154
3.291
0.187
0.158
d20 (nm)
207.262
266.043
0.810
202.908
261.182
When n1 ≧ n10, n1m =
1.703
1.707
1.725
1.738
1.736
When n1 < n10, n1m =
1.685
1.664
1.704
1.690
1.688
When k1 ≧ k10, k1m =
0.080
0.084
0.082
0.082
0.079
When k1 < k10, k1m =
0.051
0.029
0.049
0.029
0.022
When d1 ≧ d10,
169.125
171.143
250.745
∞
∞
d1m (nm) =
When d1 < d10,
157.974
129.944
235.697
215.124
204.319
d1m (nm) =
When n2 ≧ n20, n2m =
1.696
1.748
7.849
1.818
1.809
When n2 < n20, n2m =
1.666
1.665
7.185
1.613
1.611
When k2 ≧ k20, k2m =
0.202
0.195
3.465
0.264
0.246
When k2 < k20, k2m =
0.150
0.115
2.625
0.129
0.105
When d2 ≧ d20,
213.501
∞
0.893
∞
∞
d2m (nm) =
When d2 < d20,
194.001
249.665
0.721
179.167
225.188
d2m (nm) =
1.3 NA ≦ 1.4
2 ≦ T ≦ 15
2/20
Case
1-11
n10
1.695
k10
0.054
d10 (nm)
267.286
n20
1.705
k20
0.184
d20 (nm)
212.751
When n1 ≧ n10, n1m =
1.731
When n1 < n10, n1m =
1.655
When k1 ≧ k10, k1m =
0.080
When k1 < k10, k1m =
0.025
When d1 ≧ d10, d1m (nm) =
∞
When d1 < d10, d1m (nm) =
220.771
When n2 ≧ n20, n2m =
1.808
When n2 < n20, n2m =
1.623
When k2 ≧ k20, k2m =
0.237
When k2 < k20, k2m =
0.115
When d2 ≧ d20, d2m (nm) =
∞
When d2 < d20, d2m (nm) =
175.645
1.3 < NA ≦ 1.4
15 < T ≦ 25
3/20
Case
2-01
2-02
2-03
2-04
2-05
n10
1.943
1.876
1.873
1.866
1.691
k10
0.121
0.112
0.080
0.068
0.064
d10 (nm)
34.905
17.699
15.588
14.042
161.844
n20
6.149
1.719
1.739
1.732
1.687
k20
4.965
0.321
0.258
0.217
0.188
d20 (nm)
1.046
148.502
203.950
262.757
198.716
When n1 ≧ n10, n1m =
1.997
1.925
1.936
1.942
1.700
When n1 < n10, n1m =
1.902
1.861
1.842
1.830
1.690
When k1 ≧ k10, k1m =
0.155
0.135
0.124
0.122
0.079
When k1 < k10, k1m =
0.064
0.044
0.004
0.000
0.061
When d1 ≧ d10,
38.478
21.745
20.735
20.064
166.973
d1m (nm) =
When d1 < d10,
32.365
16.569
13.305
11.354
161.165
d1m (nm) =
When n2 ≧ n20, n2m =
6.640
1.749
1.787
1.793
1.688
When n2 < n20, n2m =
5.695
1.636
1.643
1.623
1.668
When k2 ≧ k20, k2m =
5.267
0.354
0.304
0.266
0.197
When k2 < k20, k2m =
4.500
0.266
0.202
0.162
0.165
When d2 ≧ d20,
1.189
∞
∞
∞
199.493
d2m (nm) =
When d2 < d20,
0.912
129.925
173.046
186.094
188.055
d2m (nm) =
1.3 < NA ≦ 1.4
15 < T ≦ 25
Case
2-06
2-07
2-08
2-09
2-10
n10
1.692
1.706
1.711
1.704
1.695
k10
0.059
0.052
0.075
0.059
0.056
d10 (nm)
157.652
221.303
235.815
225.762
267.452
n20
1.696
1.695
6.235
1.687
1.705
k20
0.161
0.165
4.691
0.197
0.194
d20 (nm)
257.279
252.591
0.724
194.502
204.028
When n1 ≧ n10, n1m =
1.703
1.736
1.711
1.737
1.730
When n1 < n10, n1m =
1.667
1.690
1.709
1.692
1.658
When k1 ≧ k10, k1m =
0.082
0.079
0.079
0.082
0.080
When k1 < k10, k1m =
0.033
0.024
0.074
0.033
0.029
When d1 ≧ d10,
165.499
∞
235.852
∞
∞
d1m (nm) =
When d1 < d10,
138.474
207.206
234.721
216.211
222.458
d1m (nm) =
When n2 ≧ n20, n2m =
1.740
1.797
6.407
1.814
1.798
When n2 < n20, n2m =
1.670
1.616
6.233
1.613
1.629
When k2 ≧ k20, k2m =
0.196
0.249
4.693
0.270
0.240
When k2 < k20, k2m =
0.121
0.111
3.940
0.138
0.122
When d2 ≧ d20,
∞
∞
0.732
∞
∞
d2m (nm) =
When d2 < d20,
244.077
220.690
0.720
173.495
171.776
d2m (nm) =
1.3 < NA ≦ 1.4
25 < T ≦ 35
4/20
Case
3-01
3-02
3-03
3-04
3-05
3-06
n10
1.883
1.879
1.872
1.692
1.705
1.706
k10
0.119
0.084
0.069
0.061
0.061
0.054
d10 (nm)
18.157
15.746
14.214
157.790
225.478
221.123
n20
1.723
1.741
1.737
1.697
1.687
1.695
k20
0.349
0.274
0.228
0.168
0.209
0.173
d20 (nm)
139.788
195.542
253.893
248.784
186.105
244.149
When n1 ≧ n10, n1m =
1.927
1.939
1.945
1.699
1.735
1.735
When n1 < n10, n1m =
1.873
1.852
1.839
1.671
1.694
1.692
When k1 ≧ k10, k1m =
0.135
0.123
0.119
0.079
0.082
0.078
When k1 < k10, k1m =
0.055
0.011
0.000
0.039
0.038
0.026
When d1 ≧ d10, d1m (nm) =
21.683
20.446
19.836
161.921
270.295
∞
When d1 < d10, d1m (nm) =
17.423
13.775
11.786
145.560
217.505
209.346
When n2 ≧ n20, n2m =
1.744
1.786
1.794
1.735
1.754
1.781
When n2 < n20, n2m =
1.647
1.650
1.632
1.679
1.615
1.622
When k2 ≧ k20, k2m =
0.374
0.316
0.276
0.196
0.276
0.252
When k2 < k20, k2m =
0.295
0.218
0.173
0.130
0.149
0.118
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
124.317
167.810
181.193
239.270
167.329
214.946
1.3 < NA ≦ 1.4
35 < T ≦ 45
5/20
Case
4-01
4-02
4-03
4-04
4-05
n10
1.890
1.886
1.877
1.692
1.705
k10
0.130
0.088
0.073
0.062
0.063
d10 (nm)
18.083
15.723
14.196
157.690
225.284
n20
1.714
1.743
1.736
1.697
1.687
k20
0.371
0.287
0.236
0.175
0.220
d20 (nm)
132.495
187.112
245.779
240.328
177.345
When n1 ≧ n10, n1m =
1.928
1.943
1.947
1.695
1.732
When n1 < n10, n1m =
1.886
1.862
1.846
1.674
1.696
When k1 ≧ k10, k1m =
0.137
0.123
0.120
0.075
0.081
When k1 < k10, k1m =
0.069
0.018
0.000
0.046
0.042
When d1 ≧ d10,
21.026
19.960
19.411
159.493
266.580
d1m (nm) =
When d1 < d10,
17.768
14.046
12.019
148.447
218.746
d1m (nm) =
When n2 ≧ n20, n2m =
1.723
1.784
1.789
1.731
1.745
When n2 < n20, n2m =
1.643
1.655
1.634
1.687
1.620
When k2 ≧ k20, k2m =
0.382
0.326
0.281
0.195
0.283
When k2 < k20, k2m =
0.323
0.234
0.182
0.141
0.159
When d2 ≧ d20,
∞
∞
∞
273.632
∞
d2m (nm) =
When d2 < d20,
119.322
160.895
176.028
234.699
160.070
d2m (nm) =
1.3 < NA ≦ 1.4
35 < T ≦ 45
Case
4-06
4-07
n10
1.706
1.695
k10
0.055
0.055
d10 (nm)
220.863
262.917
n20
1.695
1.705
k20
0.180
0.178
d20 (nm)
235.453
255.408
When n1 ≧ n10, n1m =
1.734
1.723
When n1 < n10, n1m =
1.693
1.660
When k1 ≧ k10, k1m =
0.078
0.082
When k1 < k10, k1m =
0.027
0.031
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
210.617
221.552
When n2 ≧ n20, n2m =
1.767
1.832
When n2 < n20, n2m =
1.630
1.613
When k2 ≧ k20, k2m =
0.252
0.241
When k2 < k20, k2m =
0.123
0.108
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
206.982
177.439
1.3 < NA ≦ 1.4
45 < T ≦ 55
6/20
Case
5-01
5-02
5-03
5-04
5-05
n10
1.891
1.892
1.878
1.691
1.705
k10
0.144
0.091
0.079
0.064
0.064
d10 (nm)
17.530
15.545
14.050
157.168
225.395
n20
1.686
1.744
1.728
1.696
1.686
k20
0.376
0.296
0.240
0.179
0.227
d20 (nm)
126.586
178.253
238.151
231.953
167.881
When n1 ≧ n10, n1m =
1.925
1.947
1.947
1.692
1.729
When n1 < n10, n1m =
1.891
1.870
1.849
1.677
1.698
When k1 ≧ k10, k1m =
0.144
0.124
0.124
0.069
0.080
When k1 < k10, k1m =
0.087
0.024
0.000
0.054
0.044
When d1 ≧ d10,
19.955
19.462
18.998
157.553
251.532
d1m (nm) =
When d1 < d10,
17.523
14.081
12.045
150.032
219.912
d1m (nm) =
When n2 ≧ n20, n2m =
1.686
1.783
1.778
1.727
1.728
When n2 < n20, n2m =
1.619
1.656
1.625
1.693
1.628
When k2 ≧ k20, k2m =
0.377
0.330
0.281
0.190
0.292
When k2 < k20, k2m =
0.336
0.244
0.186
0.164
0.167
When d2 ≧ d20,
127.104
∞
∞
253.769
∞
d2m (nm) =
When d2 < d20,
114.397
150.903
169.614
229.862
150.571
d2m (nm) =
1.3 < NA ≦ 1.4
45 < T ≦ 55
Case
5-06
5-07
n10
1.706
1.697
k10
0.056
0.047
d10 (nm)
220.607
278.691
n20
1.694
1.700
k20
0.184
0.152
d20 (nm)
226.210
281.986
When n1 ≧ n10, n1m =
1.728
1.753
When n1 < n10, n1m =
1.694
1.654
When k1 ≧ k10, k1m =
0.077
0.078
When k1 < k10, k1m =
0.029
0.021
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
210.961
211.857
When n2 ≧ n20, n2m =
1.757
1.912
When n2 < n20, n2m =
1.639
1.611
When k2 ≧ k20, k2m =
0.250
0.220
When k2 < k20, k2m =
0.125
0.096
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
199.775
202.106
1.3 < NA ≦ 1.4
55 < T ≦ 65
7/20
Case
6-01
6-02
6-03
6-04
6-05
6-06
n10
1.896
1.875
1.705
1.705
1.708
1.697
k10
0.091
0.087
0.064
0.057
0.053
0.047
d10 (nm)
15.652
14.019
225.606
220.354
218.289
278.413
n20
1.752
1.715
1.687
1.694
1.707
1.701
k20
0.303
0.239
0.232
0.186
0.158
0.154
d20 (nm)
167.408
230.256
157.678
216.433
272.538
271.867
When n1 ≧ n10, n1m =
1.950
1.943
1.724
1.723
1.740
1.750
When n1 < n10, n1m =
1.875
1.846
1.699
1.693
1.693
1.656
When k1 ≧ k10, k1m =
0.122
0.132
0.079
0.077
0.077
0.078
When k1 < k10, k1m =
0.025
0.004
0.045
0.033
0.030
0.022
When d1 ≧ d10, d1m (nm) =
19.494
18.898
247.964
∞
∞
∞
When d1 < d10, d1m (nm) =
14.295
12.042
221.101
210.599
206.669
213.947
When n2 ≧ n20, n2m =
1.792
1.763
1.721
1.752
1.799
1.923
When n2 < n20, n2m =
1.662
1.612
1.638
1.648
1.579
1.614
When k2 ≧ k20, k2m =
0.337
0.279
0.301
0.247
0.230
0.223
When k2 < k20, k2m =
0.249
0.186
0.176
0.128
0.106
0.097
When d2 ≧ d20, d2m (nm) =
∞
∞
172.085
∞
∞
∞
When d2 < d20, d2m (nm) =
138.575
161.008
143.974
199.200
203.487
191.019
1.3 < NA ≦ 1.4
65 < T ≦ 75
8/20
Case
7-01
7-02
7-03
7-04
7-05
n10
1.901
1.871
1.866
1.706
1.705
k10
0.088
0.093
0.067
0.065
0.057
d10 (nm)
16.388
14.267
13.172
225.317
220.112
n20
1.774
1.706
1.724
1.687
1.694
k20
0.318
0.241
0.206
0.238
0.188
d20 (nm)
154.194
221.319
275.098
147.740
206.685
When n1 ≧ n10, n1m =
1.955
1.937
1.947
1.721
1.721
When n1 < n10, n1m =
1.881
1.842
1.823
1.701
1.693
When k1 ≧ k10, k1m =
0.116
0.138
0.131
0.077
0.077
When k1 < k10, k1m =
0.024
0.011
0.000
0.045
0.035
When d1 ≧ d10,
20.279
19.161
19.228
239.263
245.793
d1m (nm) =
When d1 < d10,
15.118
12.240
10.142
222.197
210.312
d1m (nm) =
When n2 ≧ n20, n2m =
1.816
1.751
1.783
1.720
1.752
When n2 < n20, n2m =
1.683
1.603
1.616
1.644
1.651
When k2 ≧ k20, k2m =
0.355
0.280
0.254
0.305
0.246
When k2 < k20, k2m =
0.259
0.188
0.151
0.177
0.133
When d2 ≧ d20,
∞
∞
∞
161.062
∞
d2m (nm) =
When d2 < d20,
132.898
152.054
192.936
136.808
191.952
d2m (nm) =
1.3 < NA ≦ 1.4
65 < T ≦ 75
Case
7-06
7-07
n10
1.708
1.697
k10
0.053
0.047
d10 (nm)
218.342
278.070
n20
1.707
1.702
k20
0.161
0.156
d20 (nm)
262.805
262.294
When n1 ≧ n10, n1m =
1.740
1.735
When n1 < n10, n1m =
1.695
1.657
When k1 ≧ k10, k1m =
0.077
0.077
When k1 < k10, k1m =
0.032
0.024
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
208.328
215.902
When n2 ≧ n20, n2m =
1.805
1.806
When n2 < n20, n2m =
1.580
1.618
When k2 ≧ k20, k2m =
0.232
0.224
When k2 < k20, k2m =
0.108
0.097
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
195.570
182.960
1.3 < NA ≦ 1.4
75 < T ≦ 85
9/20
Case
8-01
8-02
8-03
8-04
8-05
n10
1.908
1.871
1.869
1.706
1.705
k10
0.087
0.097
0.067
0.067
0.058
d10 (nm)
17.362
14.654
13.479
224.641
220.026
n20
1.802
1.704
1.729
1.684
1.694
k20
0.342
0.250
0.214
0.248
0.194
d20 (nm)
141.959
212.121
265.153
139.263
197.616
When n1 ≧ n10, n1m =
1.960
1.935
1.947
1.720
1.721
When n1 < n10, n1m =
1.891
1.843
1.828
1.704
1.694
When k1 ≧ k10, k1m =
0.111
0.140
0.128
0.074
0.078
When k1 < k10, k1m =
0.023
0.016
0.000
0.049
0.035
When d1 ≧ d10, d1m
21.165
19.437
19.380
236.042
243.446
(nm) =
When d1 < d10, d1m
16.261
12.685
10.599
223.100
210.844
(nm) =
When n2 ≧ n20, n2m =
1.843
1.746
1.787
1.711
1.754
When n2 < n20, n2m =
1.713
1.604
1.618
1.641
1.649
When k2 ≧ k20, k2m =
0.382
0.288
0.262
0.299
0.249
When k2 < k20, k2m =
0.279
0.196
0.159
0.184
0.134
When d2 ≧ d20, d2m
∞
∞
∞
151.104
∞
(nm) =
When d2 < d20, d2m
126.652
177.678
187.664
128.169
181.064
(nm) =
1.3 < NA ≦ 1.4
75 < T ≦ 85
Case
8-06
8-07
n10
1.708
1.697
k10
0.054
0.048
d10 (nm)
218.429
277.999
n20
1.707
1.702
k20
0.165
0.160
d20 (nm)
253.768
253.663
When n1 ≧ n10, n1m =
1.739
1.730
When n1 < n10, n1m =
1.697
1.656
When k1 ≧ k10, k1m =
0.076
0.076
When k1 < k10, k1m =
0.032
0.027
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
209.931
217.650
When n2 ≧ n20, n2m =
1.810
1.804
When n2 < n20, n2m =
1.580
1.625
When k2 ≧ k20, k2m =
0.235
0.225
When k2 < k20, k2m =
0.109
0.100
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
216.664
177.272
1.3 < NA ≦ 1.4
85 < T ≦ 95
10/20
Case
9-01
9-02
9-03
9-04
9-05
9-06
n10
1.918
1.876
1.874
1.706
1.709
1.697
k10
0.092
0.100
0.069
0.060
0.055
0.050
d10 (nm)
17.977
14.944
13.674
219.996
218.382
278.074
n20
1.822
1.706
1.733
1.694
1.707
1.701
k20
0.371
0.265
0.224
0.203
0.172
0.166
d20 (nm)
132.466
203.140
256.300
189.146
245.309
245.468
When n1 ≧ n10, n1m =
1.966
1.936
1.950
1.723
1.738
1.728
When n1 < n10, n1m =
1.905
1.851
1.836
1.696
1.699
1.655
When k1 ≧ k10, k1m =
0.109
0.138
0.126
0.078
0.075
0.075
When k1 < k10, k1m =
0.028
0.021
0.000
0.035
0.032
0.029
When d1 ≧ d10, d1m (nm) =
21.461
19.418
19.237
242.566
∞
∞
When d1 < d10, d1m (nm) =
17.167
13.206
11.040
212.120
211.373
219.101
When n2 ≧ n20, n2m =
1.855
1.745
1.789
1.754
1.811
1.805
When n2 < n20, n2m =
1.737
1.611
1.626
1.644
1.579
1.636
When k2 ≧ k20, k2m =
0.407
0.300
0.271
0.255
0.237
0.226
When k2 < k20, k2m =
0.308
0.211
0.169
0.143
0.115
0.106
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
121.537
173.052
183.002
168.954
213.072
172.052
1.3 < NA ≦ 1.4
95 < T ≦ 105
11/20
10-01
10-02
10-03
10-04
10-05
n10
1.929
1.883
1.880
1.707
1.709
k10
0.101
0.103
0.071
0.062
0.057
d10 (nm)
17.864
14.973
13.709
219.774
218.071
n20
1.821
1.709
1.736
1.693
1.706
k20
0.398
0.279
0.234
0.214
0.179
d20 (nm)
125.532
194.479
247.823
180.753
237.020
When n1 ≧ n10, n1m =
1.973
1.940
1.953
1.724
1.737
When n1 < n10, n1m =
1.922
1.863
1.845
1.698
1.701
When k1 ≧ k10, k1m =
0.111
0.136
0.124
0.077
0.074
When k1 < k10, k1m =
0.042
0.027
0.000
0.035
0.034
When d1 ≧ d10, d1m
20.839
19.023
18.857
241.722
∞
(nm) =
When d1 < d10, d1m
17.465
13.566
11.352
213.515
212.546
(nm) =
When n2 ≧ n20, n2m =
1.840
1.742
1.789
1.751
1.807
When n2 < n20, n2m =
1.743
1.619
1.632
1.642
1.577
When k2 ≧ k20, k2m =
0.418
0.310
0.278
0.260
0.236
When k2 < k20, k2m =
0.340
0.227
0.180
0.155
0.122
When d2 ≧ d20, d2m
161.544
∞
∞
∞
∞
(nm) =
When d2 < d20, d2m
119.422
166.497
178.361
161.067
205.891
(nm) =
1.3 < NA ≦ 1.4
95 < T ≦ 105
Case
10-06
n10
1.697
k10
0.047
d10 (nm)
275.083
n20
1.700
k20
0.148
d20 (nm)
295.680
When n1 ≧ n10, n1m =
1.768
When n1 < n10, n1m =
1.650
When k1 ≧ k10, k1m =
0.079
When k1 < k10, k1m =
0.023
When d1 ≧ d10, d1m (nm) =
∞
When d1 < d10, d1m (nm) =
200.276
When n2 ≧ n20, n2m =
1.849
When n2 < n20, n2m =
1.604
When k2 ≧ k20, k2m =
0.227
When k2 < k20, k2m =
0.093
When d2 ≧ d20, d2m (nm) =
∞
When d2 < d20, d2m (nm) =
212.971
1.3 < NA ≦ 1.4
105 < T ≦ 115
12/20
Case
11-01
11-02
11-03
11-04
11-05
n10
1.891
1.885
1.707
1.709
1.697
k10
0.108
0.074
0.064
0.058
0.048
d10 (nm)
14.702
13.594
219.485
217.678
275.043
n20
1.707
1.735
1.692
1.705
1.701
k20
0.289
0.241
0.223
0.184
0.152
d20 (nm)
186.368
239.426
171.867
228.411
286.426
When n1 ≧ n10, n1m =
1.944
1.955
1.723
1.736
1.767
When n1 < n10, n1m =
1.874
1.853
1.700
1.703
1.650
When k1 ≧ k10, k1m =
0.135
0.124
0.077
0.073
0.078
When k1 < k10, k1m =
0.035
0.000
0.037
0.036
0.023
When d1 ≧ d10, d1m
18.320
18.363
240.271
∞
∞
(nm) =
When d1 < d10, d1m
13.618
11.476
214.658
213.396
201.239
(nm) =
When n2 ≧ n20, n2m =
1.733
1.786
1.744
1.797
1.850
When n2 < n20, n2m =
1.620
1.632
1.646
1.574
1.606
When k2 ≧ k20, k2m =
0.314
0.282
0.261
0.232
0.229
When k2 < k20, k2m =
0.241
0.188
0.163
0.126
0.094
When d2 ≧ d20, d2m
∞
∞
∞
∞
∞
(nm) =
When d2 < d20, d2m
157.397
173.024
156.390
195.169
202.551
(nm) =
1.3 < NA ≦ 1.4
115 < T ≦ 125
13/20
Case
12-01
12-02
12-03
12-04
12-05
n10
1.896
1.887
1.692
1.707
1.709
k10
0.113
0.078
0.059
0.065
0.059
d10 (nm)
14.435
13.577
153.772
219.581
217.561
n20
1.703
1.733
1.694
1.692
1.702
k20
0.295
0.244
0.154
0.231
0.188
d20 (nm)
177.615
230.253
284.837
161.904
219.131
When n1 ≧ n10, n1m =
1.947
1.955
1.718
1.720
1.728
When n1 < n10, n1m =
1.882
1.856
1.664
1.701
1.703
When k1 ≧ k10, k1m =
0.136
0.126
0.090
0.076
0.072
When k1 < k10, k1m =
0.044
0.000
0.044
0.041
0.040
When d1 ≧ d10, d1m
17.718
18.125
175.199
231.299
∞
(nm) =
When d1 < d10, d1m
13.578
11.595
128.388
215.799
214.049
(nm) =
When n2 ≧ n20, n2m =
1.725
1.783
1.772
1.738
1.784
When n2 < n20, n2m =
1.617
1.629
1.642
1.658
1.629
When k2 ≧ k20, k2m =
0.315
0.284
0.182
0.262
0.229
When k2 < k20, k2m =
0.249
0.192
0.119
0.174
0.128
When d2 ≧ d20, d2m
∞
∞
∞
∞
∞
(nm) =
When d2 < d20, d2m
145.196
165.335
240.440
152.266
193.496
(nm) =
1.3 < NA ≦ 1.4
115 < T ≦ 125
Case
12-06
12-07
n10
1.707
1.697
k10
0.053
0.048
d10 (nm)
216.484
274.812
n20
1.695
1.701
k20
0.157
0.154
d20 (nm)
278.062
276.656
When n1 ≧ n10, n1m =
1.748
1.768
When n1 < n10, n1m =
1.689
1.651
When k1 ≧ k10, k1m =
0.077
0.078
When k1 < k10, k1m =
0.030
0.024
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
199.849
201.932
When n2 ≧ n20, n2m =
1.761
1.850
When n2 < n20, n2m =
1.583
1.607
When k2 ≧ k20, k2m =
0.215
0.229
When k2 < k20, k2m =
0.104
0.098
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
212.463
192.106
1.3 < NA ≦ 1.4
125 < T ≦ 135
14/20
Case
13-01
13-02
13-03
13-04
13-05
n10
1.898
1.885
1.868
1.707
1.708
k10
0.115
0.081
0.075
0.067
0.060
d10 (nm)
14.632
13.917
12.752
219.938
217.756
n20
1.705
1.732
1.713
1.695
1.701
k20
0.303
0.248
0.206
0.239
0.192
d20 (nm)
166.646
219.851
279.921
151.390
209.457
When n1 ≧ n10, n1m =
1.949
1.951
1.949
1.716
1.721
When n1 < n10, n1m =
1.886
1.855
1.830
1.703
1.704
When k1 ≧ k10, k1m =
0.135
0.127
0.135
0.075
0.072
When k1 < k10, k1m =
0.050
0.002
0.000
0.050
0.045
When d1 ≧ d10, d1m
17.809
18.468
18.469
226.140
∞
(nm) =
When d1 < d10, d1m
13.869
11.960
10.161
217.246
214.692
(nm) =
When n2 ≧ n20, n2m =
1.725
1.781
1.771
1.731
1.769
When n2 < n20, n2m =
1.618
1.628
1.611
1.678
1.659
When k2 ≧ k20, k2m =
0.322
0.288
0.250
0.263
0.228
When k2 < k20, k2m =
0.256
0.194
0.153
0.185
0.138
When d2 ≧ d20, d2m
∞
∞
∞
179.041
∞
(nm) =
When d2 < d20, d2m
136.370
153.796
194.427
147.510
199.403
(nm) =
1.3 < NA ≦ 1.4
125 < T ≦ 135
Case
13-06
13-07
n10
1.706
1.696
k10
0.054
0.049
d10 (nm)
217.065
274.075
n20
1.694
1.702
k20
0.160
0.157
d20 (nm)
268.021
267.366
When n1 ≧ n10, n1m =
1.746
1.770
When n1 < n10, n1m =
1.690
1.651
When k1 ≧ k10, k1m =
0.077
0.078
When k1 < k10, k1m =
0.033
0.026
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
202.380
202.716
When n2 ≧ n20, n2m =
1.761
1.853
When n2 < n20, n2m =
1.586
1.608
When k2 ≧ k20, k2m =
0.219
0.227
When k2 < k20, k2m =
0.106
0.099
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
208.129
186.947
1.3 < NA ≦ 1.4
135 < T ≦ 145
15/20
Case
14-01
14-02
14-03
14-04
14-05
14-06
n10
1.899
1.882
1.870
1.708
1.707
1.696
k10
0.115
0.083
0.074
0.062
0.055
0.050
d10 (nm)
15.367
14.477
13.063
217.887
217.378
273.384
n20
1.714
1.732
1.717
1.700
1.693
1.702
k20
0.318
0.256
0.212
0.197
0.164
0.160
d20 (nm)
155.141
209.893
269.637
200.272
258.646
258.714
When n1 ≧ n10, n1m =
1.949
1.947
1.949
1.716
1.744
1.741
When n1 < n10, n1m =
1.888
1.854
1.833
1.704
1.691
1.652
When k1 ≧ k10, k1m =
0.132
0.127
0.132
0.071
0.077
0.078
When k1 < k10, k1m =
0.051
0.006
0.000
0.050
0.036
0.028
When d1 ≧ d10, d1m (nm) =
18.581
19.085
18.767
∞
∞
∞
When d1 < d10, d1m (nm) =
14.660
12.539
10.533
215.374
204.778
209.881
When n2 ≧ n20, n2m =
1.733
1.780
1.774
1.754
1.760
1.859
When n2 < n20, n2m =
1.627
1.630
1.611
1.677
1.592
1.608
When k2 ≧ k20, k2m =
0.337
0.296
0.256
0.228
0.223
0.226
When k2 < k20, k2m =
0.266
0.200
0.157
0.152
0.109
0.098
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
131.038
171.650
189.575
195.166
202.001
178.700
1.3 < NA ≦ 1.4
145 < T ≦ 155
16/20
Case
15-01
15-02
15-03
15-04
15-05
15-06
n10
1.903
1.884
1.874
1.708
1.707
1.696
k10
0.118
0.087
0.075
0.063
0.056
0.051
d10 (nm)
16.130
14.896
13.357
217.693
217.044
273.493
n20
1.723
1.733
1.722
1.700
1.694
1.702
k20
0.340
0.268
0.221
0.205
0.169
0.165
d20 (nm)
145.164
201.113
260.240
191.744
250.083
250.180
When n1 ≧ n10, n1m =
1.950
1.946
1.951
1.714
1.742
1.738
When n1 < n10, n1m =
1.895
1.858
1.839
1.706
1.694
1.652
When k1 ≧ k10, k1m =
0.130
0.127
0.128
0.070
0.076
0.078
When k1 < k10, k1m =
0.053
0.010
0.000
0.053
0.038
0.031
When d1 ≧ d10, d1m (nm) =
19.240
19.361
18.857
222.035
∞
∞
When d1 < d10, d1m (nm) =
15.619
13.105
10.992
216.109
206.771
213.326
When n2 ≧ n20, n2m =
1.737
1.779
1.777
1.735
1.755
1.839
When n2 < n20, n2m =
1.641
1.636
1.612
1.682
1.595
1.609
When k2 ≧ k20, k2m =
0.356
0.307
0.265
0.225
0.223
0.227
When k2 < k20, k2m =
0.286
0.211
0.166
0.161
0.114
0.102
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
126.286
170.199
185.156
187.971
215.684
171.738
1.3 < NA ≦ 1.4
155 < T ≦ 165
17/20
Case
16-01
16-02
16-03
16-04
16-05
16-06
n10
1.913
1.891
1.879
1.709
1.708
1.696
k10
0.125
0.091
0.077
0.064
0.057
0.052
d10 (nm)
16.406
14.954
13.440
217.197
216.333
274.035
n20
1.727
1.734
1.724
1.700
1.694
1.700
k20
0.366
0.282
0.231
0.214
0.175
0.171
d20 (nm)
136.777
193.024
251.802
183.446
241.739
241.498
When n1 ≧ n10, n1m =
1.955
1.950
1.953
1.714
1.742
1.735
When n1 < n10, n1m =
1.910
1.868
1.847
1.708
1.697
1.651
When k1 ≧ k10, k1m =
0.129
0.127
0.127
0.066
0.075
0.077
When k1 < k10, k1m =
0.064
0.016
0.000
0.055
0.039
0.034
When d1 ≧ d10, d1m (nm) =
19.185
19.061
18.574
220.596
∞
∞
When d1 < d10, d1m (nm) =
16.268
13.452
11.329
216.874
208.223
215.451
When n2 ≧ n20, n2m =
1.731
1.774
1.776
1.707
1.748
1.840
When n2 < n20, n2m =
1.651
1.642
1.618
1.678
1.595
1.612
When k2 ≧ k20, k2m =
0.371
0.317
0.273
0.218
0.220
0.229
When k2 < k20, k2m =
0.314
0.227
0.177
0.165
0.120
0.108
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
121.662
164.818
180.821
179.468
209.260
166.208
1.3 < NA ≦ 1.4
165 < T ≦ 175
18/20
Case
17-01
17-02
17-03
17-04
n10
1.900
1.885
1.708
1.697
k10
0.097
0.082
0.058
0.048
d10 (nm)
14.674
13.311
215.615
273.453
n20
1.732
1.722
1.694
1.699
k20
0.294
0.239
0.180
0.151
d20 (nm)
185.336
243.911
233.152
289.720
When n1 ≧ n10, n1m =
1.955
1.956
1.741
1.736
When n1 < n10, n1m =
1.881
1.856
1.699
1.650
When k1 ≧ k10, k1m =
0.126
0.128
0.074
0.080
When k1 < k10, k1m =
0.023
0.000
0.039
0.020
When d1 ≧ d10, d1m (nm) =
18.346
18.029
∞
∞
When d1 < d10, d1m (nm) =
13.519
11.467
209.091
211.222
When n2 ≧ n20, n2m =
1.767
1.769
1.740
1.868
When n2 < n20, n2m =
1.645
1.618
1.591
1.614
When k2 ≧ k20, k2m =
0.322
0.277
0.217
0.224
When k2 < k20, k2m =
0.243
0.187
0.126
0.094
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
156.774
176.585
198.961
204.980
1.3 < NA ≦ 1.4
175 < T ≦ 185
Case
18-01
18-02
18-03
18-04
18-05
n10
1.908
1.888
1.708
1.709
1.697
k10
0.102
0.088
0.059
0.054
0.049
d10 (nm)
14.316
13.163
215.377
215.137
273.522
n20
1.730
1.716
1.693
1.702
1.700
k20
0.303
0.243
0.185
0.158
0.154
d20 (nm)
177.238
235.819
223.802
279.418
279.960
When n1 ≧ n10, n1m =
1.960
1.956
1.740
1.745
1.734
When n1 < n10, n1m =
1.893
1.861
1.700
1.696
1.657
When k1 ≧ k10, k1m =
0.126
0.131
0.073
0.075
0.079
When k1 < k10, k1m =
0.031
0.002
0.041
0.028
0.020
When d1 ≧ d10, d1m
17.569
17.540
∞
∞
∞
(nm) =
When d1 < d10, d1m
13.467
11.504
209.546
205.939
213.387
(nm) =
When n2 ≧ n20, n2m =
1.759
1.759
1.736
1.790
1.874
When n2 < n20, n2m =
1.644
1.611
1.587
1.604
1.617
When k2 ≧ k20, k2m =
0.325
0.278
0.217
0.211
0.226
When k2 < k20, k2m =
0.256
0.193
0.129
0.105
0.095
When d2 ≧ d20, d2m
∞
∞
∞
∞
∞
(nm) =
When d2 < d20, d2m
143.259
171.381
185.714
201.921
193.505
(nm) =
1.3 < NA ≦ 1.4
185 < T ≦ 195
19/20
Case
19-01
19-02
19-03
19-04
19-05
n10
1.914
1.886
1.873
1.692
1.708
k10
0.104
0.093
0.070
0.060
0.060
d10 (nm)
14.390
13.299
12.581
152.854
215.913
n20
1.735
1.710
1.721
1.693
1.692
k20
0.314
0.247
0.208
0.157
0.189
d20 (nm)
166.400
226.131
280.628
278.359
213.567
When n1 ≧ n10, n1m =
1.964
1.952
1.955
1.709
1.739
When n1 < n10, n1m =
1.903
1.860
1.833
1.664
1.699
When k1 ≧ k10, k1m =
0.123
0.135
0.133
0.092
0.074
When k1 < k10, k1m =
0.040
0.012
0.000
0.042
0.044
When d1 ≧ d10, d1m
17.353
17.539
18.087
163.046
∞
(nm) =
When d1 < d10, d1m
13.759
11.668
9.947
129.659
210.046
(nm) =
When n2 ≧ n20, n2m =
1.759
1.750
1.778
1.784
1.739
When n2 < n20, n2m =
1.648
1.604
1.614
1.659
1.586
When k2 ≧ k20, k2m =
0.331
0.280
0.252
0.196
0.222
When k2 < k20, k2m =
0.267
0.196
0.156
0.120
0.129
When d2 ≧ d20, d2m
∞
∞
∞
∞
∞
(nm) =
When d2 < d20, d2m
144.756
162.922
193.262
243.485
177.669
(nm) =
1.3 < NA ≦ 1.4
185 < T ≦ 195
Case
19-06
19-07
n10
1.708
1.697
k10
0.054
0.050
d10 (nm)
215.905
273.350
n20
1.701
1.701
k20
0.161
0.157
d20 (nm)
269.362
270.178
When n1 ≧ n10, n1m =
1.744
1.732
When n1 < n10, n1m =
1.697
1.658
When k1 ≧ k10, k1m =
0.075
0.078
When k1 < k10, k1m =
0.029
0.021
When d1 ≧ d10, d1m (nm) =
∞
∞
When d1 < d10, d1m (nm) =
207.633
215.326
When n2 ≧ n20, n2m =
1.795
1.877
When n2 < n20, n2m =
1.605
1.619
When k2 ≧ k20, k2m =
0.216
0.228
When k2 < k20, k2m =
0.105
0.098
When d2 ≧ d20, d2m (nm) =
∞
∞
When d2 < d20, d2m (nm) =
205.481
189.945
1.3 < NA ≦ 1.4
195 < T ≦ 205
20/20
Case
20-01
20-02
20-03
20-04
20-05
20-06
n10
1.918
1.883
1.874
1.707
1.708
1.697
k10
0.103
0.095
0.068
0.061
0.055
0.050
d10 (nm)
15.177
13.742
12.955
216.749
216.874
272.522
n20
1.753
1.708
1.728
1.693
1.699
1.701
k20
0.331
0.252
0.214
0.194
0.165
0.160
d20 (nm)
153.467
215.835
269.400
203.628
259.716
261.468
When n1 ≧ n10, n1m =
1.966
1.948
1.955
1.739
1.743
1.731
When n1 < n10, n1m =
1.909
1.857
1.835
1.699
1.698
1.652
When k1 ≧ k10, k1m =
0.117
0.137
0.128
0.075
0.075
0.078
When k1 < k10, k1m =
0.043
0.016
0.000
0.048
0.030
0.022
When d1 ≧ d10, d1m (nm) =
18.089
18.051
18.523
256.743
∞
∞
When d1 < d10, d1m (nm) =
14.663
12.041
10.348
210.937
209.294
217.122
When n2 ≧ n20, n2m =
1.773
1.748
1.785
1.744
1.800
1.874
When n2 < n20, n2m =
1.665
1.604
1.616
1.589
1.608
1.620
When k2 ≧ k20, k2m =
0.348
0.285
0.259
0.230
0.223
0.227
When k2 < k20, k2m =
0.278
0.199
0.159
0.145
0.109
0.100
When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞
When d2 < d20, d2m (nm) =
140.260
150.984
188.160
180.549
200.943
184.530.

3,262 more elements

Antireflective film and exposure method

Life of this patent

Antireflective film and exposure method

Life of this patent

Abstract

Claims10