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US 7,548,011 B2Granted
Systems and methods for improved control of micro-electrical-mechanical system (MEMS) electrostatic actuator
AssigneeBoard of Regents, The University of Texas System
InventorsBruno Borovic, Frank L. Lewis, Ai Qun Liu, Dan O. Popa
Life of this patent
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Abstract
Methods and apparatuses for sensing and adjusting lateral motion in a comb drive actuated MEMS device are provided. If lateral motion is sensed by a lateral motion sensor coupled to the comb drive actuated MEMS device, and the lateral motion is greater than a reference value, a feedback controller adjusts the lateral motion by providing a drive signal to a comb drive electrode of a comb drive actuator.
Claims11
A method comprising:
- sensing lateral motion associated with a comb drive actuated MEMS device;
- providing a value corresponding to the sensed lateral motion to a feedback controller;
- comparing the sensed lateral motion value with a reference value;
- providing a signal if the sensed lateral motion value is greater than the reference value, the signal being provided from the feedback controller to a comb drive electrode;
- and
- adjusting the lateral motion to substantially zero using the signal.
3 more elements
An apparatus, comprising:
- a comb drive actuated MEMS device;
- a plurality of lateral motion sensors coupled to the comb drive actuated MEMS device for sensing motion in a lateral direction;
- a feedback controller coupled to the lateral motion sensors for adjusting lateral motion in the comb drive actuated MEMS device, the feedback controller being configured to provide a drive signal to a comb drive electrode coupled to the comb drive actuated MEMS device.
Dependencies are inferred from the claim text.