Multi-layer piezoelectric measuring element, and pressure sensor or force sensor comprising such a measuring element

Abstract

A piezoelectric measuring element (9) consists of at least two piezoelectric crystals (1) showing a transversal effect for the measurement of axially acting forces and/or pressures as well as to a pressure or force sensor comprising said element. The crystals (1) with transversal effect having an opposite polarization (4) to each other are attached to each other by means of a lateral electrode (12). In this manner, if n crystals (1) are attached to each other, a single multi-layer measuring element (9) is obtained with a stability under load which is n-times that of an individual crystal. Preferably, the electrodes extend alternately into the two force-absorbing end faces (3) of the crystals. Such measuring elements can be fabricated from wafers (15) in a cost-effective manner. A compact multi-layer measuring element prepared in this way can be easily mounted in a sensor, particularly a force or pressure sensor, without the risk of inclination.

Dependencies are inferred from the claim text.