Methods to make piezoelectric ceramic thick film array and single elements with a reusable single layer substrate structure

A method of producing at least one piezoelectric element comprising:

• depositing a piezoelectric ceramic material onto a first surface of at least one first reusable single layer substrate structure to form at least one piezoelectric element structure, wherein a first surface of the piezoelectric ceramic material and the first surface of the first reusable single layer substrate are in direct contact;
• depositing an electrode on a second surface of the at least one piezoelectric element structure;
• bonding the at least one piezoelectric element structure to a second substrate, the second substrate being conductive or having a conductive layer;
• removing the at least one first reusable single layer substrate from the at least one piezoelectric element structure;
• depositing a second side electrode on the first surface of the at least one piezoelectric element structure;
• and
• poling, by applying a DC voltage to the at least one piezoelectric element structure, to provide the at least one piezoelectric element structure with piezoelectric characteristics.