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US 7,547,243 B2Granted
Method of making and apparatus having polishing pad with window
AssigneeApplied Materials, Inc.
InventorsAndreas Norbert Wiswesser, Ramiel Oshana, Kerry F. Hughes, Jay Rohde, David Datong Huo, Dominic J. Benvegnu
Life of this patent
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Abstract
A polishing layer of a polishing has a window member with a top surface positioned a predetermined distance below the polishing surface. A transparent layer can be positioned below the polishing layer and supporting the window member.
Claims12
A method of constructing a polishing pad having a window, the method comprising:
- placing a window member in an opening of a polishing layer of a polishing pad having a polishing layer;
- placing the window member against an adhesive sealant;
- placing a spacer having a depth of a predetermined distance between the window member and a weight;
- and
- pressing the window member against an adhesive sealant with the spacer and the weight while the adhesive sealant is cured so that a transparent layer of the polishing pad positioned below the polishing layer supports the window member and a top surface of the window member is spaced the predetermined distance below the polishing surface of the polishing layer.
2 more elements
A method of constructing a polishing pad having a window, the method comprising:
- placing a window member in an opening of a polishing layer of a polishing pad having a polishing layer so that a transparent layer of the polishing pad positioned below the polishing layer supports the window member;
- placing a spacer having a depth on the window member;
- pressing the window member into the opening with a weight-imparting element while the spacer is between the window member and the weight;
- securing the window member in the opening with an adhesive;
- and
- removing the spacer so that a top surface of the window member is spaced a distance below the polishing surface of the polishing layer about equal to the depth of the spacer.
3 more elements
Dependencies are inferred from the claim text.