Method for purifying nitrogen trifluoride
AssigneeSodiff Advanced Materials Co., Ltd.
InventorYoung-Kyun Lee
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Abstract
A highly pure nitrogen trifluoride having a carbon tetrafluoride content of 10 ppm or less can be effectively obtained by boiling crude liquid nitrogen trifluoride having carbon tetrafluoride contaminant under a pressure ranging from 35 to 45 atm, to remove carbon tetrafluoride therefrom through vaporization.
Claims5
A method for purifying crude liquid nitrogen trifluoride having carbon tetrafluoride contaminant, which comprises boiling the crude liquid nitrogen trifluoride at a temperature in the range of −38 to −50° C. under a pressure ranging from 35 to 45 atm, to remove carbon tetrafluoride from the liquid nitrogen trifluoride through vaporization.
Dependencies are inferred from the claim text.