Low temperature testing device for electronic components

Cold test device for electronic components, with a cryogenic fluid line for supply of a liquid cryogenic fluid, an evaporator for converting the liquid cryogenic fluid into a gaseous cryogenic fluid, the liquid cryogenic fluid having an associated temperature, pressure and volumetric flow, a cryogenic fluid line for transporting the gaseous cryogenic fluid to the electronic component in order to cool the electronic component with the gaseous cryogenic fluid, and with a heating means for adjusting the temperature of the gaseous cryogenic fluid, characterized in that in the cryogenic fluid line which transports the gaseous cryogenic fluid there is a volumetric flow regulator which stabilizes the pressure and the volumetric flow of the cryogenic fluid,

• further including a volumetric flow regulator disposed in the cryogenic fluid line between the heating means and an end of said cryogenic fluid line.