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US 7,553,386 B2Granted
Adhesive with differential optical properties and its application for substrate processing
AssigneeIntel Corporation
InventorsDaoqiang Lu, Eric J. Li
Life of this patent
Estimating the term…
Abstract
An adhesive adapted with particular optical properties, and its use to couple a substrate to a substrate holder during substrate processing are disclosed. After processing the substrate, the optical properties of the adhesive may be exploited to locate and/or remove adhesive residue that may be present on the substrate.
Claims9
A method, comprising:
- providing a substrate, the substrate having first electromagnetic responsive material that emits light of a first spectrum responsive to electromagnetic radiation;
- and
- coupling the substrate to a support substrate with an adhesive, the adhesive having second electromagnetic responsive material that emits light of a second spectrum responsive to electromagnetic radiation, the adhesive including a moiety having fluorescent polymer particles having a chemical having a formula C41H44N4O10S2, and the first and second spectrums being sufficiently different to facilitate detection of adhesive residues left after decoupling the support substrate from the substrate.
A method comprising:
- decoupling a substrate holder from a substrate to which the substrate holder is coupled to using an adhesive, the substrate having first electromagnetic responsive material that emits light of a first spectrum, responsive to electromagnetic radiation, and the adhesive having second electromagnetic responsive material that emits light of a second spectrum responsive to electromagnetic radiation, the adhesive including a moiety having fluorescent polymer particles having a chemical having a formula C41H44N4O10S2, and the first and second spectrums being sufficiently different to facilitate detection of adhesive residues left after the decoupling;
- and
- irradiating the substrate, after said decoupling, to detect for adhesive residue.
Dependencies are inferred from the claim text.