Monolithic microwave integrated circuit (MMIC) waveguide resonators having a tunable ferroelectric layer

A three-dimensional monolithic microwave integrated circuit (3D MMIC) chip, comprising:

• a voltage controlled oscillator (VCO);
• and
• a radio frequency resonator, integrated into a common 3D MMIC chip with the VCO wherein the radio frequency resonator further comprises:
• a resonator cavity;
• a ferroelectric layer within the resonator cavity that traverses an entire surface of the resonator cavity;
• means supplying electromagnetic coupling between the resonator and the VCO;
• and
• means for varying the frequency of operation of the resonator by varying a bias voltage applied to the ferroelectric layer.

A method for fabricating an electronically tunable three-dimensional monolithic microwave integrated circuit (3D MMIC) chip, comprising:

• forming a waveguide defining a resonator cavity located within the 3D MMIC chip comprising:
• forming a first metal layer;
• forming a dielectric region overlying the first metal layer;
• forming a ferroelectric layer within the dielectric region;
• and
• forming a second metal layer overlying the dielectric region and the ferroelectric layer, thereby defining the resonator cavity such that the ferroelectric layer resides within the resonator cavity;
• forming a coupling to the resonator cavity;
• and
• electromagnetically coupling the waveguide to other components in the 3D MMIC chip.