Manufacturing method of electron emitting device, electron source and image display apparatus
AssigneeCanon Kabushiki Kaisha
InventorsKeisuke Yamamoto, Tamaki Kobayashi
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AssigneeCanon Kabushiki Kaisha
InventorsKeisuke Yamamoto, Tamaki Kobayashi
Estimating the term…
In an electron-emitting device having a pair of electroconductors arranged on a substrate at an interval, a top of one electroconductor is higher than that of the other electroconductor and a groove extending from the interval region toward a position under a region where the one electroconductor is come into contact with the substrate is formed on the substrate. Deterioration of the electron-emitting device due to collision of charged particles is suppressed by the asymmetrical electron-emitting region, electron-emitting efficiency is improved, and a long life is realized.
A manufacturing method of an electron-emitting device having a pair of electroconductive members arranged on a substrate with a gap and a film which contains carbon as a main component and covers each of said pair of electroconductive members, comprising a step of applying voltage pulses of both first and second polarities across said pair of electroconductive members arranged on said substrate with the gap in an atmosphere containing carbon compound gases, wherein in said voltage pulses of both first and second polarities, there is a sequence of time periods comprising a first voltage pulse period (T1) during which a voltage pulse of the first polarity is being applied, a first quiescent period (T2) until a voltage pulse of the second polarity is applied after applying the voltage pulse of the first polarity, a second voltage pulse period (T3) longer than the first voltage pulse period (T1) during which a voltage pulse of the second polarity is being applied, and a second quiescent period (T4) longer than the first quiescent period (T2) until a next voltage pulse of the first polarity is applied after applying the voltage pulse of the second polarity,
Dependencies are inferred from the claim text.
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Cold cathodes, e.g. field-emissive cathode: having an electric field parallel to the surface, e.g. thin film cathodes
Of cold cathodes: of thin film cathodes
Electric discharge tubes or discharge lamps
Term ended 14 Jan 2026 (estimated)
1. Field of the Invention
The invention relates to a surface conduction electron-emitting device, an electron source using such an electron-emitting device, an image display apparatus, and their manufacturing method.
2. Related Background Art
FIGS. 1A and 1B are schematic diagrams of an embodiment of an electron-emitting device of the invention;
FIG. 2 is a waveform diagram of an example of a voltage pulse which is used in an activating step according to the invention;
FIG. 3 is a driving waveform diagram of the electron-emitting device of the invention;
The first aspect of the invention provides an electron-emitting device having a pair of electroconductors arranged on a substrate at an interval, wherein a top of one of the pair of electroconductors is higher than that of the other electroconductor and a groove extending from the interval region toward a position under a region where the one electroconductor is come into contact with the substrate is formed on the substrate along the interval.
The second aspect of the invention provides an electron source having a plurality of electron-emitting devices on a substrate, wherein the electron-emitting device is the electron-emitting device according to the first aspect of the invention.
The third aspect of the invention provides an image display apparatus comprising: an electron source having a plurality of electron-emitting devices on a substrate; and phosphor members which emit light by electrons emitted from the electron-emitting devices, wherein the electron source is the electron source according to the second aspect of the invention.