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US 7,548,370 B2Granted
Layered structure for a tile wave plate assembly
AssigneeASML Holding N.V.
InventorsMichael M. Albert, Justin Kreuzer, Ronald A. Wilklow
Life of this patent
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Abstract
The present invention relates to an apparatus for polarizing an incident light beam. In embodiments, a tile wave plate assembly is provided. The tile wave plate includes a layered structure having a substrate plate and two layers of mosaic tiles. The layers of the apparatus are mechanically separated to form a controlled gap spacing. The mosaic tiles can be configured to form a pseudo or true zero order wave plate.
Claims19
An apparatus, comprising:
- a substrate plate;
- and
- first and second layers of tiles configured to be aligned to produce a substantially zero order wave plate,
- wherein the first and second layers of tiles have a fixed separation to form a controlled gap spacing.
1 more element
A lithographic apparatus, comprising:
- an illumination system configured to supply a beam of radiation;
- a wave plate assembly comprising a first and second layer of tiles which are aligned to produce a substantially zero order wave plate and which receive the beam of radiation;
- a first support structure configured to support the first and second layers of tiles such that they are fixedly separated from each other;
- a second support structure configured to hold a patterning device that is configured to pattern the beam of radiation after the beam as transmitted through the wave plate assembly;
- and
- a projection system configured to project the patterned beam of radiation onto a substrate.
3 more elements
A method, comprising:
- receiving a beam of radiation onto a substrate;
- rotating a polarization of the beam of radiation transmitted through the substrate using a first layer of tile;
- and
- rotating the polarization of the beam of radiation received from the first layer of tile using a second layer of tile,
- wherein the first and second layer of tiles are aligned to produce a substantially zero order wave plate.
2 more elements
Dependencies are inferred from the claim text.