Laser-decomposable resin composition and pattern-forming material using the same
AssigneeFUJIFILM Corporation
InventorAtsushi Sugasaki
Life of this patent
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Abstract
A laser-decomposable resin composition contains: a compound including at least one structure selected from a carboxyl group and a carboxylic acid anhydride structure and at least one hetero atom selected from N, S and O atoms other than the structure; and a binder polymer.
Claims7
A pattern-forming material comprising a support and a layer obtainable by curing a laser-decomposable resin composition comprising a binder polymer, a polymerizable compound and a compound (A) including at least one structure selected from a carboxyl group and a carboxylic acid anhydride structure and at least one hetero atom selected from N, S and O atoms other than the structure in its molecule;
- and
- wherein based on laser exposure, an exposed area of the pattern-forming material forms a concave area in comparison with an unexposed area, whereby the pattern-forming material has a concave-convex pattern.
Dependencies are inferred from the claim text.