Intelligent data multiplexer
AssigneeApplied Materials, Inc.
InventorAlexey G. Goder
Life of this patent
Estimating the term…
Abstract
An Intelligent Data Multiplexer (“IDM”) can be used to interface a plurality of host computers with a semiconductor manufacturing tool. In one embodiment, the IDM has a plurality of host-side ports configured to receive messages from each of the host computers interfaced with the semiconductor manufacturing tool. The IDM also includes a multiplexer configured to multiplex the messages received from the host-side ports. To process possible conflict messages from the host computers, the IDM has a conflict resolve module. The messages are then delivered from the IDM to the semiconductor manufacturing tool through a tool-side port used to connect the semiconductor manufacturing tool to the IDM.
Claims14
An intelligent data multiplexer (“IDM”) to interface a plurality of host computers with a semiconductor manufacturing tool, the IDM comprising:
- a plurality of host-side ports configured to receive messages from each host computer;
- a multiplexer configured to multiplex the messages received from the host-side ports;
- a conflict resolution module configured to process conflict messages from the multiplexed messages;
- a tool-side port configured to deliver the processed messages to the semiconductor manufacturing tool, and a message cache module configured to store reply messages from the semiconductor manufacturing tool, wherein the message cache module is configured to analyze received message patterns from the plurality of host computers and to speculatively request reply messages from the semiconductor manufacturing tool based on the analysis.
A semiconductor manufacturing system comprising:
- a semiconductor manufacturing tool;
- a first host computer and a second host computer;
- a server having resident thereon an intelligent data multiplexer (“IDM”) to interface the first and second host computers with the semiconductor manufacturing tool, wherein the IDM comprises:
- (a) a first port configured to receive messages from the first host computer;
- (b) a second port configured to receive messages from the second host computer;
- (c) a multiplexer configured to multiplex the messages received from the first port and the second port;
- (d) a conflict resolution module configured to process conflict messages from the multiplexed messages;
- (e) a third port configured to deliver the processed messages to the semiconductor manufacturing tool;
- and
- (f) a message cache module configured to store reply messages from the semiconductor manufacturing tool wherein the message cache module is configured to analyze received message patterns from the plurality of host computers and to speculatively request reply messages from the semiconductor manufacturing tool based on the analysis.
Dependencies are inferred from the claim text.