Sample introduction and transfer system and method

A method for processing a sample, the method comprising:

• providing a process chamber associated with a load lock chamber;
• providing a sample receiving stage coupled to a sample positioning apparatus, wherein the sample positioning apparatus is configured to move the sample receiving stage between an introduction position and a processing position within the process chamber;
• moving the sample receiving stage using the sample positioning apparatus to the introduction position resulting in a sealed barrier between the process chamber and the associated load lock chamber;
• positioning a sample on the sample receiving stage;
• moving the sample receiving stage using the sample positioning apparatus to the processing position, wherein moving the sample receiving stage using the sample positioning apparatus to the processing position comprises positioning an auxiliary seal mechanism to provide another sealed barrier between the process chamber and the associated load lock chamber when the sample receiving stage is moved to the processing position;
• and
• processing the sample positioned on the sample receiving stage.

A method for processing a sample, the method comprising:

• providing a process chamber associated with a load lock chamber;
• providing a sample receiving stage coupled to a sample positioning apparatus, wherein the sample positioning apparatus is configured to move the sample receiving stage between an introduction position and a processing position within the process chamber;
• moving the sample receiving stage using the sample positioning apparatus to the introduction position resulting in a sealed barrier between the process chamber and the associated load lock chamber;
• positioning a sample on the sample receiving stage, wherein positioning the sample on the sample receiving stage comprises using a transfer-type sample mounting system to transfer one or more samples between the sample receiving stage and one or more auxiliary chambers;
• moving the sample receiving stage using the sample positioning apparatus to the processing position;
• and
• processing the sample positioned on the sample receiving stage.

A method for processing a sample, wherein the method comprises:

• using a sample positioning apparatus to position a sample provided on a sample receiving stage for processing in a process chamber held at conditions different than ambient conditions;
• providing a load lock chamber comprising a sealing surface, wherein the sealing surface is located within the process chamber;
• and
• moving the sample receiving stage using the sample positioning apparatus into contact with the sealing surface of the load lock chamber permitting the load lock chamber to be returned to ambient conditions, wherein using the sample positioning apparatus to position a sample provided on the sample receiving stage for processing in a process chamber comprises moving the sample receiving stage along a plurality of axes from a region of the process chamber proximate the load lock chamber to a region of the process chamber proximate at least one component of a processing system associated with the process chamber, wherein moving the sample receiving stage along the plurality of axes comprises:
• moving the sample receiving stage along a first axis providing for horizontal travel,
• moving the sample receiving stage along a second axis providing for vertical travel, and
• moving the sample receiving stage along one or more additional axes to provide fine positioning of the sample receiving stage with the sample provided thereon in the region of the process chamber proximate at least one component of the processing system associated with the process chamber.

A method for processing a sample, wherein the method comprises:

• using a sample positioning apparatus to position a sample provided on a sample receiving stage for processing in a process chamber held at conditions different than ambient conditions;
• providing a load lock chamber comprising a sealing surface, wherein the sealing surface is located within the process chamber;
• and
• moving the sample receiving stage using the sample positioning apparatus into contact with the sealing surface of the load lock chamber permitting the load lock chamber to be returned to ambient conditions, wherein the method further comprises positioning an auxiliary seal mechanism to provide a sealed barrier between the process chamber and the associated load lock chamber when the sample receiving stage is positioned for processing the sample.

A method for processing a sample, wherein the method comprises:

• using a sample positioning apparatus to position a sample provided on a sample receiving stage for processing in a process chamber held at conditions different than ambient conditions;
• providing a load lock chamber comprising a sealing surface, wherein the sealing surface is located within the process chamber;
• and
• moving the sample receiving stage using the sample positioning apparatus into contact with the sealing surface of the load lock chamber permitting the load lock chamber to be returned to ambient conditions, wherein the method further comprises using a transfer-type sample mounting system to transfer one or more samples between the sample receiving stage and one or more auxiliary chambers.

A system for use in processing a sample, wherein the system comprises:

• a process chamber configured to be held at conditions different than ambient conditions;
• a load lock chamber comprising a sealing surface located within the process chamber;
• a sample receiving stage for receiving a sample;
• and
• a sample positioning apparatus associated with the sample receiving stage, wherein the sample positioning apparatus is configured to move the sample receiving stage between an introduction position at which the sample receiving stage is in contact with the sealing surface of the load lock chamber providing a sealed barrier between the process chamber and the load lock chamber and a processing position in the process chamber at which processing of the sample is performed, and further wherein the sample positioning apparatus is configured to move the sample receiving stage along a first axis providing for horizontal travel, along a second axis providing for vertical travel, and along one or more additional axes to provide fine positioning of the sample receiving stage with the sample thereon in a region of the process chamber proximate at least one component of a processing system associated with the process chamber used for processing the sample at the processing position.

A system for use in processing a sample, wherein the system comprises:

• a process chamber configured to be held at conditions different than ambient conditions;
• a load lock chamber comprising a sealing surface located within the process chamber;
• a sample receiving stage for receiving a sample;
• and
• a sample positioning apparatus associated with the sample receiving stage, wherein the sample positioning apparatus is configured to move the sample receiving stage between an introduction position at which the sample receiving stage is in contact with the sealing surface of the load lock chamber providing a sealed barrier between the process chamber and the load lock chamber and a processing position in the process chamber at which processing of the sample is performed, wherein the system further comprises an auxiliary sealing plate configured to be moved into contact with the sealing surface of the load lock chamber when the sample receiving stage is moved to the processing position.

A system for use in processing a sample, wherein the system comprises:

• a process chamber configured to be held at conditions different than ambient conditions;
• a load lock chamber comprising a sealing surface located within the process chamber;
• a sample receiving stage for receiving a sample;
• and
• a sample positioning apparatus associated with the sample receiving stage, wherein the sample positioning apparatus is configured to move the sample receiving stage between an introduction position at which the sample receiving stage is in contact with the sealing surface of the load lock chamber providing a sealed barrier between the process chamber and the load lock chamber and a processing position in the process chamber at which processing of the sample is performed, wherein the system further comprises a transfer-type sample mounting system to transfer one or more samples between the sample receiving stage and one or more auxiliary chambers.