Maskless optical writer
AssigneeASML Holding N.V.
InventorHarry Sewell
Life of this patent
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Abstract
A maskless pattern generating system for use in lithographic processing includes a liquid crystal pixel array. The system generates a light beam and applies a voltage level to each pixel of the pixel array to modulate a polarization state of the light beam so as to create a pattern image. The voltage levels correspond to greyscale levels assigned to the pixels. The system can receive a control signal input based on pattern information that defines the pattern image. The setting of the individual voltage levels can allow the liquid crystal pixel array to act as a phase shift mask, can allow the pattern image to be shifted, and can allow the manipulation of a pattern image edge. This maskless pattern writing system acts as a light valve to control pattern imagery, on a pixel by pixel basis, for the purposes of direct writing patterns.
Claims24
A method of generating a pattern for use in a maskless lithographic processing system using a pixel array of a liquid crystal programmable pattern generator having a plurality of pixels, comprising:
- generating an individual voltage level for respective pixels of a pixels array of a liquid crystal pattern generator;
- and
- applying the individual voltage level to the respective pixels of the pixel array to modulate a polarization state of a light beam interacting with the liquid crystal pattern generator so as to create a pattern image, wherein the individual voltage level corresponds to one of at least three different greyscale levels.
A maskless pattern generating system for use in a lithographic processing system, the maskless pattern system including a liquid crystal pixel array of a plurality of pixels and comprising:
- means for generating an individual voltage level for respective pixels of a pixel array of the liquid crystal pattern generator;
- and
- means for applying the individual voltage level to the respective pixels of the pixel array to modulate a polarization state of a light beam interacting with the liquid crystal pattern generator so as to create a pattern image, wherein the individual voltage level corresponds to one of at least three different greyscale levels.
A system for use in a lithographic processing system comprising:
- a voltage generator configured to generate respective individual voltage levels;
- and
- a liquid crystal pattern generator comprising a pixel array of respective pixels;
- wherein the respective individual voltage levels are applied to the respective pixels of the pixel array to modulate a polarization state of a light beam interacting with the liquid crystal pattern generator so as to create a pattern image, and
- wherein the respective individual voltage levels correspond to one of at least three different greyscale levels.
Dependencies are inferred from the claim text.