Method of manufacturing directional coupler
AssigneeSeiko Epson Corporation
InventorsTomoko Koyama, Takeo Kaneko, Taketomi Kamikawa, Norio Oguchi, Atsushi Harada
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Abstract
A method of manufacturing directional coupler includes forming a first waveguide over a substrate, forming a separate section on respective ends of the first waveguide, and forming a second waveguide stacked over the first waveguide, wherein the first waveguide and the second waveguide are patterned by ink-jet process. The first waveguide and the second waveguide may be formed so as to overlap each other. The method may further include forming a projecting portion on the substrate, wherein the first waveguide being formed on the projection portion.
Claims18
A method of manufacturing a directional coupler that includes a cladding material, a first waveguide layer, and a second waveguide layer, a part of the first waveguide layer and a part of the second waveguide layer overlapping each other to form an optical coupling section, and a separation material separating the first waveguide layer and the second waveguide layer at least at one end of the first waveguide layer and the second waveguide layer, the method comprising:
- forming the cladding material on a substrate by an ink-jet method;
- forming the first waveguide layer on the cladding material by an ink-jet method;
- forming the separation material on the first waveguide layer by an ink-jet method;
- and
- forming the second waveguide layer on the separation material and the part of the first waveguide layer by an ink-jet method, a width of the first waveguide layer and the second waveguide layer being configured to be narrower than a width of the substrate.
A method of manufacturing a directional coupler that includes a first waveguide layer, a second waveguide layer, a first separation material, a second separation material, a third separation material, and a cladding material, the method comprising:
- disposing the second separation material between the first separation material and the third separation material;
- integrally forming the first separation material, the second separation material and the third separation material between the first waveguide layer and the second waveguide layer,
- forming an optical coupling section by the first waveguide layer, the second separation material and the second waveguide layer;
- forming the first waveguide layer on a substrate;
- forming the first separation material, the second separation material and the third separation material on the first waveguide layer by an ink-jet method;
- forming the second waveguide layer on the first separation material, on the second separation material, and on the third separation material by an ink-jet method, a width of the first waveguide layer and the second waveguide layer being configured to be narrower than a width of the substrate;
- and
- forming the cladding material on the second waveguide layer by an ink-jet method.
Dependencies are inferred from the claim text.