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US 7,548,741 B2Granted
Dual logarithmic amplifier phase-magnitude detector
AssigneeMKS Instruments, Inc.
InventorRichard E. Church
Life of this patent
Estimating the term…
Abstract
A power generation system including a RF power generator which provides a RF output power. The power distribution system includes a phase-magnitude detector module having a dual logarithmic amplifier phase-magnitude detector. The dual logarithmic amplifier phase-magnitude detector receives current and voltage signals. The dual logarithmic amplifier phase-magnitude detector generates a phase signal that varies in accordance with the phase between the voltage signal and the current signal and a magnitude signal that varies in accordance with the magnitude between the voltage and current signals. A controller receives the phase and magnitude signal and communicates control signals to the matching network.
Claims21
A power generation system comprising:
- a RF power generator, the RF power generator providing a RF output power;
- a matching network communicating with the RF power generator and receiving the RF output power, the matching network communicating with a load and having a variable impedance;
- a phase-magnitude detector module receiving at least one signal that varies in accordance with the RF output power, the phase-magnitude detector including a dual logarithmic amplifier phase-magnitude detector, the dual logarithmic amplifier phase-magnitude detector receiving a current signal that varies in accordance with a current of the RF output power and a voltage signal that varies in accordance with a voltage of the RF output power, the dual logarithmic amplifier phase-magnitude detector generating a phase signal that varies in accordance with the phase between the voltage signal and the current signal and a magnitude signal that varies in accordance with the magnitude between the voltage and current signals;
- and
- a controller for receiving the phase and magnitude signal and communicating at least one control signal to the matching network to vary the impedance.
2 more elements
A power generation system comprising:
- a RF power generator, the RF power generator providing a RF output power;
- a matching network communicating with the RF power generator and receiving the RF output power, the matching network communicating with a load and having a variable impedance;
- a phase-magnitude detector module receiving at least one signal that varies in accordance with the RF output power, the at least one signal including a current signal that varies in accordance with a current of the RF output power and a voltage signal that varies in accordance with a voltage of the RF output power, the phase-magnitude detector module including:
- a lead network module for receiving the current signal and applying a phase lead to the current signal to generate a phase led signal;
- a lag network module for receiving the voltage signal and applying a phase lag to the voltage signal to generate a phase lag signal;
- and
- a dual logarithmic amplifier phase-magnitude detector, the dual logarithmic amplifier phase-magnitude detector receiving the phase led signal and the phase lag signal, the dual logarithmic amplifier phase-magnitude detector generating a phase signal that varies in accordance with the phase between the voltage signal and the current signal and a magnitude signal that varies in accordance with the magnitude between the voltage and current signals;
- and
- a controller for receiving the phase and magnitude signal and communicating at least one control signal to the matching network to vary the impedance.
6 more elements
A power generation system comprising:
- a RF power generator, the RF power generator providing a RF output power;
- a matching network communicating with the RF power generator and receiving the RF output power, the matching network communicating with a load and having a variable impedance;
- a phase-magnitude detector module receiving at least one signal that varies in accordance with the RF output power, the at least one signal including a current signal that varies in accordance with a current of the RF output power and a voltage signal that varies in accordance with a voltage of the RF output power, phase-magnitude detector module including:
- a first filter, the filter for receiving the current signal and generating a filtered current signal;
- a second filter, the filter for receiving the voltage signal and generating a filtered voltage signal;
- a lead network module for receiving the filtered current signal and applying a phase lead to the filtered current signal to generate a phase led signal;
- a lag network module for receiving the filtered voltage signal and applying a phase lag to the filtered voltage signal to generate a phase lag signal;
- and
- a dual logarithmic amplifier phase-magnitude detector, the dual logarithmic amplifier phase-magnitude detector receiving the phase led and phase lag signals, the dual logarithmic amplifier phase-magnitude detector generating a phase signal that varies in accordance with the phase between the voltage signal and the current signal and a magnitude signal that varies in accordance with the magnitude between the voltage and current signals;
- and
- a controller for receiving the phase and magnitude signal and communicating control signal to the matching network.
8 more elements
Dependencies are inferred from the claim text.