Light emitting device and method for manufacturing same
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorKiyofumi Ogino
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Abstract
The object is to provide a method for realizing to selectively form a film in the manufacture of a light-emitting device using a polymer organic compound. The invention is characterized in that the application liquid having an organic compound dissolved in a solvent is applied onto a substrate having a mask thereby forming an organic compound layer of a plurality of materials. Furthermore, a sucker is provided to place the mask in sufficient contact with the substrate without causing positional deviation during film forming, thereby making possible to form an organic compound layer with accuracy.
Claims14
A method for manufacturing a light emitting device comprising:
- forming a thin film transistor over a substrate;
- forming a first electrode electrically connected to the thin film transistor;
- providing a mask having an opening over a surface of the substrate;
- aligning an application position over the first electrode with the opening;
- providing a plurality of magnets, which are arranged in a matrix form, on a back surface of the substrate to fix the mask by a magnetic force;
- applying an application liquid over the substrate by a spin coat technique to form an organic compound layer in the application position;
- and
- forming a second electrode over the organic compound layer,
- wherein the matrix form is aligned with the opening.
A method for manufacturing a light emitting device comprising:
- forming a thin film transistor over a substrate;
- forming an electrode electrically connected to the thin film transistor;
- providing a mask having an opening over the electrode;
- aligning an application position over the electrode with the opening;
- providing a plurality of magnets, which are arranged in a matrix form, on a back surface of the substrate to fix the mask by a magnetic force;
- and
- applying an application liquid over the electrode by a spin coat technique to form an organic compound layer in the application position,
- wherein the matrix form is aligned with the opening.
Dependencies are inferred from the claim text.