Chuck plate assembly with cooling means

A chuck plate assembly, comprising:

• a shadow mask formed with a predetermined pattern;
• a shadow mask frame for holding the shadow mask;
• a substrate aligned with the shadow mask and to which a deposition material from a deposition source is deposited;
• a chuck plate attaching the substrate to the shadow mask by having a front surface facing the deposition source closely attached to a back surface of the substrate facing away from the deposition source, wherein the chuck plate includes a refrigerant circulating duct through which a refrigerant circulates;
• and
• a cooling plate mounted on a portion of the shadow mask frame exposed to the deposition source,
• wherein the cooling plate has an inner portion extending towards a film growth region, the inner portion having a tapered profile.

A chuck plate assembly, comprising:

• a shadow mask formed with a predetermined pattern;
• a shadow mask frame for holding the shadow mask;
• a substrate aligned with the shadow mask and to which a deposition material from a deposition source is deposited;
• and
• a chuck plate attaching the substrate to the shadow mask by having a front surface facing the deposition source closely attached to a back surface of the substrate facing away from the deposition source;
• and
• an external cooling plate mounted on a back surface of the chuck plate opposite the front surface closely attached to the substrate, wherein the external cooling plate includes a refrigerant circulating duct through which a refrigerant circulates.