Automated sputtering target production
AssigneeTosoh SMD, Inc.
InventorsWiley Zane Reed, Bobby R. Cosper, Kenneth G. Schmidt, Neil D. Bultz, Charles E. Wickersham, John P. Matera
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AssigneeTosoh SMD, Inc.
InventorsWiley Zane Reed, Bobby R. Cosper, Kenneth G. Schmidt, Neil D. Bultz, Charles E. Wickersham, John P. Matera
Estimating the term…
A system and method are provided for manufacturing workpieces, such as metal articles like sputtering target, the system comprising: comparing one or more physical or chemical values of a respective one of a plurality of metal target blanks to one or more comparable values of at least one desired criterion; selecting one of the metal target blanks from a plurality of metal target blanks as a work-in-progress; assigning a serial route for the work-in-progress; processing the work-in-progress by translating the work-in-progress from note to node with an automated transport, after completion of the events at each node; rejecting or accepting the work-in-progress as a metal target by evaluating a result of at least one event of the one or more respective events to be completed at, at least one of the plurality of nodes.
A computer implemented method for manufacturing a metal target, the method comprising:
An automated system for manufacturing a metal target, the system comprising:
A computer implemented method for manufacturing a workpiece, the method comprising:
An automated system for manufacturing a workpiece, the system comprising:
Dependencies are inferred from the claim text.