US 7,582,367 B2 · Ceramic member and manufacturing method for the same

Abstract

A ceramic member is provided including a base including an alumina sintered body, an yttria sintered body formed on the alumina sintered body, an intermediate layer including yttrium and aluminum formed between the alumina sintered body and the yttria sintered body, and a metallic member buried in the intermediate layer of the base. A difference between the thermal expansion coefficient of the alumina sintered body and that of the yttria sintered body is equal to or less than about 0.50×10−6/K, and the thermal expansion coefficient of the alumina sintered body is greater than the thermal expansion coefficient of the yttria sintered body. The alumina sintered body, the intermediate layer, the yttria sintered body, and the metallic member are formed into an integrated sintered body, and the content of yttria in the yttria sintered body is 99 wt % or more.

Claims16

Dependent claims

A ceramic member comprising:

a base including an alumina sintered body, a yttria sintered body formed on the alumina sintered body and exposed to a corrosive gas, and an intermediate layer including yttrium and aluminum formed between the alumina sintered body and the yttria sintered body;
and
a metallic member buried in the intermediate layer of the base;
wherein a difference between a thermal expansion coefficient of the alumina sintered body and a thermal expansion coefficient of the yttria sintered body is equal to or less than about 0.50×10−6/K;
wherein the thermal expansion coefficient of the alumnina sintered body is greater than the thermal expansion coefficient of the yttria sintered body;
wherein the alumina sintered body, the intermediate layer, the yttria sintered body, and the metallic member are formed into an integrated sintered body;
and
wherein a content of yttria in the yttria sintered body is 99 wt % or more.

5 more elements

A method of manufacturing a ceramic member, comprising the steps of:

forming an alumina sintered body;
forming a yttria sintered body exposed to a corrosive gas, wherein a content of yttria in the yttria sintered body is 99 wt % or more;
forming a metallic member;
and
integrating the alumina sintered body, the yttria sintered body and the metallic member;
wherein an intermediate layer including yttrium and aluminum is formed between the alumina sintered body and the yttria sintered body;
wherein the metallic member is buried in the intermediate layer;
wherein a difference between a thermal expansion coefficient of the alumina sintered body and a thermal expansion coefficient of the yttria sintered body is equal to or less than about 0.50×10−6/K;
and
wherein the thermal expansion coefficient of the alumina sintered body is greater than the thermal expansion coefficient of the yttria sintered body.

7 more elements

Dependencies are inferred from the claim text.

Ceramic member and manufacturing method for the same

Life of this patent

Ceramic member and manufacturing method for the same

Life of this patent

Abstract

Claims16