Exhaust gas scrubber for epitaxial wafer manufacturing device
AssigneeSumco Corporation
InventorYasuhiro Rikihisa
Life of this patent
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Abstract
This exhaust gas scrubber for an epitaxial wafer manufacturing device includes: a scrubber inlet tube for introducing an exhaust gas discharged from an epitaxial wafer manufacturing device; and a wash tube unit formed inside the scrubber inlet tube for spraying wash water toward an interior of the scrubber inlet tube from one end thereof so as to wash adhesions inside the scrubber inlet tube, wherein the wash tube unit includes an outer tube through which inert gas constantly flows, a middle tube which is formed inside the outer tube and through which inert gas intermittently flows, and an inner tube which is formed inside the middle tube and through which the wash water and inert gas alternately flow.
Claims4
An exhaust gas scrubber for an epitaxial wafer manufacturing device, comprising:
- a scrubber inlet tube configured to introduce an exhaust gas discharged from an epitaxial wafer manufacturing device;
- and
- a wash tube unit formed inside said scrubber inlet tube configured to spray wash water toward an interior of said scrubber inlet tube from one end thereof so as to wash adhesions inside said scrubber inlet tube,
- wherein said wash tube unit comprises:
- an outer tube arranged to allow inert gas constantly flows,
- a middle tube which is formed inside said outer tube and arranged to allow inert gas intermittently flows,
- an inner tube which is formed inside said middle tube and arranged to allow said wash water and inert gas alternately flow, and
- a nozzle tip which is provided on an end of said inert gas flowing through said inner tube,
- wherein said nozzle tip comprises:
- an inner nozzle configured to spray said wash water and said inert gas flowing through said inner tube,
- a middle nozzle configured to spray said inert gas flowing through said middle tube from a rear side of said inner nozzle radially and approximately perpendicular to a central axis along the direction of said wash tube unit, and
- an outer nozzle is provided on said outer tube configured to spray said inert gas flowing through said outer tube around said nozzle tip.
Dependencies are inferred from the claim text.