Micro-electro-mechanical transducer having embedded springs
AssigneeKolo Technologies, Inc.
InventorYongli Huang
Life of this patent
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Abstract
A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a base having a lower portion and an upper portion; a top plate disposed above the upper portion of the base forming a gap therebetween; and a spring-like structure disposed between the top plate and the lower portion of the base. The spring-like structure has a spring layer connected to the lower portion of the base and a spring-plate connector connecting the spring layer and a top plate. In an alternate embodiment, the spring-like has a vertical bendable connector connecting the top plate and the lower portion of the base. The spring-like structure transports the top plate vertically in a piston like manner to perform the function of the transducer. Fabrication methods to make the same are also disclosed.
Claims16
A micro-electro-mechanical transducer comprising:
- a base having a lower portion and an upper portion;
- a top plate disposed above the upper portion of the base forming a gap therebetween;
- a spring-like structure disposed between the top plate and the lower portion of the base, the spring-like structure having a spring layer connected to the lower portion of the base and a spring-plate connector connecting the spring layer and the top plate;
- and
- a first transducing member on the top plate and a second transducing member included in the base or carried by the base.
A micro-electro-mechanical transducer comprising:
- a first support layer supporting a first electrode;
- a second support layer supporting a second electrode, the second support layer having a pattern of openings and being connected to a substrate through a plurality of anchors;
- a spring layer below the second support layer, the spring layer being connected to the plurality of anchors at various locations;
- and
- a plurality of vertical connectors passing through the pattern of openings on the second support layer to connect the first support layer and the spring layer.
A micro-electro-mechanical transducer comprising:
- a base having a lower portion and an upper portion;
- a top plate disposed above the upper portion of the base forming a gap therebetween;
- a spring-like structure disposed between the top plate and the lower portion of the base, the spring-like structure having a vertical bendable connector connecting the top plate and the lower portion of the base;
- and
- a first transducing member on the top plate and a second transducing member included in the base or carried by the base.
A micro-electro-mechanical transducer comprising:
- a base having a lower portion and an upper portion;
- a top plate disposed above the upper portion of the base forming a gap therebetween;
- a spring-like structure disposed between the top plate and the lower portion of the base, the spring-like structure having a spring layer connected to the lower portion of the base and a spring-plate connector connecting the spring layer and the top plate;
- and
- a transducing member on the top plate,
- wherein the lower portion of the base has a sidewall receding from an edge of the upper portion of the base to define a cavity under the upper portion, the spring layer being connected to the sidewall of the lower portion to form a cantilever disposed in the cavity.
A micro-electro-mechanical transducer comprising:
- a base having a lower portion and an upper portion;
- a top plate disposed above the upper portion of the base forming a gap therebetween;
- a spring-like structure disposed between the top plate and the lower portion of the base, the spring-like structure having a vertical bendable connector connecting the top plate and the lower portion of the base;
- and
- a transducing member on the top plate,
- wherein the upper portion of the base comprises a layer material having a pattern of trench openings passing from a top to the lower portion of the base, wherein the spring-like structure comprises a plurality of vertical bendable connectors disposed in the pattern of trench openings.
A micro-electro-mechanical transducer comprising:
- a base having a lower portion and an upper portion;
- a top plate disposed above the upper portion of the base forming a gap therebetween;
- a spring-like structure disposed between the top plate and the lower portion of the base, the spring-like structure having a vertical bendable connector connecting the top plate and the lower portion of the base;
- and
- a transducing member on the top plate,
- wherein the vertical bendable connector connects to the lower portion of the base through an anchor layer.
A micro-electro-mechanical transducer comprising:
- a base having a lower portion and an upper portion;
- a top plate disposed above the upper portion of the base forming a gap therebetween;
- a spring-like structure disposed between the top plate and the lower portion of the base, the spring-like structure having a vertical bendable connector connecting the top plate and the lower portion of the base;
- and
- a transducing member on the top plate,
- wherein the vertical bendable connector includes a first vertical electrode, and the upper portion of the base has a sidewall including a second vertical electrode, the first electrode and the second electrode forming a vertical capacitor.
Dependencies are inferred from the claim text.