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US 7,557,361 B2Granted
Ion sources, systems and methods
AssigneeALIS Corporation
InventorsBilly W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
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Abstract
Ion sources, systems and methods are disclosed.
Claims110
A system, comprising:
- a gas field ion source capable of interacting with a gas to generate an ion beam that can interact with a sample to cause scattered ions to leave the sample;
- at least one detector configured so that, during use, the at least one detector can detect at least some of the scattered ions;
- and
- an electronic processor electrically connected to the at least one detector so that, during use, the electronic processor can process information based on the detected scattered ions to determine information about the sample.
1 more element
A method, comprising:
- generating an ion beam by interacting a gas with a gas field ion source;
- interacting the ion beam with a sample to cause scattered ions to leave the sample;
- detecting at least some of the scattered ions;
- and
- determining information about the sample based on the detected scattered ions.
2 more elements
A system, comprising:
- a gas field ion source capable of interacting with a gas to generate an ion beam that can interact with a sample to cause primary neutral particles to leave the sample;
- at least one detector configured so that, during use, the at least one detector can detect at least some of the primary neutral particles;
- and
- an electronic processor electrically connected to the at least one detector so that, during use, the electronic processor can process information based on the detected primary neutral particles to determine information about the sample.
1 more element
A method, comprising:
- generating an ion beam by interacting a gas with a gas field ion source;
- interacting the ion beam with a sample to cause primary neutral particles to leave the sample;
- detecting at least some of the primary neutral particles;
- and
- determining information about the sample based on the detected primary neutral particles.
2 more elements
Dependencies are inferred from the claim text.