Cooling assembly for a stage
AssigneeNikon Corporation
InventorMichael Sogard
Life of this patent
Estimating the term…
Abstract
A stage assembly (218) for positioning a work piece (30) includes a stage (238), a heat transfer region (246), a stage mover assembly (240), and an environmental system (226). The stage (238) retains the work piece (30). The heat transfer region (246) is positioned near the stage (238). The stage mover assembly (240) moves the stage (238) relative to the heat transfer region (246). The environmental system (226) directly controls the temperature of the heat transfer region (246). For example, the environmental system (226) can circulate a circulation fluid near the heat transfer region (246). A bearing (254B) can maintain the stage (238) spaced apart from the heat transfer region (246).
Claims34
A stage assembly for positioning a work piece, the stage assembly comprising:
- a stage that retains the work piece;
- a heat transfer region positioned near the stage;
- a fluid type bearing that maintains the stage spaced apart from the heat transfer region;
- a stage mover assembly that moves the stage;
- and
- an environmental system that controls the temperature of at least a portion of the stage by directly controlling the temperature of the heat transfer region, wherein the environmental system directs a circulation fluid to a circulation passageway positioned adjacent to a perimeter of the heat transfer region, and wherein heat is transferred between the heat transfer region and the stage via the fluid type bearing.
A stage assembly for positioning a work piece, the stage assembly comprising:
- a stage that retains the work piece;
- a guide beam that guides the movement of the stage along a first axis and inhibits movement of the stage along a second axis and along a third axis that are orthogonal to the first axis;
- a bearing that maintains the stage spaced apart from the guide beam, wherein the bearing is a fluid type bearing;
- a stage mover assembly that moves the stage relative to the guide beam;
- and
- an environmental system that controls the temperature of a portion of the stage by directly controlling the temperature of the guide beam, wherein heat is transferred between the guide beam and the stage via the bearing.
A method for positioning a work piece, the method comprising the steps of:
- retaining the work piece with a stage;
- moving the stage with a stage mover assembly;
- positioning a heat transfer region near the stage;
- maintaining the heat transfer region spaced apart from the stage with a fluid type bearing;
- and
- controlling the temperature of at least a portion of the stage by directly controlling the temperature of the heat transfer region with an environmental system that directs a circulation fluid to a circulation passageway positioned adjacent to a perimeter of the heat transfer region, wherein heat is transferred between the heat transfer region and the stage via the fluid type bearing.
A stage assembly for positioning a work piece, the stage assembly comprising:
- a stage that retains the work piece;
- a heat transfer region positioned near the stage;
- a fluid type bearing that maintains the stage spaced apart from the heat transfer region;
- a stage mover assembly that moves the stage;
- a guide beam that guides the movement of the stage along a first axis and inhibits movement of the stage along a second axis and a long a third axis that are orthogonal to the first;
- and
- an environmental system that controls the temperature of at least a portion of the stage by directly controlling the temperature of the heat transfer region, wherein heat is transferred between the heat transfer region and the stage via the fluid type bearing.
A stage assembly for positioning a work piece, the stage assembly comprising:
- a stage that retains the work piece;
- a heat transfer region positioned near the stage;
- a fluid type bearing that maintains the stage spaced apart from the heat transfer region;
- a stage mover assembly that moves the stage;
- a heat transferer positioned within the stage that transfers heat from one portion of the stage to another portion of the stage;
- and
- an environmental system that controls the temperature of at least a portion of the stage by directly controlling the temperature of the heat transfer region, wherein heat is transferred between the heat transfer region and the stage via the fluid type bearing.
Dependencies are inferred from the claim text.