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US 7,573,031 B2Granted
Methods for SEM inspection of fluid containing samples
AssigneeQuantomix Ltd.
InventorsVered Behar, Amotz Nechushtan, Yossef Kliger, Opher Gileadi, David Sprinzak, Ory Zik, Yiftuh Karni
Life of this patent
Estimating the term…
Abstract
A method of visualizing a sample in a wet environment including introducing a sample into a specimen enclosure in a wet environment and scanning the sample in the specimen enclosure in a scanning electron microscope, thereby visualizing the sample.
Claims9
A sample container system comprising:
- a plurality of sample containers comprising:
- an electron beam permeable, fluid impermeable membrane;
- and
- a peripheral enclosure sealed to said membrane and defining with said membrane at least one of said plurality of sample containers;
- and
- a sample container closure for engagement with said at least one of said sample containers;
- and
- a support for supporting said at least one of said sample containers wherein said membrane defines a surface of a sample receiving volume.
5 more elements
A sample container system comprising:
- an enclosure defining a multiplicity of apertures arranged in an array for electron or light communication therethrough;
- at least one electron beam or light permeable, fluid impermeable membrane disposed over said multiplicity of apertures,
- said enclosure and said at least one membrane defining a multiplicity of sample dishes, each including at least a portion of said at least one membrane, and
- said multiplicity of apertures being arranged with respect to said at least one membrane for electron or light communication through said at least one membrane with interiors of said sample dishes.
1 more element
A sample container system comprising:
- a SEM including an electron gun having an electron output aperture;
- a sample dish assembly defining a dish aperture for electron communication therethrough, said sample dish assembly including an electron beam permeable, fluid impermeable membrane which at least partially defines a sample enclosure, said sample dish assembly being sealed to said electron gun at said electron output aperture.
Dependencies are inferred from the claim text.